JPS6146757A - Conveyor - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION (A) Field of Industrial Application The present invention relates to a conveying device that uses a linear motor to transport a conveying table while floating the conveying table on a conveying path.

(B) Prior Art Conventionally, this type of conveyance device injects compressed air from below using a number of nozzles provided on a flat plate-shaped movable element of a near motor, for example, on a conveyor table or on a table corresponding to the movable element. It is known that the transfer table is moved by excitation of a linear motor stator while floating the transfer table.

However, the above-described apparatus has disadvantages in that the equipment cost is high because it requires a compressed air source, and it is difficult to provide a large floating blade to the conveyance platform.

Furthermore, since the movable element and the stator constituting the linear motor are arranged below the conveyance path, there is a drawback that the size of the conveyance path becomes large, and as a result, the size of the entire conveyance device becomes large.

(c) Objective The main objective of the present invention is to provide a conveying device that has simple equipment for providing floating blades and can reduce the cost of the equipment.

A further object of the present invention is to provide a conveyance device that can improve the floating blade of the conveyance table and reduce the size of the entire device.

(D) Structure The conveyance device according to the first invention is characterized in that a predetermined amount of magnetic fluid is stored in the dovetail groove portion of the conveyance path, and the leg portion of the conveyance table on which the permanent magnet is fixed is inserted into the dovetail groove portion of the conveyance path. The carrier is inserted into the groove, and the carrier is levitated by the magnetic force between the magnetic fluid and the magnetic circuit.
The reason lies in that the conveyance platform is configured to move along the conveyance path using a linear motor.

The conveying device according to the second invention is characterized by the legs of the conveying platform having a predetermined amount of magnetic fluid stored in the dovetail portion of the conveying path, and a magnetic circuit composed of a permanent magnet and a magnetic pole fixed thereto. The carrier is inserted into the dovetail groove, and while the carrier is floated by the magnetic force of the magnetic fluid and the magnetic circuit, the carrier is moved along the carrier path by a linear motor.

(e) Embodiment Part 1 - Fig. 1 is a sectional view showing an embodiment of the conveying device according to the first invention, Fig. 2 is a sectional view taken along line A-A' in Fig. 1, and Fig. The figure is a plan view of FIG. 1.

In FIGS. 1 to 3, ``■'' is a conveyance path made of a non-magnetic material fixed by a frame (not shown), and its cross section is formed in a substantially dovetail shape.
2. It is distinguished from the storage section 13.

The cover part 12 prevents the magnetic fluid 5 (explanation will be described later) placed at a predetermined position in the conveyance path 1 from flowing out, and
It serves to reduce evaporation of the solvent of the magnetic fluid 5.

2 are stators of the near motor, and are arranged in pairs on the upper surface of the cover part 12 at predetermined intervals in the longitudinal direction thereof.

Reference numeral 3 denotes a conveyance platform for conveying objects to be conveyed, and is arranged so as to run along the conveyance path 1 . This conveyance table 3 is composed of a bottom surface 31 on which an object to be conveyed (not shown) is placed, and substantially T-shaped legs 32 arranged in the storage section 13 of the conveyance path 1. The bottom surface 31 acts as a reaction plate of the linear motor, and is made of a conductive material such as aluminum or copper plate, and faces the stator 2 with a predetermined gap therebetween. This constitutes a linear motor. On the other hand, a permanent magnet 4 is fixed to the bottom surface of the leg portion 32, and this permanent magnet 4 and the conveyance path 1
A predetermined amount of magnetic fluid 5 is interposed between the housing portion 13 and the magnetic fluid 5 .

The magnetic fluid 5 is a well-known colloidal solution in which the surfaces of magnetic fine particles such as ferrite are coated with long-chain unsaturated fatty acids and dispersed in a solution using a surfactant. Moreover, since the magnetic fluid 5 is magnetically an aggregate of molecules having a permanent magnetic moment, it has superparamagnetic properties.

Next, the operation of the transport device having the above-mentioned configuration will be explained.

First, the magnetic fluid 5 having the above-described properties is magnetized under the influence of the magnetic field generated by the permanent magnets 4 provided on the legs 32 of the carrier 3. That is, since the conveyance table 3 always maintains a floating state, the conveyance table 3 can be moved along the conveyance path 1 in an appropriate direction by the driving force of the linear motor.

Note that control means for speed control, stopping, etc. of the conveyance table 3 are well known, and detailed explanation will be omitted.

Dormitory I Natsuhakakai's second invention is that a magnetic circuit is configured by a permanent magnet 4 fixed to the leg portion 32 of the conveyance table 3 and a magnetic pole 6 laminated on this permanent magnet 4. This is an attempt to further improve the floating blade.

FIG. 4 is a sectional view showing the first embodiment of the conveying device according to the second invention. Note that the same reference numerals are given to the same τ portions as in FIGS. 1 to 3, and the explanation thereof will be omitted.

Three rectangular permanent magnets 4 smaller than the permanent magnets 4 of the embodiment of the first invention are used, and each permanent magnet 4 is fixedly installed on the bottom surface of the leg portion 32 at a predetermined interval. The magnetic pole 6 is formed to have substantially the same dimensions as the bottom surface of the leg portion 32, and is fixed to the permanent magnet 4. That is, the magnetic pole 6 is placed on the side that comes into contact with the magnetic fluid 5. The permanent magnet 4 and the magnetic pole 6 constitute a magnetic circuit.

In this embodiment, since the three permanent magnets 4 and the magnetic poles 6 constitute an efficient magnetic circuit, the dimensions of the individual permanent magnets 4 may be relatively small, and the entire magnetic field can be strong. It is possible to generate a large floating blade on the conveyance platform 3. Therefore, the object to be transported placed on the transport table 3 can be floated and transported by the driving force of the linear motor. 1. FIG. 5 is a sectional view showing a second embodiment of the conveying device according to the second invention.

This embodiment differs from the previous embodiment in that a groove is formed on the surface of the magnetic pole 6 that contacts the magnetic fluid 5.

With respect to the magnetic pole 6, the magnetic fluid 5 is concentrated in the part where the magnetic field strength is strong, so if the surface of the magnetic pole 6 is flat, it will be concentrated at the edges around the four sides, but by providing a groove in the magnetic pole 6, ,
Corners with strong magnetic field strength also exist on the surface of the magnetic pole 6. Therefore, a situation is obtained in which the magnetic fluid 5 is distributed on the surface of the magnetic pole 6, and a floating blade can be efficiently provided to the conveyance table 3. The configuration other than the above is the same as the previous embodiment.

That is, this embodiment has the following effects in addition to the effects of the previous embodiment.

When the conveyance path 1 and the surface of the magnetic pole 6 face each other in a plane,
If the magnetic fluid 5 interposed therebetween is considered as a liquid, it is experimentally known that surface tension exerts an attractive force effect between the magnetic poles 6 and the magnetic fluid 5. On the other hand, in order to effectively utilize the floating ability of the transport platform 3 by the permanent magnets 4, it is possible to reduce the surface area of the magnetic poles 6 in contact with the magnetic fluid 5 by providing a groove on the surface of the magnetic poles 6 in contact with the magnetic fluid 5. It is valid.

In addition, although the groove part of the magnetic pole 6 is provided in the traveling direction of the conveyance table 3 in this embodiment, the present invention is not limited to this. It is also conceivable to provide a cross-shaped groove as a whole. In that case, the above effect can be further enhanced.

FIG. 6 is a sectional view showing a third embodiment of the conveying device according to the second invention.

In this embodiment, the groove portion of the magnetic pole 6 in the second embodiment has a semicircular cross-sectional shape. Other configurations are similar to those of the second embodiment.

In this embodiment, the surface where the magnetic pole 6 and the magnetic fluid 5 are in contact is only the semicircular tip of the magnetic pole 6, so the surface area where the magnetic pole 6 and the magnetic fluid 5 are in contact is smaller than in the second embodiment. Therefore, the floating ability of the conveyor table 3 by the permanent magnets 4 can be more effectively exhibited.

Note that the direction in which the cross-sectional shape of the groove portion of the magnetic pole 6 is made semicircular is as follows:
In this embodiment, it is provided in the traveling direction of the conveyor table 3, but it is not limited to this. For example, it is also possible to make the cross-sectional shape semicircular in accordance with the direction orthogonal to the traveling direction of the conveyor table 3. . In that case, the above effects can be further enhanced.

Further, the cross-sectional shape of the magnetic pole 6 is not limited to a semicircular shape, but it is also preferable to have a circular arc shape, for example. In this case as well, the same effect as above can be obtained.

Further, in each embodiment of the second invention, the number of permanent magnets 4 is described as three, but the invention is not limited to this, and the number can be selected as appropriate depending on the required floating blade. Of course, it will be done.

Therefore, in each of the embodiments of the first and second inventions described above,
Although the case where a parallel drive type linear motor is used is explained as an example, a monthly drive type linear motor may be used, for example.

(F) Effect The first invention is, as detailed above, the magnetic force between the permanent magnets fixed to the legs of the carrier and the magnetic fluid interposed between the carrier path and the legs of the carrier. Since the conveyance table is floated along the conveyance path by the action, the flotation blade is greatly improved compared to the conventional flotation means using compressed air, and extremely simple equipment is required, and the equipment cost and maintenance cost are reduced. It is excellent in this aspect.

In addition, the reaction plate is used as the bottom surface of the conveyance table on which the transported object is placed, and the stator is provided on the top surface of the conveyance path, which is the position opposite to this, so that the extra space can be utilized to the maximum. The entire device can be made smaller.

Furthermore, since almost no dust is generated, it is especially suitable as a transport device for use in a clean room.

The second invention, as detailed above, constitutes an efficient magnetic circuit with a plurality of permanent magnets and magnetic poles.
In addition to obtaining the same effect as the first invention, a strong magnetic field can be generated as a whole even if the size of the permanent magnet is relatively small, so the floating blade is larger than the first invention. can be applied to the transport platform.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an embodiment of the conveyance device according to the first invention, FIG. 2 is a sectional view taken along line A-A' in FIG. 1, FIG. 3 is a plan view of FIG. 1, and FIG. is a cross-sectional view showing an embodiment of the conveyance device according to the second invention, FIG. 5 is a cross-sectional view showing a second embodiment of the conveyance device according to the second invention, and FIG. It is a sectional view showing a third example of such a conveying device. 1... Conveyance path, 2... Stator, 3... Conveyance platform, 3
1...Bottom surface, 32...Legs, 4...Permanent magnet, 5
...Magnetic fluid, 6...Magnetic pole. Patent applicant Hitachi Kiden Kogyo Co., Ltd. Agent Patent attorney Takaharu Ohnishi Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Procedural amendment (method) 2. Name of the invention Conveying device 3. Amendment Relationship with the case of the person who made the amendment Patent applicant 7, subject of amendment Specification 8, content of amendment Engraving of the specification (no change in content). Procedural amendment (voluntary) Displayed on April 2, 1985 Patent Application No. 169700 of 1988 2, Name of the invention Conveying device 3, Relationship with the case of the person making the amendment Patent applicant's office 3-11 Shimosakabe, Amagasaki City Number of inventions increased from No. 1 0 7, Amendment) ↓:■ (3) Specification (4) Drawing 8, Contents of amendment (1) The scope of claims is amended as shown in the attached sheet. (2) Page 4, line 18 of the specification: "Dovetail groove part J is r groove part"
Correct to. (3) Page 4, line 19 of the specification, ``J within the dovetail groove'' is corrected to ``inside the groove''. (4) Correct the dovetail groove portion J to “r groove portion” on page 5, line 5 of the specification. (5) "In the dovetail groove" on page 5, line 7, r of the specification is corrected to "in the groove." (6) Page 5, line 18 of the specification: “The cross section is approximately dovetail-shaped.
(7) Page 8 of the specification, lines 2-3, ``The first embodiment J is corrected to ``one embodiment j.'' 8) Delete from line 1 on page 9 of the specification to line 9 on page 11. (9) Lines 10 to 11 on page 9 of the specification ``In each embodiment of the second invention, all permanent magnets are used. (10) Specification Page 13, line 6, "Cross-sectional view showing one embodiment, j" is corrected to "Cross-sectional view showing one embodiment, j. (11) Specification, page 13, lines 6-9, "Fig. teeth····
... is a sectional view showing... ” to be deleted. (12) Among the drawings, Figures 5 and 6 will be deleted as shown in the attached sheet. Attachment 2, Claims (1) In a conveyance device using a linear motor, in which the bottom surface of the conveyance platform is a rear axle lamp plate, and a stator provided opposite to the rear axle lamp plate, and the rear axle lamp plate, a conveyance path made of a non-magnetic material formed into an IT-shaped "ct"; a conveyance table running along the conveyance path; and a magnetic fluid interposed between the conveyance path and the legs of the conveyance table; and permanent magnets disposed on the legs of the conveyance platform, so that the conveyance platform is always floated from the conveyance path by magnetic fluid while being transferred. (2) The conveyance device according to claim 1, wherein the permanent magnet is fixed to the bottom surface of the leg of the conveyance table. (3) The linear motor The conveyance device according to claim 1, wherein a plurality of stators are provided at predetermined intervals on the upper surface of the conveyance path at predetermined intervals. In a conveyance device using a linear motor comprising a stator provided opposite to the rear axle lamp plate and the rear axle lamp plate, the conveyor is made of a non-magnetic material and has a cross section shaped like a plate. a conveyance table running along the conveyance path; a magnetic fluid interposed between the conveyance path and the legs of the conveyance table; and a plurality of permanent magnets fixed to the legs of the conveyance table. It is equipped with a magnet and a magnetic pole made of a magnetic material laminated to the permanent magnet, and the conveyor table is constantly levitated from the conveyance path by a magnetic fluid.
A conveyance device characterized in that it is adapted to be conveyed. (5) The conveyance device according to claim 4, wherein the permanent magnet is fixed to the bottom surface of the leg of the conveyance table. (6) The conveyance device according to claim 4, wherein a plurality of stators of the linear motor are provided at predetermined positions on the upper surface of the conveyance path at predetermined intervals.

Claims (8)

[Claims] (1) In a conveyance device using a linear motor that uses a reaction plate as the bottom surface of the conveyance table, and a stator provided opposite to the reaction plate and the reaction plate, the cross section is formed in a generally dovetail shape. A conveying path made of a magnetic material, a conveying table running along the conveying path, a magnetic fluid interposed between the conveying path and the legs of the conveying table, and a magnetic fluid disposed on the legs of the conveying table. What is claimed is: 1. A conveying device comprising: a permanent magnet; the conveying device is configured such that the conveying table is always levitated from the conveying path by a magnetic fluid while being conveyed; (2) The conveyance device according to claim 1, wherein the permanent magnet is fixed to the bottom surface of the leg of the conveyance table. (3) The conveyance device according to claim 1, wherein a plurality of stators of the linear motor are provided at predetermined positions on the upper surface of the conveyance path at predetermined intervals. (4) In a conveyance device using a linear motor, the bottom surface of a conveyance table is a reaction plate, and a stator provided opposite to the reaction plate and the reaction plate are used. A conveying path made of a magnetic material, a conveying table running along the conveying path, a magnetic fluid interposed between the conveying path and the legs of the conveying table, and a magnetic fluid fixed to the legs of the conveying table. The carrier is equipped with a plurality of permanent magnets and magnetic poles made of a magnetic material laminated on the permanent magnets, and the carrier is transported while being constantly levitated from the carrier path by magnetic fluid. A conveyance device featuring: (5) The conveyance device according to claim 4, wherein the permanent magnet is fixed to the bottom surface of the leg of the conveyance table. (6) The conveyance device according to claim 4, wherein the magnetic pole has a groove formed on a surface that comes into contact with the magnetic fluid. (7) The conveyance device according to claim 6, wherein the magnetic pole has a groove tip having a semicircular or arcuate shape. (8) The conveyance device according to claim 4, wherein a plurality of stators of the linear motor are provided at predetermined positions on the upper surface of the conveyance path at predetermined intervals.