JPS6148856B2 - - Google Patents

Info

Publication number
JPS6148856B2
JPS6148856B2 JP13318980A JP13318980A JPS6148856B2 JP S6148856 B2 JPS6148856 B2 JP S6148856B2 JP 13318980 A JP13318980 A JP 13318980A JP 13318980 A JP13318980 A JP 13318980A JP S6148856 B2 JPS6148856 B2 JP S6148856B2
Authority
JP
Japan
Prior art keywords
vacuum
degree
shield
electric field
polarizer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13318980A
Other languages
Japanese (ja)
Other versions
JPS5757230A (en
Inventor
Tomio Fukushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meidensha Electric Manufacturing Co Ltd
Original Assignee
Meidensha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Electric Manufacturing Co Ltd filed Critical Meidensha Electric Manufacturing Co Ltd
Priority to JP13318980A priority Critical patent/JPS5757230A/en
Publication of JPS5757230A publication Critical patent/JPS5757230A/en
Publication of JPS6148856B2 publication Critical patent/JPS6148856B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01HELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H33/00High-tension or heavy-current switches with arc-extinguishing or arc-preventing means
    • H01H33/60Switches wherein the means for extinguishing or preventing the arc do not include separate means for obtaining or increasing flow of arc-extinguishing fluid
    • H01H33/66Vacuum switches
    • H01H33/668Means for obtaining or monitoring the vacuum

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • High-Tension Arc-Extinguishing Switches Without Spraying Means (AREA)

Description

【発明の詳細な説明】 本発明は電圧が印加される真空部を有する真空
電気機器の真空度監視装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum degree monitoring device for vacuum electrical equipment having a vacuum section to which a voltage is applied.

一般に真空しや断器などの真空電気機器は内部
の真空度の良否によつて能力が大きく左右される
ため真空度を監視することが必要となる。このた
め従来においても種々の真空度監視装置が提案さ
れているが、いずれも絶縁、大きさ、コストなど
において問題があり、実用的でなかつた。
In general, the performance of vacuum electrical equipment such as vacuum chambers and disconnectors is greatly affected by the quality of the internal vacuum, so it is necessary to monitor the vacuum. For this reason, various vacuum degree monitoring devices have been proposed in the past, but all of them have problems with insulation, size, cost, etc., and are not practical.

本発明は上記の従来の欠点を除去して、構成が
簡単小形で安価であるとともに絶縁上の問題もな
く、かつ真空度を常時高い信頼性で監視すること
ができる真空電気機器の真空度監視装置を提供す
ることを目的とする。
The present invention eliminates the above-mentioned conventional drawbacks, has a simple, small, and inexpensive configuration, and has no problems with insulation, and can constantly monitor the vacuum level with high reliability for vacuum level monitoring of vacuum electrical equipment. The purpose is to provide equipment.

以下本発明の実施例を図面とともに説明する。 Embodiments of the present invention will be described below with reference to the drawings.

まず、本発明の基本的な考え方を第1図A,
B、第2図および第3図A,Bによつて説明す
る。第1図A,Bは夫々通電状態における真空し
や断器およびその等価回路を示し、1は固定電
極、2は可動電極、3は固定リード、4は可動リ
ード、5は絶縁筒、6,7は絶縁筒5の両端に封
着された端板で、固定リード3は端板6に取付け
られ、可動リード4はベローズ8を介して端板7
に封着される。9は絶縁筒5の中間に取付けられ
たシールドである。又、10,11は夫々真空し
や断器の設置された回路の電源および負荷、1
2,13は夫々固定電極1とシールド9間の抵抗
および静電容量、14,15は夫々可動電極2と
シールド9間の抵抗および静電容量、16a,1
6bは絶縁筒5の抵抗、17はシールド9と大地
間の静電容量である。
First, the basic idea of the present invention is shown in Figure 1A.
This will be explained with reference to FIG. 2 and FIGS. 3A and 3B. 1A and 1B respectively show a vacuum shield breaker and its equivalent circuit in the energized state, where 1 is a fixed electrode, 2 is a movable electrode, 3 is a fixed lead, 4 is a movable lead, 5 is an insulating cylinder, 6, Reference numeral 7 denotes an end plate sealed to both ends of the insulating cylinder 5, the fixed lead 3 is attached to the end plate 6, and the movable lead 4 is attached to the end plate 7 via a bellows 8.
will be sealed. 9 is a shield attached to the middle of the insulating cylinder 5. In addition, 10 and 11 are the power supply and load of the circuit in which the vacuum circuit breaker is installed, respectively, and 1
2 and 13 are the resistance and capacitance between the fixed electrode 1 and the shield 9, respectively; 14 and 15 are the resistance and capacitance between the movable electrode 2 and the shield 9, respectively; 16a and 1
6b is the resistance of the insulating tube 5, and 17 is the capacitance between the shield 9 and the ground.

上記した真空しや断器においては絶縁筒5およ
び端板6,7によつて形成された真空容器の内部
は高真空に保たれており、この真空度が劣下した
場合にも静電容量13,15は殆ど変化せずら一
定であるが抵抗12,14は急激に小さくなる。
このため、電極1,2とシールド9間の電圧が小
さくなり、真空しや断器の各部での分担電圧に変
化が生じる。例えば真空度が良好な場合には電源
10の電圧V、固定電極1とシールド9間の電圧
をV1、可動電極2とシールド9間の電圧をV2
シールド9と大地間の電圧をV3としてV1=V2
V/2、V3=V―V1=V/2となるが、真空度
が劣下した場合にはV1=V2=V/4、V3=V―
V/4=3/4・Vとなる(尚、これらの値は一例
として示されたものでしや断器の構造や真空度に
よつて変化する。)従つて、第2図に示すように
シールド9の電圧V3は真空度によつて大きく変
化し、シールド9付近の電界Eも大きく変化す
る。
In the vacuum chamber disconnector described above, the interior of the vacuum container formed by the insulating cylinder 5 and the end plates 6 and 7 is maintained at a high vacuum, and even if this degree of vacuum deteriorates, the capacitance will increase. The resistances 13 and 15 hardly change and remain constant, but the resistances 12 and 14 suddenly decrease.
For this reason, the voltage between the electrodes 1, 2 and the shield 9 becomes small, and the voltages shared at each part of the vacuum shield and disconnector change. For example, when the degree of vacuum is good, the voltage of the power supply 10 is V, the voltage between the fixed electrode 1 and the shield 9 is V 1 , the voltage between the movable electrode 2 and the shield 9 is V 2 ,
Assuming that the voltage between shield 9 and the ground is V 3 , V 1 = V 2 =
V/2, V 3 = V-V 1 = V/2, but if the degree of vacuum decreases, V 1 = V 2 = V/4, V 3 = V-
V/4 = 3/4・V (These values are shown as an example and may vary depending on the structure of the disconnector and the degree of vacuum.) Therefore, as shown in Figure 2. The voltage V 3 of the shield 9 varies greatly depending on the degree of vacuum, and the electric field E near the shield 9 also varies greatly.

又、第3図A,Bは夫々しや断状態における真
空しや断器およびその等価回路を示し、18,1
9は夫々電極1,2間の抵抗および静電容量を示
す。この場合も静電容量13,15,19は真空
度によつて変化しないが、抵抗12,14,18
は真空度によつて変化し、従つて真空度が劣下す
るとシールド9の電圧は上昇し、シールド9付近
の電界も大きくなる。このように真空しや断器に
おいては通電状態でもしや断状態でもシールド9
の電位が真空度によつて大きく変化し、シールド
9付近の電界も大きく変化する。従つて、シール
ド9の外部側の電界を監視することにより真空し
や断器の真空度を常時監視することができる。
又、シールド9以外の部分でも真空度によつて電
界が変化する部分であれば、その部分の電界を監
視することにより真空度を監視することができ、
真空しや断器以外の真空電気機器においても同様
である。
Moreover, FIGS. 3A and 3B show the vacuum shield disconnector and its equivalent circuit in the disconnected state, respectively, and 18 and 1
9 indicates the resistance and capacitance between electrodes 1 and 2, respectively. In this case as well, the capacitances 13, 15, 19 do not change depending on the degree of vacuum, but the resistances 12, 14, 18
varies depending on the degree of vacuum. Therefore, as the degree of vacuum decreases, the voltage across the shield 9 increases and the electric field near the shield 9 also increases. In this way, in a vacuum disconnector, the shield 9
The potential changes greatly depending on the degree of vacuum, and the electric field near the shield 9 also changes greatly. Therefore, by monitoring the electric field on the outside of the shield 9, it is possible to constantly monitor the degree of vacuum in the vacuum shield and the disconnector.
In addition, if there is a part other than the shield 9 where the electric field changes depending on the degree of vacuum, the degree of vacuum can be monitored by monitoring the electric field in that part.
The same applies to vacuum electrical equipment other than vacuum shields and disconnectors.

第4図は本発明に係る真空度監視装置の一実施
例を示し、20,21,22は夫々シールド9の
外部側近傍に設けられた偏光子、カー素子および
検光子、23は光フアイバー24を介して偏光子
20に光を送る光源、25は光フアイバー26を
介して検光子22からの光を受けこの光の量に応
じた電気信号を出力する光電気変換部、27は光
電気変換部25の出力を受けて真空度の良否を判
定する真空度判定部で、真空度判定部27は真空
度の良否に応じて警報や表示のための出力を出
す。
FIG. 4 shows an embodiment of the vacuum level monitoring device according to the present invention, in which 20, 21, 22 are a polarizer, a Kerr element, and an analyzer provided near the outside of the shield 9, and 23 is an optical fiber 24. 25 is a photoelectric conversion unit that receives light from the analyzer 22 via an optical fiber 26 and outputs an electrical signal according to the amount of this light; 27 is a photoelectric conversion unit The degree of vacuum determination section 27 receives the output from the section 25 and determines whether the degree of vacuum is good or bad, and the degree of vacuum judgment section 27 outputs an output for alarm or display depending on whether the degree of vacuum is good or bad.

上記の真空度監視装置の動作を第5図を参照し
て説明すると、光源23より発せられた光は光フ
アイバー24を介して偏光子20に送られ、偏光
子20により水平方向又は垂直方向に直線偏光さ
れる。21はシールド9の外部側近傍の電界Eを
水平方向又は垂直方向に加えられたカー素子(電
界Eの方向はカー素子の結晶軸により定める。)
で、カー素子21は電界Eの大きさに応じて偏光
子20からの光の偏光面角度をθだけ変化させ
る。偏光面角度変化θはポツケルス素子θ∝Eに
対してカー素子はθ∝E2なので電界変化に対し
検出感度が大幅に向上する。次にカー素子21か
らの光は偏光面が偏光子20の偏光面と直角又は
平行な関係にある検光子22に加えられ、この検
光子22を通過した光は光の量に応じた電気信号
を出す光電気変換部25に加えられる。第6図に
示すように真空しや断器の真空度が良好な場合に
は電界Eが小さく、真空度が不良即ち劣化すると
電界Eが上昇する。従つて、カー素子21におけ
る光の偏光面の変化角θは真空度が良好な場合は
小さく、真空度が不良になるとθは大きくなる。
このため、検出子22の偏光面と偏光子20の偏
光面が直角な場合には真空度が不良になると検光
子22を通過する光の量は大きくなり、光電気変
換部25の出力Aは第6図の実線で示すようにな
る。又、検光子22の偏光面と偏光子20の偏光
面が平行な場合には真空度が不良になると検光子
22を通過する光の量は小さくなり、光電気変換
部25の出力Aは第6図の点線で示すようにな
る。このため、光フアイバー26を介して出力A
を受けた真空度判定部27は出力Aが急激に大き
く又は小さくなつたことにより真空度劣化を検知
して警報や表示のための出力を出す。尚、上記実
施例では真空しや断器のシールド9の外周近傍に
おける電界変化の検知により真空度劣化を検知す
るようにしたが、真空しや断器の他の部分におけ
る電界変化を検知するようにしても良い。又、本
発明の真空度監視装置は他の真空電気機器、例え
ば真空しや断器を使用した断路器やスイツチ、真
空管、真空ギヤツプ、X線管などの真空度監視に
も適用することができる。
The operation of the vacuum level monitoring device described above will be explained with reference to FIG. Linearly polarized. 21 is a Kerr element to which an electric field E near the outside of the shield 9 is applied horizontally or vertically (the direction of the electric field E is determined by the crystal axis of the Kerr element).
The Kerr element 21 changes the polarization plane angle of the light from the polarizer 20 by θ in accordance with the magnitude of the electric field E. Since the polarization plane angle change θ is θ∝E 2 for the Kerr element compared to θ∝E for the Pockels element, the detection sensitivity for changes in the electric field is greatly improved. Next, the light from the Kerr element 21 is applied to an analyzer 22 whose polarization plane is perpendicular or parallel to the polarization plane of the polarizer 20, and the light that has passed through the analyzer 22 is an electrical signal corresponding to the amount of light. It is added to the photoelectric conversion section 25 which outputs. As shown in FIG. 6, when the degree of vacuum in the vacuum chamber or disconnector is good, the electric field E is small, and when the degree of vacuum is poor or deteriorated, the electric field E increases. Therefore, the change angle θ of the polarization plane of light in the Kerr element 21 is small when the degree of vacuum is good, and becomes large when the degree of vacuum is poor.
Therefore, when the polarization plane of the detector 22 and the polarization plane of the polarizer 20 are perpendicular to each other, if the degree of vacuum becomes poor, the amount of light passing through the analyzer 22 will increase, and the output A of the photoelectric converter 25 will be It becomes as shown by the solid line in FIG. Further, when the polarization plane of the analyzer 22 and the polarization plane of the polarizer 20 are parallel, when the degree of vacuum becomes poor, the amount of light passing through the analyzer 22 becomes small, and the output A of the photoelectric converter 25 becomes The result is as shown by the dotted line in Figure 6. Therefore, the output A is transmitted through the optical fiber 26.
The vacuum level determining unit 27 that receives the signal detects the deterioration of the vacuum level when the output A suddenly increases or decreases, and outputs an output for an alarm or display. In the above embodiment, deterioration in the degree of vacuum is detected by detecting changes in the electric field near the outer periphery of the shield 9 of the vacuum shield/breaker, but it is also possible to detect changes in the electric field in other parts of the vacuum shield/breaker. You can also do it. Furthermore, the vacuum level monitoring device of the present invention can be applied to vacuum level monitoring of other vacuum electrical equipment, such as disconnectors and switches using vacuum shields and disconnectors, vacuum tubes, vacuum gaps, and X-ray tubes. .

以上のように本発明においては、電圧が印加さ
れる真空部を有する真空電気機器において真空部
の外側の真空度によつて電界が変化する部分に偏
光子、カー素子および検光子を設け、この電界変
化により電界の2乗に比例して変化する検光子の
通過光量を光電気変換部により検知して真空度劣
化を検知するようにしており、真空度監視装置の
構成が簡単小形で安価となる。又、真空電気機器
周辺の高圧部にある偏光子、カー素子および検光
子は全て金属部材でなく、光電気変換部との接続
も光フアイバーなどの非金属材を介して行うこと
ができ、高圧部と大地間の絶縁に支障を生じるこ
とはない。さらに、偏光子、カー素子および検光
子は全て受動素子であり、故障の心配がなく、信
頼性が高い。又、真空度の検知を光によつて行つ
ているので耐ノイズ性に優れ、又真空電気機器の
開閉いずれの状態においても真空度を監視するこ
とができ、常時監視を行うことができる。
As described above, in the present invention, a polarizer, a Kerr element, and an analyzer are provided in a vacuum electrical device having a vacuum section to which a voltage is applied, in which the electric field changes depending on the degree of vacuum outside the vacuum section. The amount of light passing through the analyzer, which changes in proportion to the square of the electric field due to changes in the electric field, is detected by a photoelectric converter to detect deterioration of the vacuum level.The configuration of the vacuum level monitoring device is simple, small, and inexpensive. Become. In addition, the polarizers, Kerr elements, and analyzers in the high-pressure parts around vacuum electrical equipment are not all metal members, and the connection to the photoelectric converter can also be made through non-metallic materials such as optical fibers. There will be no problem with the insulation between the parts and the ground. Furthermore, the polarizer, Kerr element, and analyzer are all passive elements, so there is no fear of failure and high reliability. In addition, since the degree of vacuum is detected using light, it has excellent noise resistance, and the degree of vacuum can be monitored whether the vacuum electrical equipment is open or closed, so that constant monitoring can be performed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図A,Bおよび第2図は夫々真空しや断器
の通電状態における縦断正面図、等価回路図およ
び真空度と各部の電圧、電界との関係図、第3図
A,Bは夫々真空しや断器のしや断状態における
縦断正面図および等価回路図、第4〜6図は夫々
本発明に係る真空度監視装置の正面図、動作説明
図および真空度と電界、光電気変換部出力との関
係図。 9はシールド、20は偏光子、21はカー素
子、22は検光子、23は光源、24,26は光
フアイバー、25は光電気変換部、27は真空度
判定部。
Figures 1A and B and Figure 2 are respectively a longitudinal sectional front view of the vacuum shield breaker in the energized state, an equivalent circuit diagram, and a diagram of the relationship between the degree of vacuum and the voltage and electric field of each part, and Figures 3A and B are respectively A vertical sectional front view and an equivalent circuit diagram of the vacuum shield disconnector in the shielded state, and Figures 4 to 6 are a front view, an operation explanatory diagram, and a vacuum level, electric field, and photoelectric conversion of the vacuum level monitoring device according to the present invention, respectively. Relationship diagram with departmental output. 9 is a shield, 20 is a polarizer, 21 is a Kerr element, 22 is an analyzer, 23 is a light source, 24 and 26 are optical fibers, 25 is a photoelectric conversion section, and 27 is a degree of vacuum determination section.

Claims (1)

【特許請求の範囲】[Claims] 1 電圧が印加される真空部を有する真空電気機
器において、真空部の外側における真空度によつ
て電界が変化する部分に、光源からの光を直線偏
光する偏光子と、偏光子からの光の偏光面角度を
前記電界の大きさに応じて変化させるカー素子
と、偏光子の偏光面と所定な関係にある偏光面を
有するとともにカー素子からの光を受ける検光子
とを設け、かつ検光子からの光の量に応じた電気
信号を出す光電気変換部を設けたことを特徴とす
る真空電気機器の真空度監視装置。
1 In vacuum electrical equipment that has a vacuum section to which a voltage is applied, a polarizer that linearly polarizes the light from the light source and a polarizer that linearly polarizes the light from the polarizer are installed in the part outside the vacuum section where the electric field changes depending on the degree of vacuum. A Kerr element that changes a polarization plane angle according to the magnitude of the electric field, and an analyzer that has a polarization plane that has a predetermined relationship with the polarization plane of the polarizer and receives light from the Kerr element, and the analyzer 1. A vacuum level monitoring device for vacuum electrical equipment, characterized in that it includes a photoelectric conversion section that outputs an electrical signal according to the amount of light emitted from the vacuum electrical equipment.
JP13318980A 1980-09-25 1980-09-25 Monitoring device of degree of vacuum for vacuum electric equipment Granted JPS5757230A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13318980A JPS5757230A (en) 1980-09-25 1980-09-25 Monitoring device of degree of vacuum for vacuum electric equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13318980A JPS5757230A (en) 1980-09-25 1980-09-25 Monitoring device of degree of vacuum for vacuum electric equipment

Publications (2)

Publication Number Publication Date
JPS5757230A JPS5757230A (en) 1982-04-06
JPS6148856B2 true JPS6148856B2 (en) 1986-10-27

Family

ID=15098773

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13318980A Granted JPS5757230A (en) 1980-09-25 1980-09-25 Monitoring device of degree of vacuum for vacuum electric equipment

Country Status (1)

Country Link
JP (1) JPS5757230A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0535894Y2 (en) * 1985-07-12 1993-09-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0535894Y2 (en) * 1985-07-12 1993-09-10

Also Published As

Publication number Publication date
JPS5757230A (en) 1982-04-06

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