JPS61292600A - X-ray optical system - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an X-ray optical system suitable for use in an objective lens and an eyepiece of an X-ray microscope or the like.

[Prior Art] Among these, a method using a rotating body reflecting mirror is attracting attention. This optical system is configured such that, for example, the inner surfaces of the hyperboloid of revolution and the ellipsoid of revolution are used as total reflection surfaces for X-rays, and the inner surfaces totally reflect the X-rays to condense the X11. There is. The focused X-rays are irradiated onto the sample, and the X-rays diffracted by the sample are transmitted through an objective lens consisting of an ellipsoid of revolution and a hyperboloid of revolution, and an eyepiece consisting of an ellipsoid of revolution and a hyperboloid of revolution. An X-ray image of the sample can be obtained by forming an image using an X-ray optical system composed of a lens.

[Problems to be Solved by the Invention] The above-mentioned X-ray optical system uses a large number of bifocal rotating curved surfaces, and the focal point of each curved surface must be placed on a straight optical axis. The imaging direction is also limited. In addition, the X-ray anti-sword surface inside the rotating curved body requires high-precision machining, but since it is a rotating surface, the machining is extremely difficult.

The present invention has been made in view of the above-mentioned points, and an object of the present invention is to provide an X-ray optical system in which the direction of image formation can be arbitrarily set and the lens can be easily processed.

[Means for Solving the Problems] The X-ray optical system based on the present invention has a bifocal rotating curved body, and has a second optical system that focuses X-rays from an object point by total reflection on the inner surface of the curved body. 1 lens, and a second lens that has a bifocal curved body and completely reflects the X-rays focused by the first lens on the inner surface of the curved body to form an image. The optical axes of the first and second lenses are arranged to be inclined so as to intersect at the condensing point of the first lens, and
The bifocal curved body constituting the lens is characterized by being formed in the shape of a rotating body with a part cut out.

[Operation] X-rays from the X-ray source are focused and irradiated onto the sample. X-rays from the sample are focused by a first X-ray lens consisting of a bifocal rotating curved surface. The focused X-rays are imaged by a second X-ray lens made of a bifocal curved body,
The optical axis that connects the two focal points of the bifocal curved surface that constitutes the second lens is tilted at a predetermined angle with respect to the optical axis that connects the two focal points of the bifocal curved surface that constitutes the first lens. One focal point of the curved surface of the second lens is arranged to coincide with the focal point of the X-rays by the first lens. Further, since X-rays do not enter a part of the curved body constituting the second X-ray lens by tilting the optical axis, the curved body has a shape in which that part is cut out. .

As a result, the imaging direction of X-rays can be changed according to the direction of the optical axis of the second lens, and processing such as high-precision polishing of a partially cut-out curved body is easy. Become.

[Example] An embodiment of the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 shows an X-ray microscope embodying the present invention.
is, for example, a rotating anticathode type X-ray source, and among the X-rays generated from the X-ray source, X-rays traveling in a specific direction are totally reflected by the first X-ray reflecting mirror 2. The X-rays totally reflected by the first reflecting mirror are totally reflected by the second X-ray reflecting mirror 3 to become X-rays parallel to the optical axis 01. The first and second X-ray reflecting mirrors 2.3 are each rotating bodies,
For example, the first anti-tFJM2 is a hyperbolic mirror of revolution, and the second reflecting mirror 3 is a parabolic mirror of revolution.

The X-rays parallel to the optical axis are focused onto the sample 6 by third and fourth X-ray reflecting mirrors 4.5. In this embodiment, the third reflecting mirror 4 is a parabolic mirror of revolution, and the fourth reflecting mirror 5 is a hyperbolic mirror of revolution. Here, 7 is the first
and an X-ray shielding member for shielding X-rays other than xIjI that are totally reflected by the second reflecting mirrors 2 and 3; 8 is a focal point of an X-ray condensing system consisting of the first to fourth This is a diaphragm plate arranged on a plane, and the diaphragm plate 8 is provided with a ring-shaped slit. By irradiating the sample 6 with X-rays, the X-rays diffracted from the sample 6 undergo fifth and sixth reflections vi10
, 11, the fifth reflecting mirror 10 is a hyperboloid of revolution, the sixth reflecting mirror 11 is an ellipsoid of revolution, and the fifth and sixth reflection The mirror constitutes an objective lens for X-rays diffracted from the sample 6. X-rays diffracted from the sample 6 by the objective lens are focused on one focal point F1 of the spheroidal mirror 11 on the optical axis 01.

The X-rays focused on the focal point F1 are further totally reflected by the seventh and eighth reflecting mirrors 12.13, but the seventh reflecting mirror 12 is a rotating hyperboloid mirror, and the eighth The reflecting mirror 13 is a spheroidal mirror, and the seventh and eighth reflecting mirrors constitute an eyepiece. The respective focal points of the seventh and eighth reflecting mirrors 12.13 are arranged on the optical axis 02 which intersects the optical axis 01 at the focal point F1. The seventh and eighth reflecting mirrors 12 and 13 have a shape in which a part of a rotating body is cut out, and at least a reflecting surface is formed in a portion where the X-rays from the focal point F1 are incident. Reference numeral 14 denotes an imaging tube disposed at the imaging position of the X-ray image by the imaging system, that is, the focal position F2 of one of the eighth reflecting mirrors, and the signal detected by the imaging tube 14 is
The signal is supplied to an amplifier 15 for amplification and then supplied to a display means 16 such as a cathode ray tube. Note that if a reflecting mirror whose surface is provided with a multilayer film is used as each reflecting mirror, the flatness of the focused X-rays can be increased.

In the configuration described above, among the X-rays generated from the X-ray source 1, the X-rays emitted in a specific direction are transmitted to the first and second XFs.
The light is totally reflected by A anti-rJJ mirror 2.3 @ol
Since the other X-rays are blocked by the Xa shielding plate 7, the aperture plate 8 is irradiated with ring-shaped X-rays. The ring-shaped X-ray is
is shaped by passing through the slit of the aperture plate 8, and the shaped XI! The third and fourth reflecting mirrors 4 and 5 focus the light onto a minute point on the sample 6.

The X-rays irradiated to the sample 6 depend on the thickness of the sample, or
It is diffracted according to the difference in its constituent components. The diffracted light is totally reflected by the fifth and sixth reflecting mirrors 10.11 constituting the objective lens, and is focused at one focal point F1 of the reflecting mirror 11, which is an ellipsoid of revolution.

The focused X-rays are imaged by an eyepiece; one focus of the hyperboloid reflector 12 constituting the eyepiece is aligned with the focus point F1, and the other focus is formed on an ellipsoid. It is arranged in common with one focal point of the reflecting mirror 13. The recording tube 14 is disposed at the other focal point F2 of the ellipsoidal reflecting mirror 13, as described above. As a result, the X-rays from the focal point F1 are totally reflected by the hyperboloid skin D[12, then totally reflected by the ellipsoid skin tA mirror 13, and imaged at the focal point F2. Here, the respective focal points of the hyperboloid reflector 12 and the ellipsoid reflector 13 constituting the eyepiece are arranged on the optical axis 02 which intersects the optical axis o1 at the condensing point F2, but both optical axes Even if the X-ray beam is misaligned, there is no problem in forming an X-ray image because the optical axis is tilted so that the focused X-ray beam is totally reflected by the hyperboloid 12.

Furthermore, since the optical axis is tilted in this way, the hyperboloid reflector 12
The ellipsoidal skin tA mirror 13 does not need to be a completely rotating body, and it is sufficient if there is a total reflection surface only in the portion where the X-rays are incident.

Therefore, as the reflecting mirrors 12 and 13, it is possible to use a reflecting mirror having a shape in which a part of the rotating body, into which X-rays do not enter, is cut out. In this way, a reflecting mirror that is partially a rotating body can perform polishing of the reflecting surface, deposition of a multilayer film on the reflecting surface, etc. more easily than a completely rotating body, and is easy to manufacture. becomes.

Although one embodiment of the present invention has been described in detail above, the present invention is not limited to this embodiment and can be modified in many ways. for example,
Although a lens system combining two types of curved bodies was used as the objective lens or eyepiece, each lens may also be composed of a single curved body, or conversely, 3F! A lens system combining the above curved surfaces may also be used.

[Effects] As described in detail above, in the present invention, the optical axis of the second lens such as the eyepiece is tilted with respect to the optical axis of the first lens such as the objective lens. The direction of image formation can be changed to a desired direction. Furthermore, since the optical axis of the second lens is tilted, the curved body constituting the second lens can be shaped like a part of a rotating body, and the lens can be manufactured easily.

[Brief explanation of the drawing]

The accompanying drawings are diagrams showing an X-ray microscope that is an embodiment of the present invention. 1... X-ray source 2.3.4.5... X-ray reflecting mirror 6... Sample 7... X-ray shielding plate 8... Aperture plate 9... Slit 10.11.12 .13
... X-ray reflecting mirror 14 ... image carrier tube 15 ... amplifier 16 ... display means

Claims (1)

[Claims] (1) A first lens having a bifocal rotating curved body and condensing X-rays from an object point by total reflection on the inner surface of the curved body; and a second lens that completely reflects the X-rays focused by the lens on the inner surface of the curved body to form an image, and the optical axes of the first and second lenses are aligned with the first lens. The bifocal curved surface body constituting the second lens is arranged so as to intersect at the focal point of the second lens, and is formed in the shape of a rotating body with a part cut out. X-ray optical system.