JPS6138575U - Probe position adjustment device - Google Patents

Probe position adjustment device

Info

Publication number
JPS6138575U
JPS6138575U JP12368684U JP12368684U JPS6138575U JP S6138575 U JPS6138575 U JP S6138575U JP 12368684 U JP12368684 U JP 12368684U JP 12368684 U JP12368684 U JP 12368684U JP S6138575 U JPS6138575 U JP S6138575U
Authority
JP
Japan
Prior art keywords
mounting plate
probe
probe mounting
lead
horizontal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12368684U
Other languages
Japanese (ja)
Inventor
浩二 星
友由 真庭
Original Assignee
日立電子エンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立電子エンジニアリング株式会社 filed Critical 日立電子エンジニアリング株式会社
Priority to JP12368684U priority Critical patent/JPS6138575U/en
Publication of JPS6138575U publication Critical patent/JPS6138575U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案のプローブ位置調節装置の一実施例にお
ける垂直断面図、第２図は同じく平面因である。 第３図は薄形ＩＣとプローブとの斜視図、第４図は従来
用いられｊＸＹθテーブルの模式図である。 １・・・薄形ＩＣ， ｌａ・・・パッケージ、１ｂ・・
・リード、２・・・プローブ、３．３’・・・プローブ
取付板、３ａ・・・フランジ状支承板、３ａ−１・・・
バカ孔、３ｂ・・・本体部、４・・・Ｘステージ、５・
・・Ｙステージ、６・・・θステージ、７・・・枠部材
、７ａ・・・雌ネジ孔、７ｂ・・・雌ネジ孔、８・・・
セットボルト、９・・・調節ネジ、１０・・・プローブ
カード。FIG. 1 is a vertical sectional view of an embodiment of the probe position adjustment device of the present invention, and FIG. 2 is a plan view thereof. FIG. 3 is a perspective view of a thin IC and a probe, and FIG. 4 is a schematic diagram of a conventionally used jXYθ table. 1... Thin IC, la... Package, 1b...
・Lead, 2...Probe, 3.3'...Probe mounting plate, 3a...Flanged support plate, 3a-1...
Baka hole, 3b...Main body, 4...X stage, 5.
...Y stage, 6...θ stage, 7...frame member, 7a...female screw hole, 7b...female screw hole, 8...
Set bolt, 9...adjustment screw, 10...probe card.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 薄形ＩＣのリードに接触して導通するプローブを植設し
たプローブ取付板を水平に支承し、このプローブ取付板
を水平面内で移動、回転させて前記プローブの先端をＩ
Ｃリードに対向せしめるように調節する装置において、
前記のブロー取付板を長方形に構成するとともにこのプ
ローブ取付板に水平な支承部材を固着し、上記の支承部
材を介してプローブ取付板を水平に支承する水平な長方
形の枠状部材を構成し、かつ、上記長方形の枠状部材の
各辺に直交せしめて２本ずつ螺合貫通した調節ボルトの
先端をそれぞれプローブ取付板の−側面に当接せしめる
とともに、前記枠状部材とプローブ取付板との水平面内
における相対的位置を固定・解除し得る手段を設けたこ
・とを特徴とする、プローブ位置の調節装置。A probe mounting plate in which a probe is implanted that contacts the lead of a thin IC for conduction is horizontally supported, and the probe mounting plate is moved and rotated in a horizontal plane to attach the tip of the probe to an I.
In a device that adjusts the C lead to face the C lead,
The blow mounting plate is configured in a rectangular shape, and a horizontal support member is fixed to the probe mounting plate to form a horizontal rectangular frame member that horizontally supports the probe mounting plate via the support member, In addition, the tips of two adjustment bolts screwed through each side of the rectangular frame-like member are brought into contact with the negative side of the probe mounting plate, and the contact between the frame-like member and the probe mounting plate is A device for adjusting the position of a probe, comprising means for fixing and releasing the relative position in a horizontal plane.
JP12368684U 1984-08-14 1984-08-14 Probe position adjustment device Pending JPS6138575U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12368684U JPS6138575U (en) 1984-08-14 1984-08-14 Probe position adjustment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12368684U JPS6138575U (en) 1984-08-14 1984-08-14 Probe position adjustment device

Publications (1)

Publication Number Publication Date
JPS6138575U true JPS6138575U (en) 1986-03-11

Family

ID=30682432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12368684U Pending JPS6138575U (en) 1984-08-14 1984-08-14 Probe position adjustment device

Country Status (1)

Country Link
JP (1) JPS6138575U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110649A (en) * 1986-10-28 1988-05-16 Tokyo Electron Ltd Prober
JPH02307075A (en) * 1989-05-23 1990-12-20 Mitsubishi Electric Corp Inspection device for electronic component
JP2009545753A (en) * 2006-08-04 2009-12-24 フォームファクター， インコーポレイテッド Adjustment mechanism

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125639A (en) * 1979-03-23 1980-09-27 Hitachi Ltd Inspection apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55125639A (en) * 1979-03-23 1980-09-27 Hitachi Ltd Inspection apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110649A (en) * 1986-10-28 1988-05-16 Tokyo Electron Ltd Prober
JPH02307075A (en) * 1989-05-23 1990-12-20 Mitsubishi Electric Corp Inspection device for electronic component
JP2009545753A (en) * 2006-08-04 2009-12-24 フォームファクター， インコーポレイテッド Adjustment mechanism

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