JPS6130716A - ガス流量測定装置 - Google Patents

ガス流量測定装置

Info

Publication number
JPS6130716A
JPS6130716A JP15336084A JP15336084A JPS6130716A JP S6130716 A JPS6130716 A JP S6130716A JP 15336084 A JP15336084 A JP 15336084A JP 15336084 A JP15336084 A JP 15336084A JP S6130716 A JPS6130716 A JP S6130716A
Authority
JP
Japan
Prior art keywords
main body
measuring device
chamber
fine tube
flow amount
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15336084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0227610B2 (enExample
Inventor
Masayoshi Kikuchi
菊池　正吉
Tatsuya Ichihara
達也 市原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP15336084A priority Critical patent/JPS6130716A/ja
Publication of JPS6130716A publication Critical patent/JPS6130716A/ja
Publication of JPH0227610B2 publication Critical patent/JPH0227610B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP15336084A 1984-07-24 1984-07-24 ガス流量測定装置 Granted JPS6130716A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15336084A JPS6130716A (ja) 1984-07-24 1984-07-24 ガス流量測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15336084A JPS6130716A (ja) 1984-07-24 1984-07-24 ガス流量測定装置

Publications (2)

Publication Number Publication Date
JPS6130716A true JPS6130716A (ja) 1986-02-13
JPH0227610B2 JPH0227610B2 (enExample) 1990-06-19

Family

ID=15560750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15336084A Granted JPS6130716A (ja) 1984-07-24 1984-07-24 ガス流量測定装置

Country Status (1)

Country Link
JP (1) JPS6130716A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6454220A (en) * 1987-08-26 1989-03-01 Hitachi Ltd Small laminar flowmeter

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139819U (enExample) * 1981-02-26 1982-09-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57139819U (enExample) * 1981-02-26 1982-09-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6454220A (en) * 1987-08-26 1989-03-01 Hitachi Ltd Small laminar flowmeter

Also Published As

Publication number Publication date
JPH0227610B2 (enExample) 1990-06-19

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