JPS5336478A - Automatic lead-out device for wafer from cartridge - Google Patents

Automatic lead-out device for wafer from cartridge

Info

Publication number
JPS5336478A
JPS5336478A JP11079176A JP11079176A JPS5336478A JP S5336478 A JPS5336478 A JP S5336478A JP 11079176 A JP11079176 A JP 11079176A JP 11079176 A JP11079176 A JP 11079176A JP S5336478 A JPS5336478 A JP S5336478A
Authority
JP
Japan
Prior art keywords
wafer
cartridge
out device
automatic lead
lead
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11079176A
Other languages
Japanese (ja)
Other versions
JPS5943822B2 (en
Inventor
Hiroshi Maejima
Masato Ishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11079176A priority Critical patent/JPS5943822B2/en
Publication of JPS5336478A publication Critical patent/JPS5336478A/en
Publication of JPS5943822B2 publication Critical patent/JPS5943822B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To eliminate the cartridge fall-down at the wafer lead-out time as well as the position shift at the restoration time to ensure an assured holding at the holder, thus securing a smooth lead-out of the wafer from the cartridge with no damage of the wafer.
COPYRIGHT: (C)1978,JPO&Japio
JP11079176A 1976-09-17 1976-09-17 Automatic wafer extraction device from cartridge Expired JPS5943822B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11079176A JPS5943822B2 (en) 1976-09-17 1976-09-17 Automatic wafer extraction device from cartridge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11079176A JPS5943822B2 (en) 1976-09-17 1976-09-17 Automatic wafer extraction device from cartridge

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP17230185A Division JPS6144441A (en) 1985-08-07 1985-08-07 Wafer draw-out equipment

Publications (2)

Publication Number Publication Date
JPS5336478A true JPS5336478A (en) 1978-04-04
JPS5943822B2 JPS5943822B2 (en) 1984-10-24

Family

ID=14544712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11079176A Expired JPS5943822B2 (en) 1976-09-17 1976-09-17 Automatic wafer extraction device from cartridge

Country Status (1)

Country Link
JP (1) JPS5943822B2 (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619635A (en) * 1979-07-27 1981-02-24 Hitachi Ltd Manufacturing apparatus
JPS5691427A (en) * 1979-12-25 1981-07-24 Mitsubishi Electric Corp Device for processing semiconductor substrate
JPS5763677A (en) * 1980-10-03 1982-04-17 Hitachi Ltd Continuous vacuum treating device
JPS5896475U (en) * 1981-12-23 1983-06-30 三菱重工業株式会社 Absorption chiller regenerator
JPS594039A (en) * 1982-06-30 1984-01-10 Hitachi Ltd Wafer carrying apparatus
JPS59222941A (en) * 1983-06-01 1984-12-14 Ulvac Corp Charging device for cassette case to be used for wafer
JPS6144441A (en) * 1985-08-07 1986-03-04 Hitachi Ltd Wafer draw-out equipment
JPS6165873A (en) * 1984-09-07 1986-04-04 Mitsui Petrochem Ind Ltd 2-piperazinopyrimidine derivative
JPS61123150A (en) * 1985-10-23 1986-06-11 Hitachi Ltd Production apparatus
JPS61123151A (en) * 1985-10-23 1986-06-11 Hitachi Ltd Production apparatus

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5619635A (en) * 1979-07-27 1981-02-24 Hitachi Ltd Manufacturing apparatus
JPS5691427A (en) * 1979-12-25 1981-07-24 Mitsubishi Electric Corp Device for processing semiconductor substrate
JPS5763677A (en) * 1980-10-03 1982-04-17 Hitachi Ltd Continuous vacuum treating device
JPS5896475U (en) * 1981-12-23 1983-06-30 三菱重工業株式会社 Absorption chiller regenerator
JPS594039A (en) * 1982-06-30 1984-01-10 Hitachi Ltd Wafer carrying apparatus
JPS59222941A (en) * 1983-06-01 1984-12-14 Ulvac Corp Charging device for cassette case to be used for wafer
JPS6165873A (en) * 1984-09-07 1986-04-04 Mitsui Petrochem Ind Ltd 2-piperazinopyrimidine derivative
JPH0522703B2 (en) * 1984-09-07 1993-03-30 Mitsui Petrochemical Ind
JPS6144441A (en) * 1985-08-07 1986-03-04 Hitachi Ltd Wafer draw-out equipment
JPS6318329B2 (en) * 1985-08-07 1988-04-18 Hitachi Ltd
JPS61123150A (en) * 1985-10-23 1986-06-11 Hitachi Ltd Production apparatus
JPS61123151A (en) * 1985-10-23 1986-06-11 Hitachi Ltd Production apparatus

Also Published As

Publication number Publication date
JPS5943822B2 (en) 1984-10-24

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