JPS614139A - X-ray generator - Google Patents

Abstract

PURPOSE:To allow multiple-characteristic X-rays to be extracted from one device by fixing multiple metal members each generating specific-characteristic X- rays to a target and radiating an electron beam to an optional metal member among them. CONSTITUTION:Metal members 4A, 4B, 4C made of Al material, Si material, Pd material are fixed to the peripheral surface of a cylindrical target 3 rotatably supporting a support member 5, and a fixed filament 1 for generating an electron beam 2 is provided. The DC high voltage is applied across the filament 1 and the target 3, and the target 3 is rotated, thereby the electron beam 2 is radiated to the Al material 4A, Si material 4B, Pd material 4C, and specific- characteristic X-rays are generated respectively. Accordingly, multiple-characteristic X-rays can be optionally utilized with one device, and the life can be extended by changing the beam position even on the same metal.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to an X-ray generator, and in particular to an anticathode.

[Prior art]

Conventionally, in an X-ray generator, an electron beam is irradiated onto one type of metal or alloy, and the X-rays generated from the metal or alloy are utilized. The generated X-rays consist of continuous X-rays showing a continuous wavelength distribution and characteristic X-rays showing a line spectrum specific to the metal or alloy. Therefore, when using characteristic X-rays, only one type of characteristic X-ray could be used with one X-ray generator. In X-ray lithography, the characteristic X-rays that are effective for the exposure system are limited by the combination of resist, mask base material, and absorber. In other words, one exposure device can only use one type of characteristic X-ray, so when changing the resist or mask, it is necessary to
With an X-ray generator that can only use X-rays, it is not possible to change the characteristic X-rays, which is extremely inconvenient in terms of use.

〔the purpose〕

An object of the present invention is to provide an X-ray generating device that eliminates the above-mentioned drawbacks and at the same time allows a single device to arbitrarily extract and utilize a plurality of characteristic X-rays.

〔composition〕

In order to achieve the above-mentioned object, the present invention provides an anticathode (target) with a plurality of metal parts that each generate characteristic X-rays, and makes it possible to irradiate an electron beam to any one of these metal parts. It is configured as follows.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings.

FIGS. 1(a) and 1(b) show an embodiment of the present invention, and are a front view and a side view, respectively. In the figure, 1 is a fixed filament for generating the electron beam 2, 3 is a cylindrical Kugela to which the electron beam 2 is irradiated), 4A,
4E and 40 are metal members, respectively At material, Si material,
It is made of PD material and is firmly and securely fitted to the circumferential surface of the target 3. Further, 5 is a support member for the target 3, and 6 is an X
It is a line.

A DC high voltage is applied between the filament 1 and the target 3 by a power source (not shown), and the electron beam 2 generated from the filament 1 is directed to the At material 4k on the target 3.
collides with and generates X-rays 6. The X-rays 6 include characteristic X-rays specific to the At material 4A. Also, the target 3 is the support member 4 5, yo, kae, oh, 9, ka, 8, 8. It can be rotated as desired by one device.

In FIGS. 1(a) and (b), the electron beam 2 is connected to the At material 4A.
Although an example is shown in which the target 3 collides with the S1 material 4B and the Pd material 4C, by rotationally moving the target 3, it is possible to also collide with the S1 material 4B and the Pd material 4C, thereby generating characteristic X-rays unique to each.

Therefore, it has become possible to generate and utilize arbitrary characteristic X-rays by rotating the target.

Next, another embodiment will be described with reference to FIG.

The feature of this embodiment is that the target remains fixed, and multiple filaments (two in the figure) are used to generate the electron beam.
). In other words, target 3 has A
The T material 4A and the Si material 4B are fixed, and the electron beams 8A and 8E colliding with each other are caused by different filaments 7A,
This is caused by 7E. Therefore, if it is desired to utilize the characteristic Xi 9A of the At material 4A, only the filament 7A needs to be ignited. Of course, both filaments) 7A.

7B may be ignited together, and two types of characteristics XJ19A and 9B may be utilized by At material 4A and S1 material 4B.

Furthermore, another embodiment will be described with reference to FIG.

The feature of this embodiment is that the target and filament remain fixed, but the electric field intensity applied to the filament is varied. That is, the target 3 is made of At material 4A as in the previous embodiment.

A Si material 4B and a PA material 4C are fixed, and by controlling the potential of the extraction electrode 10 of the filament 1, the electron beam is deflected to 11A, 1'lB.

This allows an arbitrary electron beam such as 110 to be taken out. Therefore, for example, the characteristic X-ray 1 of At material 4A
If it is desired to use 2A, the potential of the extraction electrode 10 may be increased to generate the electron beam IIA.

〔effect〕

As described above, the present invention can arbitrarily utilize a plurality of characteristics Xi with one Xm generator. Furthermore, since the collision position of the electron beam can be changed even on the same metal, it is possible to prevent irregularities on the metal surface and decrease in dose, thereby extending the life of the device.

[Brief explanation of the drawing]

FIGS. 1(a) and 1(b) show one embodiment of the invention, showing a front view and a side view, respectively, and FIGS. 2 and 3 show other embodiments of the invention. 1...Filament, 2...Electron beam. 3... Target, 4A... At
(aluminum) material. 4B...Si (silicon) material, 4C...P
a (palladium) material. 6... X-rays. 7A, 7B... Filament. 8A, 8B... Electron beam. 9A, 9B...Characteristics Xm. 11A, IIB, 1i00・Electron beam. 12A, 1.2B, 12C... Characteristic X-rays.

Claims (1)

[Claims] An X-ray generator characterized in that an anticathode is provided with a plurality of metal parts and is configured such that an arbitrary metal part among the plurality of metal parts can be irradiated with an electron beam.