JPS61428B2 - - Google Patents
Info
- Publication number
- JPS61428B2 JPS61428B2 JP56125225A JP12522581A JPS61428B2 JP S61428 B2 JPS61428 B2 JP S61428B2 JP 56125225 A JP56125225 A JP 56125225A JP 12522581 A JP12522581 A JP 12522581A JP S61428 B2 JPS61428 B2 JP S61428B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12522581A JPS5827974A (ja) | 1981-08-12 | 1981-08-12 | 硬質被膜被覆法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12522581A JPS5827974A (ja) | 1981-08-12 | 1981-08-12 | 硬質被膜被覆法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5827974A JPS5827974A (ja) | 1983-02-18 |
| JPS61428B2 true JPS61428B2 (ja) | 1986-01-08 |
Family
ID=14904927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12522581A Granted JPS5827974A (ja) | 1981-08-12 | 1981-08-12 | 硬質被膜被覆法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5827974A (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6057964A (ja) * | 1983-09-09 | 1985-04-03 | Matsushita Electronics Corp | 固体光電変換装置およびその製造方法 |
-
1981
- 1981-08-12 JP JP12522581A patent/JPS5827974A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6057964A (ja) * | 1983-09-09 | 1985-04-03 | Matsushita Electronics Corp | 固体光電変換装置およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5827974A (ja) | 1983-02-18 |