JPS614790U - 洗浄装置 - Google Patents

洗浄装置

Info

Publication number
JPS614790U
JPS614790U JP8829784U JP8829784U JPS614790U JP S614790 U JPS614790 U JP S614790U JP 8829784 U JP8829784 U JP 8829784U JP 8829784 U JP8829784 U JP 8829784U JP S614790 U JPS614790 U JP S614790U
Authority
JP
Japan
Prior art keywords
tank
cleaning equipment
side wall
cleaned
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8829784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0123586Y2 (OSRAM
Inventor
三夫 工藤
Original Assignee
スピ−ドフアム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by スピ−ドフアム株式会社 filed Critical スピ−ドフアム株式会社
Priority to JP8829784U priority Critical patent/JPS614790U/ja
Publication of JPS614790U publication Critical patent/JPS614790U/ja
Application granted granted Critical
Publication of JPH0123586Y2 publication Critical patent/JPH0123586Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP8829784U 1984-06-14 1984-06-14 洗浄装置 Granted JPS614790U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8829784U JPS614790U (ja) 1984-06-14 1984-06-14 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8829784U JPS614790U (ja) 1984-06-14 1984-06-14 洗浄装置

Publications (2)

Publication Number Publication Date
JPS614790U true JPS614790U (ja) 1986-01-13
JPH0123586Y2 JPH0123586Y2 (OSRAM) 1989-07-19

Family

ID=30641296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8829784U Granted JPS614790U (ja) 1984-06-14 1984-06-14 洗浄装置

Country Status (1)

Country Link
JP (1) JPS614790U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007300129A (ja) * 2001-11-12 2007-11-15 Tokyo Electron Ltd 基板処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135185A (en) * 1975-05-20 1976-11-24 Fujitsu Ltd Washing device
JPS564318A (en) * 1979-06-20 1981-01-17 Hitachi Ltd Automatic correcting apparatus for roundness of can drum

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135185A (en) * 1975-05-20 1976-11-24 Fujitsu Ltd Washing device
JPS564318A (en) * 1979-06-20 1981-01-17 Hitachi Ltd Automatic correcting apparatus for roundness of can drum

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007300129A (ja) * 2001-11-12 2007-11-15 Tokyo Electron Ltd 基板処理装置

Also Published As

Publication number Publication date
JPH0123586Y2 (OSRAM) 1989-07-19

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