JPS6144441A - ウエハ引出し装置 - Google Patents

ウエハ引出し装置

Info

Publication number
JPS6144441A
JPS6144441A JP17230185A JP17230185A JPS6144441A JP S6144441 A JPS6144441 A JP S6144441A JP 17230185 A JP17230185 A JP 17230185A JP 17230185 A JP17230185 A JP 17230185A JP S6144441 A JPS6144441 A JP S6144441A
Authority
JP
Japan
Prior art keywords
cartridge
wafer
semiconductor
opening
receiver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17230185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6318329B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Hiroshi Maejima
前島　央
Masato Ishioka
石岡　政人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17230185A priority Critical patent/JPS6144441A/ja
Publication of JPS6144441A publication Critical patent/JPS6144441A/ja
Publication of JPS6318329B2 publication Critical patent/JPS6318329B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • De-Stacking Of Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
JP17230185A 1985-08-07 1985-08-07 ウエハ引出し装置 Granted JPS6144441A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17230185A JPS6144441A (ja) 1985-08-07 1985-08-07 ウエハ引出し装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17230185A JPS6144441A (ja) 1985-08-07 1985-08-07 ウエハ引出し装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP11079176A Division JPS5943822B2 (ja) 1976-09-17 1976-09-17 カ−トリツジからのウエハ自動引出装置

Publications (2)

Publication Number Publication Date
JPS6144441A true JPS6144441A (ja) 1986-03-04
JPS6318329B2 JPS6318329B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-18

Family

ID=15939385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17230185A Granted JPS6144441A (ja) 1985-08-07 1985-08-07 ウエハ引出し装置

Country Status (1)

Country Link
JP (1) JPS6144441A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5336478A (en) * 1976-09-17 1978-04-04 Hitachi Ltd Automatic lead-out device for wafer from cartridge

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5336478A (en) * 1976-09-17 1978-04-04 Hitachi Ltd Automatic lead-out device for wafer from cartridge

Also Published As

Publication number Publication date
JPS6318329B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-04-18

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