JPS614790U - 洗浄装置 - Google Patents

洗浄装置

Info

Publication number
JPS614790U
JPS614790U JP8829784U JP8829784U JPS614790U JP S614790 U JPS614790 U JP S614790U JP 8829784 U JP8829784 U JP 8829784U JP 8829784 U JP8829784 U JP 8829784U JP S614790 U JPS614790 U JP S614790U
Authority
JP
Japan
Prior art keywords
tank
cleaning equipment
side wall
cleaned
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8829784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0123586Y2 (https=
Inventor
三夫 工藤
Original Assignee
スピ−ドフアム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by スピ−ドフアム株式会社 filed Critical スピ−ドフアム株式会社
Priority to JP8829784U priority Critical patent/JPS614790U/ja
Publication of JPS614790U publication Critical patent/JPS614790U/ja
Application granted granted Critical
Publication of JPH0123586Y2 publication Critical patent/JPH0123586Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP8829784U 1984-06-14 1984-06-14 洗浄装置 Granted JPS614790U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8829784U JPS614790U (ja) 1984-06-14 1984-06-14 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8829784U JPS614790U (ja) 1984-06-14 1984-06-14 洗浄装置

Publications (2)

Publication Number Publication Date
JPS614790U true JPS614790U (ja) 1986-01-13
JPH0123586Y2 JPH0123586Y2 (https=) 1989-07-19

Family

ID=30641296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8829784U Granted JPS614790U (ja) 1984-06-14 1984-06-14 洗浄装置

Country Status (1)

Country Link
JP (1) JPS614790U (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007300129A (ja) * 2001-11-12 2007-11-15 Tokyo Electron Ltd 基板処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135185A (en) * 1975-05-20 1976-11-24 Fujitsu Ltd Washing device
JPS564318A (en) * 1979-06-20 1981-01-17 Hitachi Ltd Automatic correcting apparatus for roundness of can drum

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135185A (en) * 1975-05-20 1976-11-24 Fujitsu Ltd Washing device
JPS564318A (en) * 1979-06-20 1981-01-17 Hitachi Ltd Automatic correcting apparatus for roundness of can drum

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007300129A (ja) * 2001-11-12 2007-11-15 Tokyo Electron Ltd 基板処理装置

Also Published As

Publication number Publication date
JPH0123586Y2 (https=) 1989-07-19

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