JPS6138546A - Testing device for heat atmosphere by scattering - Google Patents

Abstract

PURPOSE:To take a test without consuming any heat medium by scattering a low-temperature and a high-temperature heat medium alternately over a sample located in a tedt chamber. CONSTITUTION:High-temperature liquid is sucked by a pump 45 and scattered over the located sample 1 from the scattering port 21 of a test chamber 2 through a valve 42 to hold the sample 1 at high temperatures. Then, the high- temperature liquid returns to a high-temperature tank 4 through a valve 43 and a heater 46 is controlled with a signal from a temperature detection terminal 27 in the test chamber 2 to hold the high-temperature liquid at a specific temperature. Thus, low-temperature liquid is scattered over the sample 1 in the test chamber 2 from the scattering port 21 through a pump 35 and a valve 32 to hold the sample 1 at low temperatures. Then, the low-temperature liquid returns to a low-temperature tank from a discharge port through a valve 33 and its temperature is controlled with a signal from the temperature detection terminal 27. Thus, a test is taken without allowing the heat media to contact the outside air, so the heat media are neither radiated nor consumed.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention aims to improve the durability, strength, and strength of semiconductors, printed circuit boards, electronic components, precision instruments, ceramics, plastics, and general materials against thermal stress and temperature cycles. We purchased this product so that we can conduct tests on the operation, measurement, etc. of small volumes without moving the sample, regardless of whether the heating medium used is liquid or gas.
By spraying directly onto the sample, the sample undergoes heat exchange before the walls of the test chamber, significantly shortening the time it takes to return to temperature.
Furthermore, even when a liquid (e.g. Fluorinert, Silifane oil, etc.) is used as a heating medium, the thermal atmosphere test by spraying is configured to allow operation without wasting f4 by discharging or dripping the expensive heating medium to the outside. It is related to the device.

Traditionally, in order to conduct thermal shock tests or temperature cycle tests on semiconductors, small parts, or materials, the test is carried out by storing the sample in a cage or frame and moving it from a low-temperature chamber to a high-temperature chamber, or vice versa. There are problems such as loss of heat of the sample due to movement, dropout, vibration, improper grip, measurement, and energization.Especially in case of equipment using liquid as the heating medium; The heating medium released into the outside air from the opening gives off heat and a foul odor, and the heating medium liquid falls onto the surface of the sample during movement, contaminating the equipment.
Expensive heat transfer liquid is wasted unnecessarily.

Moreover, since the sample is frequently moved up and down and left and right, the moving structure is complicated and causes price hikes and failures.

Although a test using a liquid heating medium is the only test method that applies the maximum thermal shock9 to the sample, the above-mentioned invention solves all the above-mentioned problems and allows the outside of the mold to be placed inside the test chamber. With the door closed and without contact with the outside air until the end of the test, operate the switching valve according to the command based on the test η, and spray the sample with a low-temperature heat medium and a high-temperature heat medium alternately. Therefore, the test can be carried out easily in a clean atmosphere and without wasting the heat transfer liquid.

The basic configuration of the present invention is the same regardless of whether a liquid or gas is used as the heat medium, including a mechanism for pumping the heat medium (for example, a pump for liquid, a fan for gas, etc.) and a dispersion port. , (shape and structure) switching valve, (bore diameter and groove a) parts used, (for liquid and gas), etc., but the intent remains the same.

The advantage of using gas as a heating medium is that gas (mainly air) can be used easily without worrying about external leakage, loss of heating medium, mixing with other gases, etc., and does not cause any adverse effects. However, on the other hand, it has a disadvantage that it has a smaller heat capacity than a liquid and cannot rapidly exchange heat with the sample.

Liquids are the opposite of gases; they have a large heat capacity and can rapidly exchange heat with the sample, making it possible to apply a sudden thermal shock to the sample.

The greatest advantage of the present invention is that when this liquid heating medium is used, tests that could not be performed with conventional equipment without liquid consumption can be performed by switching the heating medium circuit and spraying the heating medium onto the sample. The problem of groove-forming 1.2i112 mixing can be easily implemented by adding a recovery mechanism, which will be described later, to almost eliminate M.

Yet another advantage of the present invention is that since this device does not require a sample basket transfer device or its drive unit, tests can be carried out even in the smallest of test rooms, and conversely, tests can be carried out even in extremely small test rooms. It can be applied to a wide range of areas, such as testing a part of the sample (for example, a sample flowing on a conveyor).

The present invention consists of a low-temperature tank that circulates a heat medium (liquid or gas) at a controlled temperature, a high-temperature tank that controls heat W (liquid or gas) at a high temperature, and a test in which the heat medium is sprayed on test leaves. It is roughly divided into a chamber, and a control panel that commands and controls cycle operation.By housing these in one housing and installing general-purpose test equipment, and installing the test chamber separately, it is possible to achieve the ultimate level of experimentation. ＝、Hunger is a testing device for large objects, and by using gas as a heating medium, relatively gentle temperature cycle tests and thermal mountain tests,
By using liquid as a heating medium, rapid heat wI! ! !
The test was configured so that the test temperature range, collection mechanism, etc. could be selected depending on the type of heat transfer liquid used for the rainbow.

Embodiments of the present invention will be described in detail below with reference to the drawings.

Figures 1 to 4 show the I! This example shows a main M (2), and a door (1) for loading and unloading samples in the front of the test chamber (2).
1), and a heat medium dispersion port (21) is installed at the top. Directly below the test chamber (2) is a cryostat (3) that supplies a low-temperature heat transfer liquid.
A cooler (evaporator) (51), a temperature control heater (36), and a liquid feed pump (35) are installed inside the hot tank (3), and a low temperature tank (3) is installed. ) A high-temperature tank (4) for supplying high-temperature heat transfer liquid is formed at the rear, and a heating heater (46) and a liquid-feeding pump (45) are installed in the high-temperature tank (4). It is.

A cascade condenser (5) is installed at the bottom of the cryostat (3).
2) and an expansion tank (53) are installed, and the thermal wall body (6) is installed.
It is stored inside.

As shown in the explanatory diagram of FIG. 4 (showing a high temperature state), the 'a ring of the heat transfer liquid is connected to the liquid feeding pump (45) in the high temperature tank (4).
) is connected to the spray port (21) of the test chamber (2) via a switching valve (42). The discharge port of the feed pump (35) is connected to the spray port (21) of the test chamber (2) through the switching valve (32), and the cut-off valve (31) is connected to the cheese in the same tank. One of the liquid outlet ports in the test chamber (2) is connected to the high temperature tank (4) via the switching valve (43), and the other is connected to the high temperature tank (4) via the switching valve (43).
2) (33) (41) shows the closed state, and the high temperature heat transfer liquid (hereinafter referred to as high I!! liquid) is sucked into the pump (45), and the switching valve (42) moves in the direction of the arrow shown in the figure. ), the hot liquid is sprayed onto the sample (1) placed in the chamber from the spraying port (21) of the test chamber (2), the sample (11) is heated to a high temperature, and the liquid is passed through the discharge port via the switching valve (43). The high temperature tank (4) returns and the heating heater (46) is controlled by signals from the temperature detection terminal (27) and temperature controller (62') in the test chamber (2) to bring the high temperature liquid to a predetermined temperature. maintain.

At this time, the low temperature heat medium liquid (hereinafter referred to as low temperature liquid) in the low temperature tank (3)
is sucked into the pump (35) and moved in the direction of the arrow by the switching valve (3).
The temperature control heater (36) is controlled by the temperature detection terminal (37) and the temperature controller (62). death,
Maintain the cryogenic liquid at a predetermined temperature.

After the predetermined test time has passed, the switching valves are operated by the signal from the setting device, switching valves (42) (431 (31) are closed, switching valves (321 (33) (41) are open, and the low temperature liquid is pumped (35)). ), the sample (1) is sprayed from the spray port (21) through the switching valve (32), and onto the sample (1) in the test chamber (2).
is brought to a low temperature and returned to the fl hot tank (3) from the discharge port via the switching valves (3), where it is heated according to the signal from the temperature detection end (27) in the test chamber (2).

At this time, the high-temperature liquid returns to the high-temperature tank (4) via a pump (45) and a switching valve (4), and its temperature is adjusted according to a signal from a temperature detection end (47) in the tank.

At the beginning and end of the test, all the switching valves (311 (41) onwards) are closed, and both heat transfer fluids are turned off to ff.
Wait while cycling through i.

The control panel is equipped with a low temperature controller (62) and a temperature controller (62') that control the test temperature and the temperature inside the tank.
During the test, the temperature detection terminal (27) in the test chamber (2)
During standby, the temperature is controlled by the signal from the temperature detection end (37) or (47) inside the tank. (2 settings Isosaki) Setting and controlling the number of test cycles and exposure time are as follows:
The setting device shown in FIG. C is equipped with a cycle counter (64) and a timer (63), but a setting device with a built-in microcomputer, a sequencer, etc. can also be used.

In addition, a temperature recorder (61
) is perfectly safe.

FIG. 5 is a principle explanatory diagram showing a second practical example of the present invention "A ti', i", in which the basic device of the first embodiment is equipped with a heat medium recovery and purchasing device.

Heat RLTJ (Thermal Shock〈Test Method M Ratio-5TD
-883^1 test condition A (too″C, O″C)
, B (+25°C, -55°C), C (150°C.

-65'(:), D (200℃, -65℃), E
Q50+C, 105"r4, "f?0ger-, 49
15°C), and fluorine-based Fluorinert (part name), silicone oil, etc. are usually used as heat transfer fluids that meet this condition.

In Sirifun oil (by Toshi, SH-200),
Pour point -50℃ to -86℃, flash point 70℃ to 315℃
'C), MIL standard test condition B (-55℃, 125℃
℃) is its limit, and above that temperature it can only be used as a high-temperature liquid.

Fluorinert (made by Sumitomo Three M) is nonflammable and stable, but requires the use of two liquids, and for low τ products, FC-7
7 (pour point -110℃, boiling point 978C), F for high temperature use
C-・IO (boiling point 155℃), FC-43f 8 points 17
4°C), FC-70 (boiling point 2+5°C), etc., and if you use these as an option, you can meet the NIL standard test conditions D (-
Tests can be carried out at temperatures up to 65°C and 200°C.

Oxidized nitrogen is suitable as the low-temperature curve to be used for -195''c under test conditions E and F, but this will be discussed later.

In a test device that uses a liquid as a heating medium, selecting the type of heating medium to be used and the range of use are important factors, so I have purposely listed them here.

High-temperature blends of silicone oil are the best! It is stable with a TII+ point of -50°C to -55'C and a flash point of 315"C or higher, but a low-temperature blend with a pour point of -866C has a low flash point of 70+C and cannot be used with conventional equipment because it is dangerous. Test conditions (-55"C, 125℃)
The implementation of the test was the limit.

When Fluorinert is used, the boiling temperature of the low-temperature liquid FC-77 is as low as 97°C, so the same thing happens as with silicone oil, but it is nonflammable and will not catch fire.

With conventional equipment, if a sample or basket with a high temperature liquid attached is immersed in a low temperature bath, or if a sample or basket that is several times the temperature of the hot liquid is immersed in a high temperature bath, the low temperature liquid with a low boiling point will evaporate. However, the hot liquid is mixed with the cold liquid.

In addition, high-temperature liquids with a small temperature difference between the boiling point and the operating temperature are
・Vapours constantly evaporate inside the tank, and these vapors are released from various openings every time the sample is replaced, creating a risk of ignition.
Alternatively, this may lead to f3 consumption of the liquid and soiling of the equipment.

The device of the present invention solves this problem with heat g:! The solution is solved by shielding the liquid from the outside air, and in the second embodiment, by recovering the evaporated liquid and mixed liquid, safety and economy can be reduced to 1 fil! The 17rj was created so that the tests could be carried out.

High-temperature test Fluorinert FC-70 (*J 215°C) is usually used in tests with a salinity of 200°C, but evaporation is rapid due to the small temperature difference from the test conditions, and the price of the fitting itself is lower than that of FC. -40 times, it is economical to use a two-component silicone oil (flash point: 315°C) for high temperatures, and contamination of samples and test chambers by oil can be eliminated by equipping the cleaning mechanism described below. can.

Furthermore, a similar test can be conducted by using two silicone oils, one for low temperatures (pour point -86°C) and one for high temperatures (flash point 315°C).

! If we explain the purchase in detail with reference to Figure 5, then! A cooler (71) is installed in the space near the liquid level of the TJ hot tank (4),
Cool with a cooling source (e.g. refrigerator, cold water, etc.).

The vapor of the high-temperature liquid in the tank is condensed and the vapor of the coexisting low-temperature liquid remains near the ceiling of the tank. (Application of boiling point difference) By installing a condenser (serpentine coil, etc.) (731) in the space near the ceiling of the low temperature tank (3) and aligning one end with the ceiling of the high temperature tank (4), The vapor of the low-temperature liquid in the high-temperature tank (4) is condensed and reduced within the low-temperature tank (3).

High! sprayed in the test room (2)! ! ! The liquid should be stored in the test chamber (
2) and the sample (1) are evaporated, the temperature is lowered through heat exchange with the wall and the sample (1), and the υ outlet valve (83
) and sent to recycled products (80).

The opening time of the discharge valve (83) is about 5 minutes from 2 minutes after the test temperature is changed, and after that, the tJD discharge valve (43) is opened.
) and then the product temperature R'1 (41) is returned.

FIG. 6 shows a regeneration mechanism of a second embodiment of the apparatus of the present invention, in which the mixed liquid sent from the discharge valve (83) is separated using the difference in boiling point and is returned to each tank.

The predetermined volume of the regeneration P+ (80) is determined by the amount of heat transfer liquid sprayed and the opening time of the discharge valve (83) described above.

The heater (86) for Ka14111 should be one with a low surface U degree suitable for the purpose of use (for example, an electric heater with low watt density, a heater using a heat medium, etc.), and the cooler (8I) should be one with a small temperature difference ( For example, a water cooler, etc.) is preferred.

There is a steam outlet (87) on the ceiling of the regenerator (80), one end of which is connected to the inlet of a low temperature tank (31OiNd reactor (73)) to collect the low temperature liquid separated in the regenerator (80). , close the mouth of the tank.

Heat transfer liquid for separating heat transfer liquid! Degree A is determined between the boiling point of the low temperature liquid and the condensation temperature of the high temperature liquid, and is set by a temperature controller (82) installed in the control panel.

The temperature of the heat medium liquid is detected by a temperature detection end (89) installed in the regenerator (80).

FIG. 7 shows a third embodiment of the device of the present invention.
A cleaning mechanism is attached to the cleaning mechanism of the embodiment or the second embodiment,
This is designed to remove contamination of the sample and test chamber caused by silicone oil heat transfer liquid, protect the sample, and eliminate user discomfort. .

The predetermined volume of the cleaning liquid tank (90) is determined to be approximately 15 to 20 times the amount of the device 1PI11 medium to be sprayed for 7 minutes.

“The cleaning liquid is sprayed into the test chamber (2) from the spray port (21) by the liquid feed pump (95) through the switching valve” (92) from the liquid feed port, and is sprayed onto the sample (1) and the temperature detection end (27). , spraying port (21), and wall body &fft+, , through the discharge port, the waste is washed and recovered by the regenerator (OI) via the switch # (931).

The cleaning time varies depending on the shape of the sample, the manner of wiping of the surface treatment, etc., but normally -5 minutes is considered to be sufficient.

It is desirable to carry out cleaning at the end of the test, and the switching valves (32) (42) (33) (43) &
Since both (83) and (83) are closed, the cleaning circuit switching valve (83) is closed.
92) You only need to operate (93).

It will be done.

Since the test has already ended at this point, the cleaning liquid can be regenerated during the next running test.

If the test time is short (within 2 hours), a timer may be inserted in the cleaning circuit to continue regeneration even after the test is completed, and the apparatus may be stopped with a signal indicating the completion of regeneration.

As a cleaning liquid, trichlorethylene (trichlorethylene) has a melting point of -78°C and a boiling point of 87'C, and Fluorinert FC
-77 has a boiling point of 97°C, while silicone oil has a boiling point of 190°C at 186°C, so the liquid temperature in the cleaning fluid collector (OI) should be set from 87°C to 90°C. .

The cleaning solution cleans the inside of the test chamber (2) and crystallizes with the collected solution.
It enters the cleaning liquid regenerator (Ol) through the switching valve (93),
It is heated by a heating heater (06) and evaporated.

The evaporated cleaning liquid passes through the collection port (03) in the ceiling and is
The liquid enters the vessel (05), is cooled by cooling water (08), 408'), condenses, and is collected in the cleaning liquid tank (90).

When the evaporation of the cleaning liquid is completed, the temperature of the thermal GX liquid (silicon oil) remaining in the regenerator (Ol) rises, which is detected by the temperature detection terminal (07) and temperature controller (02), and a signal is generated. Switch to turn off the warming heater (06) and turn off the switching valve (0
4), the remaining heat medium liquid is returned to the high tank (4). Figure 9 shows a fourth embodiment of the device of the present invention.
When the volume of the sample is large, the spraying port is divided into an upper side (21) and a lower side (21'l), and the number of spraying ports is 1, 8, or more depending on the size of the sample, and the spraying force is reduced. The spray ports (21) and (21'') are rotated by using the reaction force, etc., so that the hot g!i liquid can be distributed evenly over the entire sample (1).

FIG. 10 shows a fifth embodiment of the device of the present invention.
It is constructed so that gas can be used as a heating medium.

Traditionally, there have been many devices that use gas as a heating medium, and there are various ways to move the sample, such as horizontal movement, vertical movement, and repetitive movement.
With the device of the present invention, by directly spraying a π-temperature medium onto a stationary sample, it is possible to exchange heat with the sample faster than with the base of the test chamber, and it is also possible to create a test chamber with extremely small poisons, and it is also possible to use a test chamber for remote objects. It is different from conventional binding TJ in that it is also possible to perform tests (for example, low-8! high-temperature tests on samples transported by robots).

Referring to Fig. 10, the configuration of the blower (44) connected to the high temperature tank (4) is connected to the high temperature tank (4) through the switching valve (42). test room (2
)'s spraying port (2 and again).The air blowing port of the air blower ff1 (34) attached to the tank (3) is connected to the spraying port (21) of the test chamber (2) via the switching valve (32). each in succession
The switching valves (41) and (3I) are bypassed to the high temperature tank (4) and the low temperature tank (3), and are connected to the intake port (22) of the engineering room (2).
is the high temperature t5 (4) via the switching valves (43) and (33).
1 and is connected to the cryostat (3)
Time Niha GJ F% Valve (42) (43) (31)
Ha1iffl O') Condition n! 3 wo, +Ag valve (32
1 (33) (at) indicates the closed state, and the high salt gas is sent by the blower (44), passes through the switching valve (42) in the direction of the arrow indicated by Z, and enters the test chamber (2). ) Spray high-temperature gas onto test B (1) placed in the chamber from the dispersion port (21) in the inlet (
22) through the switching valve (43) to high temperature 'f! l (4)
Inward return, sensitivity detection in the test chamber (2) r5 (27
) and j! ml': ; 1', The heating heater (16) is controlled by the signal from the 1-node (62°), and the high-temperature gas is maintained at a predetermined temperature.

Low ff, A R1m let switching valve (42) (43)
(31) f,! Close, selector valve (112) (331(
4I) is opened, and the low-temperature gas is passed through the blower (34) and the switching valve (J).
2), at IYζ - At this time, the high temperature gas passes through the switching valve (4I) and becomes I's +:rA I+! Returns to 'l (・$) and continues waiting.

At the start and end of the test, selector valve (31) (・II)
All the other switching valves are closed, and both heat medium gases are circulated in the tank and stand by, but since these operations are the same as those in the first example, the description thereof will be omitted.

Figure 11 shows an example of remote object testing.
The test chamber (2) is located in a separate machine and the 12th
The figure shows six embodiments of the outer cylinder of the device of the present invention.
MIL standard test conditions ε (150@C, -195℃
It is constructed to be able to conduct tests at 200'C to 195°C.

To explain with reference to FIG. 12, a container (3) equipped with automatic replenishment of liquid nitrogen (self-pressurized, externally pressurized, etc.) is used in the low temperature generating section, and a switching valve (32) is used. (Low f!2
The low-temperature liquid is sprayed into the test chamber (2) from the spray port (21) via a solenoid valve, etc. The low-temperature liquid heated by exchanging heat with the sample (1) rises and sag. The low-temperature liquid, which becomes a gas and is discharged from the pressure regulating valve (23) to the outside, is returned to the container (3) via the switching valve (33).

As in the first embodiment, the high temperature liquid (fluorinate or silicone oil) is supplied to the crystal temperature tank (4), liquid feed pump (45), @
Test chamber (2) from the spray port (21) via the switching valve (42)
Sprayed on sample (1) inside.

Depending on the heat transfer liquid used, the recovery tRIR (71
) is better equipped.

It is preferable that the test chamber (2) be constructed using a heat-resistant material such as nickel steel, tsuba alloy, etc., and be sufficiently insulated (for example, by purchasing a Jure bottle or a pressure-resistant container).

When the temperature is high, the low temperature switching valve (32) is closed and the supply of low temperature heat medium is stopped.

The circulation of the high-temperature liquid is the same as in the first example described above, so a description thereof will be omitted.

Although three main embodiments of the device of the present invention have been described above, the arrangement, configuration, and shape of each part of the device of the present invention are not limited to these, and may be combined in other states as necessary. The configuration can also be done arbitrarily.

As shown in the above-mentioned embodiments, the present invention apparatus places a sample in a test chamber, sprays high temperature liquid (or high temperature gas) into the test chamber to raise the temperature, and cools the test chamber with low temperature liquid (or low temperature gas). By spraying and switching to a low temperature, the sample can be heated to the required temperature faster than the test chamber base, and the test can be performed without the sample protruding, falling, vibration, wIm, mci, etc. It is easy to energize the sensor and set up the measurement detection terminal, etc. Moreover, by conducting the test without exposing the heating medium to the outside air, there is no release of expensive heating medium liquid, and the heat of intense evaporation is eliminated. Medium liquids and heat medium liquids with low flash points can be used with confidence, and by selecting the heat medium used, the test temperature range can be reduced to -195°C and 65°C.
to O'C, *lii range is 5" (: to 250℃
It has many features such as being able to conduct tests up to

Furthermore, the structure allows the testing chamber to be installed in any location, making it possible to conduct small-volume tests or tests on samples in one part of a large device (e.g., samples on a conveyor, samples moved by a robot, etc.). By providing a recovery system for the medium and a recyclable heating system, the enormous maintenance costs due to consumption of the heat medium can be extremely reduced.

As mentioned above, the apparatus of the present invention is capable of fixing the sample, performing all of the test conditions of the thermal 1 experiment method MIL-5TD-883A 1 oll, completely separating the test atmosphere from the outside air, and discharging the heating medium liquid to the outside. A drastic reduction in maintenance costs due to liquid recovery and regeneration.
Extremely small capacity testing and remote installation by relocating the testing room
It was possible to construct a thermal zero four gas test device by spraying, which made it possible to test samples on the m device.

[Brief explanation of drawings]

Figure 1 is a cross-sectional view of the main body of the first embodiment of the device of the present invention;
The figure is a longitudinal cross-sectional view, the third figure is a plan cross-sectional view, and the fourth figure is a diagram explaining the principle. FIG. 5 is an explanatory diagram of the principle of the second embodiment of the apparatus of the present invention, and FIG. 26 is an explanatory diagram of 81 reproducing grooves. FIG. 7 is an explanatory diagram of the principle of one cleaning groove of the third practical example of the cleaning device of the present invention, and FIG. 8 is a cross-sectional view of the cleaning liquid regenerator. FIG. 9 is a clear view of the spraying method of the fourth embodiment of the device of the present invention. FIG. 10 is a diagram explaining the principle of the fifth embodiment of the device of the present invention, the first
Figure 1 is an explanatory diagram of the remote test. FIG. 1 is a diagram explaining the principle of the sixth embodiment of the device of the present invention. (1)・・・・・・・・・Sample (2)・
・・・・・・・・・・・・Exam plan (3)・・・・・・
・・・・・・Low temperature tank (4)・・・・・・・・・
...Crystalline greenhouse (5)...Body (6) (6')...Wr thermal wall (+ +)...・・・・・・ Door
(21) (21'l...Dispersion port (27) (37) (47)...Temperature detection end (31) (32) (331...Switching
Valve (34) (441...... Sending J 虱 +
i% (351 (45)...Liquid feeding pump (
:16) (46)・・・・・・・・・Heater (
Old) (42)...Switching valve (50)...
・・・・・・・・・Frozen maple (62) (62'
)... Temperature controller (5I)...
......Cooler (83) +93) (92)
(04) Switching valve! 53 Figure 11 Figure 12

Claims (1)

[Claims] A housing (hereinafter referred to as the test chamber) equipped with a dispersion mechanism capable of dispersing a heat medium (liquid or gas) onto a fixed sample, and a case in which the heat medium (liquid or gas) to be sprayed is cooled and controlled to a low temperature in advance. A low temperature generation casing (hereinafter referred to as a cryostat) equipped with a mechanism that can pump the heat medium into the test chamber and recover it again, and a heat medium (
A high-temperature generating casing (hereinafter referred to as a high-temperature bath) that is equipped with a mechanism that can preheat and control the temperature of a liquid or gas to a high temperature and then pump the heat medium to the test chamber and recover it again can be switched by an electrical signal. The switching valves are connected to each other via switching valves, and the switching valves are switched by signals from the setting device installed in the control panel, and the low-temperature heat medium is pumped from the low-temperature chamber or the high-temperature chamber to the sample placed in the test chamber. , or by directly spraying a high-temperature heating medium to exchange heat with the sample to a predetermined temperature before the walls of the test chamber, and exposing the sample to a low temperature or high temperature condition, a predetermined test can be carried out. A thermal atmosphere test device by dispersion that is configured to perform the following, and also takes into consideration a recovery mechanism for the heat medium when the heat medium used is a liquid.