JPS6141131B2 - - Google Patents

Info

Publication number
JPS6141131B2
JPS6141131B2 JP52110195A JP11019577A JPS6141131B2 JP S6141131 B2 JPS6141131 B2 JP S6141131B2 JP 52110195 A JP52110195 A JP 52110195A JP 11019577 A JP11019577 A JP 11019577A JP S6141131 B2 JPS6141131 B2 JP S6141131B2
Authority
JP
Japan
Prior art keywords
photosensitive resin
pattern
metal film
solution
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52110195A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5443476A (en
Inventor
Kenzo Hatada
Kyomi Tsutsui
Takeshi Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11019577A priority Critical patent/JPS5443476A/ja
Publication of JPS5443476A publication Critical patent/JPS5443476A/ja
Publication of JPS6141131B2 publication Critical patent/JPS6141131B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP11019577A 1977-09-12 1977-09-12 Pattern formation method Granted JPS5443476A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11019577A JPS5443476A (en) 1977-09-12 1977-09-12 Pattern formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11019577A JPS5443476A (en) 1977-09-12 1977-09-12 Pattern formation method

Publications (2)

Publication Number Publication Date
JPS5443476A JPS5443476A (en) 1979-04-06
JPS6141131B2 true JPS6141131B2 (cs) 1986-09-12

Family

ID=14529450

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11019577A Granted JPS5443476A (en) 1977-09-12 1977-09-12 Pattern formation method

Country Status (1)

Country Link
JP (1) JPS5443476A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07309437A (ja) * 1994-05-18 1995-11-28 Kawasaki Steel Corp 空気輸送配管の詰まり解除方法および解除装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5153474A (en) * 1974-11-06 1976-05-11 Hitachi Ltd Pataanno keiseihoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07309437A (ja) * 1994-05-18 1995-11-28 Kawasaki Steel Corp 空気輸送配管の詰まり解除方法および解除装置

Also Published As

Publication number Publication date
JPS5443476A (en) 1979-04-06

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