JPS6140339B2 - - Google Patents
Info
- Publication number
- JPS6140339B2 JPS6140339B2 JP10976981A JP10976981A JPS6140339B2 JP S6140339 B2 JPS6140339 B2 JP S6140339B2 JP 10976981 A JP10976981 A JP 10976981A JP 10976981 A JP10976981 A JP 10976981A JP S6140339 B2 JPS6140339 B2 JP S6140339B2
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- dew condensation
- sensitive member
- detection
- condensation sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 28
- 230000005494 condensation Effects 0.000 claims description 14
- 238000009833 condensation Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 5
- 230000007423 decrease Effects 0.000 claims description 2
- 230000035945 sensitivity Effects 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- YDZQQRWRVYGNER-UHFFFAOYSA-N iron;titanium;trihydrate Chemical compound O.O.O.[Ti].[Fe] YDZQQRWRVYGNER-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- CMOAHYOGLLEOGO-UHFFFAOYSA-N oxozirconium;dihydrochloride Chemical compound Cl.Cl.[Zr]=O CMOAHYOGLLEOGO-UHFFFAOYSA-N 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
この発明は検出感度のすぐれた結露センサに関
するものである。
湿度の増加または結露状態において、抵抗値が
減少する、いわゆる負の湿度―抵抗変化特性を示
す結露センサは知られている。
これには、たとえば、有機高分子に導電体粉末
あるいは半導体粉末を分散させた厚膜タイプのも
の、あるいはイルメナイト型結晶構造からなるチ
タン複合酸化物を主体とするセラミツクスなどを
感湿部材とするものが知られている。
一般には、抵抗変化を検知するに当つて検出電
極が用いられるが、感湿部材が検出電極の全面を
覆うように形成されるのが通常でである。具体的
には検出電極として一対の電極、たとえば一対の
平行状検出電極、一対のくし歯状検出電極の上
に、この検出電極を全部覆うように形成されてい
る。
ところが、感湿部材が形成されている領域にお
いて、検出電極が一部現われるようにすることに
よつて、上述した従来のものより結露検出感度の
大きい結露センサの得られることが判明した。
したがつて、この発明は従来のものにくらべて
検出感度のすぐれた結露センサを提供するもので
ある。
また、この発明は抵抗変化幅の大きい結露セン
サを提供するものである。
以下、この発明の詳細について図示した実施例
に従つて詳細に説明する。
第１図はこの発明の一実施例にかかる結露セン
サの平面図を示す。１はアルミナ、ジルコニアな
どの絶縁基板で、この上には複数の短冊状の感湿
部材が形成され、さらにその上には、たとえば金
よりなる一対の平行状の検出電極が形成されてい
る。ここで、感湿部材４は検出電極２，３を互い
に連結するように形成されてる。５，６はリード
線であり、検出電極２，３の端部により半田付け
などにより取り付けられている。
この他に、図示しないが、検出電極２，３が一
対のくし歯状のもので構成してもよい。また、感
湿部材４の端部が互いに連なつている形状で構成
してもよい。さらに、検出電極２，３について
は、ら旋状のものでもよく、要は感湿部材４の抵
抗変化を検出できればよい。
次に、この発明にかかる結露センサを具体的な
実施例に従つて説明する。
感湿部材として、エポキシ樹脂0.9ｇに
MnO24.7ｇ、TiO23.8ｇを加え、さらにオキシ塩
化ジルコニウムのアルコール溶液を添加してペー
ストとしたものを用意した。
この感湿部材のペーストをアルミナ基板の上に
塗布し、これを150℃で熱処理した。さらにこの
上に対向間隔0.3mm、対向長が66mmの金からなる
検出電極を形成した、なお、感湿部材のペースト
の塗布面積を一定の55mm2として、塗布状態を、検
出電極に対して100％のもの（試料１）、検出電極
に対して10％のもの（試料２）、検出電極に対し
て33％のもの（試料３）、検出電極に対して50％
のもの（試料４）のものをそれぞれ作成した。
これらの各試料について、25℃における40％相
対湿度中で結露させたときの応答時間とそのとき
に抵抗値を測定し、その結果を下表に示した。
なお、試料の初期抵抗値は104MΩであつた。
This invention relates to a dew condensation sensor with excellent detection sensitivity. Dew condensation sensors are known that exhibit so-called negative humidity-resistance change characteristics, in which the resistance value decreases when humidity increases or when there is condensation. Examples of this include thick-film types in which conductor powder or semiconductor powder is dispersed in organic polymers, or moisture-sensitive materials such as ceramics mainly composed of titanium composite oxide with an ilmenite crystal structure. It has been known. Generally, a detection electrode is used to detect a change in resistance, and a moisture-sensitive member is usually formed to cover the entire surface of the detection electrode. Specifically, the detection electrode is formed on a pair of electrodes, for example, a pair of parallel detection electrodes and a pair of comb-like detection electrodes, so as to completely cover the detection electrodes. However, it has been found that a dew condensation sensor with higher dew condensation detection sensitivity than the above-mentioned conventional sensor can be obtained by allowing the detection electrode to partially appear in the area where the moisture sensitive member is formed. Therefore, the present invention provides a dew condensation sensor with superior detection sensitivity compared to conventional ones. Further, the present invention provides a dew condensation sensor with a large resistance change range. Hereinafter, details of the present invention will be explained in detail according to illustrated embodiments. FIG. 1 shows a plan view of a dew condensation sensor according to an embodiment of the present invention. Reference numeral 1 denotes an insulating substrate made of alumina, zirconia, etc., on which a plurality of strip-shaped moisture sensitive members are formed, and further on which a pair of parallel detection electrodes made of, for example, gold are formed. Here, the moisture sensing member 4 is formed to connect the detection electrodes 2 and 3 to each other. Lead wires 5 and 6 are attached to the ends of the detection electrodes 2 and 3 by soldering or the like. In addition, although not shown, the detection electrodes 2 and 3 may be configured with a pair of comb teeth. Alternatively, the ends of the moisture sensitive member 4 may be connected to each other. Further, the detection electrodes 2 and 3 may be spiral-shaped, as long as they can detect a change in resistance of the moisture-sensitive member 4. Next, the dew condensation sensor according to the present invention will be explained according to specific examples. 0.9g of epoxy resin used as a moisture-sensitive component
A paste was prepared by adding 4.7 g of MnO 2 and 3.8 g of TiO 2 and further adding an alcoholic solution of zirconium oxychloride. The paste of this moisture-sensitive member was applied onto an alumina substrate and heat-treated at 150°C. Further, detection electrodes made of gold were formed on top of this with an opposing interval of 0.3 mm and an opposing length of 66 mm.The application area of the paste for the moisture-sensitive member was set to be a constant 55 mm2 , and the application state was set at 100 mm with respect to the detection electrodes. % (sample 1), 10% for the detection electrode (sample 2), 33% for the detection electrode (sample 3), 50% for the detection electrode
(Sample 4) were prepared. For each of these samples, the response time and resistance value when dew condensed at 25° C. and 40% relative humidity were measured, and the results are shown in the table below. Note that the initial resistance value of the sample was 10 4 MΩ.
【表】
表から明らかなように、この発明にかかるもの
（試料２，３，４）は従来のもの（試料１）にく
らべて応答時間が短かく、また初期抵抗値にくら
べて抵抗値の変化も大きくなつている。これは検
出電極を連結している感湿部材とアルミナ基板と
の境界部が多くなり、イオン伝導の発生が容易に
起きることによるものと考えられる。また付着し
た水分の分解が生じたとしても、発生したガスが
感湿部材より容易に離脱しやすくなり、これもま
たイオン伝導の発生を容易にし、検出感度を高め
ていると考えられる。さらに感湿部材がギヤツプ
をおいて複数形成されているため、付着した水分
がギヤツプの部分から感湿部材へ容易に浸透する
ことになり、感湿部材の表面が汚染されたとして
も、汚染による影響を受けにくいという特徴を有
している。
したがつて、この発明にかかる結露センサはイ
オン伝導にもとづく検出機構に有効であり、上記
した実施例に限られず、同じ検出機構を有する感
湿部材に適用できることはもちろんである。[Table] As is clear from the table, the products according to the present invention (Samples 2, 3, and 4) have a shorter response time than the conventional product (Sample 1), and the resistance value is lower than the initial resistance value. Changes are also increasing. This is thought to be due to the fact that the number of boundaries between the moisture-sensitive member and the alumina substrate connecting the detection electrode increases, and ion conduction easily occurs. Furthermore, even if the attached moisture is decomposed, the generated gas is likely to be easily released from the moisture-sensitive member, which is also thought to facilitate the occurrence of ionic conduction and increase detection sensitivity. Furthermore, since multiple moisture-sensitive members are formed with gaps in between, adhering moisture easily permeates into the humidity-sensitive members through the gaps, and even if the surface of the moisture-sensitive member becomes contaminated, It has the characteristic of not being easily affected. Therefore, the dew condensation sensor according to the present invention is effective for a detection mechanism based on ion conduction, and is not limited to the above embodiments, but can of course be applied to moisture-sensitive members having the same detection mechanism.
第１図はこの発明にかかる結露センサを示す平
面図である。
１は基板、２，３は検出電極、４は感湿部材。
FIG. 1 is a plan view showing a dew condensation sensor according to the present invention. 1 is a substrate, 2 and 3 are detection electrodes, and 4 is a moisture-sensitive member.
Claims (1)
含む結露センサにおいて、 感湿部材の上に対向する検出電極が形成されて
いるとともに、検出電極間を連結する感湿部材が
複数形成されていることを特徴とする結露セン
サ。 ２ 感湿部材は湿度の増加につれて抵抗値が減少
する特性を有するものである特許請求の範囲１項
記載の結露センサ。[Scope of Claims] 1. In a dew condensation sensor including a detection electrode formed on a substrate and a moisture-sensitive member, the detection electrode facing each other is formed on the humidity-sensitive member, and a sensor connecting the detection electrodes is provided. A dew condensation sensor comprising a plurality of wet members. 2. The dew condensation sensor according to claim 1, wherein the moisture sensitive member has a characteristic that the resistance value decreases as the humidity increases.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10976981A JPS5810642A (en) | 1981-07-13 | 1981-07-13 | Dew condensation sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10976981A JPS5810642A (en) | 1981-07-13 | 1981-07-13 | Dew condensation sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5810642A JPS5810642A (en) | 1983-01-21 |
| JPS6140339B2 true JPS6140339B2 (en) | 1986-09-09 |
Family
ID=14518756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10976981A Granted JPS5810642A (en) | 1981-07-13 | 1981-07-13 | Dew condensation sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5810642A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63161307A (en) * | 1986-12-25 | 1988-07-05 | Toshiba Corp | Burner |
| JPH05656Y2 (en) * | 1987-12-23 | 1993-01-11 | ||
| JPH0619935Y2 (en) * | 1987-12-25 | 1994-05-25 | 大阪瓦斯株式会社 | Instant water heater |
| DE4305934B4 (en) * | 1993-02-26 | 2004-09-30 | CiS Institut für Mikrosensorik gGmbH | Arrangement of sensors for measuring the humidity |
-
1981
- 1981-07-13 JP JP10976981A patent/JPS5810642A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5810642A (en) | 1983-01-21 |
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