JPS6138643A - Dust collector - Google Patents

Abstract

PURPOSE:To increase the dust collecting effect and to prolong the life of dust collecting part in a dust collector by providing the dust collecting part, the first moistening part of gas suction side, the second moistening part of gas discharge side and a blast part. CONSTITUTION:The gas contg. fine particles which is sent from a suction pipe 2 is electrified in an ionization part 309 and the water vapor of pure water fed from the first moistening part 301 is mixed with the gas and the joining of water molecule to the fine particles is quickly accelerated and the quantity of the fine particles caught by a dust collecting part 303 becomes remarkably much and the dust collecting effect is made high. The water vapor of pure water fed from the second moistening part 305 is mixed with the gas which has been passed through the dust collecting part and the gas is passed through a blower 307 and sent to a clean chamber 1 and diffused.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a dust collector that removes dust, metal ions, etc. from gas.

(Prior Art) Conventionally, in fields such as electronic industry, mechanical industry, and chemical industry, dust collectors have been used to remove fine particles such as dust and metal ions from indoor gases.

For this reason, in the past, filters were used as dust collectors (usually with a capture rate of 99°9995% for fine particles with particle diameters of 0' and 171 m).
A so-called HEPA filter) is used to remove dust and metal ions (metal ions are generated in large quantities especially when processing metal with laser processing) in the gas, by passing the air flow through the filter and placing it on the filter. This was done by trapping dust and metal ions.

(Problems with conventional technology) However, in recent years, among fine particles in gas, particle size 0
, 1 pm or less is required to be removed by a dust collector, and restrictions on the density of fine particles passing through the dust collector are becoming stricter. Not only is it difficult to capture fine particles, but also the density of fine particles passing through the dust collector cannot satisfy recent demands for dust collectors.

In addition, with conventional filter-based dust collectors, fine particles captured by the filter remain on the filter.
If the filter is used for a long time, the filter will become clogged, and the particles that have been supplemented by the filter may peel off and be scattered again, which not only worsens the condition of capturing particles, but also causes the filter to become clogged. The lifespan is short,
In addition, the filter had to be replaced in order to dispose of the trapped particles.

(Object of the invention) The object of the present invention is to reduce the particle size of fine particles from about the size of a water molecule to O,
It is an object of the present invention to provide a dust collector capable of effectively removing particles of about lpLm.

Another object of the present invention is that even if the dust collector is used for a long time, the state of capturing fine particles does not deteriorate, and the life of the dust collecting part of the dust collector can be extremely extended, and the trapped fine particles can be easily removed. The purpose of the present invention is to provide a dust collector that can discharge dust.

Still another object of the present invention is to provide a dust collector that can effectively remove germs from gas.

(Summary of the Invention) The present invention includes a dust collection section 303 that collects and removes particles combined with water vapor in a gas, and a dust collection section 303 that is provided on the gas suction side of the dust collection section and supplies water vapor into the gas to be inhaled. No. 1 humidifying section 301
, a second humidifying section 305 that is provided on the gas discharge side of the dust collecting section and supplies water vapor to the gas after dust collection, and a blowing section 307 that circulates the gas to the dust collecting section. The present invention also provides a dust collecting section 303 that collects and removes particles combined with water vapor in the gas, and a dust collecting section 303 that is provided on the gas suction side of the dust collecting section to remove water vapor from the inhaled gas. a first humidifying section 301 that supplies a gas, and an ionizing section 3 that is provided on the gas suction side of the first humidifying section and ionizes particles in the gas.
09, a second humidifying section 305 that is provided on the gas discharge side of the dust collecting section and supplies water vapor to the gas after dust collection, and a blowing section 307 that circulates the gas to the dust collecting section. Further, the present invention provides a first dust collecting section 303 that collects and removes particles combined with water vapor in the gas, and a first dust collecting section 303 that is provided on the gas suction side of the first dust collecting section. A first humidifying section 301 that supplies water vapor into the gas to be inhaled, an ionizing section 309 that is provided on the gas suction side of the first humidifying section and ionizes particles in the gas, and a first dust collecting section. A second humidifying section 305 is provided on the gas discharge side of the ionization section and supplies water vapor to the gas after dust collection; A dust collecting section 313, a third humidifying section 311 that is provided on the gas suction side of the second dust collecting section and supplies water vapor into the inhaled gas, and a third humidifying section 311 that supplies water vapor to the first and second dust collecting sections. Air blowing unit 30 for circulation
7 is provided.

(Example) The present invention will be explained in detail below.

FIG. 1 is a schematic diagram showing an embodiment of the present invention, in which 1 is a lean room where it is necessary to remove dust, etc., 2 is a suction pipe that blows gas from the clean room 1 to a dust collector 3 according to the present invention;
Reference numeral 4 denotes an exhaust pipe for blowing the gas after dust collection from the dust collector 3 into the clean room 1.

301 is a first humidifying section that blows water vapor (H20 gas) into the suction pipe 2 and mixes the water vapor with gas from the clean room 1; 303 is a dust collection section that collects dust, etc. in the gas; 305 is a The second humidifying section '-307 that mixes water vapor into the gas after dust collection is a blowing section that circulates the gas.

Each component within the dust collector 3 will be described in detail below.

The first humidifying section 301 and the second humidifying section 305 generate pure water vapor and mix the vapor into gas, and various devices can be considered as the steam generating device. For example, there are devices that insert an electric heater into a water tank, devices that introduce dry heated steam from a boiler, devices that generate steam using ultrasonic vibrations, and infrared steam generators.

The device constituting the dust collecting section 303 may be any device that separates water vapor in gas from gas, such as a known cooler (baffle type cooler, fin coil type cooler, etc.).
A shower device using cooled pure water, salt water, etc., an eliminator that separates gas and liquid, or an appropriate combination of these devices are used. Note that when a device that cools the gas itself, such as a cooler or a shower device, is used, as shown in FIG. It is preferable to provide a heating section 304 made of known heating means.

The blower section 307 is configured with various known devices for blowing gas, such as an electric fan.

Next, the present invention will be explained in detail.

The gas that has passed through the dust collecting section 303 is mixed with pure water vapor by the second humidifying section 305, and the gas containing this water vapor is sent into the clean room 1 through the blowing section 307 and diffused. Here, the molecule of H2O is composed of two hydrogen atoms and one oxygen molecule, and its structure is polarized as shown in FIG. The distance between the two poles of H20 molecules is very large compared to other molecules, and in liquids, H20
As shown in Figure 4, 20 molecules are strongly attracted to each other by hydrogen bonding forces. If such H20 molecules are diffused into space, the H20 molecules
0 molecules are shown in Figures 5(a) and (b).

As shown in (C), it is strong against charged or polarized fine particles 7 in the gas and is connected with a ronca. Figure 5 (a
) shows a state in which H20 molecules bond around the ten-charged fine particles 7, forming ten-sized fine particles that are one size larger as a whole. FIG. 5(b) shows a state in which H20 molecules are bonded around the negatively charged fine particles 7, resulting in a slightly larger negative fine particle as a whole. Figure 5 (
In C), H is formed around the fine particle 7 polarized to
This shows a state in which 20 molecules combine to form a polarized fine particle that is one size larger as a whole. Since the surface area of the fine particles to which H2o molecules are bound increases, the binding of H20 molecules becomes more and more likely to occur.

In other words, if the fine particles floating in the gas in the clean room l are charged or polarized, H20 molecules will combine with these fine particles as nuclei, and in this way H20 molecules will combine with these fine particles as nuclei.
Fine particles made up of 20 molecules also combine with each other to form larger particles (this is the same process in which water vapor in the atmosphere forms clouds and rain using fine particles as cores).

However, when pure water vapor is sent into the clean room 1 by the second humidifying unit 305, fine particles and H20
It is thought that those with bound molecules do not grow as much, and that there are also fine particles in which all <H2O is not bound.

In addition, due to work in clean room 1 or dust collection efficiency,
It is undesirable for the water vapor to contain impurities, and as the number of H20 molecules in the water vapor generated from the second humidifying section 305 increases, the frequency of bonding between H20 molecules and fine particles in the clean room 1 increases. , H2 at the same humidity
In order to increase the number of zero molecules, it is preferable that the H20 molecules be water vapor in a single state as much as possible, that is, water vapor in a complete gas state with high thermal energy. For this reason, the second humidifying unit 305 is one of the above-mentioned various water vapor generating devices that irradiates electromagnetic waves in the near-infrared region to the ice surface in the water tank to evaporate water from the surface in a short time without causing boiling in the water. , Habo 100%
It is possible to obtain pure water dry heating steam with a similar ratio, and compared to the other various steam generators mentioned above, various substances and gases other than H20 are less likely to be ejected together with the steam, and the steam generated is saturated steam. Therefore, an infrared steam generator is most suitable because it is difficult to condense after mixing with gas and can maintain a perfect gas state.

Next, the gas containing fine particles bound to H20 molecules and fine particles not bound to H20 molecules in the clean room 1 is introduced into the dust collector 3 from the suction pipe 2. The introduced gas is further mixed with pure water vapor generated from the first humidifying section 301 (as the steam generating device, an infrared steam generator is most preferable as in the explanation of the second humidifying section 305 above). In clean room 1, many of the particles that did not bond with H20 molecules bonded with H20 molecules, and some of the particles that had H20 molecules bonded with them were also exposed to H2.
The H20 molecules combine to expand their particle size, and the gas containing these fine particles and H20 molecules is further sent to the dust collecting section 303.

The gas sent to the dust collection section 303 collects fine particles and H20 there.
This effect is explained below.

That is, the temperature of the gas sent into the cooler or shower device that constitutes the dust collecting section 303 is lower than the dew point of the gas. Then, this gas contains fine particles (H2
Condensation occurs with the particles (including fine particles not bonded to molecules) as the core, which becomes water droplets and adheres to the surface of the heat absorption plate of the cooler or the surface of pure water or salt water. The water droplets containing fine particles are then discharged and removed through the drain of the cooling device or the drain of the shower device. This removes fine particles such as dust and metal ions in the gas. Here, Figure 2 ・
When the heating section 304 is provided after the dust collection section 303 as shown in Fig. 3, the cooling section 304 can rapidly heat the cooled gas after fine particles in the gas have been removed, and the humidity of the gas becomes low. Then, the ability to receive the pure water vapor supplied by the second humidifying section 305 increases.

Note that even when the dust collecting section 303 is configured with an eliminator that separates gas and liquid, water droplets attached to the surface of the eliminator can be discharged and removed to the outside through the drain.

In addition, when the dust collecting section 303 is configured by various combinations of the above-mentioned cooler, shower device, and eliminator, the dust collecting section 303
The dust collection effect of 03 is further increased.

Note that the blower section 307 is the exhaust pipe 4 in this embodiment.
Although it is provided on the side, it goes without saying that the air blowing section 307 may be provided on other parts of the dust collector.

Moreover, this dust collector may be provided with a plurality of dust collectors 3 shown in FIG. 1, and if configured in this way, the dust collection effect will be further increased.

FIG. 6 is a schematic diagram showing a dust collector improved from the invention described in the above embodiment, and has a greater dust collection effect than the dust collector shown in FIG.

In the figure, the same parts as in FIG. 1 are denoted by the same reference numerals, and detailed explanation thereof will be omitted.

In the figure, 1 is a clean room, 2 is an intake pipe, 3 is a dust collector, 4 is an exhaust pipe, 301 is a first humidifying section, 303
305 is a dust collecting section, 305 is a second humidifying section, and 307 is a blowing section, which are the same as the dust collecting device shown in FIG. 309 is an ionization section, and fine particles in the gas passing through the ionization BB 309 are ionized. FIG. 7 shows this ionization section 30.
FIG. 9 is a diagram illustrating an embodiment of No. 9 in detail. In the figure, reference numeral 8 denotes a discharge electrode made of, for example, a tungsten wire, to which a high voltage (for example, 9 KV) is applied. 9 is the earth pole,
A discharge is caused between the discharge electrode 8 and the discharge electrode 8. And this discharge electrode 8.
When gas passes between the earth electrodes 9 (in the direction of arrow A), -
Alternatively, the neutral fine particles themselves become charged to 10 (the amount of charge of fine particles that are already 10 charged also increases).

That is, fine particles that have bound to H20 molecules sent from the suction pipe 2 and fine particles that have not yet bound to H20 molecules are highly charged, and pure water is added to the gas containing such fine particles from the first humidifying section 301. When water vapor is mixed, the binding of H20 molecules to the fine particles is rapidly promoted, increasing the particle size.

The amount of fine particles captured by the dust collection section 303 becomes extremely large, and the dust collection effect increases.

It goes without saying that a negative high voltage may be applied to the discharge electrode 8 of the ionization section, and in this case, the fine particles in the gas will be negatively charged.

FIG. 8 is a schematic diagram showing a dust collector which is a further improvement of the invention shown in FIG. 6 above.

In the figure, the same parts as in FIG. 6 are designated by the same reference numerals, and detailed explanation thereof will be omitted.

In the figure, 1 is a clean room, 2 is an intake pipe, 3 is a dust collector, 4 is an exhaust pipe, 301 is a first humidifying section,
303 is a dust collection part (first dust collection part), 305 is a second humidification part, 307 is a ventilation part, 309 is an ionization part, and the sixth
This is the same as the dust collector shown in the figure. 311 is a third humidifying section, and its water vapor generating device is the first humidifying section 301.
Like the second humidifying section 305, an infrared steam generator is most preferable. A second dust collecting section 313 uses a cooler, a shower device, an eliminator, etc., or a suitable combination of these devices, like the first dust collecting section 303.

Since a third humidifying section 311 and a second dust collecting section 313 are newly provided on the gas suction side of the dust collector shown in FIG. 6, the dust collecting effect is further increased.

In each of the above embodiments, the case where the dust collector is used in a clean room is shown, but the present invention is not limited to this, and can be applied to a normal indoor dust collector or when outside air is taken into the room. The present invention can be used as a dust collector in various other cases where dust collection is required, such as when used as a dust collector.

Further, since the dust collector according to the present invention has an air conditioning function, it is advantageous to incorporate it into a general air conditioner.

(Effects of the Invention) As described above in detail, according to the present invention, the particle size of the fine particles ranges from about the size of a water molecule (Habo Q, 0004 gm) to about 0.5 gm.
Even particles with a particle size of about 1 pm can be expanded and effectively removed by H20 molecules, and thereby bacteria can also be effectively removed from the gas.

Furthermore, according to the present invention, compared to a conventional dust collector using a filter, even if the dust collector is used for a long time, the fine particles collected in the dust collector are easily collected together with liquid water. It can be discharged without deteriorating the state of capturing fine particles, and the life of the dust collection part of the dust collection device can be extremely extended.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram showing a dust collector according to the present invention, FIG. 2 is a diagram showing an example of a configuration in which a heating section 304 is provided after the dust collecting section 303 shown in FIG. 1, and FIG. Figure 4 shows the shape of water molecules, Figure 4 shows the state of attraction between water molecules, Figure 5 (
a), (b), and (c) are diagrams showing the bonding state of fine particles and water molecules, Figure 6 is a schematic diagram showing a dust collector improved from the invention explained in Figure 1, and Figure 7 is a diagram showing the state of bonding between fine particles and water molecules. Ionization section 3 shown in Figure 6
FIG. 8, which is a diagram illustrating one embodiment of No. 09 in detail, is a schematic diagram showing a dust collector that is a further improvement of the invention shown in FIG. 6 above. 1-.Clean room 2-.Suction pipe 3.φ dust collector 301-.First humidifying section 303..Dust collecting section (first dust collecting section) 305..Second humidifying section 307..Blower section 4...Exhaust pipe 304...Heating section 8...Discharge electrode 9φ/earth electrode 309...Ionization section 311...Third humidifying section 313...Second dust collecting section

Claims (3)

[Claims] (1) a dust collecting section that collects and removes particles combined with water vapor in the gas; a first humidifying section that is provided on the gas suction side of the dust collecting section and supplies water vapor into the gas to be inhaled; A dust collector having a second humidifying part provided on the gas discharge side of the dust collecting part and supplying water vapor to the gas after dust collection, and a blowing part circulating the gas in the dust collecting part. (2) a dust collecting section that collects and removes particles combined with water vapor in the gas; a first humidifying section that is provided on the gas suction side of the dust collecting section and supplies water vapor into the inhaled gas; an ionization section that is provided on the gas suction side of the first humidification section and ionizes particles in the gas; a second humidification section that is provided on the gas discharge side of the dust collection section that supplies water vapor to the gas after dust collection; , and a blowing section that circulates gas through the dust collecting section. (3) A first dust collecting section that collects and removes particles combined with water vapor in the gas, and a first dust collecting section that is provided on the gas suction side of the first dust collecting section and supplies water vapor into the inhaled gas. a humidifying section,
an ionization section that is provided on the gas suction side of the first humidifying section and ionizes particles in the gas; and a second ionization section that is provided on the gas discharge side of the first dust collection section that supplies water vapor to the gas after dust collection. a second dust collecting part provided on the gas suction side of the ionization part to collect and remove particles combined with water vapor in the gas; A dust collector having a third humidifying section that supplies water vapor into the gas to be collected, and a blowing section that circulates the gas to the first and second dust collecting sections.