JPS6151733U - - Google Patents
Info
- Publication number
- JPS6151733U JPS6151733U JP13748684U JP13748684U JPS6151733U JP S6151733 U JPS6151733 U JP S6151733U JP 13748684 U JP13748684 U JP 13748684U JP 13748684 U JP13748684 U JP 13748684U JP S6151733 U JPS6151733 U JP S6151733U
- Authority
- JP
- Japan
- Prior art keywords
- outlet
- rotary table
- drive motor
- inner container
- outer container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 2
- 239000002699 waste material Substances 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13748684U JPS6350847Y2 (zh) | 1984-09-10 | 1984-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13748684U JPS6350847Y2 (zh) | 1984-09-10 | 1984-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6151733U true JPS6151733U (zh) | 1986-04-07 |
| JPS6350847Y2 JPS6350847Y2 (zh) | 1988-12-27 |
Family
ID=30695901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13748684U Expired JPS6350847Y2 (zh) | 1984-09-10 | 1984-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350847Y2 (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01228129A (ja) * | 1988-03-09 | 1989-09-12 | Tokyo Electron Ltd | 液処理方法 |
| JP2002329705A (ja) * | 2001-04-26 | 2002-11-15 | Shibaura Mechatronics Corp | スピン処理装置 |
-
1984
- 1984-09-10 JP JP13748684U patent/JPS6350847Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01228129A (ja) * | 1988-03-09 | 1989-09-12 | Tokyo Electron Ltd | 液処理方法 |
| JP2002329705A (ja) * | 2001-04-26 | 2002-11-15 | Shibaura Mechatronics Corp | スピン処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6350847Y2 (zh) | 1988-12-27 |