JPS58146717A - Static pressure guide of hybrid system - Google Patents

Static pressure guide of hybrid system

Info

Publication number
JPS58146717A
JPS58146717A JP2713882A JP2713882A JPS58146717A JP S58146717 A JPS58146717 A JP S58146717A JP 2713882 A JP2713882 A JP 2713882A JP 2713882 A JP2713882 A JP 2713882A JP S58146717 A JPS58146717 A JP S58146717A
Authority
JP
Japan
Prior art keywords
static pressure
guide
feed
pressure
pressure fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2713882A
Other languages
Japanese (ja)
Inventor
Toshiaki Watanabe
敏昭 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Okuma Corp
Original Assignee
Okuma Tekkosho KK
Okuma Machinery Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Okuma Tekkosho KK, Okuma Machinery Works Ltd filed Critical Okuma Tekkosho KK
Priority to JP2713882A priority Critical patent/JPS58146717A/en
Publication of JPS58146717A publication Critical patent/JPS58146717A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/02Sliding-contact bearings
    • F16C29/025Hydrostatic or aerostatic
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

PURPOSE:To obtain high rigidity in the direction of back component force at cutting, by using at least a largely loaded upper surface of the guide surface of a guide, which guides a moving bed in a machine tool or the like, as the static pressure guide surface and providing a means eliminating static pressure at a machining feed. CONSTITUTION:When a moving bed 2 is quickly fed, solenoid selector valves 29, 30 are opened to feed pressurized air P to each static pressure pocket 20a, 20b, 21c through flow paths 24a-24c and throttles 23a-23c, and a saddle 20 is lifted by static pressure and placed in an almost contactless condition with each guide surface 1a-1c of a guide 1. Under this condition, a feed screw 31 is driven and rotated to quickly feed the saddle 20. Then at a cutting feed, the valves 29, 30 are closed to place the saddle 20 in a boundary lubricating condition of large frictional resistance. While here at machining for a material of high hardness, a solenoid selector valve 27 is selected to both adjust intensity of oil pressure and open a solenoid selector valve 26, then a pressing cylinder 21 is pressed to the surface 1c by the oil pressure to increase rigidity in the direction of cutting back component force.

Description

【発明の詳細な説明】 本発明は工作機械の静圧ガイドの改良に関する。[Detailed description of the invention] The present invention relates to improvements in static pressure guides for machine tools.

従来工作機械特に精密加工する研削盤のテーブル案内面
、或いは中ぐり盤、!シエングセン責等の重量物を載置
して精密送りをするテーブルの案内面には摩擦抵抗が少
く円滑な送りが与えうるように静圧ガイドが用いられて
いる。 例えばベツド上の案内面にテーブルが載置され
ていて送りねじ31によって駆動される構造の案内面は
$11図のようにガイド1の荷重の大きな上1jli1
&、及び両側のナローガイド面1b、1cに対する移動
台2の内面は前記各面と儀かの隙間を有して財画し、天
井に静圧用ボナツ)2m、左右内面に静圧用ポケット2
b、2ci形威し、この静圧用ポケツFにそれぞれ絞り
3’+ 3b、3cTt介して圧力流体通路4 ’ +
 4 b* 4 cが設けられ圧力源と連通されている
静圧ガイドが構成されている。 しかしこのような静圧
ガイドは摩擦抵抗が少くなる反W7J振動に対する減衰
性が不充分であり、またナローガイド面には僅かの**
*を有するため高硬度の材料加工のとき或いは叉特に精
密を要する加工の力 ときは加工時の背分)肉の剛性が満足できる大きさでな
く問題を存していた。
Conventional machine tools, especially the table guide surface of a grinding machine for precision machining, or a boring machine! A static pressure guide is used on the guide surface of a table on which a heavy object such as a steel plate is placed for precise feeding, so as to provide smooth feeding with little frictional resistance. For example, the guide surface of a structure in which the table is placed on the guide surface on the bed and is driven by the feed screw 31 has a large load on the guide 1 as shown in the figure $11.
&, and the inner surface of the movable platform 2 with respect to the narrow guide surfaces 1b and 1c on both sides is designed with a gap between the above-mentioned surfaces and the inner surface, and a static pressure pocket (2 m) on the ceiling, and static pressure pockets 2 on the left and right inner surfaces.
b, 2ci type, pressure fluid passage 4'+ is connected to this static pressure pocket F through throttle 3'+ 3b, 3cTt, respectively.
4 b * 4 c is provided and a static pressure guide is configured which is in communication with a pressure source. However, such static pressure guides have insufficient damping properties against anti-W7J vibrations that reduce frictional resistance, and also have a slight ** on the narrow guide surface.
*Because of this, when processing high-hardness materials, or particularly when processing forces that require precision, the rigidity of the meat is not sufficiently large, which poses a problem.

従って本発明は上記の欠点を解決するためになされたも
ので、早送り時の負荷を少くするとともに切削時の背分
力方向の高い剛性並びに振動に対する良い減衰性をもた
せた静圧ガイドTt提供しようとするもので、第1の発
明はガイド面のうち少くとも荷重の大きな上面な静圧ガ
イド面とし加工送り時には静圧を消滅させるか又は微弱
にする制御手段を設は早送りと加工送りとで制御手段を
選択的に作用させることを特徴とするものである。
Therefore, the present invention has been made to solve the above-mentioned drawbacks, and aims to provide a static pressure guide Tt that reduces the load during rapid feed, has high rigidity in the direction of back force during cutting, and has good damping performance against vibrations. According to the first invention, at least the upper surface of the guide surface, which has a large load, is a static pressure guide surface, and a control means is provided to eliminate or weaken the static pressure during machining feed. This is characterized in that the control means is selectively activated.

また嬉2の発明はIllの発明に加えて極めて高い背分
力方向の雌性を必要とするときナローガイド面に移動台
を押圧する機構ttけたこと【特徴とするものである。
In addition to the invention of Ill, the invention of Raku 2 is characterized by a mechanism for pressing the movable table against the narrow guide surface when extremely high femaleness in the direction of thrust force is required.

以下本発明を図面にもとづき説明する。 図面では一例
としてNC旋盤のガイドを例示し、第2図で1llI図
の構成と同じ部分は同符号を付しテーブル2はサドル又
はクロススライド20とする。
The present invention will be explained below based on the drawings. In the drawing, a guide for an NC lathe is shown as an example, and in FIG. 2, the same parts as in FIG.

ガイド1のナローガイドの片方の1ijickl対面す
るサドル20の内面には巾方向に離れて好ましくは2個
所に面1・怖に開口するシリンダ20CTt穿設し、こ
−に油漏れ防止のOリンダを外!Nに嵌装したピストン
体の一圧筒21を摺動可能に嵌装するとともにシリンダ
20の底には圧力油路22が開口されている。 油路2
2は油路な開閉する電磁切換弁26並びに例えば強弱の
2通りに選択する電磁切換弁27を介して元圧側と減圧
弁28を介して減圧側の圧力油源と接続されている。 
従ってNCからの指令が出されて電磁切換弁27が選択
され電磁切換弁26が關くと押圧筒21の後面に強又は
弱の圧力油が送られて前端がすp−ガイド面1・を押圧
しサドル20に作用する切削時の背分力に対して剛性を
強める。 また押圧筒21の押圧園にはその中心部に静
圧用ポケット21&が、外周には環状溝211mがそれ
ぞれ削設されていて、流路21cによって連通されてい
る。 そして環状溝21bはすドル20に設けた絞り2
30を介して通路240に連通している。 また麹の静
圧用ポケットに20& −201+ &l:[す251
L ・2311を介して連通した通路24&・24bに
連通している。 油路24&は電磁切換弁29を介しま
た油路2411・246は電磁切換弁30を介して圧力
源と接続されている。 そしてNCからの指令によって
各電磁切換弁29・60が作動し早送りの指令で各静圧
用ポケットに圧力流体、本例では圧力空気が給送され切
削送りの指令で遮断される。 更にナローガイド面1b
・10に対する静圧用ポケット2′5b・23(1への
圧力空気は必要時にのみ供給されるように制御される。
On the inner surface of the saddle 20 facing one side of the narrow guide of the guide 1, cylinders 20CTt are bored in preferably two places apart from each other in the width direction, and each cylinder 20CTt opens toward the surface 1. Outside! A single-pressure cylinder 21 of the piston body is slidably fitted into the cylinder 20, and a pressure oil passage 22 is opened at the bottom of the cylinder 20. Oil road 2
2 is connected to a pressure oil source on the source pressure side and on the pressure reduction side via a pressure reduction valve 28 via an electromagnetic switching valve 26 that opens and closes the oil passage and an electromagnetic switching valve 27 that selects two types, for example, strong and weak.
Therefore, when a command is issued from the NC and the electromagnetic switching valve 27 is selected and the electromagnetic switching valve 26 is turned on, high or low pressure oil is sent to the rear surface of the press cylinder 21, causing the front end to pass through the p-guide surface 1. The rigidity is strengthened against the thrust force acting on the pressing saddle 20 during cutting. Further, a static pressure pocket 21& is cut in the center of the pressure field of the pressure cylinder 21, and an annular groove 211m is cut in the outer periphery, which are communicated by a flow path 21c. The annular groove 21b is a diaphragm 2 provided in the drill bit 20.
It communicates with passage 240 via 30. Also, in the pocket for static pressure of koji, 20& -201+ &l:[su251
It communicates with the passages 24 & 24b which communicated via L 2311. The oil passages 24& are connected to a pressure source via an electromagnetic switching valve 29, and the oil passages 2411 and 246 are connected to a pressure source via an electromagnetic switching valve 30. Then, the electromagnetic switching valves 29 and 60 are actuated by a command from the NC, and pressurized fluid, in this example, pressurized air, is supplied to each static pressure pocket in response to a rapid feed command, and is shut off in response to a cutting feed command. Furthermore, the narrow guide surface 1b
- Static pressure pockets 2'5b and 23 for 10 (pressurized air to 1 is controlled so as to be supplied only when necessary).

今NCよりの早送り指令で電磁切換弁29・!10が開
き圧力空気が流路24&・24b・24(+絞り231
・231・230を介して各静圧用ポケット26&・2
3b・23oに送られるとサドル20は静圧によって浮
かされ各画とは!無接触状態におかれる。 この静圧力
を感知した信号と早送り指令信号とにより図示しないす
−ポモータは送りねじ31を回転してサドル20を早送
りする。 次に切削送りの指令で電磁切換弁29・60
が閉じ圧力空気が遮断され静圧tm滅させて摩擦抵抗の
大きい境界潤滑状態とすると同時に送りねじ31が切削
送りに切換えられてずドル20を切削送りする。 加工
材料が高硬度材料であるときはサドル20には大きな切
削背分力を受けるため切削送りの指令と同時に材料指定
により電磁切換弁27が選択され用力油の強弱が決めら
れるとともに電磁切換弁26が闘かれ油路22を介して
シリンダ20(lに圧力油を送り押圧筒21を押し出し
ナローガイド面1at拝圧してfドル20がナローガイ
ド面1b・1Cを挾持する。 このため切削背分力方向
の剛性が必要なる大きさに強められる。
Now, with a fast forward command from the NC, the electromagnetic switching valve 29.! 10 opens and pressure air flows through the flow paths 24 & 24b and 24 (+ throttle 231
・Each static pressure pocket 26 & 2 via 231 and 230
When sent to 3b and 23o, the saddle 20 is lifted by static pressure and each image is! Be left in a no-contact state. Based on the signal detected by this static pressure and the fast-feeding command signal, a not-shown seat motor rotates the feed screw 31 to rapidly feed the saddle 20. Next, the solenoid switching valves 29 and 60 are
is closed, the pressure air is cut off, the static pressure tm is reduced, and a boundary lubrication state with large frictional resistance is created.At the same time, the feed screw 31 is not switched to cutting feed and the dollar 20 is fed by cutting. When the material to be processed is a high-hardness material, the saddle 20 receives a large cutting thrust force, so the electromagnetic switching valve 27 is selected according to the material specification at the same time as the cutting feed command, and the strength of the utility oil is determined. is fought, pressure oil is sent to the cylinder 20 (l) via the oil passage 22, the press cylinder 21 is pushed out, the narrow guide surface 1at is pressed, and the f dollar 20 clamps the narrow guide surfaces 1b and 1C. The directional stiffness is increased to the required magnitude.

次にII2の実施例を示す1113.第4Hにおいては
サドル20にす田−Xイドを挾持する機構を設けず、ナ
ローガイドwjj1b・1@It)Ill関【極力少く
して背分力方向の剛性を高めるようになし面10&:対
してサドル20偏にジブ又はローラガイド若しくは&−
にガイド25111閏調整可能に組込むとともにナロー
ガイドail・1@に沿って静圧用lケラ)20aより
の空気を噴出する溝20直を縦方向に削設しておき、早
送り時には静圧を働かせ切削送り時には静圧1e生しな
いように圧力空気を遮断することは同じである。 この
ものは主として早送り時の負荷を小さくするものである
Next, 1113. which shows an example of II2. In the 4th H, the saddle 20 is not provided with a mechanism for holding the suta-X side, and the narrow guide wjj1b.1@It)Ill. jib or roller guide or &-
The guide 25111 is built in so that it can be adjusted in increments, and along the narrow guide ail 1@, grooves 20 straight for blowing out air from the static pressure groove 20a are cut in the vertical direction, and static pressure is applied during rapid cutting. It is the same that pressurized air is shut off so that static pressure 1e does not occur during feeding. This is primarily intended to reduce the load during rapid forwarding.

更に第1,112夷篇例において静圧用の圧力空気とと
もに微量の潤滑油を補給した空気を混用すれば効率的な
摺動画の潤滑が得られ、鎗のたれ流しによる損失並びに
汚れを防止することができる。
Furthermore, in the example of the 1,112th edition, if air supplemented with a small amount of lubricating oil is used in combination with the compressed air for static pressure, efficient lubrication of the sliding motion can be obtained, and loss and dirt caused by dripping of the spear can be prevented. can.

更にまた静圧用の圧力空気の大きさを電磁切換弁によっ
て選択できるようにして静圧t−W4滅させず徽翳にす
ることも可能である。 この場合は切削送り時にも潤滑
油を混合して焼付き等【予防することもできる。 なお
静圧を消滅若しくは微Iii&:する手段としては静圧
用ポケットの圧力【開放し弱める制御手段を設けること
も可能である。
Furthermore, the magnitude of the pressure air for static pressure can be selected by an electromagnetic switching valve, so that the static pressure t-W4 can be kept unchanged. In this case, it is also possible to mix lubricating oil during cutting and feeding to prevent seizure, etc. As a means for eliminating or reducing the static pressure, it is also possible to provide a control means for releasing and weakening the pressure in the static pressure pocket.

以上詳述したように本発明は制御手段によって少くとも
荷重の大きな上面に早送り時は静圧が作用し切削送り時
には静圧を作用させないか微弱とする静圧ガイドとなし
たので早送り時の負N【4以上大巾に減少しえて移動台
の高連送り化に対してす−ボモータの客員t4IjiI
Il増加させる必要をなくすることができる。 また切
削送り時の背分力方向の剛性が高められるとともに振動
に対する減衰性が付与されるため精密加工遊びに精密送
りができ加工面の仕上が良くなり製品々質【向上させる
ことができ、更に移動台をすp−ガイドを挾持する*W
を設けたので高硬度材料切削時の大きな背分力に対して
も充分な剛性かえられる特徴を有する。
As described in detail above, the present invention uses a control means to create a static pressure guide in which static pressure is applied at least to the upper surface with a large load during rapid traverse, and no or weak static pressure is applied during cutting feed. N [4 or more widths can be reduced and the moving platform can be moved at high speeds.
It is possible to eliminate the need to increase Il. In addition, the rigidity in the direction of back force during cutting feed is increased, and vibration damping properties are provided, allowing precision feed to be performed during precision machining play, improving the finish of the machined surface, and improving product quality. Hold the moving platform p-guide *W
This feature provides sufficient rigidity even against large thrust forces when cutting high-hardness materials.

【図面の簡単な説明】[Brief explanation of the drawing]

@1図は従来知られている静圧ガイド説明断面図 第2図は本発明の静圧ガイド説明断面図第3図は第2の
実施例の説明断面図 第4図はts2実施例の斜視図である。 1・・・ガイド  1b・1C・・・ナローガイド2−
20 ・−移動台  2m −2b −20−2oa2
0b・200・・・静圧用ポケット 21・・・押圧筒  25・・・ジブ又は転ガリガイド
  26・27・29・60・・・電磁切換弁組 21
@Figure 1 is a sectional view of a conventionally known static pressure guide. Figure 2 is a sectional view of a static pressure guide of the present invention. Figure 3 is a sectional view of the second embodiment. Figure 4 is a perspective view of the ts2 embodiment. It is a diagram. 1...Guide 1b/1C...Narrow guide 2-
20 ・-Moving platform 2m -2b -20-2oa2
0b・200... Static pressure pocket 21... Press cylinder 25... Jib or rolling gully guide 26, 27, 29, 60... Solenoid switching valve assembly 21
A

Claims (1)

【特許請求の範囲】 (1)加工物或いは刃物台等を載置して駆動装置によっ
て送られる移動台を案内する工作機械のlイドにおいて
、少くとも最大荷重を受けるlイド面に対する前記移動
台の摺動向に絞りを介して圧力流体源と連通される静圧
用ポケットを設は圧力流体の供給によって該lケツシ内
に発生する静圧を加工送りの指令によって消滅又は微弱
にする制御手段を設けて、早送り時と加工送り時に前記
静圧を選択的に作用させるようになしたことrtII黴
とするバイブリフト方式の静圧ガイド。 (り圧力流体は微量の潤滑餉を混合した空気である特許
請求の範m第1項記載のバイブリフト方式の静圧ガイド (8)加工物を載置して駆動装置によって送られる移動
台【案内する工作機械のガイドにおいて、少くとも最大
荷重を受けるガイド面&:対する前記移動台の摺動画に
絞り【介して圧力流体源と1!!通される静圧用ポケツ
)を設け、圧力流体の供給によって該ポケット内に発生
する静圧を加工送りの指令によって消滅又は微ii&:
する制御手段を設け、前記ガイドの一部であるナローガ
イド側に対する前記移動台側に圧力流体によって作用す
る抑圧手段を設け、早送り時と加工送り時に前記静圧の
選択的に作用させるとともに必要に応じて加工時の剛性
を高めるように前記押圧手段を作用させること七特徴と
するハイブリット方式の静圧ガイド。 (4)圧力流体は微量の濶滑餉七混合した空気であるr
Il#許請求の範l#Il第6項記載のハイブリット方
式の静圧ガイド。
[Scope of Claims] (1) In the id of a machine tool that guides a moving pedestal on which a workpiece or a turret or the like is placed and is sent by a drive device, the id of the machine tool is placed at least on the id surface that receives the maximum load. A pocket for static pressure is provided in the sliding movement of the cage and communicated with a source of pressure fluid through a restriction, and a control means is provided for eliminating or weakening the static pressure generated within the cage by supplying pressure fluid in accordance with a processing feed command. The static pressure guide is a vibration lift type static pressure guide in which the static pressure is applied selectively during rapid feed and machining feed. (The pressure fluid is air mixed with a small amount of lubricant. In the guide of the machine tool to be guided, at least the guide surface receiving the maximum load is provided with an aperture (static pressure pocket passed through the pressure fluid source and 1!!) in the sliding motion of the moving table against which the pressure fluid is supplied. The static pressure generated in the pocket due to feeding is eliminated or slightly reduced by the processing feed command.
A control means is provided to act on the movable table side with respect to the narrow guide side which is a part of the guide, and a suppressing means is provided which acts on the movable table side with a pressure fluid, so that the static pressure is selectively applied during rapid feed and machining feed, and when necessary. 7. A hybrid type static pressure guide, characterized in that the pressing means acts so as to increase the rigidity during machining accordingly. (4) Pressure fluid is air mixed with a minute amount of water.
Il#Claims I#Il The hybrid type static pressure guide according to claim 6.
JP2713882A 1982-02-20 1982-02-20 Static pressure guide of hybrid system Pending JPS58146717A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2713882A JPS58146717A (en) 1982-02-20 1982-02-20 Static pressure guide of hybrid system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2713882A JPS58146717A (en) 1982-02-20 1982-02-20 Static pressure guide of hybrid system

Publications (1)

Publication Number Publication Date
JPS58146717A true JPS58146717A (en) 1983-09-01

Family

ID=12212685

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2713882A Pending JPS58146717A (en) 1982-02-20 1982-02-20 Static pressure guide of hybrid system

Country Status (1)

Country Link
JP (1) JPS58146717A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6138836A (en) * 1984-07-28 1986-02-24 Citizen Watch Co Ltd Fixing/guiding method of sliding member
JPS63150128A (en) * 1986-12-16 1988-06-22 Yamazaki Mazak Corp Guiding control method for parts
JPH01138533U (en) * 1988-03-09 1989-09-21
JPH027931U (en) * 1988-06-29 1990-01-18
JPH0295529A (en) * 1988-09-30 1990-04-06 Okuma Mach Works Ltd Static pressure guide method for movement body
WO1998030809A1 (en) * 1995-12-23 1998-07-16 Unova U.K. Limited Improved hydrostatic bearings
JP2010180891A (en) * 2009-02-03 2010-08-19 Nobufumi Nakamura Sliding mechanism
CN102632398A (en) * 2012-04-25 2012-08-15 北京工业大学 High-precision and high-rigidity closed type aerostatic guideway

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5143983B2 (en) * 1973-12-08 1976-11-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5143983B2 (en) * 1973-12-08 1976-11-25

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6138836A (en) * 1984-07-28 1986-02-24 Citizen Watch Co Ltd Fixing/guiding method of sliding member
JPS63150128A (en) * 1986-12-16 1988-06-22 Yamazaki Mazak Corp Guiding control method for parts
JPH01138533U (en) * 1988-03-09 1989-09-21
JPH027931U (en) * 1988-06-29 1990-01-18
JPH0295529A (en) * 1988-09-30 1990-04-06 Okuma Mach Works Ltd Static pressure guide method for movement body
WO1998030809A1 (en) * 1995-12-23 1998-07-16 Unova U.K. Limited Improved hydrostatic bearings
JP2010180891A (en) * 2009-02-03 2010-08-19 Nobufumi Nakamura Sliding mechanism
CN102632398A (en) * 2012-04-25 2012-08-15 北京工业大学 High-precision and high-rigidity closed type aerostatic guideway

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