JPS6143283A - Piezoelectric pump - Google Patents

Piezoelectric pump

Info

Publication number
JPS6143283A
JPS6143283A JP59164795A JP16479584A JPS6143283A JP S6143283 A JPS6143283 A JP S6143283A JP 59164795 A JP59164795 A JP 59164795A JP 16479584 A JP16479584 A JP 16479584A JP S6143283 A JPS6143283 A JP S6143283A
Authority
JP
Japan
Prior art keywords
metal plate
housing
center
hole
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59164795A
Other languages
Japanese (ja)
Inventor
Yuji Shinguu
祐二 新宮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59164795A priority Critical patent/JPS6143283A/en
Publication of JPS6143283A publication Critical patent/JPS6143283A/en
Pending legal-status Critical Current

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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

PURPOSE:To obtain a piezoelectric pump which has a simple structure and necessitates a small electric-power consumption at a low cost by utilizing piezoelectric elements as the driving source of a pump. CONSTITUTION:Ring-shaped piezoelectric elements 2 and 2 are attached onto the both surfaces of a thin circular metal plate 1. In this constitution, a parallel type bimorph element is constituted. A hole 7 as discharge port is formed at the center of the metal plate 1. The outer periphery of the metal plate 1 is supported onto a housing 3 by a supporting ring 4. A strain is provided onto the piezoelectric elements 2 and 2 by applying a voltage. Then, the metal plate 1 vibrates, and operates as piezoelectric pump, and the fluid 5 in the housing 3 is discharged from the hole 7. The fluid 5 stored in the housing 3 is gas or liquid.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、ポンプの駆動源に関し、圧電素子に電圧を印
加して生ずる歪を利用する圧電ポンプに関するものであ
る。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a drive source for a pump, and more particularly to a piezoelectric pump that utilizes strain produced by applying a voltage to a piezoelectric element.

(従来例の構成とその問題点) 従来のチンプの駆動源として、モータを利用したものが
あるが、構造が複雑、消費電力が大きい、吐出量の微調
ができない等の問題点があった。
(Constitution of conventional example and its problems) Some conventional chimps use a motor as a drive source, but they have problems such as a complicated structure, high power consumption, and inability to finely adjust the discharge amount.

(発明の目的) 本発明は上記欠点に鑑み、圧電素子に電圧を印加して生
ずる歪を利用することにより、構造が簡単で安価にでき
、消費電力が小さく、吐出量の微調ができるという圧電
ポンプを提供するものである。
(Object of the Invention) In view of the above-mentioned drawbacks, the present invention provides a piezoelectric device that utilizes the strain produced by applying a voltage to a piezoelectric element, which has a simple and inexpensive structure, consumes little power, and allows fine adjustment of the discharge amount. It provides pumps.

(発明の構成) この目的を達成するために本発明の圧電ポンプは、中央
に孔を有する薄板の円形の金属板の両面にリング状圧電
素子を貼合せ並列型バイモルフエレメントを構成し、前
記並列型バイモルフエレメントの前記金属板をハウジン
グと支持リングで外周支持し、前記並列型バイモルフエ
レメントに電圧印加したわみ振動を発生させ、前記ハウ
ジング内の液体又は気体を、前記金属板の中央の孔より
ハウジング外に吐出させることができる。又ハウジング
の底面にも中央部に孔を有さない薄板の円形の金属板の
両面にリングの圧電素子を貼合せた並列型バイモルフエ
レメントとし前記金属板を外周支持し設け、上部の並列
型バイモルフエレメントと電圧の位相を反転するように
印加することにより約2倍の吐出量を得ることも可能で
ある。又、金属の中央の孔を複数個にし吐出状態を変え
ることも可能である。
(Structure of the Invention) In order to achieve this object, the piezoelectric pump of the present invention comprises a parallel type bimorph element by laminating ring-shaped piezoelectric elements on both sides of a thin circular metal plate having a hole in the center, and The metal plate of the bimorph element is supported on the outer periphery by a housing and a support ring, and a voltage is applied to the parallel bimorph element to generate flexural vibration, and the liquid or gas in the housing is transferred from the central hole of the metal plate to the housing. It can be discharged outside. Further, on the bottom of the housing, a parallel bimorph element is provided, in which ring piezoelectric elements are bonded to both sides of a thin circular metal plate without a hole in the center, and the metal plate is supported on the outer periphery, and an upper parallel bimorph element is provided. It is also possible to obtain approximately twice the ejection amount by applying the element and the voltage so that their phases are reversed. It is also possible to change the discharge state by making a plurality of holes in the center of the metal.

(実施例の説明) 以下本発明の一実施例について、図面を参照しながら説
明する。
(Description of Embodiment) An embodiment of the present invention will be described below with reference to the drawings.

第1図、第2図は本発明の第1の実施例における圧電ポ
ンプの断面図と平面図を示すものである。
1 and 2 show a sectional view and a plan view of a piezoelectric pump according to a first embodiment of the present invention.

同図において1は中央に孔を有する薄板の円形の金属板
で、両面にリング状圧電素子2を貼合せ並列型バイモル
フエレメントが構成され、金属板1をハウジング3と支
持リング4で外周支持している。ハウジング3内には吐
出させたい気体又は液体5が貯蔵されている。
In the figure, reference numeral 1 denotes a thin circular metal plate with a hole in the center, and ring-shaped piezoelectric elements 2 are pasted on both sides to form a parallel bimorph element. ing. A gas or liquid 5 to be discharged is stored in the housing 3.

以上のように構成された圧電ポンプについて、以下その
動作を説明する。並列型パイモルフエレメントに第1図
に示すように電圧を印加するとたわみ振動が発生し、ハ
ウジング3内に貯蔵された気体又は液体5が金属板1の
中央の孔よりハウジング3外に吐出することになる。吐
出量は印加する電圧により加減することができる。
The operation of the piezoelectric pump configured as described above will be described below. When a voltage is applied to the parallel type pymorph element as shown in FIG. 1, flexural vibration occurs, and the gas or liquid 5 stored in the housing 3 is discharged from the hole in the center of the metal plate 1 to the outside of the housing 3. become. The discharge amount can be adjusted by changing the applied voltage.

第3図は本発明の第2の実施例を示す圧電ポンプの断面
図であり、第1図と同一番号は同一部品を示[7ている
。第3図のものが、第1図のものと異なるのは、ハウジ
ング3の底面に、中央部に孔が設けられていない薄板の
円形の金属板1aを、支持リング4により外周支持して
設け、この金属板1aの両面に圧電素子2を貼合せて、
並列型バイモルフとした点である。
FIG. 3 is a sectional view of a piezoelectric pump showing a second embodiment of the present invention, and the same numbers as in FIG. 1 indicate the same parts. The difference between the one in FIG. 3 and the one in FIG. 1 is that a thin circular metal plate 1a without a hole in the center is provided on the bottom of the housing 3 and is supported on the outer periphery by a support ring 4. , piezoelectric elements 2 are pasted on both sides of this metal plate 1a,
The point is that it is a parallel bimorph.

上記のように構成された圧電ポンプについて、以下その
動作を説明する。上部の並列型バイモルフエレメントと
ハウジングの底面に設けた並列型バイモルフエレメント
に、第3図に示すように電圧の位相が逆になるように印
加すると、それぞれたわみ振動が発生し、約2倍の吐出
量を得ることができる。
The operation of the piezoelectric pump configured as described above will be described below. When voltages are applied to the upper parallel bimorph element and the parallel bimorph element provided on the bottom of the housing so that the voltages are in opposite phases as shown in Figure 3, deflection vibration occurs, resulting in approximately twice the discharge. You can get the amount.

第4図は本発明の第3の実施例を示す圧電ポンプの断面
図である。同図において2は圧電素子、3はハウジング
、4は支持リング、5は気体又は液体で、以上は第1図
の構成と同様のものである。
FIG. 4 is a sectional view of a piezoelectric pump showing a third embodiment of the present invention. In the figure, 2 is a piezoelectric element, 3 is a housing, 4 is a support ring, and 5 is a gas or liquid, which is the same as the structure shown in FIG. 1.

第1図の構成と異なるのは、薄板の円形の金属板1bの
中央に複数の孔を設けた点である。
The difference from the configuration shown in FIG. 1 is that a plurality of holes are provided in the center of a thin circular metal plate 1b.

上記のように構成された圧電ポンプについて以下その動
作を説明する。並列型バイモルフエレメントに第4図に
示すように電圧を印加すると、たわみ振動が発生し、金
属板1bの中央の複数の孔より・・ウジフグ3外に気体
又は液体5を吐出することができ、吐出状態を第1の実
施例と比較し変えることができる。
The operation of the piezoelectric pump configured as described above will be explained below. When a voltage is applied to the parallel bimorph elements as shown in FIG. 4, flexural vibration is generated, and gas or liquid 5 can be discharged from the plurality of holes in the center of the metal plate 1b to the outside of the Ujifugu 3. The discharge state can be changed compared to the first embodiment.

(発明の効果) 以上のように本発明は、電圧を印加すると歪を生ずる圧
電素子を用いた並列型バイモルフエレメントで圧電ボン
fが構成され、構造が簡単で、消費電力が小さく、吐出
量の微調が可能となりその実用的効果は犬なるものがあ
る。
(Effects of the Invention) As described above, in the present invention, the piezoelectric bong f is constructed of parallel bimorph elements using piezoelectric elements that produce distortion when a voltage is applied, and the structure is simple, the power consumption is small, and the discharge amount is small. Fine adjustment becomes possible, and its practical effects are significant.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の第1の実施例における圧電ポンプの断
面図、第2図は本発明の第1の実施例における圧電ポン
プの平面図、第3図は本発明の第2の実施例における圧
電ポンプの断面図、第4図は本発明の第3の実施例にお
ける圧電ポンプの断面図である。 1、la、lb−金属板、2−・圧電素子、3・ハウジ
ング、4・・支持リング、5・・・液体又は気体。 第1図 第2図 第3図
FIG. 1 is a sectional view of a piezoelectric pump according to a first embodiment of the present invention, FIG. 2 is a plan view of a piezoelectric pump according to a first embodiment of the present invention, and FIG. 3 is a cross-sectional view of a piezoelectric pump according to a first embodiment of the present invention. FIG. 4 is a sectional view of a piezoelectric pump according to a third embodiment of the present invention. 1, la, lb - metal plate, 2 - piezoelectric element, 3 - housing, 4 - support ring, 5 - liquid or gas. Figure 1 Figure 2 Figure 3

Claims (3)

【特許請求の範囲】[Claims] (1)中央に孔を有する薄板の円形の金属板の両面にリ
ング状圧電素子を貼合せて並列型バイモルフエレメント
を構成し、前記並列型バイモルフエレメントの前記金属
板をハウジングと支持リングで外周支持し、前記並列型
バイモルフエレメントに電圧印加し、たわみ振動を発生
させ、前記ハウジング内の液体又は気体を、前記金属板
の中央の孔よりハウジング外に吐出させることを特徴と
する圧電ポンプ。
(1) A parallel bimorph element is constructed by laminating ring-shaped piezoelectric elements on both sides of a thin circular metal plate having a hole in the center, and the metal plate of the parallel bimorph element is supported on the outer periphery by a housing and a support ring. A piezoelectric pump, characterized in that a voltage is applied to the parallel bimorph elements to generate flexural vibrations and discharge liquid or gas within the housing out of the housing from a hole in the center of the metal plate.
(2)前記ハウジングの底面に、中央部に孔が設けられ
ておらず、両面にリング状の圧電素子を貼合せて並列型
バイモルフエレメントを構成する薄板の円形金属板を外
周支持して設け、該バイモルフエレメントと前記中央部
に孔を有するバイモルフエレメントへの印加電圧の位相
を反転させた特許請求の範囲第(1)項記載の圧電ポン
プ。
(2) A thin circular metal plate having no hole in the center and having ring-shaped piezoelectric elements bonded to both sides to form a parallel bimorph element is provided on the bottom surface of the housing, supporting the outer periphery; The piezoelectric pump according to claim 1, wherein the phases of voltages applied to the bimorph element and the bimorph element having a hole in the center are reversed in phase.
(3)金属板の中央の孔を複数個にした特許請求の範囲
第(1)項記載の圧電ポンプ。
(3) The piezoelectric pump according to claim (1), wherein the metal plate has a plurality of holes in the center.
JP59164795A 1984-08-08 1984-08-08 Piezoelectric pump Pending JPS6143283A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59164795A JPS6143283A (en) 1984-08-08 1984-08-08 Piezoelectric pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59164795A JPS6143283A (en) 1984-08-08 1984-08-08 Piezoelectric pump

Publications (1)

Publication Number Publication Date
JPS6143283A true JPS6143283A (en) 1986-03-01

Family

ID=15800079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59164795A Pending JPS6143283A (en) 1984-08-08 1984-08-08 Piezoelectric pump

Country Status (1)

Country Link
JP (1) JPS6143283A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6827559B2 (en) 2002-07-01 2004-12-07 Ventaira Pharmaceuticals, Inc. Piezoelectric micropump with diaphragm and valves
US8308454B2 (en) 2007-03-12 2012-11-13 Murata Manufacturing Co., Ltd. Fluid conveyance device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6827559B2 (en) 2002-07-01 2004-12-07 Ventaira Pharmaceuticals, Inc. Piezoelectric micropump with diaphragm and valves
US8308454B2 (en) 2007-03-12 2012-11-13 Murata Manufacturing Co., Ltd. Fluid conveyance device

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