JPS6131656U - Workpiece holding mechanism of surface polishing equipment - Google Patents
Workpiece holding mechanism of surface polishing equipmentInfo
- Publication number
- JPS6131656U JPS6131656U JP1984117323U JP11732384U JPS6131656U JP S6131656 U JPS6131656 U JP S6131656U JP 1984117323 U JP1984117323 U JP 1984117323U JP 11732384 U JP11732384 U JP 11732384U JP S6131656 U JPS6131656 U JP S6131656U
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- surface polishing
- holding mechanism
- workpiece holding
- polishing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の第１の実施例の縦断面区、第２図は第
１図に本考案の第１の実施例のフランジから上の部分を
取り除いた状態の平面図、第３図は本考案の第２の実施
例の縦断面図、第４図は従来装置の縦断面図である。
２１・・・円盤、−５・・・スプラ
イン軸、１１・・・半球体、１２．３４・・・押圧板（
保持部）、２０・・・素材、′３−２・・・フランジ（
支持部）、３３・・・弾性体、４０，４１・・・ベロー
ズ（弾性体）。Figure 1 is a longitudinal section of the first embodiment of the present invention, Figure 2 is a plan view of the first embodiment of the present invention with the upper part removed from the flange, and Figure 3. FIG. 4 is a vertical cross-sectional view of a second embodiment of the present invention, and FIG. 4 is a vertical cross-sectional view of a conventional device. 21... Disk, -5... Spline shaft, 11... Hemisphere, 12.34... Pressing plate (
Holding part), 20...Material, '3-2...Flange (
support part), 33... elastic body, 40, 41... bellows (elastic body).
Claims (1)
と、姿勢を一定に保って設けられた支持部と、軸方向に
は剛性を有し軸と直角な方向には柔軟性を有し軸の延長
が前記被加工物の被加工面上の一点を通り、かつすべて
が一平面上に位置しないように両端が前記保持部と前記
支持部に取り付けられた３本以上の弾性体と、前記保持
部と前記支持部の間に設けられ捩りに対しでは剛性が大
きく曲げに対しては柔軟な弾性体とを有することを特徴
とする平面研摩装置の被加工物保持機構。- A holding part that holds the workpiece on the polishing surface of the flat surface polishing device, a support part that maintains a constant posture, and a part that is rigid in the axial direction and flexible in the direction perpendicular to the axis. three or more elastic bodies having both ends attached to the holding part and the supporting part so that the extension of the shaft passes through one point on the workpiece surface of the workpiece and all of them are not located on one plane; and an elastic body provided between the holding part and the supporting part and having high rigidity against torsion and flexibility against bending.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984117323U JPS6131656U (en) | 1984-07-31 | 1984-07-31 | Workpiece holding mechanism of surface polishing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984117323U JPS6131656U (en) | 1984-07-31 | 1984-07-31 | Workpiece holding mechanism of surface polishing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6131656U true JPS6131656U (en) | 1986-02-26 |
Family
ID=30676237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984117323U Pending JPS6131656U (en) | 1984-07-31 | 1984-07-31 | Workpiece holding mechanism of surface polishing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6131656U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6445566A (en) * | 1987-08-12 | 1989-02-20 | Mimasu Handotai Kogyo Kk | High accuracy surface grinding machine |
-
1984
- 1984-07-31 JP JP1984117323U patent/JPS6131656U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6445566A (en) * | 1987-08-12 | 1989-02-20 | Mimasu Handotai Kogyo Kk | High accuracy surface grinding machine |
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