JPS6149604B2 - - Google Patents

Info

Publication number
JPS6149604B2
JPS6149604B2 JP7091085A JP7091085A JPS6149604B2 JP S6149604 B2 JPS6149604 B2 JP S6149604B2 JP 7091085 A JP7091085 A JP 7091085A JP 7091085 A JP7091085 A JP 7091085A JP S6149604 B2 JPS6149604 B2 JP S6149604B2
Authority
JP
Japan
Prior art keywords
detection device
spot position
position detection
light spot
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7091085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60227105A (ja
Inventor
Kazuo Shigematsu
Hirobumi Nakamura
Toshimasa Kamisada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7091085A priority Critical patent/JPS60227105A/ja
Publication of JPS60227105A publication Critical patent/JPS60227105A/ja
Publication of JPS6149604B2 publication Critical patent/JPS6149604B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Recording Or Reproduction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP7091085A 1985-04-05 1985-04-05 面振れ測定装置 Granted JPS60227105A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7091085A JPS60227105A (ja) 1985-04-05 1985-04-05 面振れ測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7091085A JPS60227105A (ja) 1985-04-05 1985-04-05 面振れ測定装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP791086A Division JPS61228306A (ja) 1986-01-20 1986-01-20 面振れ測定装置

Publications (2)

Publication Number Publication Date
JPS60227105A JPS60227105A (ja) 1985-11-12
JPS6149604B2 true JPS6149604B2 (de) 1986-10-30

Family

ID=13445139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7091085A Granted JPS60227105A (ja) 1985-04-05 1985-04-05 面振れ測定装置

Country Status (1)

Country Link
JP (1) JPS60227105A (de)

Also Published As

Publication number Publication date
JPS60227105A (ja) 1985-11-12

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