JPS61284573A - 放電電極 - Google Patents
放電電極Info
- Publication number
- JPS61284573A JPS61284573A JP12748785A JP12748785A JPS61284573A JP S61284573 A JPS61284573 A JP S61284573A JP 12748785 A JP12748785 A JP 12748785A JP 12748785 A JP12748785 A JP 12748785A JP S61284573 A JPS61284573 A JP S61284573A
- Authority
- JP
- Japan
- Prior art keywords
- targets
- plasma
- target
- magnets
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 claims abstract description 9
- 239000003302 ferromagnetic material Substances 0.000 abstract description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 4
- 230000002093 peripheral effect Effects 0.000 abstract description 3
- 229910052742 iron Inorganic materials 0.000 abstract description 2
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12748785A JPS61284573A (ja) | 1985-06-12 | 1985-06-12 | 放電電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12748785A JPS61284573A (ja) | 1985-06-12 | 1985-06-12 | 放電電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61284573A true JPS61284573A (ja) | 1986-12-15 |
| JPH0241584B2 JPH0241584B2 (enrdf_load_stackoverflow) | 1990-09-18 |
Family
ID=14961159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12748785A Granted JPS61284573A (ja) | 1985-06-12 | 1985-06-12 | 放電電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61284573A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01201472A (ja) * | 1988-02-08 | 1989-08-14 | Nippon Telegr & Teleph Corp <Ntt> | プラズマ生成装置およびプラズマを利用した薄膜形成装置 |
| US6761804B2 (en) | 2002-02-11 | 2004-07-13 | Applied Materials, Inc. | Inverted magnetron |
| US8163191B2 (en) | 2005-09-06 | 2012-04-24 | Applied Materials, Inc. | Apparatus and methods for using high frequency chokes in a substrate deposition apparatus |
| WO2012144107A1 (ja) * | 2011-04-18 | 2012-10-26 | Jx日鉱日石金属株式会社 | スパッタリングターゲット |
-
1985
- 1985-06-12 JP JP12748785A patent/JPS61284573A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01201472A (ja) * | 1988-02-08 | 1989-08-14 | Nippon Telegr & Teleph Corp <Ntt> | プラズマ生成装置およびプラズマを利用した薄膜形成装置 |
| US6761804B2 (en) | 2002-02-11 | 2004-07-13 | Applied Materials, Inc. | Inverted magnetron |
| US8163191B2 (en) | 2005-09-06 | 2012-04-24 | Applied Materials, Inc. | Apparatus and methods for using high frequency chokes in a substrate deposition apparatus |
| WO2012144107A1 (ja) * | 2011-04-18 | 2012-10-26 | Jx日鉱日石金属株式会社 | スパッタリングターゲット |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0241584B2 (enrdf_load_stackoverflow) | 1990-09-18 |
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