JPS61294894A - Making of metal based laminate board - Google Patents

Making of metal based laminate board

Info

Publication number
JPS61294894A
JPS61294894A JP13546585A JP13546585A JPS61294894A JP S61294894 A JPS61294894 A JP S61294894A JP 13546585 A JP13546585 A JP 13546585A JP 13546585 A JP13546585 A JP 13546585A JP S61294894 A JPS61294894 A JP S61294894A
Authority
JP
Japan
Prior art keywords
core plate
film
resin
pressure
reduced pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13546585A
Other languages
Japanese (ja)
Other versions
JPH0564879B2 (en
Inventor
大浦 憲二
鎌田 邦利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Plastics Inc
Original Assignee
Mitsubishi Plastics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Plastics Inc filed Critical Mitsubishi Plastics Inc
Priority to JP13546585A priority Critical patent/JPS61294894A/en
Publication of JPS61294894A publication Critical patent/JPS61294894A/en
Publication of JPH0564879B2 publication Critical patent/JPH0564879B2/ja
Granted legal-status Critical Current

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  • Laminated Bodies (AREA)
  • Insulated Metal Substrates For Printed Circuits (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、金属ベース印刷配線板の素材として好適な8
I層板を得る方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention provides an 8
The present invention relates to a method for obtaining an I-layer plate.

(従来技術) 金属ベース印刷配線板は、金属芯板と、その表面に絶縁
層を介して設けられた導電回路層よりなるもので、放熱
性や磁気シールド性に優れており、ハイブリッドIC基
板等の各種用途に供されている。
(Prior art) Metal-based printed wiring boards consist of a metal core plate and a conductive circuit layer provided on the surface of the metal core plate through an insulating layer, and have excellent heat dissipation and magnetic shielding properties, and are useful for hybrid IC boards, etc. It is used for various purposes.

従来、この金属ベース印刷配線板の素材どなる積層板は
、第3図の断面図で示すように、あらかじめ多数の貫通
孔11を設けた金属芯板1に、エポキシ樹脂含浸ガラス
ls維マット(ガラスエポキシ)3′を熱プレスして芯
板1の表面を被覆すると同時に、ガラスエポキシ中のエ
ポキシ樹脂を孔11中に流入させて孔11の表面をも被
覆して作られるのが離油であった。
Conventionally, as shown in the cross-sectional view of FIG. 3, the material of this metal-based printed wiring board is a laminate made of epoxy resin-impregnated glass fiber mat (glass Oil separation is made by heat-pressing epoxy 3' to cover the surface of the core plate 1, and at the same time, flowing the epoxy resin in the glass epoxy into the holes 11 to cover the surfaces of the holes 11. Ta.

(発明が解決しようとする問題点) ところがガラスエポキシを芯板に被覆した81層板にお
いては、孔11の表面に気泡12が残りやす(、ILl
lにスルーホールを開けたときに絶縁不良が生じるとい
う重大欠点になっていた。またガラスエポキシは高周波
特性が十分でな(、用途によってはさらに高い性能のも
のが望まれていた。
(Problem to be Solved by the Invention) However, in the 81-layer board in which the core plate is coated with glass epoxy, air bubbles 12 tend to remain on the surface of the holes 11 (, ILl
A serious drawback was that insulation failure occurred when a through hole was drilled in the l. Furthermore, glass epoxy does not have sufficient high-frequency characteristics (and depending on the application, even higher performance is desired.

本発明者等は、上記問題点を解決するため、金属芯板を
耐熱性の高い熱可塑性樹脂により孔表面をも含めて被覆
する方法を検討の結果、気泡の点で改善が見られたもの
の、さらに高度の品質を要求される場合には未だ完全と
は言えなかった。
In order to solve the above problems, the present inventors investigated a method of covering the metal core plate, including the hole surface, with a highly heat-resistant thermoplastic resin. However, it has not yet been perfect in cases where even higher quality is required.

(問題点を解決するための手段) 本発明は、耐熱性熱可塑性樹脂フィルムと、貫通孔を設
けた金属芯板とを、減圧雰囲気下で加熱プレスすること
により、気泡残存の極めて少ない積層板を得ることに成
功したものである。
(Means for Solving the Problems) The present invention produces a laminate with extremely few remaining bubbles by hot pressing a heat-resistant thermoplastic resin film and a metal core plate provided with through holes in a reduced pressure atmosphere. It was successfully obtained.

以下本発明を図面を参照して詳細に説明する。The present invention will be described in detail below with reference to the drawings.

第1図は、本発明方法により得られる積層板の一例を示
す断面図、第2図は別の例を示す断面図であって、第1
図のものは金属芯板1を耐熱性熱可塑性樹脂のフィルム
2で被覆絶縁し、その表面に導電回路を設けるようにし
たもの、第2図のものは、さらにガラスエポキシ等のプ
リプレグ署3を積層してこの層3上に導電回路を設ける
ようにしたものである。
FIG. 1 is a sectional view showing an example of a laminate obtained by the method of the present invention, and FIG. 2 is a sectional view showing another example.
The one shown in the figure has a metal core plate 1 coated and insulated with a film 2 of heat-resistant thermoplastic resin, and a conductive circuit is provided on the surface of the metal core plate 1. The layers are laminated and a conductive circuit is provided on this layer 3.

本発明で使用する金属芯板は、予め多数の貫通孔11が
設G−Jられたもので、通常0.1〜1.61程度の厚
さである。材質としては、鉄、アルミ、銅、亜鉛等があ
る。
The metal core plate used in the present invention has a large number of through holes 11 formed in advance, and has a thickness of usually about 0.1 to 1.6 mm. Materials include iron, aluminum, copper, zinc, etc.

この芯板1は、サンドブラスト、液体ホーニング、エツ
チング等の粗面化処理を施して、表面粗さくJIs  
B  0601で規定する中心線平均粗さ)が1μ以上
12μm以下、特に1.2μm以上となるように微細に
粗面化したものが好ましい。これは加熱プレス時に層間
の空気が逃げやすいことと粗面によるアンカー効果が相
俟って接着力を高めるためと考えられる。
This core plate 1 is subjected to surface roughening treatments such as sandblasting, liquid honing, and etching to achieve a JIs surface roughness.
It is preferable that the surface is finely roughened so that the center line average roughness defined by B 0601 is 1 μm or more and 12 μm or less, particularly 1.2 μm or more. This is thought to be due to the fact that air between the layers easily escapes during hot pressing, and the anchoring effect of the rough surface combines to increase the adhesive strength.

また同時に、アルマイト処理、アロジン処理、樹脂コー
ティング等の処理を行なって接着力の向上を図るのが好
ましい。
At the same time, it is preferable to perform treatments such as alumite treatment, alodine treatment, and resin coating to improve adhesive strength.

耐熱性熱可塑性樹脂フィルム2としては、半田耐熱性が
ある熱可塑性樹脂、たとえばポリサルフォン、ポリエー
テルエーテルケトン、ポリフェニレンサルファイド等の
フィルムを用い得るが、特に熱変形湿度(ASTM  
D648.18.6k(+/cn+2 )が200℃以
上の樹脂、例えばポリエーテルイミド(200℃)、ポ
リエーテルサルフオン(203℃)、ポリアミドイミド
(274℃)等のフィルムが好ましい。。
As the heat-resistant thermoplastic resin film 2, a thermoplastic resin having soldering heat resistance, such as a film of polysulfone, polyetheretherketone, polyphenylene sulfide, etc., can be used.
Resins having a D648.18.6k(+/cn+2) of 200°C or higher, such as films of polyetherimide (200°C), polyethersulfon (203°C), polyamideimide (274°C), are preferred. .

フィルム2の厚さは、1alI中の厚さ減少を見込んで
0.25〜Q、5mm程度が好適である。
The thickness of the film 2 is preferably about 0.25 to Q, about 5 mm, taking into account the thickness reduction during 1alI.

芯板1とフィルム2とを積層するには、両者を重ね合せ
、減圧下で加熱プレスをおこなう。減圧度(常圧と残存
圧の差)は、600n+mHg以上、好ましくは650
 mm1−I 0以上とする。これよりも減圧度が低い
と気泡が完全には扱けない。
In order to laminate the core plate 1 and the film 2, they are overlapped and heated under reduced pressure. The degree of reduced pressure (difference between normal pressure and residual pressure) is 600n+mHg or more, preferably 650
mm1-I shall be 0 or more. If the degree of pressure reduction is lower than this, bubbles cannot be completely treated.

加熱プレスを常圧下で行うと、孔部や層間に気泡が残存
し、この気泡は高温高圧を加えても容易に排除されない
ばかりか、苛酷な加熱圧着条件によりフィルム2が流れ
出したり熱劣化する等の欠点が生じる。ところが減圧度
600mm1−1Q程度の減圧条件下で加熱プレスする
と、ガラスエポキシのような液状成分を含むものとは違
い、フィルム2が固体状にあるうらに層間および孔中の
空気の大部分が容易に抜け、しかも樹脂に常に圧力が加
わっているから、目立った気泡はほとんど認められなく
なる。またプレス時の加熱による全底芯板表面の酸化を
抑えることにより高い接着力が得られるという効果も大
きい。
When heat pressing is performed under normal pressure, air bubbles remain in the pores and between the layers, and not only are these air bubbles not easily removed even when high temperature and pressure are applied, but the film 2 may flow out or undergo thermal deterioration due to the harsh heat and pressure bonding conditions. disadvantages arise. However, when hot pressing is performed under reduced pressure conditions with a degree of reduced pressure of about 600 mm1-1Q, most of the air between the layers and in the pores is easily removed while the film 2 is in a solid state, unlike those containing liquid components such as glass epoxy. Moreover, since pressure is constantly applied to the resin, there are almost no visible bubbles. It also has the great effect of providing high adhesive strength by suppressing oxidation of the entire bottom core plate surface due to heating during pressing.

ここで加熱温度は、フィルム2を構成する樹脂の流動開
始温度以上、熱分解温度未満の範囲とする必要があるの
でフィルム2の材質で当然異なってくるが、一般的には
、200℃未満では芯板1とフィルム2との接着力が弱
く、450℃を越えるとフィルム2が流れて厚さが著し
く減少し好ましくないので、200〜450℃の範囲と
する必要がある。好ましい温度は、例えばポリエーテル
イミドの場合には350〜380℃、ポリエーテルリル
フΔンの場合には320〜360 ’C、ポリサルフオ
ンでは280〜340℃、ポリアミドイミドでは300
〜400℃、ポリエーテルエーテルケトンでは350〜
380℃の範囲である。
Here, the heating temperature needs to be in the range above the flow start temperature of the resin constituting the film 2 and below the thermal decomposition temperature, so it naturally varies depending on the material of the film 2, but generally it is less than 200°C. The adhesive force between the core plate 1 and the film 2 is weak, and if the temperature exceeds 450°C, the film 2 will flow and the thickness will decrease significantly, which is not preferable, so the temperature should be in the range of 200 to 450°C. Preferred temperatures are, for example, 350 to 380°C for polyetherimide, 320 to 360'C for polyether rifane, 280 to 340'C for polysulfone, and 300°C for polyamideimide.
~400℃, 350~ for polyetheretherketone
The temperature range is 380°C.

これらの範囲であれば、適正なプレス圧力を選ぶことに
より、プレス中にフィルム2が著しく流れ出すこともな
く、かつフィルム2が溶融してその一部が孔11中に流
入充填され、7L11の表面を十分に被覆するので、良
好な結果が得られる。
Within these ranges, by selecting an appropriate pressing pressure, the film 2 will not flow out significantly during pressing, and the film 2 will melt and a part of it will flow into the hole 11 and fill it, and the surface of 7L11 will be good results are obtained.

またプレス圧力は50〜200 kQ/ cm2の範囲
がよく、これが50kQ/Cm2未満では、減圧下でも
層間および孔部の気泡が十分後けす、接着力も弱く、3
QQkg/cm2を越えるとフィルム2の厚さが不必要
に減少し、所定厚さの積層体が得られない。実用的には
100k g/cm2秤度の圧力で十分な接着強度が得
られる。
In addition, the press pressure should preferably be in the range of 50 to 200 kQ/cm2; if it is less than 50 kQ/cm2, even under reduced pressure, air bubbles between the layers and in the holes will be sufficiently removed, and the adhesive strength will be weak.
If it exceeds QQ kg/cm2, the thickness of the film 2 will decrease unnecessarily, making it impossible to obtain a laminate with a predetermined thickness. Practically speaking, sufficient adhesive strength can be obtained with a pressure of 100 kg/cm2.

加熱プレスが完了すると、冷却を開始する。この冷却中
にも加圧を行なうのがよいが、減圧を維持することは必
ずしも必要ない。
Once the heating press is completed, cooling begins. It is preferable to pressurize during this cooling, but it is not necessarily necessary to maintain reduced pressure.

第2図は特に好ましい構成の積層板を示すものであるが
、このような積層板を得る場合にはζフィルム層2の上
にガラスエポキシ等の未硬化プリプレグおよび必要に応
じ銅箔等の導電金属箔を重ね、120〜2oO℃程度(
0m度で5〜150kg/cm2の圧力を加えてプレス
すればよい。この場合には、減圧雰囲気中で行なう必要
はない。温度が120℃よりも低いと接着力が弱く、2
00℃を越えるどプリプレグ中の樹脂の熱分解が生じや
すく好ましくない。時間は、プリプレグ中の樹脂が十分
硬化するように10分以上行なう。
Figure 2 shows a laminate with a particularly preferred configuration. When obtaining such a laminate, an uncured prepreg such as glass epoxy and, if necessary, a conductive material such as copper foil are added on the ζ film layer 2. Layer the metal foils at around 120~2oO℃ (
Pressing may be performed by applying a pressure of 5 to 150 kg/cm2 at 0 m degrees. In this case, it is not necessary to carry out the process in a reduced pressure atmosphere. If the temperature is lower than 120°C, the adhesive force will be weak;
If the temperature exceeds 00°C, thermal decomposition of the resin in the prepreg tends to occur, which is not preferable. The time is 10 minutes or more so that the resin in the prepreg is sufficiently cured.

プリプレグ3は、ガラス繊維等のマットにエポキシ樹脂
、フェノール樹脂1.ポリエステル樹脂、アリル樹脂等
の熱硬化性樹脂を含浸させたもので、厚さ0.1〜0.
2111m程度のものを数枚重ねて用いるのがよい。
Prepreg 3 is a mat made of glass fiber or the like, epoxy resin, phenol resin 1. It is impregnated with thermosetting resin such as polyester resin or allyl resin, and has a thickness of 0.1 to 0.
It is best to use several layers of about 2111 m in length.

このように積層板の表面にプリプレグ層3を設けると、
「ひけ」が生じやすい熱可塑性フィルムの性質を補って
表面平滑性が向上し、また絶縁層の耐熱寸法安定性、耐
溶剤性等が向上する。
When the prepreg layer 3 is provided on the surface of the laminate in this way,
This improves the surface smoothness by compensating for the tendency of thermoplastic films to cause "sink marks," and also improves the heat-resistant dimensional stability, solvent resistance, etc. of the insulating layer.

(実施例1) 直径0.5〜5.mmの貫通孔を多数設けた下記2Iの
金属芯板を準備した。
(Example 1) Diameter 0.5-5. A metal core plate of 2I below, which had a large number of mm-sized through holes, was prepared.

a)厚さ1.6111mのアルミ板(表面粗さ1.2μ
、アロジン処理あり) b)厚さ1.6mmのアルミ板(表面粗さ0.2μ、ア
ロジン処理あり゛) これらの芯板の両面に厚さ0.3mmのポリエーテルイ
ミドフィルムを重ね、雰囲気圧力を変えて、プレス圧力
100 kg/ cm2で90分間加熱プレスし、次い
で加圧したまま冷却した。次いでその樹脂層の両面に、
厚さQ、1mmのガラスエポキシを2枚ずつ重ね、温度
170℃、圧力50 kg/ cm2で10分間プレス
(常圧雰囲気下)して積層板を得た。
a) Aluminum plate 1.6111m thick (surface roughness 1.2μ
b) Aluminum plate with a thickness of 1.6 mm (surface roughness 0.2μ, with alodine treatment) A polyetherimide film with a thickness of 0.3 mm was placed on both sides of these core plates, and the atmospheric pressure was applied. The material was heated and pressed for 90 minutes at a press pressure of 100 kg/cm2, and then cooled while being pressurized. Then, on both sides of the resin layer,
Two sheets of glass epoxy having a thickness of Q and 1 mm were stacked one on top of the other and pressed for 10 minutes at a temperature of 170° C. and a pressure of 50 kg/cm 2 (under normal pressure atmosphere) to obtain a laminate.

そして孔内部の樹脂を切削して開口部を設け、その表面
を顕微鏡観察して気泡の有無を検査し、直径2μm以上
の気泡がないものを○、あるものをXとした。また芯板
とフィルムの接着力をJrS  C6481により測定
した。その結果を第1表に示す。
Then, the resin inside the hole was cut to form an opening, and the surface was observed under a microscope to check for the presence of air bubbles. Those with no air bubbles with a diameter of 2 μm or more were rated ○, and those with bubbles were rated X. Furthermore, the adhesive strength between the core plate and the film was measured using JrS C6481. The results are shown in Table 1.

第1表 NO減圧度 芯板 温度   接着力  気泡(mml
1g)     (’C)   (ka/cm)1  
600   a  350  1.3  02  60
0   a  370  2.2  03  500 
  a  370  2.OX4    0   a3
70  1.1   X5  600   b  37
0  0.9  0以上の結果からあきらかなように、
減圧しないNo4および減圧度が不足しているNo3で
は十分気泡が1友けないが、減圧下で加熱圧着した本発
明方法によるもの(No 1〜2および5)では孔表面
に気泡が残らない。また、高い接着力を得るには、芯板
としては表面粗面板が好ましいことがわかる。
Table 1 NO degree of decompression Core plate Temperature Adhesive force Air bubbles (mml
1g) ('C) (ka/cm)1
600 a 350 1.3 02 60
0 a 370 2.2 03 500
a 370 2. OX4 0 a3
70 1.1 X5 600 b 37
0 0.9 As is clear from the results of 0 or more,
No. 4, which is not depressurized, and No. 3, which is insufficiently depressurized, do not leave enough air bubbles, but no air bubbles remain on the pore surfaces in No. 1 to No. 2 and No. 5, which are made by the method of the present invention and are heat-pressed under reduced pressure. It is also understood that a rough-surfaced plate is preferable as the core plate in order to obtain high adhesive strength.

(実施例2) 表面を硫酸アルマイト処理したアルミ芯板a)(表面粗
さ1.3友m )(7)両面に、厚さ0.3mn+のボ
リエーテルサルフAンフイルムを重ね、600IllR
Hgの雰囲気下で、温度330℃、プレス圧力100 
kg/ cm2で75分間加熱プレスした。
(Example 2) Aluminum core plate a) whose surface was treated with sulfuric acid alumite (surface roughness 1.3mm) (7) A polyether sulfur A film with a thickness of 0.3mm+ was overlaid on both sides, and 600IllR
Under Hg atmosphere, temperature 330°C, press pressure 100
It was heated and pressed at kg/cm2 for 75 minutes.

次いでその樹脂層の両面に、実施例1と同様にしてガラ
スエポキシを積層し、第2図に示す構成の積層板を得た
。積層板は、気泡がなく、各層の接着力も十分あり、か
つ表面平滑であった。
Next, glass epoxy was laminated on both sides of the resin layer in the same manner as in Example 1 to obtain a laminate having the structure shown in FIG. 2. The laminate had no air bubbles, sufficient adhesion between the layers, and a smooth surface.

(発明の効果) 本発明によれば、芯板の表面はもとより、従来気泡の残
存が著しかった孔部においても気泡がない積層板が得ら
れる。
(Effects of the Invention) According to the present invention, a laminate can be obtained that is free of air bubbles not only on the surface of the core plate but also in the pores where bubbles have conventionally remained significantly.

【図面の簡単な説明】[Brief explanation of drawings]

第1〜2図は、本発明方法により得られる積層板の例を
示す断面図、第3図は、従来の8!1層板を示を断面図
。 1・・・金属芯板  11・・・・・・貫通孔  2・
・・耐熱性熱可塑性樹脂層  3・・・プリプレグ第1
図 易2凪 第3図
1 and 2 are cross-sectional views showing an example of a laminated plate obtained by the method of the present invention, and FIG. 3 is a cross-sectional view showing a conventional 8!1 layer plate. 1... Metal core plate 11... Through hole 2.
...Heat-resistant thermoplastic resin layer 3...Prepreg 1st
Zui 2 Calm Figure 3

Claims (1)

【特許請求の範囲】  耐熱性熱可塑性樹脂フィルムと、貫通孔を有する金属
芯板とを、減圧度600mmHg以上の減圧雰囲気下に
おいて、温度200〜450℃、圧力50〜300kg
/cm^2の範囲内の条件で加熱プレスし、前記樹脂に
より前記芯板の表面を被覆するとともに前記貫通孔を充
填することを特徴とする金属ベース積層板の製法。 2)金属芯板として、表面粗さが1μm以上の微細粗面
板を用いることを特徴とする特許請求の範囲第1項記載
の方法。
[Scope of Claims] A heat-resistant thermoplastic resin film and a metal core plate having through holes are heated at a temperature of 200 to 450°C and a pressure of 50 to 300 kg in a reduced pressure atmosphere with a degree of reduced pressure of 600 mmHg or more.
A method for producing a metal-based laminate, which comprises heating and pressing under conditions within a range of /cm^2 to cover the surface of the core plate with the resin and filling the through holes. 2) The method according to claim 1, characterized in that a finely roughened plate having a surface roughness of 1 μm or more is used as the metal core plate.
JP13546585A 1985-06-21 1985-06-21 Making of metal based laminate board Granted JPS61294894A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13546585A JPS61294894A (en) 1985-06-21 1985-06-21 Making of metal based laminate board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13546585A JPS61294894A (en) 1985-06-21 1985-06-21 Making of metal based laminate board

Publications (2)

Publication Number Publication Date
JPS61294894A true JPS61294894A (en) 1986-12-25
JPH0564879B2 JPH0564879B2 (en) 1993-09-16

Family

ID=15152346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13546585A Granted JPS61294894A (en) 1985-06-21 1985-06-21 Making of metal based laminate board

Country Status (1)

Country Link
JP (1) JPS61294894A (en)

Also Published As

Publication number Publication date
JPH0564879B2 (en) 1993-09-16

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