JPS6129055A - Fluorescent display panel - Google Patents

Fluorescent display panel

Info

Publication number
JPS6129055A
JPS6129055A JP14987784A JP14987784A JPS6129055A JP S6129055 A JPS6129055 A JP S6129055A JP 14987784 A JP14987784 A JP 14987784A JP 14987784 A JP14987784 A JP 14987784A JP S6129055 A JPS6129055 A JP S6129055A
Authority
JP
Japan
Prior art keywords
layer
thin film
film conductor
fluorescent display
display section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14987784A
Other languages
Japanese (ja)
Inventor
Masanobu Yamaguchi
正信 山口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP14987784A priority Critical patent/JPS6129055A/en
Publication of JPS6129055A publication Critical patent/JPS6129055A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/15Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen with ray or beam selectively directed to luminescent anode segments

Landscapes

  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)

Abstract

PURPOSE:To improve operation efficiency and to facilitate in-lined and automated operation by forming on the insulation substrate, a thin film conductor layer of thin mesh type etc. placed on the upper face of the insulator layer and on the front face of the fluorescent body layer, so as to form a conductor layer control grid. CONSTITUTION:Stripe-shaped film conductor layers 10, 10'... crossing the stripe- shaped base electrodes 2 at a right angle and wiring layers 11, 11'... extending from one end of the conductor layers 10, 10'... are formed, by etching the thin film conductor layer 10 and end portions of the wiring layer 11, 11'... are connected to conductor supporting units 11, 11'... thus the stripe-shaped thin film conductor layers 10, 10'... are electrically connected to outer terminals 4, 4'.... Then, an electronic control grid is easily formed and connected to the outer connecting terminal. Therefore, operation efficiency can be improved and inlined and automated operation can be facilitated.

Description

【発明の詳細な説明】 (1)発明の域する分野の説明 本発明は加速制御1圧が低く一般には100〜200v
以下で動作させる低速電子仇による真空蛍光表示装置に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION (1) Description of the field to which the invention applies
This invention relates to a vacuum fluorescent display device using a low-speed electronic enemy that operates as follows.

(2)従来の技術の説明 最近、この袖の真空蛍光表示装置においても、ひじよう
にファイン・ピッチのドツト表示パターンが実用化され
ているが、低速官、子線真空蛍光表示装置においては電
子をコントロールするために電子源と表示パターンの間
に表示パターンに対向してコントロールグリッドを設置
−する必要があるため、上述したファインピッチのドツ
ト表示パターンのものについては厚さ005龍程度の金
托板をエツチングして線状もしくは適当な格子状とした
ものを、表示パターンの外側に設置した適当な高さを有
する絶縁根の上に%適当な張力を与えて、フリットツノ
ラス等で固看する方法等がとられている。更にこれらコ
ントロールグリッドと外部電源との接続は、外部接続用
のパッドを真空蛍光表示装置の基板に設けてワイヤーボ
ンディングを行って外部接続用端子に接続したり、ある
いは前記コントロールグリッドをその塘ま真空蛍光表示
装置の容器の外まで延長してとり出し真空蛍光表示装置
固定用を兼ねるプリント基板に直接半田付は等を行って
外部との接続が行われたりしている。
(2) Explanation of the prior art Recently, fine-pitch dot display patterns have been put into practical use in vacuum fluorescent display devices as well, but in low-speed and sub-line vacuum fluorescent display devices, electronic In order to control the display pattern, it is necessary to install a control grid between the electron source and the display pattern, facing the display pattern, so for the fine-pitch dot display pattern mentioned above, a metal grid with a thickness of approximately 005 mm is used. The plate is etched into a line or a suitable grid shape, and an appropriate tension is applied to an insulating root of an appropriate height placed outside the display pattern, and the plate is fixed with a fritted horn or the like. Methods are being taken to do so. Furthermore, these control grids can be connected to an external power source by providing external connection pads on the substrate of the vacuum fluorescent display device and connecting them to external connection terminals by wire bonding, or by connecting the control grids to external connection terminals by connecting them to external connection terminals, or Connections with the outside are made by extending the vacuum fluorescent display device outside the container, taking it out, and directly soldering it to a printed circuit board that also serves as a means for fixing the vacuum fluorescent display device.

しかしながら、上述した従来のコントロールグリッド形
成方法や外部接続方法では多数の細い金執線を取り扱う
ため作業がひじように特殊であシ、パターンの細分化桁
数の増犬忙伴い多大の工数を要している。
However, in the conventional control grid formation method and external connection method described above, the work is quite special as it involves handling a large number of thin wires, and a large number of man-hours are required as the number of digits for pattern subdivision increases. are doing.

(3)発明の目的 本発明の目的は上述したようなコントロールグリッドの
形成、接続に伴う作業上の問題点をなくし、かつ一般に
真空蛍光表示装置の製造において主工程となっている厚
膜、薄膜等の技術を利用してコントロールグリッドの形
成を行い作業性を大幅に改善すると共に、大量生産に際
しインライン化、自動化が容易な真空蛍光表示装置を提
供すると七にある。
(3) Purpose of the Invention The purpose of the present invention is to eliminate the operational problems associated with the formation and connection of control grids as described above, and to solve the problem of thick film and thin film, which is generally the main process in manufacturing vacuum fluorescent display devices. The present invention aims to provide a vacuum fluorescent display device that greatly improves workability by forming a control grid using the technology described above, and which can be easily integrated in-line and automated during mass production.

(4)発明の搗成および作用の説明 以下に図面を用いて本発明の詳細な説明する。(4) Development of the invention and explanation of its operation The present invention will be described in detail below using the drawings.

第1図は本発明による真空蛍光表示装置の一実施例を示
す分解破断斜視図である。第2図は第1図の組立封着彼
の断面模式図である。
FIG. 1 is an exploded perspective view showing an embodiment of a vacuum fluorescent display device according to the present invention. FIG. 2 is a schematic cross-sectional view of the assembly and seal of FIG. 1.

■はガラス板等の絶縁基板であり、この上に真空蒸着法
によりAl!薄膜〜を形成したあと、フォトレジスト法
によりエッチングを行い、ストライプ状の下地電極2.
2′・・・・・・を形成する。
■ is an insulating substrate such as a glass plate, on which Al is applied by vacuum evaporation method! After forming the thin film ~, etching is performed using a photoresist method to form a striped base electrode 2.
2'... is formed.

更に絶縁基板1の上にAgペースト等を印刷して、外部
接続端子3.3′・・・・・、4.4’・・・・・・及
び配線5.5′・・・・・・、 6 、6’・・・・・
・を形成し、この時前記下地電極2゜2′・・・・・・
と外部接続端子3.3′叩・・等の接続は配線5゜5′
・・・・・・等により行われる。またコントロールグリ
ッド接続用の外部端子4.4′・・印・に連なる配線6
゜6′・・・・・・の端部には銅ペーストを印刷して導
体支柱7.7′・・・・・・を形成する。次に下地電極
2.2′・・・・・・の表示エリア部上には電着法によ
り蛍光体層8.8’−・・・・・を形成したあと、前記
外部接続端子3,3′・四・、4゜4′・・・・・・が
形成された絶縁基板1の外周部、前記導体支柱部7.7
′・・・・・・更に前記蛍光体層8,8′・・・・・・
を除いて、絶縁基板1の上に絶縁層9全印刷法により、
前記蛍光体8.8′・・・・・・より厚く形成する。次
に前記蛍光体m 8 、8’・・・・・・部の凹形状部
を埋める形で前記絶縁層9と同じ高さに有機樹脂層を塗
布し、その後、前記絶縁層面と有機樹脂層面全面に真空
蒸着法にようAノ等の薄膜導体層を形成する。次に前記
薄膜導体層を7オトレジスト法により工、テングして前
記ストライプ状の下地電極方向と直交するストライプ状
薄膜導体層10.10’・・・・・・およびストライプ
状電極10.10’・・・・・・の一端より伸びる配線
層11.11’・・・・・・を形成し、かつ配線層11
.11’・・・・・・の端部は導体支柱部11.11’
・・・・・・に接続することによりストライプ状薄膜導
体層10.10’・旧・・が、外部接続端子4.4′・
・・・・・等に電気的に接続される。このあと溶剤によ
り前記有機樹脂層を溶がして除去する。
Furthermore, Ag paste or the like is printed on the insulating substrate 1 to form external connection terminals 3.3'..., 4.4'... and wiring 5.5'... , 6, 6'...
・At this time, the base electrode 2゜2'...
and external connection terminal 3.3', etc. are connected by wiring 5゜5'
This is done by...etc. Also, the wiring 6 connected to the external terminal 4,4'...marked for control grid connection.
Copper paste is printed on the ends of ゜6', . . . to form conductor supports 7, 7', . Next, a phosphor layer 8.8'-... is formed on the display area of the base electrode 2.2'... by electrodeposition, and then the external connection terminals 3, 3 ', 4, 4゜4'..., the outer peripheral portion of the insulating substrate 1, the conductor support portion 7.7
'...Furthermore, the phosphor layers 8, 8'...
By printing the entire insulating layer 9 on the insulating substrate 1, except for
The phosphors 8, 8' are formed thicker. Next, an organic resin layer is applied to the same height as the insulating layer 9 to fill the concave portions of the phosphors m 8 , 8' . . . , and then the insulating layer surface and the organic resin layer surface A thin film conductor layer such as A is formed on the entire surface by vacuum evaporation. Next, the thin film conductor layer is etched and stretched by the 7-photoresist method to form striped thin film conductor layers 10.10', which are perpendicular to the direction of the striped base electrode, and striped electrodes 10.10'. . . . A wiring layer 11, 11' . . . extending from one end is formed, and the wiring layer 11
.. The ends of 11'... are conductor support parts 11.11'
By connecting to..., the striped thin film conductor layer 10.10'.old... becomes the external connection terminal 4.4'.
It is electrically connected to...etc. Thereafter, the organic resin layer is dissolved and removed using a solvent.

次に内面にネサ膜等の透明導体膜を形成したガラス板よ
り成る透明絶縁基板18とガラス&を整、 彫加工した
側面板16との間に熱電子源の供電用外部リードフレー
ム12と一体となったFe−Ni−Cr糸の金属支持板
をはさみ、フリットガラス17等で気密固着し、更に排
気管19を取)つけまた側面板16の底面にはフリ、ト
ガラスを塗布しカバーガラスを形成する。尚、前記金属
支持板上にはバネ状支持体13全設置し、対向する固定
支持部13′との間に、熱電子放射物質をタングステン
線に塗布した細線状熱電子源14を架張設置すると共に
リング状ゲッター15を設置する。
Next, an external lead frame 12 for power supply of the thermionic source is integrated between a transparent insulating substrate 18 made of a glass plate with a transparent conductive film such as Nesa film formed on the inner surface, and a side plate 16 which has been prepared and carved with glass. Sandwich the metal support plate of the Fe-Ni-Cr thread, fix it airtight with frit glass 17, etc., and attach the exhaust pipe 19).Fri-to-glass is applied to the bottom of the side plate 16, and a cover glass is attached. Form. Incidentally, the spring-like support 13 is entirely installed on the metal support plate, and a thin wire thermionic source 14, which is a tungsten wire coated with a thermionic emitting material, is installed in a stretched manner between it and the opposing fixed support part 13'. At the same time, a ring-shaped getter 15 is installed.

上述した工程を経た前記絶縁基板1と前記カバーガラス
は前記外部接続用端子3,3′・・・・・・、4.4’
・・・・・・部を容器の外部に位置するようにして、か
つ蛍光体Ji&10.10’・・・・・・面と線状電子
源14を対向するようにして組立て側面板16の底面に
塗布した7リツトガラスで封着し気密シールを行う。こ
の後、排気台に取り付けて内部を高真空に排気したあと
封止する。次にリングゲッタ一部を為周波加熱法により
加熱し、Ha等のゲッター剤をリングゲッター近傍内壁
に飛着させ、継続して高真空に維持出来るようにする。
The insulating substrate 1 and the cover glass which have undergone the above-described steps are used as the external connection terminals 3, 3', 4.4'.
. . . is located outside the container, and the phosphor Ji&10.10' . It is sealed with 7-lit glass coated on the glass to create an airtight seal. After this, it is attached to an exhaust stand, the inside is evacuated to a high vacuum, and then sealed. Next, a part of the ring getter is heated by a frequency heating method, and a getter agent such as Ha is deposited on the inner wall near the ring getter, so that a high vacuum can be continuously maintained.

外部接続用端子3.3′・・・・・・。External connection terminal 3.3'...

4.4′・・・・・・には、ポリイミド等の耐熱性有機
樹脂フィルム上に前記外部接続用端子3.3′・・・・
・・、4.4’・・・・・・と同一ピッチでCu薄膜導
体配線を設置したフレキシブルフレームリードを半田付
けし、更に半田付は部には一ヒから光硬化樹脂を塗布し
て補強し、外部接続が行えるように真空蛍光表示装備が
完成する。
4.4'..., the external connection terminals 3.3'... are placed on a heat-resistant organic resin film such as polyimide.
..., 4.4'... Solder the flexible frame leads with Cu thin film conductor wiring installed at the same pitch, and furthermore apply photocuring resin to the soldering part to reinforce it. Vacuum fluorescent display equipment was completed to enable external connections.

尚本実施例はドツト表示パターンの真空蛍光表示装置に
ついて行ったが、数字1文字等の固定表示に使用される
いわゆるセグメントパターンの真空蛍光表示装置につい
て実施可能なことはいう壕でもない。
Although the present embodiment has been described with respect to a vacuum fluorescent display device with a dot display pattern, it is not possible to implement the present invention with a vacuum fluorescent display device with a so-called segment pattern used for fixed display of a single number or character.

(5)効果の説明 以上説明したように、本発明による真空蛍光表示装置は
従来のような特殊な工程を経ることなく薄膜や厚膜技術
をオリ用し、容易に電子コントロールグリッドの形成及
び電子コントロールグリッドと外部接続用端子の接続が
行われる。このように微細なグリッド形成、外部接続が
容易であり、またインライン化による自動化、省力化が
可能であり、従来に比し、作業性の良い、安価な真空蛍
光表示装置が侍られる利点がある。
(5) Explanation of Effects As explained above, the vacuum fluorescent display device according to the present invention uses thin film or thick film technology without going through any special processes as in the past, and can easily form electronic control grids and The control grid and external connection terminals are connected. In this way, it is easy to form a fine grid and connect externally, and it is possible to automate and save labor by in-line, and has the advantage of being able to use vacuum fluorescent display devices that are easier to work with and cheaper than conventional ones. .

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明による真空蛍光表示装置の一実施例を示
す分解破断ギ1視図、第2図は第1図の組立封着後の断
簡模式図である。 1・・・・・・絶縁基板、2・・・・・・下地電極、3
(3’・・・・・・)。 4(4′・・・・・・)・・・・・・外部接続端子、5
(5′・・・・・・)、6(6’・・・・・・)・・・
・・・配線、7(7’・・・・・・)・・・・・・導体
支柱、8(8’・・・・・)・・・・・−′itグ光体
ノーノt19・・・・・・絶奪JとJ髪ビレ、10(1
0’・・・・・・)・・・・・・薄膜導体層、11 (
11’・・・・・・)・・・・・・配線層、12・・・
・・・熱電子源供電用リードフレーム、13・・・・・
・バネ状支持体、13′・・・・・・固定支持部、14
・・・・・・細線状熱電子源、15・・・・・・リング
状ゲッター、16・・・・・・側面板、17・・・・・
・フリットガラス、18・・・・・・透明絶縁基板、1
9・・・・・・排気管。 渠2 図
FIG. 1 is an exploded, cut-away view showing one embodiment of a vacuum fluorescent display device according to the present invention, and FIG. 2 is a schematic fragmentary view of FIG. 1 after assembly and sealing. 1...Insulating substrate, 2...Base electrode, 3
(3'...). 4 (4'...)...External connection terminal, 5
(5'...), 6 (6'...)...
... Wiring, 7 (7'...)... Conductor support, 8 (8'...)...-'it gluing body no-no t19... ... Zetto J and J hair fin, 10 (1
0'...)... Thin film conductor layer, 11 (
11'...)...Wiring layer, 12...
...Lead frame for power supply of thermionic source, 13...
・Spring-like support body, 13'...Fixed support part, 14
... Thin wire thermionic source, 15 ... Ring-shaped getter, 16 ... Side plate, 17 ...
・Frit glass, 18...Transparent insulating substrate, 1
9...Exhaust pipe. Ditch 2 diagram

Claims (1)

【特許請求の範囲】[Claims] 絶縁基板上に蛍光層を備えた表示部を有し、前記表示部
に対向して電子源を有し、かつ前記蛍光体層表示部と前
記電子源の間にコントロールグリッドを設置し、前記蛍
光体層表示部を、電子線を加速制御して刺激し、発光さ
せる蛍光表示パネルにおいて、前記絶縁基板上に、前記
蛍光体層表示部をさけて、かつ前記蛍光体層より厚い絶
縁体層を形成し、かつ前記蛍光体層表示部前面は細い、
メッシュ状またはストライプ状とした薄膜導体層を、前
記絶縁体層面上及び前記蛍光体層前面に形成し、前記薄
膜導体層をコントロールグリッドとしたことを特徴とす
る蛍光表示パネル。
A display section including a fluorescent layer on an insulating substrate, an electron source facing the display section, and a control grid installed between the phosphor layer display section and the electron source, In a fluorescent display panel in which a body layer display section is stimulated to emit light by accelerated control of an electron beam, an insulating layer is provided on the insulating substrate, avoiding the phosphor layer display section and being thicker than the phosphor layer. formed, and the front surface of the phosphor layer display section is thin;
A fluorescent display panel characterized in that a thin film conductor layer in a mesh shape or a stripe shape is formed on the surface of the insulator layer and in front of the phosphor layer, and the thin film conductor layer is used as a control grid.
JP14987784A 1984-07-19 1984-07-19 Fluorescent display panel Pending JPS6129055A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14987784A JPS6129055A (en) 1984-07-19 1984-07-19 Fluorescent display panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14987784A JPS6129055A (en) 1984-07-19 1984-07-19 Fluorescent display panel

Publications (1)

Publication Number Publication Date
JPS6129055A true JPS6129055A (en) 1986-02-08

Family

ID=15484589

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14987784A Pending JPS6129055A (en) 1984-07-19 1984-07-19 Fluorescent display panel

Country Status (1)

Country Link
JP (1) JPS6129055A (en)

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