JPS6145914A - Detecting method of surface strain defect of mirror surface body - Google Patents
Detecting method of surface strain defect of mirror surface bodyInfo
- Publication number
- JPS6145914A JPS6145914A JP16650984A JP16650984A JPS6145914A JP S6145914 A JPS6145914 A JP S6145914A JP 16650984 A JP16650984 A JP 16650984A JP 16650984 A JP16650984 A JP 16650984A JP S6145914 A JPS6145914 A JP S6145914A
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- image
- reflected
- detected
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
Landscapes
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は表面性状が鏡面化された金属等の表面の歪み欠
陥の検出測定方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for detecting and measuring distortion defects on the surface of a metal or the like having a mirror-finished surface.
従来の検出方法としては、レーザー光の走査方法が容易
に考察されるが、鏡面状の被検材の検出について彎曲歪
の欠陥検出は、レーザー使用方式が考えられる。然し乍
らレーザー光を使用する場合、鏡面化された被検面は、
移動中、常時立体的に変化する反射曲面に関しては、現
実に、連続且適確に平均化された反射光を、とらえるこ
とは不可能である。レーザー光を、走査して被検材が、
鏡面且不規則な非球面連続波状移動の場合、その反射光
をたえず捕捉受光は可能にしても、或1個所で正反射光
を、センサーが受光した場合、受光信号は飽和状態とな
り検出測定の目的が達成されない。As a conventional detection method, a laser beam scanning method is easily considered, but a method using a laser can be considered for detecting curvature distortion defects in a mirror-like test material. However, when using laser light, the mirrored surface to be inspected is
Regarding a reflecting curved surface that constantly changes three-dimensionally during movement, it is actually impossible to capture reflected light that is continuously and accurately averaged. The material to be inspected is scanned with laser light.
In the case of a continuous wave-like movement of a mirrored and irregular aspherical surface, it is possible to constantly capture and receive the reflected light, but if the sensor receives specularly reflected light at one point, the received light signal becomes saturated and detection measurement is difficult. Purpose not achieved.
本発明は以上の事情にもとづいてなされたものである。The present invention has been made based on the above circumstances.
以下本発明の原理及び実施例を第1図、第2図、第3図
、筑4図にもとづいて説明する。The principle and embodiments of the present invention will be explained below with reference to FIGS. 1, 2, 3, and 4.
第1図中、1.は実施例の被検材として鏡面化されたス
テンレスミガキ鋼板である。本明細書では以下ミガキ鋼
板と略称する。第1図第2図中2、は反射映像をミガキ
鋼板に反映さすため表面粗度のあらい光沢のない反射板
を示す。本明細書では反射板と略称する。第1図はミガ
キ鋼板の下反りの計測状態を示す。第1図において、図
に示す如く水平移動中のミガキ鋼板上方空間に反射板2
.を設けこの反射板2.にミガキ鋼板1゜の側面又は斜
下方より照明灯5.によって照明する。図中9は照明灯
5.よりの照明光を示す。In Figure 1, 1. is a polished stainless steel plate with a mirror finish as the material to be tested in the example. In this specification, it will be abbreviated as a polished steel sheet hereinafter. 2 in Fig. 1 and Fig. 2 shows a reflective plate with a rough surface and no gloss, in order to reflect the reflected image on a polished steel plate. In this specification, it is abbreviated as a reflection plate. Figure 1 shows how the downward warpage of a polished steel sheet is measured. In Fig. 1, a reflector plate 2 is placed in the space above the polished steel plate that is moving horizontally as shown in the figure.
.. This reflector plate 2. 5. Lighting from the side or diagonally downward of the polished steel plate 1°. illuminate by. 9 in the figure is lighting lamp 5. Shows more illumination light.
照明された反射板2.の下方に移動するミガキ鋼板に反
射板の映像パターンが第1図の場合ミガキ鋼板が下反り
の変形状態の時に反映された、パターン3.を示す。第
1図中に示す鎖線6.は、通常正常な平面板の仮想線を
示す。Illuminated reflector 2. If the image pattern of the reflector on the polished steel plate moving downward is shown in Figure 1, pattern 3 is reflected when the polished steel plate is in a downwardly warped deformed state. shows. Chain line 6 shown in FIG. indicates a virtual line of a normally normal flat plate.
ミガキ鋼板1.の上面に反映された倒立パターンの虚像
をTV左カメラで撮像する。この場合の撮像を第4図に
示す如くモニタ像に表示される。Polished steel plate 1. A virtual image of the inverted pattern reflected on the top surface of the TV is captured by the TV left camera. The captured image in this case is displayed on a monitor image as shown in FIG.
第4図に示すモニタ画面は、あらかじめ設けられたカー
ソル線17に対して映像歪みの底辺が第4図に示す通り
の歪み寸法15と表示される。On the monitor screen shown in FIG. 4, the base of the image distortion is displayed as a distortion dimension 15 as shown in FIG. 4 with respect to a cursor line 17 provided in advance.
本考案の場合図示された歪み寸法15を電子回路により
ディジタルに信号変換して定量的に、検出表示できる。In the case of the present invention, the illustrated distortion dimension 15 can be quantitatively detected and displayed by converting it into a digital signal using an electronic circuit.
第3図に図示されているモニタ図は、第4図同様上反り
の寸法測定のモニタ図を示す。The monitor diagram shown in FIG. 3 is a monitor diagram for measuring the dimensions of upward warpage, similar to FIG. 4.
被検物が正常なフラット状(平面状態)の場合第3図、
第4図に示すカーソルライン16.17のパターンに一
致することは云うまでもない。If the test object is in a normal flat shape (flat state), Figure 3.
It goes without saying that the pattern matches the pattern of cursor lines 16 and 17 shown in FIG.
第1図、第2図は本発明の実施例を示す。
1・・・ステンレスミガキ鋼板(下反り)2・・・反射
板 3・・・反射板反映パターン(下反り) 4・・・
TV左カメラ5・・・照明灯 6・・・ステンレスミガ
キ鋼板平面基準線 7・・・ステンレスミガキ鋼板(上
反り) 8・・・反射板反映パターン(上反り) 9・
・・照明光を示す。
第3図は第2図に示す通りの実験の経過に得られたモニ
タ画像を示す。第3図における10はTVモニタを示し
、11は基準値を決めるカーソルラインを示す。同様に
16も基準値を決めるカーソルラインを示す。12は歪
量を示す。第4図も同様、第1図の現状をモニタ状に示
している。
第1図1 and 2 show an embodiment of the present invention. 1...Stainless steel polished steel plate (downward curvature) 2...Reflector 3...Reflector reflection pattern (downward curvature) 4...
TV left camera 5...Lighting light 6...Stainless steel polished steel plate plane reference line 7...Stainless steel polished steel plate (upward curvature) 8...Reflector reflection pattern (upward curvature) 9.
...Indicates illumination light. FIG. 3 shows monitor images obtained during the course of the experiment as shown in FIG. In FIG. 3, numeral 10 indicates a TV monitor, and numeral 11 indicates a cursor line for determining a reference value. Similarly, 16 indicates a cursor line for determining the reference value. 12 indicates the amount of distortion. Similarly, FIG. 4 also shows the current state of FIG. 1 in the form of a monitor. Figure 1
Claims (1)
色又はその他の色の乱反射性平面板を、鏡面上被検物の
上部空間に垂直又は一定の角度をもたせて被検材面に平
行に且被検材の移動方向に対して直角に設けその乱反射
性平面板に照明光を当ててその照明光の反射光による平
面板端辺の、直線状の倒立像を鏡面板被検材に反射虚像
として反映されたシャープな境界パターンを撮像するこ
とにより鏡面状の被検材表面歪及び欠陥を検出できるこ
とを特徴とする検出方法。 2鏡面状の金属等の表面に反射虚像パターンを垂直又は
斜方向より反映させてその反射虚像をTVカメラ及びセ
ンサーにより撮影、この撮影パターンを画像処理するこ
とにより歪量及び欠陥を測定する特許請求範囲第1項記
載の鏡面状金属等の表面歪み及び欠陥検出方法。[Scope of Claims] 1. A diffusely reflective flat plate of white or other color with linear edges is placed perpendicularly or at a constant angle to the upper space of the specular surface of the object to be inspected. Illumination light is applied to the diffusely reflective flat plate, which is installed at an angle parallel to the surface of the material to be inspected and at right angles to the direction of movement of the material to be inspected. A detection method characterized in that surface distortions and defects on a mirror-like test material can be detected by imaging a sharp boundary pattern that is reflected as a virtual image of an inverted image of a mirror-like test material on a mirror-like test material. 2. A patent claim that reflects a reflected virtual image pattern vertically or obliquely on the surface of a mirror-like metal, etc., photographs the reflected virtual image with a TV camera and sensor, and measures the amount of distortion and defects by image processing this photographed pattern. A method for detecting surface distortions and defects in mirror-like metal, etc., according to scope 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16650984A JPS6145914A (en) | 1984-08-10 | 1984-08-10 | Detecting method of surface strain defect of mirror surface body |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16650984A JPS6145914A (en) | 1984-08-10 | 1984-08-10 | Detecting method of surface strain defect of mirror surface body |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6145914A true JPS6145914A (en) | 1986-03-06 |
Family
ID=15832659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16650984A Pending JPS6145914A (en) | 1984-08-10 | 1984-08-10 | Detecting method of surface strain defect of mirror surface body |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6145914A (en) |
-
1984
- 1984-08-10 JP JP16650984A patent/JPS6145914A/en active Pending
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