JPS6143983Y2 - - Google Patents

Info

Publication number
JPS6143983Y2
JPS6143983Y2 JP9476278U JP9476278U JPS6143983Y2 JP S6143983 Y2 JPS6143983 Y2 JP S6143983Y2 JP 9476278 U JP9476278 U JP 9476278U JP 9476278 U JP9476278 U JP 9476278U JP S6143983 Y2 JPS6143983 Y2 JP S6143983Y2
Authority
JP
Japan
Prior art keywords
cryopump
vacuum vessel
vacuum
tube
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9476278U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5512058U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9476278U priority Critical patent/JPS6143983Y2/ja
Publication of JPS5512058U publication Critical patent/JPS5512058U/ja
Application granted granted Critical
Publication of JPS6143983Y2 publication Critical patent/JPS6143983Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP9476278U 1978-07-10 1978-07-10 Expired JPS6143983Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9476278U JPS6143983Y2 (enrdf_load_stackoverflow) 1978-07-10 1978-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9476278U JPS6143983Y2 (enrdf_load_stackoverflow) 1978-07-10 1978-07-10

Publications (2)

Publication Number Publication Date
JPS5512058U JPS5512058U (enrdf_load_stackoverflow) 1980-01-25
JPS6143983Y2 true JPS6143983Y2 (enrdf_load_stackoverflow) 1986-12-11

Family

ID=29027072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9476278U Expired JPS6143983Y2 (enrdf_load_stackoverflow) 1978-07-10 1978-07-10

Country Status (1)

Country Link
JP (1) JPS6143983Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5512058U (enrdf_load_stackoverflow) 1980-01-25

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