JPS6151741U - - Google Patents
Info
- Publication number
- JPS6151741U JPS6151741U JP13540484U JP13540484U JPS6151741U JP S6151741 U JPS6151741 U JP S6151741U JP 13540484 U JP13540484 U JP 13540484U JP 13540484 U JP13540484 U JP 13540484U JP S6151741 U JPS6151741 U JP S6151741U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- compound semiconductor
- metal layer
- soft metal
- periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
Landscapes
- Dicing (AREA)
Description
第１図は本考案実施例の化合物半導体基板の平
面図ａと側面断面図ｂである。
１…化合物半導体基板、２，２…オーミツク電
極、３…軟質金属層、４，４…スクライブ方向、
５…スクライブ針。
FIG. 1 is a plan view (a) and a side cross-sectional view (b) of a compound semiconductor substrate according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Compound semiconductor substrate, 2, 2... Ohmic electrode, 3... Soft metal layer, 4, 4... Scribe direction,
5...Scribe needle.
Claims (1)
を特徴とする化合物半導体基板。 A compound semiconductor substrate characterized by having a soft metal layer around the periphery of a scribe surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13540484U JPS6151741U (en) | 1984-09-06 | 1984-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13540484U JPS6151741U (en) | 1984-09-06 | 1984-09-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6151741U true JPS6151741U (en) | 1986-04-07 |
Family
ID=30693893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13540484U Pending JPS6151741U (en) | 1984-09-06 | 1984-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6151741U (en) |
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1984
- 1984-09-06 JP JP13540484U patent/JPS6151741U/ja active Pending