JPS6131804B2 - - Google Patents
Info
- Publication number
- JPS6131804B2 JPS6131804B2 JP553480A JP553480A JPS6131804B2 JP S6131804 B2 JPS6131804 B2 JP S6131804B2 JP 553480 A JP553480 A JP 553480A JP 553480 A JP553480 A JP 553480A JP S6131804 B2 JPS6131804 B2 JP S6131804B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- electrode
- slit
- electrodes
- movable electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/22—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP553480A JPS56103318A (en) | 1980-01-21 | 1980-01-21 | Length measuring signal detector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP553480A JPS56103318A (en) | 1980-01-21 | 1980-01-21 | Length measuring signal detector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56103318A JPS56103318A (en) | 1981-08-18 |
JPS6131804B2 true JPS6131804B2 (enrdf_load_stackoverflow) | 1986-07-23 |
Family
ID=11613846
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP553480A Granted JPS56103318A (en) | 1980-01-21 | 1980-01-21 | Length measuring signal detector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56103318A (enrdf_load_stackoverflow) |
-
1980
- 1980-01-21 JP JP553480A patent/JPS56103318A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS56103318A (en) | 1981-08-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US3805150A (en) | Environment immune high precision capacitive gauging system | |
US6492911B1 (en) | Capacitive displacement encoder | |
US5691646A (en) | Capacitance-type displacement measuring device with electrodes having spiral patterns | |
US3873916A (en) | Capacitive sensor for measuring displacement or position | |
JPH05215506A (ja) | 容量性位置センサ | |
US3706919A (en) | Capacitive gauge | |
GB1595127A (en) | Transducer for angular and linear measurement | |
EP0363426A1 (en) | Absolute position sensor using multiple wavelengths of offset pitch phase patterns | |
JPH0535801B2 (enrdf_load_stackoverflow) | ||
GB2118720A (en) | Capacitive position transducers | |
JP2001091205A (ja) | 物体搭載装置 | |
EP0067643A2 (en) | Method for determining the dimensions and/or form of surfaces | |
JPS6131804B2 (enrdf_load_stackoverflow) | ||
JPS6235603B2 (enrdf_load_stackoverflow) | ||
EP0104748A1 (en) | RF Watt meter | |
JPH0467881B2 (enrdf_load_stackoverflow) | ||
US6541986B2 (en) | Sensor for the capacitive measurement of film with thicknesses | |
JPH08159704A (ja) | 静電容量式変位測定装置 | |
JPS59187203A (ja) | デジタル表示マイクロメ−タ | |
JP2889143B2 (ja) | 静電容量式変位測定装置 | |
JPS61235702A (ja) | 静電容量型ノギス | |
JPS61235721A (ja) | 静電容量型エンコ−ダ | |
JPH0354285B2 (enrdf_load_stackoverflow) | ||
JPS59183329A (ja) | デジタル表示測定装置 | |
JPH0460530B2 (enrdf_load_stackoverflow) |