JPS58166249A - Humidity, temperature and gas sensitive element - Google Patents

Humidity, temperature and gas sensitive element

Info

Publication number
JPS58166249A
JPS58166249A JP4858582A JP4858582A JPS58166249A JP S58166249 A JPS58166249 A JP S58166249A JP 4858582 A JP4858582 A JP 4858582A JP 4858582 A JP4858582 A JP 4858582A JP S58166249 A JPS58166249 A JP S58166249A
Authority
JP
Japan
Prior art keywords
electrodes
sensitive
temperature
gas
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4858582A
Other languages
Japanese (ja)
Inventor
Yoshiharu Komine
小峰　義治
Takao Sawada
隆夫 沢田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4858582A priority Critical patent/JPS58166249A/en
Publication of JPS58166249A publication Critical patent/JPS58166249A/en
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE:To make possible the measurement of humidity, temperature and gas by one small-sized element, by using either one sensitive element for humidity, temperature or gas as a substrate and providing the separated electrodes on both sides of the substrate leaving a space and then, providing with remaining two materials bringing into contact with each one side of the separated electrodes. CONSTITUTION:For example, a humidity sensitive material such as apatite hydroxide is used for an element substrate 1 and porous electrodes 2a, 2b are provided on the one side of the substrate 1 by RuO2 or gold paste leaving a space and then, an SnO2 base gas sensitive porous ceramic material is placed overlapping parts of it with both electrodes each other. Porous electrodes 2c, 2b are provided on the other side of the substrate 1 by the same paste and a humidity sensitive film 4 made of Ni-Cu oxide base is placed overlapping parts of it with both electrodes each other. On occasion of detecting the humidity, lead wires 5a, 5b of the electrodes 2a, 2b and that of 5c, 5d of the electrodes 2c, 2d, are short-circuited and electric resistance between both sides of the substrate 1 is measured. On occasion of detecting the gas, the electric resistance between the electrodes 2a and 2b is measured and on occasion of detecting the temperature, the electric resistance between the electrodes 2c and 2d is measured.

Description

【発明の詳細な説明】 この発明は、湿度、温度、およびガスを検出する素子、
すなわち感湿感温感ガス素子に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention provides an element for detecting humidity, temperature, and gas;
That is, it relates to a moisture-sensitive, temperature-sensitive gas element.

従来、湿度を検出する素子としては、湿度の変化に応じ
て、電気抵抗電気容量などが変化する多孔質セラミック
ス、無機電解質、有機電解質などが用いられ、ガスを検
出する素子としてはｅ　８ｎ０２．　ＺｎＯなど多孔質
セラミックス半導体が用いられてき良。また温度を検出
す′る素子としてｉ、サーミスタ、熱電対などが用いら
れてきた。しかし、従来は、ある雰囲気の中の湿度。Conventionally, as elements for detecting humidity, porous ceramics, inorganic electrolytes, organic electrolytes, etc., whose electric resistance and capacitance change depending on changes in humidity, have been used, and as elements for detecting gas, e8n02. Porous ceramic semiconductors such as ZnO are often used. In addition, as elements for detecting temperature, a thermistor, a thermocouple, etc. have been used. However, traditionally, the humidity in a certain atmosphere.

温度およびガスを検出するのに上述の各素子をそれぞれ
別個に使用していたので、取付スペースがかなり広くな
り、また高価になる等の欠点があった。Since each of the above-mentioned elements was used separately to detect temperature and gas, there were drawbacks such as a considerable installation space and high cost.

この発明は、前述のように従来は３゛つの素子をそれぞ
れ別個に用いていたのを改善こて、１つの素子で湿度、
温度およびガスを検出できるように、従来の湿度検出す
なわち感湿材料、温度検出すなわち感温材ｉ、及びガス
検出すなわ゛ち感ガス材料を一体化して、３つの素子を
用いるのに比べ、設置スペースが小さくてすみ、かつ取
付けが簡易にでき、安価な感湿感温感ガス素子を提供す
ることを目的としている。This invention improves the conventional method of using three separate elements as described above.
In order to detect temperature and gas, compared to the conventional method of integrating three elements: humidity detection, or moisture sensitive material, temperature detection, or temperature sensitive material i, and gas detection, or gas sensitive material. The purpose of the present invention is to provide a moisture-sensitive and temperature-sensitive gas element that requires a small installation space, is easy to install, and is inexpensive.

以下、この発明の実施例を図について説明する。Embodiments of the present invention will be described below with reference to the drawings.

第１図（Ａ）　、　（Ｂ）はこの発明の一実施例を示す
、・これらの図において、（１）は感湿材料からなる素
子基板であり、前記感湿材料としては、水酸アパタイト
、　ＴｉＯ２、ＺｎＯ、リチウムフェライトなどの高温
で安定な多孔質セラミックが用いられ。FIGS. 1(A) and 1(B) show an embodiment of the present invention. In these figures, (1) is an element substrate made of a moisture-sensitive material, and the moisture-sensitive material is hydroxyapatite. Porous ceramics that are stable at high temperatures, such as TiO2, ZnO, and lithium ferrite, are used.

これらを２００、−４００μ程度の厚みに焼結体から切
り出し、研暦したものか、グリーンシートを焼成したも
のなどが素子基板として用いられる。These are cut out from a sintered body to a thickness of about 200 to -400 μm, and then polished, or a green sheet fired is used as the element substrate.

第１図（Ａ）に示すように、前記素子基板（りの表面（
第１図（Ａ））、裏面（第１図（Ｂ））に、　　Ｒｕｏ
２ペースト、金ペーストなどからなる多孔質面電極（２
ａ）　、　（２ｂ）および（２ｃ）　＊　（２ｄ）　ｔ
ある間隔で互に分離させて設ける。電極（２ａ）と（２
ｂ）　、　（２ａ）と（２ｄ）は分離電極とも呼ぶ。な
お、前記両ｉｌｌ極（２ａ）　、　（２ｂ）又Ｆｌ　（
２ｃ）　、　（２ｄ）間の間隔は後述する感ガス材料、
感温材料の抵抗値によって、任意に変えるものとする。As shown in FIG. 1(A), the surface of the element substrate (
Fig. 1 (A)), the back side (Fig. 1 (B)), Ruo
Porous surface electrode made of 2 paste, gold paste, etc.
a) , (2b) and (2c) * (2d) t
They are separated from each other at certain intervals. Electrodes (2a) and (2
b), (2a) and (2d) are also called separate electrodes. In addition, both ill poles (2a), (2b) and Fl (
The interval between 2c) and (2d) is the gas-sensitive material described below,
It shall be arbitrarily changed depending on the resistance value of the temperature-sensitive material.

（３）は素子基板（１）表面の多孔質面１１２ａ）　、
　（２ｂ）間に、これらの電極（２ａ）（２ｂ）Ｋ一部
を重ねて、スクリーン印刷、蒸着などによりて設けられ
る感ガス材料である。この感ガス材料（３）としては、
　５ｎｏ２系、　ＺｎＯ系。(3) is the porous surface 112a on the surface of the element substrate (1);
A gas-sensitive material is provided between electrodes (2b) by partially overlapping these electrodes (2a), (2b) and K by screen printing, vapor deposition, or the like. This gas-sensitive material (3) is
5no2 series, ZnO series.

７８２０５系などの多孔質セラミックが用いられる。Porous ceramics such as 78205 series are used.

（４）は素子基板（１）裏面の多孔質面電極（２ｃ）　
、　（２ｄ）間に、これらの電極（２Ｇ）　、　（２ｄ
）　Ｋ　−ｓＩｓ　？重ねて。(4) is the porous surface electrode (2c) on the back side of the element substrate (1)
, (2d) between these electrodes (2G) , (2d
) K-sIs? Overlapping.

スクリーン印刷、蒸着などによって設けられる感温材料
で０例えばＭｌ−Ｃｕ系酸化物などが好ましいｏ　（５
ａ）　−（５６）　ｉｊそれぞれ（２ａ）　−＝　（２
ｄ）のリード線である。電極を多孔質罠する理由は、水
蒸気が電極を通して、感湿基板に致達するためである。Temperature-sensitive material provided by screen printing, vapor deposition, etc. For example, Ml-Cu oxide is preferable (5
a) −(56) ij each (2a) −= (2
This is the lead wire of d). The reason for making the electrode porous is that water vapor can pass through the electrode and reach the moisture sensitive substrate.

そのため電極は開孔、スリットを多数設けたものでもよ
い。Therefore, the electrode may be provided with a large number of openings and slits.

前述のように構成した感湿感温感ガス素子で。With a moisture-sensitive temperature-sensitive gas element configured as described above.

湿１１−検出する場合には、リード線（５ａ）と（ｓｂ
）　。Moisture 11 - When detecting, connect the lead wires (5a) and (sb
).

及び（５ｃ）と（５ｄ）とを短絡させ、電極（２ａ）と
（２ｂ）　。and (5c) and (5d) are short-circuited to form electrodes (2a) and (2b).

及び（２ｃ）と（２ｄ）　を同電位にし、基板（１）の
両面の電極間の電気抵抗ｔ−測測定る。なお、リード線
（５ａ）と（５ｂ）及び（５ｃ）と（５ｄ）とは短絡さ
せなくてもよいが、この場合には電気抵抗値が高くなる
。Then, (2c) and (2d) are set to the same potential, and the electrical resistance between the electrodes on both sides of the substrate (1) is measured. Note that the lead wires (5a) and (5b) and (5c) and (5d) do not need to be short-circuited, but in this case, the electrical resistance value becomes high.

そして、相対湿度０Ｓ１００％に対応する電気抵抗値は
、感湿材料によって異なるが、水酸アパタイトでは素子
基板（１１の大きさが４．５　Ｘ　４．５　Ｘ　０．３
闘のもので、１０８Ｓ１０　　Ω程度となる。The electrical resistance value corresponding to a relative humidity of 0S and 100% varies depending on the moisture-sensitive material, but in the case of hydroxyapatite, the size of the element substrate (11 is 4.5 x 4.5 x 0.3
The resistance is approximately 108S10Ω.

ガスを検出する場合には、電極（２ａ）と（２ｂ）との
間の電気抵抗を測定する。素子は、基板（１）の周辺に
設けたヒータ（図示せず）により２００、−４００℃に
保持する。感ガス材料としてＺｎＯ。When detecting gas, the electrical resistance between electrodes (2a) and (2b) is measured. The element is maintained at 200.degree. C. and -400.degree. C. by a heater (not shown) provided around the substrate (1). ZnO as a gas-sensitive material.

５ｎｏ２　　ｆ用いたときの電気抵抗は１例えばプロパ
ンガス３０００ｐｐｍでプロパンがない場合のそれぞれ
１１５５１７１Ｇ　、　１／１０　Ｓ１／１００　Ｋ　
す；ｂ。The electrical resistance when using 5no2f is 1, for example, when propane gas is 3000ppm and there is no propane, respectively 1155171G, 1/10 S1/100K
S;b.

温度を検知するＫは、ガス検出のときに使用した加熱用
ヒータは通電を中断１．て、ＪＩ湿悪感温感ガス素子測
定される周囲の温度に一致するように放置し、電極（２
ｃ）と（２ｄ）との間の電気抵抗を測定する。感温材料
としてＮｉ　−Ｃ！ｕ系酸化物を用いたときの電気抵抗
は、＊極間隔３００μテ、　０、−２００℃０ＩＩＩで
ＩＯ’Ｓ１９ｓａｚ化−する〇なお、感ガス材料（３）
は電極（２ａ）と電極（２ｂ）上に般社たが、素子基板
（１）上に設け、その上に電極（２ａ）と電極（２ｂ）
を設けてもよい。このとき素子基板（１）Ｋは、感ガス
材料（３）を電極（２ａ）と電極（２ｂ）の一部に接触
する大きさに制限して設け。K, which detects temperature, interrupts power supply to the heater used during gas detection.1. Then, leave it so that the temperature matches the ambient temperature to be measured by the JI humidity/temperature-sensitive gas element, and then connect the electrodes (2
Measure the electrical resistance between c) and (2d). Ni-C as a temperature-sensitive material! The electrical resistance when using the u-based oxide is:
The electrode (2a) and the electrode (2b) are provided on the element substrate (1), and the electrode (2a) and the electrode (2b) are placed on the element substrate (1).
may be provided. At this time, the element substrate (1) K is provided with the gas-sensitive material (3) limited to a size that contacts a portion of the electrode (2a) and the electrode (2b).

素子基板（１）への水蒸気の到達を容易にする。又感温
材料（船の素子基板（１）への設は方についても感ガス
材料（３）と同様に変更してもよい。This makes it easier for water vapor to reach the element substrate (1). Also, the way the temperature-sensitive material is provided on the ship's element substrate (1) may be changed in the same way as the gas-sensitive material (3).

なお又、第１図において、（１）を感ガス材料。Furthermore, in Fig. 1, (1) is a gas-sensitive material.

（３）を感湿材料としても、また（１１　ｔ−感温材料
（４）全感湿材料としても、同様の機能が得られる。（
菫）を感温材料とした場合は、電極は多孔質でなくても
良い。Similar functions can be obtained by using (3) as a moisture-sensitive material or by using (11 t-temperature-sensitive material (4) as a total moisture-sensitive material.)
When violet) is used as a temperature-sensitive material, the electrode does not need to be porous.

第２図は、この発明の他の実施例で、筒状の感湿材料（
１）の外周面および内面に分離された電極（２ａ）　、
　（２ｂ）および（２ｃ）　、　（２ａ）が設けられ、
電極（２ａ）　、　（２ｂ）の間に両者に接触して、感
ガス材料、電極（２ｃ）　、　（２１りの間に両者に接
触して感温材料が設けられている。各電極からリード線
（５ａ）　５（５（１）が取り出されている。機能的に
は第１図と同じであり、　（１）　、　（３１、（４）
の材料は、感湿材、感ガス材、感温材の適轟な組合せで
よい。FIG. 2 shows another embodiment of the present invention, in which a cylindrical moisture-sensitive material (
an electrode (2a) separated on the outer peripheral surface and inner surface of 1);
(2b) and (2c), (2a) are provided,
A gas-sensitive material is provided between the electrodes (2a) and (2b) in contact with both, and a temperature-sensitive material is provided in contact with both the electrodes (2c) and (21).Leads are provided from each electrode. Line (5a) 5 (5 (1) is taken out. Functionally the same as in Figure 1, (1) , (31, (4)
The material may be any suitable combination of moisture-sensitive materials, gas-sensitive materials, and temperature-sensitive materials.

但しく４）は筒内部雰囲気が外部雰囲気の変化に対して
応答が遅くなるので、感湿材、感ガス材にするより、感
温材にした方が良い。However, in 4), the response of the internal atmosphere of the cylinder to changes in the external atmosphere is delayed, so it is better to use a temperature-sensitive material rather than a moisture-sensitive material or a gas-sensitive material.

以上のように、この発明によれば、湿度、ガスおよび温
度の検出を１つの感湿感温感ガス素子で行なうことがで
き、さらに従来から用いられている。安定性が高く、シ
かも安価な材料を用いることができるため、３つの素子
を用いるのに比べ、設置スペースが小さくてすみ、取付
が簡易にでき、極めて高い信頼性の安価な素子が提供で
きる。As described above, according to the present invention, humidity, gas, and temperature can be detected using one moisture-sensitive and temperature-sensitive gas element, which has been conventionally used. Because it is highly stable and can use inexpensive materials, it requires less installation space and is easier to install compared to using three elements, and can provide an inexpensive element with extremely high reliability. .

【図面の簡単な説明】[Brief explanation of drawings]

第１図（Ａ）　、　（Ｂ）はこの発明の一実施例による
感湿感温感ガス素子を示す表面側、裏面側斜視図。 第２図はこの発明の他の実施例による感湿感温感ガス素
子を示す斜視図である。 （１）　・・・素子基板で感湿材料、　（２ａ）　、　
（２に＋）　、　（２Ｃ）　。 （２ｄ）・・・多孔質面電極、（３）・・・ＩＩＡガス
材料、（４）・・・感温材料、　（５ａ）　、　（５ｂ
）　、　（５ｃ）　、　（５ｄ）−リード線。 なお１図中同一符号は同一または相当部分を示す０ 代理人　葛　野　信　−FIGS. 1A and 1B are front and rear perspective views showing a moisture-sensitive temperature-sensitive gas element according to an embodiment of the present invention. FIG. 2 is a perspective view showing a moisture-sensitive temperature-sensitive gas element according to another embodiment of the present invention. (1) ... Moisture-sensitive material on the element substrate, (2a),
(+ to 2), (2C). (2d) Porous surface electrode, (3) IIA gas material, (4) Temperature sensitive material, (5a), (5b
), (5c), (5d) - Lead wire. In addition, the same reference numerals in the figure 1 indicate the same or corresponding parts.

Claims (2)

【特許請求の範囲】[Claims] （１）　感湿、感温及び感ガス材料のいずれか一つから
なる素子基板、この基板の両面にそれぞれ間隔を置いて
設けた分離電極、上記基板の一面に設けた上記分離電極
と接触させて上記・基板に設けた感湿、感温及び感ガス
材料の残り二つのいずれか一方の材料、上記基板の他面
に設けた上記分離電極と接触させて上記基板に設けた感
湿、感温及び感カス材料の残り一つの材料を備えた感湿
感瀉感ガス素子。(1) An element substrate made of any one of moisture-sensitive, temperature-sensitive, and gas-sensitive materials, separation electrodes provided at intervals on both sides of the substrate, and contact with the separation electrodes provided on one surface of the substrate. one of the remaining two moisture-sensitive, temperature-sensitive and gas-sensitive materials provided on the substrate, and a moisture-sensitive, temperature-sensitive and gas-sensitive material provided on the substrate in contact with the separation electrode provided on the other surface of the substrate. A moisture-sensitive gas element having one remaining material: a temperature- and dust-sensitive material. （２）　　電極は多孔質面電極である特許請求の範囲第
１項記載の感湿感温感ガス素子。(2) The moisture-sensitive and temperature-sensitive gas device according to claim 1, wherein the electrode is a porous surface electrode.
JP4858582A 1982-03-26 1982-03-26 Humidity, temperature and gas sensitive element Pending JPS58166249A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4858582A JPS58166249A (en) 1982-03-26 1982-03-26 Humidity, temperature and gas sensitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4858582A JPS58166249A (en) 1982-03-26 1982-03-26 Humidity, temperature and gas sensitive element

Publications (1)

Publication Number Publication Date
JPS58166249A true JPS58166249A (en) 1983-10-01

Family

ID=12807472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4858582A Pending JPS58166249A (en) 1982-03-26 1982-03-26 Humidity, temperature and gas sensitive element

Country Status (1)

Country Link
JP (1) JPS58166249A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190049A (en) * 1984-10-11 1986-05-08 Sekisui Plastics Co Ltd Method for detecting carbon dioxide and detecting element thereof
JPH03140856A (en) * 1989-10-27 1991-06-14 Kyoshiro Seki Ultrasonic system for measuring humidity and gas concentration
CN110441349A (en) * 2019-07-22 2019-11-12 苏州工业园区传世汽车电子有限公司 Nano-metal-oxide composite noble metal electrode and preparation method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190049A (en) * 1984-10-11 1986-05-08 Sekisui Plastics Co Ltd Method for detecting carbon dioxide and detecting element thereof
JPH0418260B2 (en) * 1984-10-11 1992-03-27 Sekisui Plastics
JPH03140856A (en) * 1989-10-27 1991-06-14 Kyoshiro Seki Ultrasonic system for measuring humidity and gas concentration
CN110441349A (en) * 2019-07-22 2019-11-12 苏州工业园区传世汽车电子有限公司 Nano-metal-oxide composite noble metal electrode and preparation method thereof
CN110441349B (en) * 2019-07-22 2022-02-18 苏州工业园区传世汽车电子有限公司 Nano metal oxide composite noble metal electrode and preparation method thereof

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