JPS6138836A - Fixing/guiding method of sliding member - Google Patents

Fixing/guiding method of sliding member

Info

Publication number
JPS6138836A
JPS6138836A JP15833184A JP15833184A JPS6138836A JP S6138836 A JPS6138836 A JP S6138836A JP 15833184 A JP15833184 A JP 15833184A JP 15833184 A JP15833184 A JP 15833184A JP S6138836 A JPS6138836 A JP S6138836A
Authority
JP
Japan
Prior art keywords
sliding member
static pressure
main body
static
guide means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15833184A
Other languages
Japanese (ja)
Other versions
JPH0767655B2 (en
Inventor
Sousaku Kimura
木村　壮作
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP59158331A priority Critical patent/JPH0767655B2/en
Publication of JPS6138836A publication Critical patent/JPS6138836A/en
Publication of JPH0767655B2 publication Critical patent/JPH0767655B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/28—Means for securing sliding members in any desired position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports

Abstract

PURPOSE:To assure correct stopping position by removing one of horizontal or vertical components of static pressure through static pressure guide means. CONSTITUTION:Static pressure is functioned onto a sliding member 3 through static pressure guide means 6-8 such that one of the horizontal or vertical component will face between the body 1 and the sliding member 3 thus to remove one component and to pressure contact the sliding member 3 against the body 1 through the other component. Consequently, the desired stopping position of the sliding member 3 is held accurately while maintaining high rigidity for holding stoppage and to enagle highly accurate positioning/feeding.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、工作機械等の装置における工作物配置テーブ
ル等本体上を摺動可能な摺動部材の固定方法及び案内方
法に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of fixing and a method of guiding a sliding member that can slide on a main body of a device such as a machine tool, such as a workpiece placement table.

〔従来技術と問題点〕[Prior art and problems]

従えば工作機械等の装置においては一本体とこの本体を
摺動可能なテーブル等の摺動部材との間に静圧案内手段
を介在して当該摺動部材を案内し、別駆動源により当該
摺動部材を所期停止Ｆ位置まで移動させると共に停止保
持して作業をなすものがある。かかる装置では摺動部材
の支持剛性−位置決め送り、停止保持剛性の精度により
装置全体の精度が左右される。Accordingly, in devices such as machine tools, a static pressure guide means is interposed between one main body and a sliding member such as a table on which this main body can slide, and the sliding member is guided, and a separate drive source is used to guide the sliding member. Some work is carried out by moving the sliding member to a predetermined stop position F and then holding it there. In such a device, the accuracy of the entire device is determined by the accuracy of the support rigidity of the sliding member - positioning, feeding, and stopping and holding rigidity.

〔発明の目的〕[Purpose of the invention]

本発明は上述した事情に基づいてなされたものであり、
その目的は停止保持剛性の大きな摺動部材の固定方法及
び支持剛性が大きくかつ高精度な位置決め送りを可能と
した摺動部材の案内方法を提供し−その結果−適用装置
全体の精度の向上を図ることである。The present invention has been made based on the above-mentioned circumstances,
The purpose is to provide a method for fixing a sliding member that has high rigidity for stopping and holding, and a method for guiding a sliding member that has high support rigidity and enables highly accurate positioning and feeding.As a result, the accuracy of the entire application device can be improved. It is to aim for it.

〔発明の構成〕[Structure of the invention]

本発明の摺動部材の固定方法は一本体とこの本体を摺動
可能な摺動部材との間に一水平方向成分あるいは鉛直方
向成分のうち少なくとも一方が相対向する少なくとも一
対の静圧力を上記摺動部材に作用する静圧案内手段を介
在ｌ−上記相対向する静圧力のうち一方の静圧力を除去
することにより、他方の静圧力により上記摺動部材を本
体に圧接させて固定する構成をなす。The method for fixing a sliding member according to the present invention applies at least one pair of static forces between a main body and a sliding member capable of sliding this main body, with at least one of a horizontal component and a vertical component facing each other. A static pressure guide means acting on the sliding member is interposed. By removing one of the opposing static pressures, the sliding member is pressed against the main body and fixed by the other static pressure. to do.

一方、本発明の摺動部材の案内方法は一本体４１−この
本体を摺動可能な摺動部材との間に、水平方向成分ある
いは鉛直方向成分のうち少なくとも一方が相対向する少
なくとも一対の流体圧を上記摺動部材に作用する静圧案
内手段を介在し一上記静圧案内手段のうちの一方には本
体と摺動部材との間に静摩擦力を発生しない最小油膜が
確保できろ程度でかつ他方の静圧案内手段による静圧力
より低い静圧力を作用して摺動部材を案内、する構成な
なす。On the other hand, in the method for guiding a sliding member of the present invention, at least a pair of fluids are provided between a main body 41 and a sliding member capable of sliding this main body, with at least one of a horizontal component and a vertical component facing each other. The pressure is applied to the sliding member through static pressure guide means, and one of the static pressure guide means is provided with a minimum oil film that does not generate static friction between the main body and the sliding member. The sliding member is guided by applying a static pressure lower than that of the other static pressure guide means.

〔発明の実施例〕[Embodiments of the invention]

以下１本発明σ）実施例を図面に基づいて説明する。 Embodiments of the present invention σ) will be described below based on the drawings.

第１図は摺動部材が本体上を摺動する際の状態を示す側
断面図−第２図は括動部イオが固定された状態を示す側
断面図である。FIG. 1 is a side sectional view showing the state in which the sliding member slides on the main body, and FIG. 2 is a side sectional view showing the state in which the bracket Io is fixed.

図中１は工作機械等における本体であり一基礎定盤２上
に固着されている。また図中６は上記本体１上に摺動可
能に配置された摺動部材である。In the figure, reference numeral 1 denotes a main body of a machine tool, etc., which is fixed on a base plate 2. Further, reference numeral 6 in the figure represents a sliding member slidably disposed on the main body 1.

すなわち一本体１には台形溝４が形成されており一一方
、摺動部材乙にはこの台形溝４に対応する形状の突条部
５が形成され、上記突条部５が上記台形溝４に緩嵌され
ている。これら本体１と摺動部材６との間には一第１の
静圧ボケ：ｙｌ□６−第２の静圧ポケット７−配管８１
図示しない作動流体供給源等からなる静圧案内手段が介
在して設けられている。すなわち、第１−第２の静圧ボ
ケ、ｈ６−７は摺動部材６の突条部５の側壁にそれぞれ
設けられており配管８．８を介して各々所定圧力の作動
流体を供給される。第］−第２の静圧ポケット６−７は
水平方向成分が相対向する流体圧を摺動部材乙に作用す
る。尚１図中９は摺動部材６の摺動を円滑にするための
静圧ポケットである。That is, a trapezoidal groove 4 is formed in the main body 1, and a protrusion 5 having a shape corresponding to the trapezoidal groove 4 is formed in the sliding member B, and the protrusion 5 is formed in the trapezoidal groove 4. 4 is loosely fitted. Between the main body 1 and the sliding member 6, there is a first static pressure gap: yl 6 - a second static pressure pocket 7 - a pipe 81.
A static pressure guide means including a working fluid supply source (not shown) is interposed. That is, the first and second static pressure blurs h6-7 are respectively provided on the side walls of the protruding portion 5 of the sliding member 6, and each is supplied with working fluid at a predetermined pressure via the piping 8.8. . ] - The second static pressure pocket 6-7 applies fluid pressure with opposing horizontal components to the sliding member B. Note that 9 in FIG. 1 is a static pressure pocket for smooth sliding of the sliding member 6.

上述した構成の装置において、本実施例は次の如く摺動
部材６を案内−固定する。In the apparatus configured as described above, in this embodiment, the sliding member 6 is guided and fixed as follows.

まず−摺動案内の際は、第１の静圧ポケット乙には比較
的高圧力の作動流体を供給し−また。第２の静圧ポケッ
ト７には静摩擦力が発生しない最小油膜を確保できる程
度の比較的低圧力の作動流体を供給する。かかる作動流
体の供給状態においては一第１図に示す如く一第１の静
圧ポケット配設側の間隙１０は広く一一方一第２の静圧
ポケット配設側の間隙１１は狭く保持される。摺動部材
６は上述の如き状態で静圧摺動案内されつつ１図示しな
い駆動源から動力を受けて本体１上を摺動する。かＮる
摺動案内によれば高精度の位置決め送りが可能となると
共に静圧テーブルの高剛性化が可能になるなどの利点が
ある。First, during sliding guidance, relatively high pressure working fluid is supplied to the first static pressure pocket B. A relatively low pressure working fluid is supplied to the second static pressure pocket 7 to ensure a minimum oil film that does not generate static frictional force. In such a state where the working fluid is supplied, as shown in FIG. 1, the gap 10 on the side where the first static pressure pocket is disposed is wide, while the gap 11 on the side where the second static pressure pocket is disposed is kept narrow. Ru. The sliding member 6 slides on the main body 1 in the above-described state while being guided by static pressure and receiving power from a drive source (not shown). The sliding guide has advantages such as enabling highly accurate positioning and feeding and increasing the rigidity of the static pressure table.

次に一摺動部材３を停止位置にて同定保持するときは一
第１の静圧ポケット６にはそのまま作動流体の供給を維
持しつつ、一方、第２の静圧ポケット７への作動流体の
供給を停止する。そうすると−摺動部材３は第２図に示
す如く第１の静圧ポケット６からの流体圧により本体１
における第２の静圧ポケット配設側に押付けられる。こ
のときの摺動部材３の押圧方向への移動量は一前述の如
く静圧案内状態にて間隙１１を狭く保持していたので、
極微小なものである。その結果１例えば駆動源からの動
力伝達手段としてリードスクリュー・ナンド機構を用い
ていた場合でも、ねじピッチ−ねじれ角等の影響を受け
て摺動部材３が摺動方向へ移動するおそれがない。かく
して−摺動部材６は本体１にクランプされて所期の停止
位置で保持剛性の大きな位置ずれの生じない確実な保持
状態が保たれる。Next, when the sliding member 3 is held in the stopped position, the working fluid is kept supplied to the first static pressure pocket 6 while the working fluid is supplied to the second static pressure pocket 7. supply will be stopped. Then, the sliding member 3 is moved from the main body 1 by the fluid pressure from the first static pressure pocket 6 as shown in FIG.
It is pressed against the side where the second static pressure pocket is provided. The amount of movement of the sliding member 3 in the pressing direction at this time is as follows, since the gap 11 is kept narrow in the static pressure guidance state as described above.
It is extremely small. As a result 1, for example, even when a lead screw NAND mechanism is used as a power transmission means from a drive source, there is no fear that the sliding member 3 will move in the sliding direction due to the influence of the screw pitch, twist angle, etc. In this way, the sliding member 6 is clamped to the main body 1, and is maintained in a secure holding state in which the holding rigidity does not cause large displacement at the desired stop position.

尚−上記実施例の変形例として、摺動部材乙の固定時に
静圧ポケット９への作動流体の供給も停止して、摺動部
材６と本体１との接触面を広（してもよい。As a modification of the above embodiment, the supply of working fluid to the static pressure pocket 9 may also be stopped when the sliding member B is fixed to widen the contact surface between the sliding member 6 and the main body 1. .

第３図及び第４図は本発明の他の実施例を示すものであ
り、第３図は摺動部材が本体」−を摺動する際の状態を
示す側断面図−第４図は摺動部材が固定された状態を示
す側断面図である。なお、先に示した第１図、第２図と
同一部分には同一符号を付し、その部分の詳細な説明は
省略する。3 and 4 show other embodiments of the present invention, FIG. 3 is a side sectional view showing the state when the sliding member slides on the main body, and FIG. FIG. 3 is a side sectional view showing a state in which the moving member is fixed. Note that the same parts as in FIGS. 1 and 2 shown above are given the same reference numerals, and detailed explanations of those parts will be omitted.

本実施例における装置は、摺動部材６に第１−第２．第
３、第４−第５−第６の静圧ポケット２１−２２−２１
２１２５−２６を設は−これら静圧ポケットが本体１の
溝２７における所定壁面に各々所定の流体圧を作用する
ものである。In the device in this embodiment, the sliding member 6 has first to second... Third, fourth-fifth-sixth static pressure pockets 21-22-21
2125-26 are provided - these static pressure pockets each apply a predetermined fluid pressure to a predetermined wall surface in the groove 27 of the main body 1.

尚、このとき摺動部材３の各部にも同様に所定の流体圧
が作用する。すなわち−上記第１．第３の静圧ポケット
２ｋ　２３と第２．第４の静圧ボケノ）２１２４とは一
鉛直方向成分が相対向する流体圧を摺動部材乙に作用さ
せる。上記第５の静圧ポケット２５と第６σ）静圧ポケ
ット２６とは、水平方向成分が相対向する流体圧を摺動
部材乙に作用させる。また−第１−第３−第５の静圧ポ
ケット２１２１２５には比較的高い流体圧を作用するよ
うに作動流体が供給され、第２−第４゜第６の静圧ポケ
ノ）２２−　２４−２６には前述の如く静摩擦力が発生
しない最小油膜が確保できる程度の比較的低い流体圧を
作用ずろように作動流体が供給される。かかる静圧案内
手段にて摺動部材３は本体１上を摺動する。At this time, a predetermined fluid pressure is similarly applied to each part of the sliding member 3. That is - the above No. 1. The third static pressure pocket 2k 23 and the second. The fourth static pressure blur 2124 applies a fluid pressure whose vertical component is opposite to the sliding member B. The fifth static pressure pocket 25 and the sixth σ) static pressure pocket 26 apply fluid pressures having opposite horizontal components to the sliding member B. In addition, working fluid is supplied to the first, third, and fifth static pressure pockets 212125 so as to apply a relatively high fluid pressure, and the second to fourth static pressure pockets 212-24- As described above, the working fluid is supplied to 26 so as to apply a relatively low fluid pressure to the extent that a minimum oil film without generating static frictional force is maintained. The sliding member 3 slides on the main body 1 by such static pressure guide means.

摺動部材３を停止位置にて固定するときは一第１−第３
−第５の静圧ポケソｌ−２１２１２５にはそのまま作動
流体の供給を維持しつつ、一方一第２−第４−第６の静
圧ボケノｌ−２１２１２６への作動流体の供給を停止す
る。そうすると−摺動部材６は第４図に示す如く第１−
第３．紀５の静圧ポケソ）２１２３−２５からの流体圧
により本体１に押付けられ、所期の停止位置で保持剛性
の大きな位置ずれσ）生じない確実な保持状態が保たれ
る。When fixing the sliding member 3 at the stop position, the first to third
- While maintaining the supply of working fluid to the fifth static pressure pocket 1-212125, the supply of working fluid to the first, second, fourth, and sixth static pressure pockets 1-212126 is stopped. Then, the sliding member 6 is moved to the first position as shown in FIG.
Third. It is pressed against the main body 1 by the fluid pressure from the static pressure pocket 2123-25, and a reliable holding state is maintained in which no large displacement σ) of the holding rigidity occurs at the expected stop position.

尚−不発明は上述した実施例に限定されるものではなく
１本発明の要旨を逸脱しない範囲で種々変形実施可能で
あることは勿論である。また、一般に、静圧ポケットへ
供給する作動流体は油が適用されるが、他に空気等を適
用してもよい。It goes without saying that the invention is not limited to the embodiments described above, and that various modifications can be made without departing from the gist of the invention. Further, although oil is generally used as the working fluid to be supplied to the static pressure pocket, other fluids such as air may also be used.

〔発明の効果〕〔Effect of the invention〕

以上の説明から明らかなように本発明によれば一本体と
この本体を摺動可能な摺動部材との間に。As is clear from the above description, according to the present invention, there is a structure between a main body and a sliding member capable of sliding this main body.

水平方向成分あるいは鉛直方向成分のうち少なくとも一
方が相対向する少なくとも一対の静圧力を上記摺動部材
に作用する静圧案内手段を介在し−上記相対向する静圧
力のうち一方の静圧力を除去することにより一他方の静
圧力により上記摺動部材を本体に圧接させて固定するの
で、大きな停止保持剛性を維持しつつ摺動部材の所期の
停止位置を的確に保持し得る摺動部材の固定方法を提供
でき、さらに、前記静圧案内手段のうちの一方には本体
と摺動部材との間に静摩擦力を発生しない最小油膜が確
保できる程度でかつ他方の静圧案内手段による静圧力よ
り低い静圧力を作用して摺動部材を案内するので−大き
な支持剛性を維持しつつ高精度な位置決め送りを可能と
した摺動部材の案内方法を提供でき−その結果−適用装
置全体の精度の向上を図ることができるという効果があ
る。interposing a static pressure guide means for acting on the sliding member at least one pair of static pressures in which at least one of the horizontal component and the vertical component faces each other, and removing one of the static pressures of the opposing static pressures; By doing so, the sliding member is pressed against and fixed to the main body by the static pressure of the other side, so that the sliding member can accurately hold the intended stopping position of the sliding member while maintaining a large stop-holding rigidity. The fixing method is such that one of the static pressure guide means is provided with a minimum oil film that does not generate a static friction force between the main body and the sliding member, and the static pressure caused by the other static pressure guide means is maintained. Since the sliding member is guided by applying a lower static pressure, it is possible to provide a method for guiding the sliding member that enables highly accurate positioning and feeding while maintaining large support rigidity.As a result, the overall accuracy of the applied device is improved. This has the effect that it is possible to improve the

【図面の簡単な説明】[Brief explanation of drawings]

第１図及び第２図は本発明の実施例を示すものであり一
第１図は摺動部材が本体上を摺動する際の状態を示す側
断面図−第２図は摺動部材が固定された状態を示す側断
面１ン１．第３図及び第４図は他の実施例を示すもので
あり、第３図は摺動部材が本体上を摺動する際σ）状態
を示す側断面図、第４図は摺動部材が固定された状態を
示す側断面図である。 １・・・・・・本体−３・・・・・・摺動部材−６・・
・・・・第１の静圧ポケット。 ７・・・・・・第２の静圧ポケット− ２１・・・・・・第１の静圧ポケット。 ２２・・・・・・第２の静圧ポケット−２３・・・・・
・第３の静圧ポケット、２４・・・・・・第４の静圧ポ
ケット。 ２５・・・・・・第５の静圧ポケット。 ２６・・・・・・第６の静圧ポケット。1 and 2 show an embodiment of the present invention. FIG. 1 is a side sectional view showing the state when the sliding member slides on the main body. FIG. Side cross section showing the fixed state 1.1. 3 and 4 show other embodiments, FIG. 3 is a side sectional view showing the state σ) when the sliding member slides on the main body, and FIG. It is a side sectional view showing a fixed state. 1...Main body-3...Sliding member-6...
...First static pressure pocket. 7... Second static pressure pocket - 21... First static pressure pocket. 22...Second static pressure pocket-23...
- Third static pressure pocket, 24... Fourth static pressure pocket. 25...Fifth static pressure pocket. 26...6th static pressure pocket.

Claims (2)

【特許請求の範囲】[Claims] （１）本体とこの本体を摺動可能な摺動部材との間に、
水平方向成分あるいは鉛直方向成分のうち少なくとも一
方が相対向する少なくとも一対の静圧力を上記摺動部材
に作用する静圧案内手段を介在し、上記相対向する静圧
力のうち一方の静圧力を除去することにより、他方の静
圧力により上記摺動部材を本体に圧接させて固定するこ
とを特徴とする摺動部材の固定方法。(1) Between the main body and a sliding member that can slide this main body,
At least one of the horizontal component and the vertical component is interposed between a static pressure guiding means that applies at least a pair of opposing static pressures to the sliding member, and removes one of the opposing static pressures. A method for fixing a sliding member, characterized in that the sliding member is brought into pressure contact with the main body and fixed by the static pressure of the other. （２）本体とこの本体を摺動可能な摺動部材との間に、
水平方向成分あるいは鉛直方向成分のうち少なくとも一
方が相対向する少なくとも一対の流体圧を上記摺動部材
に作用する静圧案内手段を介在し、上記静圧案内手段の
うちの一方には本体と摺動部材との間に静摩擦力を発生
しない最小油膜が確保できる程度でかつ他方の静圧案内
手段による静圧力より低い静圧力を作用して摺動部材を
案内することを特徴とする摺動部材の案内方法。(2) Between the main body and a sliding member that can slide this main body,
At least one of a horizontal component and a vertical component is interposed between a static pressure guide means that applies at least a pair of opposing fluid pressures to the sliding member, and one of the static pressure guide means has a main body and a sliding member. A sliding member that guides the sliding member by applying a static pressure that is low enough to ensure a minimum oil film that does not generate static friction between the sliding member and the static pressure that is lower than the static pressure of the other static pressure guide means. How to guide.
JP59158331A 1984-07-28 1984-07-28 Positioning guide fixing device Expired - Lifetime JPH0767655B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59158331A JPH0767655B2 (en) 1984-07-28 1984-07-28 Positioning guide fixing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59158331A JPH0767655B2 (en) 1984-07-28 1984-07-28 Positioning guide fixing device

Publications (2)

Publication Number Publication Date
JPS6138836A true JPS6138836A (en) 1986-02-24
JPH0767655B2 JPH0767655B2 (en) 1995-07-26

Family

ID=15669301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59158331A Expired - Lifetime JPH0767655B2 (en) 1984-07-28 1984-07-28 Positioning guide fixing device

Country Status (1)

Country Link
JP (1) JPH0767655B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01228743A (en) * 1988-03-08 1989-09-12 Toyoda Mach Works Ltd Slidable moving body support and guide device
JPH05104388A (en) * 1991-10-16 1993-04-27 Canon Inc Work holding structure
CN102121500A (en) * 2010-12-24 2011-07-13 东莞市尚正机电科技有限公司 High-load mechanical movement liquid pressure supporting and suspending system
CN103803257A (en) * 2014-03-06 2014-05-21 杨胜华 Hydraulic suspension load-carrying operation device
JP2014108503A (en) * 2012-12-04 2014-06-12 Jtekt Corp Static pressure fluid guiding device and machine tool using static pressure fluid guiding device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58146717A (en) * 1982-02-20 1983-09-01 Okuma Mach Works Ltd Static pressure guide of hybrid system
JPS5917132U (en) * 1982-07-21 1984-02-02 日立精工株式会社 Positioning and fixing device for moving objects using hydrostatic bearings

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58146717A (en) * 1982-02-20 1983-09-01 Okuma Mach Works Ltd Static pressure guide of hybrid system
JPS5917132U (en) * 1982-07-21 1984-02-02 日立精工株式会社 Positioning and fixing device for moving objects using hydrostatic bearings

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01228743A (en) * 1988-03-08 1989-09-12 Toyoda Mach Works Ltd Slidable moving body support and guide device
JPH05104388A (en) * 1991-10-16 1993-04-27 Canon Inc Work holding structure
CN102121500A (en) * 2010-12-24 2011-07-13 东莞市尚正机电科技有限公司 High-load mechanical movement liquid pressure supporting and suspending system
JP2014108503A (en) * 2012-12-04 2014-06-12 Jtekt Corp Static pressure fluid guiding device and machine tool using static pressure fluid guiding device
EP2740952A3 (en) * 2012-12-04 2018-01-31 Jtekt Corporation Hydrostatic guide device and machine tool using the hydrostatic guide device
CN103803257A (en) * 2014-03-06 2014-05-21 杨胜华 Hydraulic suspension load-carrying operation device

Also Published As

Publication number Publication date
JPH0767655B2 (en) 1995-07-26

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