JPS61287285A - Laser oscillation tube - Google Patents

Abstract

PURPOSE:To increase the output of a laser or to reduce the size of a laser oscillation tube by mounting, containing or connecting a heat pipe partly at, in or with the oscillation tube to cool a discharge electrode by the pipe. CONSTITUTION:A heat pipe 4 is buried in a discharge electrode 2 in an oscillation tube vessel 1. The electrode 2 becomes high temperature by a pulse-shaped high voltage discharge in the tube 1. The high temperature heat is externally removed by fins 3, and the mounting portion of the fins 3 also becomes a high voltage connector. The heat applied to the surface of the electrode 2 is uniformly transported axially by the pipe 4, and then transmitted by the fins to the exterior of the vessel 1. Thus, it can prevent the electrode 2 from thermally deforming to efficiently remove the heat and to reduce the size of the tube.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] Used for efficient heat removal from laser oscillation tubes, especially gas discharge laser tubes.

[Background of the invention]

Conventional laser oscillator tubes are described in the Laser Handbook (Ohmsha,
As shown in (1989), a water cooling jacket or the like was used to cool the laser oscillation tube. However, this method requires a cooling device and poses problems in terms of movement of the laser device.

[Purpose of the invention]

An object of the present invention is to provide a laser oscillation tube equipped with a heat pipe for efficient cooling.

[Summary of the invention]

In the present invention, the heat pipe is a heat transport device without a driving part, and the heat pipe container is characterized by being isothermal. By applying this heat pipe, heat is removed from the laser oscillation tube, and the temperature of the laser oscillation tube and discharge electrode is kept constant, thereby preventing thermal deformation.

[Embodiments of the invention]

An embodiment of the present invention will be described below with reference to FIG. In this figure, a heat pipe 4 is embedded in a discharge electrode 2 inside a laser oscillation tube container 1, and a fin 3 is installed outside the laser oscillation tube container 1 in order to remove it. fin,
The part where No. 3 is installed also serves as a high voltage connection. Heat applied to the surface of the discharge electrode 2 is uniformly transported in the axial direction by the heat pipe 4, and then transmitted to the outside of the laser oscillation tube container 1 by the fins. With such a structure, thermal deformation of the discharge electrode 2 can be prevented and heat can be removed more efficiently. FIG. 2 shows a conventional laser oscillation tube, and as can be understood from the comparison between FIG. 1 and FIG. 2, the installation of the heat pipe does not make the structure of the laser tube so complicated. Also, heat removal is promoted, so
Even if the laser oscillation tube is downsized, oscillation efficiency is maintained.

FIG. 3 shows another embodiment. In this embodiment, the heat pipe is installed inside the laser oscillation tube container 1.

Due to the discharge of the laser gas, not only the temperature of the discharge electrode 2 rises, but also the laser oscillation tube container 1 becomes hot. Considering the surface area of the laser oscillation tube 1, its cooling effect is large. The heat transferred to the heat pipe, 4, is released into the air by the fins, 3. Even if the heat pipe 4 has a cross-sectional shape as shown in FIG. 3, except for the portion where the discharge electrode 2 and the pre-discharge electrode 5 are located, it still exhibits its functions.

FIG. 4 shows another embodiment according to the present invention. This figure is a longitudinal cross-sectional view of the laser oscillation tube. A discharge is caused between the anode, 9, and the cathode, 10. In particular, since the temperature becomes high in the thin tube section 8, a heat pipe 4 is installed in the thin tube section 8,
Dissipates heat to the outside.

Therefore, it is not necessary to use a heat-resistant material for the narrow tube portion, and an inexpensive laser oscillation tube can be provided.

〔Effect of the invention〕

According to the present invention, by attaching, incorporating, or connecting a heat pipe to a part of the laser oscillation tube, the laser oscillation tube can be efficiently cooled, and the output of the laser can be increased or the size of the laser oscillation tube can be reduced.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of a laser oscillation tube according to an embodiment of the present invention;
FIG. 2 is a cross-sectional view of a conventional laser oscillation tube, FIG. 3 is a cross-sectional view of a laser oscillation tube according to another embodiment of the present invention, and FIG. 4 is a cross-sectional view of a laser oscillation tube according to another embodiment of the present invention. FIG. DESCRIPTION OF SYMBOLS 1... Laser oscillation tube container, 2... Discharge electrode, 3...
... Fin, 4... Heat pipe, 7... Solenoid, 8... Thin tube part.
・σ≧pa) Agent Patent attorney Katsuma Ogawa −″ Figure 4

Claims (1)

[Claims] 1. A gas laser that oscillates by discharging a single gas or a mixture of gases, and a laser oscillation tube characterized in that a discharge electrode is cooled with a heat pipe.