JPS6142321A - シランガス処理装置 - Google Patents
シランガス処理装置Info
- Publication number
- JPS6142321A JPS6142321A JP59164738A JP16473884A JPS6142321A JP S6142321 A JPS6142321 A JP S6142321A JP 59164738 A JP59164738 A JP 59164738A JP 16473884 A JP16473884 A JP 16473884A JP S6142321 A JPS6142321 A JP S6142321A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- casing
- cylindrical filter
- introduction pipe
- silane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 45
- 238000001514 detection method Methods 0.000 claims abstract description 11
- 238000004140 cleaning Methods 0.000 claims description 20
- 238000005406 washing Methods 0.000 abstract description 7
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000002485 combustion reaction Methods 0.000 abstract description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 80
- 238000000034 method Methods 0.000 description 13
- 230000007062 hydrolysis Effects 0.000 description 6
- 238000006460 hydrolysis reaction Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000009841 combustion method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000008399 tap water Substances 0.000 description 1
- 235000020679 tap water Nutrition 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Gas Separation By Absorption (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59164738A JPS6142321A (ja) | 1984-08-06 | 1984-08-06 | シランガス処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59164738A JPS6142321A (ja) | 1984-08-06 | 1984-08-06 | シランガス処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6142321A true JPS6142321A (ja) | 1986-02-28 |
| JPH0331085B2 JPH0331085B2 (enrdf_load_stackoverflow) | 1991-05-02 |
Family
ID=15798962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59164738A Granted JPS6142321A (ja) | 1984-08-06 | 1984-08-06 | シランガス処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6142321A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61115129U (enrdf_load_stackoverflow) * | 1984-12-28 | 1986-07-21 | ||
| US6638343B1 (en) | 1998-12-01 | 2003-10-28 | Ebara Corporation | Exhaust gas treating device |
| US6969250B1 (en) | 1998-12-01 | 2005-11-29 | Ebara Corporation | Exhaust gas treating device |
| JP2013039521A (ja) * | 2011-08-15 | 2013-02-28 | Taiyo Nippon Sanso Corp | ガス処理方法、ガス処理装置、微粉末の形成方法及び微粉末形成装置 |
| CN112915748A (zh) * | 2021-02-03 | 2021-06-08 | 湖州加怡新市热电有限公司 | 一种烟气脱硫系统 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49119869U (enrdf_load_stackoverflow) * | 1973-02-12 | 1974-10-14 | ||
| JPS5312777A (en) * | 1976-07-22 | 1978-02-04 | Sony Corp | Centrifugal gas washing and separation apparatus |
| JPS54101675U (enrdf_load_stackoverflow) * | 1977-12-28 | 1979-07-18 | ||
| JPS5657423A (en) * | 1979-10-16 | 1981-05-19 | Matsushita Electric Ind Co Ltd | Central cleaner |
| JPS5658515A (en) * | 1979-10-17 | 1981-05-21 | Hitachi Ltd | Dust collecting apparatus |
| JPS5684619A (en) * | 1979-12-12 | 1981-07-10 | Seitetsu Kagaku Co Ltd | Nonpolluting method of gas for semiconductor |
| JPS5794323A (en) * | 1980-12-03 | 1982-06-11 | Stanley Electric Co Ltd | Treating method for waste gas of cvd apparatus |
-
1984
- 1984-08-06 JP JP59164738A patent/JPS6142321A/ja active Granted
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49119869U (enrdf_load_stackoverflow) * | 1973-02-12 | 1974-10-14 | ||
| JPS5312777A (en) * | 1976-07-22 | 1978-02-04 | Sony Corp | Centrifugal gas washing and separation apparatus |
| JPS54101675U (enrdf_load_stackoverflow) * | 1977-12-28 | 1979-07-18 | ||
| JPS5657423A (en) * | 1979-10-16 | 1981-05-19 | Matsushita Electric Ind Co Ltd | Central cleaner |
| JPS5658515A (en) * | 1979-10-17 | 1981-05-21 | Hitachi Ltd | Dust collecting apparatus |
| JPS5684619A (en) * | 1979-12-12 | 1981-07-10 | Seitetsu Kagaku Co Ltd | Nonpolluting method of gas for semiconductor |
| JPS5794323A (en) * | 1980-12-03 | 1982-06-11 | Stanley Electric Co Ltd | Treating method for waste gas of cvd apparatus |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61115129U (enrdf_load_stackoverflow) * | 1984-12-28 | 1986-07-21 | ||
| US6638343B1 (en) | 1998-12-01 | 2003-10-28 | Ebara Corporation | Exhaust gas treating device |
| US6969250B1 (en) | 1998-12-01 | 2005-11-29 | Ebara Corporation | Exhaust gas treating device |
| JP2013039521A (ja) * | 2011-08-15 | 2013-02-28 | Taiyo Nippon Sanso Corp | ガス処理方法、ガス処理装置、微粉末の形成方法及び微粉末形成装置 |
| CN112915748A (zh) * | 2021-02-03 | 2021-06-08 | 湖州加怡新市热电有限公司 | 一种烟气脱硫系统 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0331085B2 (enrdf_load_stackoverflow) | 1991-05-02 |
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