JPS6140654U - 光学的検査用プロ−ブ - Google Patents

光学的検査用プロ−ブ

Info

Publication number
JPS6140654U
JPS6140654U JP12502384U JP12502384U JPS6140654U JP S6140654 U JPS6140654 U JP S6140654U JP 12502384 U JP12502384 U JP 12502384U JP 12502384 U JP12502384 U JP 12502384U JP S6140654 U JPS6140654 U JP S6140654U
Authority
JP
Japan
Prior art keywords
specimen
light receiving
optical inspection
inspection probe
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12502384U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0329737Y2 (enrdf_load_stackoverflow
Inventor
俊夫 千竈
Original Assignee
株式会社 町田製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社 町田製作所 filed Critical 株式会社 町田製作所
Priority to JP12502384U priority Critical patent/JPS6140654U/ja
Priority to US06/765,670 priority patent/US4718760A/en
Publication of JPS6140654U publication Critical patent/JPS6140654U/ja
Priority to US07/072,121 priority patent/US4732474A/en
Application granted granted Critical
Publication of JPH0329737Y2 publication Critical patent/JPH0329737Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Instruments For Viewing The Inside Of Hollow Bodies (AREA)
JP12502384U 1984-08-18 1984-08-18 光学的検査用プロ−ブ Granted JPS6140654U (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP12502384U JPS6140654U (ja) 1984-08-18 1984-08-18 光学的検査用プロ−ブ
US06/765,670 US4718760A (en) 1984-08-18 1985-08-14 Apparatus for optically inspecting object having reflecting surface
US07/072,121 US4732474A (en) 1984-08-18 1987-07-10 Apparatus for optically inspecting object having reflecting surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12502384U JPS6140654U (ja) 1984-08-18 1984-08-18 光学的検査用プロ−ブ

Publications (2)

Publication Number Publication Date
JPS6140654U true JPS6140654U (ja) 1986-03-14
JPH0329737Y2 JPH0329737Y2 (enrdf_load_stackoverflow) 1991-06-25

Family

ID=30683713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12502384U Granted JPS6140654U (ja) 1984-08-18 1984-08-18 光学的検査用プロ−ブ

Country Status (1)

Country Link
JP (1) JPS6140654U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0329737Y2 (enrdf_load_stackoverflow) 1991-06-25

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