JPS6144830U - 光ｃｖｄ装置 - Google Patents

光ｃｖｄ装置

Info

Publication number
JPS6144830U
JPS6144830U JP13009684U JP13009684U JPS6144830U JP S6144830 U JPS6144830 U JP S6144830U JP 13009684 U JP13009684 U JP 13009684U JP 13009684 U JP13009684 U JP 13009684U JP S6144830 U JPS6144830 U JP S6144830U
Authority
JP
Japan
Prior art keywords
optical cvd
cvd equipment
reaction chamber
introducing
abstract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13009684U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0356046Y2 (enExample
Inventor
英一 太田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP13009684U priority Critical patent/JPS6144830U/ja
Publication of JPS6144830U publication Critical patent/JPS6144830U/ja
Application granted granted Critical
Publication of JPH0356046Y2 publication Critical patent/JPH0356046Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
JP13009684U 1984-08-28 1984-08-28 光ｃｖｄ装置 Granted JPS6144830U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13009684U JPS6144830U (ja) 1984-08-28 1984-08-28 光ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13009684U JPS6144830U (ja) 1984-08-28 1984-08-28 光ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6144830U true JPS6144830U (ja) 1986-03-25
JPH0356046Y2 JPH0356046Y2 (enExample) 1991-12-16

Family

ID=30688708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13009684U Granted JPS6144830U (ja) 1984-08-28 1984-08-28 光ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS6144830U (enExample)

Also Published As

Publication number Publication date
JPH0356046Y2 (enExample) 1991-12-16

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