JPS6141255U - マスク保護装置 - Google Patents

マスク保護装置

Info

Publication number
JPS6141255U
JPS6141255U JP1984125270U JP12527084U JPS6141255U JP S6141255 U JPS6141255 U JP S6141255U JP 1984125270 U JP1984125270 U JP 1984125270U JP 12527084 U JP12527084 U JP 12527084U JP S6141255 U JPS6141255 U JP S6141255U
Authority
JP
Japan
Prior art keywords
protection device
frame member
mask
mask protection
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984125270U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6339703Y2 (enrdf_load_stackoverflow
Inventor
和則 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP1984125270U priority Critical patent/JPS6141255U/ja
Publication of JPS6141255U publication Critical patent/JPS6141255U/ja
Priority to US07/136,427 priority patent/US4833051A/en
Application granted granted Critical
Publication of JPS6339703Y2 publication Critical patent/JPS6339703Y2/ja
Granted legal-status Critical Current

Links

JP1984125270U 1984-08-20 1984-08-20 マスク保護装置 Granted JPS6141255U (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1984125270U JPS6141255U (ja) 1984-08-20 1984-08-20 マスク保護装置
US07/136,427 US4833051A (en) 1984-08-20 1987-12-17 Protective device for photographic masks

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984125270U JPS6141255U (ja) 1984-08-20 1984-08-20 マスク保護装置

Publications (2)

Publication Number Publication Date
JPS6141255U true JPS6141255U (ja) 1986-03-15
JPS6339703Y2 JPS6339703Y2 (enrdf_load_stackoverflow) 1988-10-18

Family

ID=30683958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984125270U Granted JPS6141255U (ja) 1984-08-20 1984-08-20 マスク保護装置

Country Status (1)

Country Link
JP (1) JPS6141255U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004354720A (ja) * 2003-05-29 2004-12-16 Semiconductor Leading Edge Technologies Inc マスク用ペリクル
KR100746864B1 (ko) * 1999-11-08 2007-08-07 신에쓰 가가꾸 고교 가부시끼가이샤 포토리소그래피 포토마스크의 보호용 프레임식 펠리클

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006301525A (ja) * 2005-04-25 2006-11-02 Shin Etsu Chem Co Ltd ペリクルフレーム
JP5047232B2 (ja) 2009-06-26 2012-10-10 信越化学工業株式会社 ペリクル
KR101915912B1 (ko) 2014-09-19 2018-11-06 미쯔이가가꾸가부시끼가이샤 펠리클, 그 제조 방법 및 노광 방법
KR101910302B1 (ko) 2014-09-19 2018-10-19 미쯔이가가꾸가부시끼가이샤 펠리클, 펠리클의 제조 방법 및 펠리클을 사용한 노광 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100746864B1 (ko) * 1999-11-08 2007-08-07 신에쓰 가가꾸 고교 가부시끼가이샤 포토리소그래피 포토마스크의 보호용 프레임식 펠리클
JP2004354720A (ja) * 2003-05-29 2004-12-16 Semiconductor Leading Edge Technologies Inc マスク用ペリクル

Also Published As

Publication number Publication date
JPS6339703Y2 (enrdf_load_stackoverflow) 1988-10-18

Similar Documents

Publication Publication Date Title
JPS6141255U (ja) マスク保護装置
JPS5845037U (ja) 積層シ−ト
JPS6079456U (ja) 手術用マスク
JPS60177227U (ja) 換気用通気筒
JPS5862048U (ja) 換気装置
JPS58140729U (ja) 化粧ガラス用接着シ−ト
JPS5865330U (ja) 車輛窓
JPS6144124U (ja) ル−ムエアコンの遮風用グロメツト
JPS59108563U (ja) 香料入りダスト除去シ−ト
JPS6058130U (ja) ギブス包帯
JPS59155114U (ja) 部分的に多孔質部が形成された軟質ポリ塩化ビニルフイルム
JPH0221650U (enrdf_load_stackoverflow)
JPS60165140U (ja) プラスチツクレンズ用加工保護シ−ル
JPS6148033U (ja) 脱臭シ−ト
JPS6120685U (ja) 結露防止シ−ト
JPS5838558U (ja) スペ−サ−
JPS5891417U (ja) 波形エアフイルタ−用炉材
JPS584156U (ja) 園芸用フイルムの換気孔
JPH0431146U (enrdf_load_stackoverflow)
JPS6148035U (ja) 脱臭シ−ト
JPS6048142U (ja) プレパラ−ト
JPS6087508U (ja) 播種用補助シ−ト
JPS5811834U (ja) デ−タタブレツト
JPS5823330U (ja) フオトマスク
JPS5969313U (ja) 防音内装材