JPS6151729U - - Google Patents
Info
- Publication number
- JPS6151729U JPS6151729U JP13624884U JP13624884U JPS6151729U JP S6151729 U JPS6151729 U JP S6151729U JP 13624884 U JP13624884 U JP 13624884U JP 13624884 U JP13624884 U JP 13624884U JP S6151729 U JPS6151729 U JP S6151729U
- Authority
- JP
- Japan
- Prior art keywords
- circumferential surface
- outer circumferential
- gas supply
- cylindrical
- inner circumferential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001947 vapour-phase growth Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
Landscapes
- Pipeline Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984136248U JPH0526734Y2 (https=) | 1984-09-10 | 1984-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984136248U JPH0526734Y2 (https=) | 1984-09-10 | 1984-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6151729U true JPS6151729U (https=) | 1986-04-07 |
| JPH0526734Y2 JPH0526734Y2 (https=) | 1993-07-07 |
Family
ID=30694712
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984136248U Expired - Lifetime JPH0526734Y2 (https=) | 1984-09-10 | 1984-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0526734Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50124256U (https=) * | 1974-03-25 | 1975-10-11 |
-
1984
- 1984-09-10 JP JP1984136248U patent/JPH0526734Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50124256U (https=) * | 1974-03-25 | 1975-10-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0526734Y2 (https=) | 1993-07-07 |