JPS6131655U - Workpiece holding mechanism of surface polishing equipment - Google Patents

Workpiece holding mechanism of surface polishing equipment

Info

Publication number
JPS6131655U
JPS6131655U JP1984117322U JP11732284U JPS6131655U JP S6131655 U JPS6131655 U JP S6131655U JP 1984117322 U JP1984117322 U JP 1984117322U JP 11732284 U JP11732284 U JP 11732284U JP S6131655 U JPS6131655 U JP S6131655U
Authority
JP
Japan
Prior art keywords
workpiece
surface polishing
holding mechanism
workpiece holding
polishing equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1984117322U
Other languages
Japanese (ja)
Inventor
武美 鎌田
哲也 安田
Original Assignee
日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気株式会社 filed Critical 日本電気株式会社
Priority to JP1984117322U priority Critical patent/JPS6131655U/en
Publication of JPS6131655U publication Critical patent/JPS6131655U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の第１の実施例を示す縦断面図、第２図
はフランジより上の部分を取り除いた状態の平面図、第
３図は本考案の第２の実施例を示す縦断面図、第４図は
第３図においてフランジより上の部分を取り除いた状態
の平面図、′第５―は従来装置の縦断面図である。 １・・・円盤、５・・・スプライン軸、１１・・・半球
体、１２．３４・・・押圧板（保持部）、２０・・・素
材、３２・・・フランジ（支持部）、３３・・・弾性体
、４１，５１・・・オルダム継手。Fig. 1 is a longitudinal sectional view showing the first embodiment of the present invention, Fig. 2 is a plan view with the portion above the flange removed, and Fig. 3 is a longitudinal sectional view showing the second embodiment of the invention. FIG. 4 is a plan view of FIG. 3 with the portion above the flange removed, and FIG. 5 is a vertical sectional view of the conventional device. DESCRIPTION OF SYMBOLS 1... Disc, 5... Spline shaft, 11... Hemisphere, 12.34... Pressing plate (holding part), 20... Material, 32... Flange (supporting part), 33 ...Elastic body, 41, 51...Oldham joint.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 平面研摩装置の研摩面上の被加工物を保持する保持部と
、姿勢を一定に保って設けられた支持部と、軸方向には
剛性を有し軸と直角な方向には柔軟性を有し軸の延長が
前記被加工物の被加工面上の一点を通り、かつすべてが
一面上に位置しないように両端が前記保持部と前記支持
部に取り付けられた３本以上め弾性体と、一端が前記保
持部に取り付けられ他端が前記支持部に取り付けられた
オルダム継手とを有することを特徴とする平面研摩装置
の被加工物保持機構。A holding part that holds the workpiece on the polished surface of the surface polishing device, a support part that maintains a constant posture, and a part that is rigid in the axial direction and flexible in the direction perpendicular to the axis. three or more elastic bodies whose ends are attached to the holding part and the support part so that the extension of the shaft passes through one point on the workpiece surface of the workpiece, and not all of them are located on one surface; A workpiece holding mechanism for a surface polishing apparatus, comprising an Oldham joint having one end attached to the holding section and the other end attached to the supporting section.
JP1984117322U 1984-07-31 1984-07-31 Workpiece holding mechanism of surface polishing equipment Pending JPS6131655U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984117322U JPS6131655U (en) 1984-07-31 1984-07-31 Workpiece holding mechanism of surface polishing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984117322U JPS6131655U (en) 1984-07-31 1984-07-31 Workpiece holding mechanism of surface polishing equipment

Publications (1)

Publication Number Publication Date
JPS6131655U true JPS6131655U (en) 1986-02-26

Family

ID=30676236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984117322U Pending JPS6131655U (en) 1984-07-31 1984-07-31 Workpiece holding mechanism of surface polishing equipment

Country Status (1)

Country Link
JP (1) JPS6131655U (en)

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