JPS6150218U - - Google Patents

Info

Publication number
JPS6150218U
JPS6150218U JP13450184U JP13450184U JPS6150218U JP S6150218 U JPS6150218 U JP S6150218U JP 13450184 U JP13450184 U JP 13450184U JP 13450184 U JP13450184 U JP 13450184U JP S6150218 U JPS6150218 U JP S6150218U
Authority
JP
Japan
Prior art keywords
thin film
heating resistor
film heating
gas flow
resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13450184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13450184U priority Critical patent/JPS6150218U/ja
Publication of JPS6150218U publication Critical patent/JPS6150218U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP13450184U 1984-09-06 1984-09-06 Pending JPS6150218U (US06168776-20010102-C00028.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13450184U JPS6150218U (US06168776-20010102-C00028.png) 1984-09-06 1984-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13450184U JPS6150218U (US06168776-20010102-C00028.png) 1984-09-06 1984-09-06

Publications (1)

Publication Number Publication Date
JPS6150218U true JPS6150218U (US06168776-20010102-C00028.png) 1986-04-04

Family

ID=30693012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13450184U Pending JPS6150218U (US06168776-20010102-C00028.png) 1984-09-06 1984-09-06

Country Status (1)

Country Link
JP (1) JPS6150218U (US06168776-20010102-C00028.png)

Similar Documents

Publication Publication Date Title
US4870860A (en) Direct-heated flow measuring apparatus having improved response characteristics
JPH0620974Y2 (ja) 感熱式流量センサ
JPH01102724U (US06168776-20010102-C00028.png)
US4911008A (en) Hot film anemometer
JPS6150218U (US06168776-20010102-C00028.png)
JPS60174830U (ja) ガス流量検出装置
JPH0422269Y2 (US06168776-20010102-C00028.png)
JP2602117B2 (ja) 流速センサ
JPH0612493Y2 (ja) マイクロブリッジフローセンサ
JPS60183825U (ja) 感熱抵抗型流量検出装置
JPS631429Y2 (US06168776-20010102-C00028.png)
JPH038637U (US06168776-20010102-C00028.png)
JPH0372319U (US06168776-20010102-C00028.png)
JPS642116U (US06168776-20010102-C00028.png)
JPH0428021Y2 (US06168776-20010102-C00028.png)
JPS6237730U (US06168776-20010102-C00028.png)
JPS6335921U (US06168776-20010102-C00028.png)
JPH0381550U (US06168776-20010102-C00028.png)
JPS6440024U (US06168776-20010102-C00028.png)
JPH02147916A (ja) センサの発熱部構造
JPS6246364U (US06168776-20010102-C00028.png)
JPS6035235U (ja) 熱流計用サ−モパイル
JPH0466578U (US06168776-20010102-C00028.png)
JPH0625685B2 (ja) フローセンサ
JPS6165118A (ja) ガス流量検出装置およびその製造方法