JPS61283107A - パ−マロイ軟磁性膜の製造方法 - Google Patents

パ−マロイ軟磁性膜の製造方法

Info

Publication number
JPS61283107A
JPS61283107A JP12552485A JP12552485A JPS61283107A JP S61283107 A JPS61283107 A JP S61283107A JP 12552485 A JP12552485 A JP 12552485A JP 12552485 A JP12552485 A JP 12552485A JP S61283107 A JPS61283107 A JP S61283107A
Authority
JP
Japan
Prior art keywords
film
permalloy
voltage
magnetic
target voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12552485A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0337849B2 (enExample
Inventor
Ryoji Namikata
量二 南方
Toru Kira
吉良　徹
Mitsuhiko Yoshikawa
吉川　光彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP12552485A priority Critical patent/JPS61283107A/ja
Publication of JPS61283107A publication Critical patent/JPS61283107A/ja
Publication of JPH0337849B2 publication Critical patent/JPH0337849B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Magnetic Heads (AREA)
  • Thin Magnetic Films (AREA)
JP12552485A 1985-06-10 1985-06-10 パ−マロイ軟磁性膜の製造方法 Granted JPS61283107A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12552485A JPS61283107A (ja) 1985-06-10 1985-06-10 パ−マロイ軟磁性膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12552485A JPS61283107A (ja) 1985-06-10 1985-06-10 パ−マロイ軟磁性膜の製造方法

Publications (2)

Publication Number Publication Date
JPS61283107A true JPS61283107A (ja) 1986-12-13
JPH0337849B2 JPH0337849B2 (enExample) 1991-06-06

Family

ID=14912296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12552485A Granted JPS61283107A (ja) 1985-06-10 1985-06-10 パ−マロイ軟磁性膜の製造方法

Country Status (1)

Country Link
JP (1) JPS61283107A (enExample)

Also Published As

Publication number Publication date
JPH0337849B2 (enExample) 1991-06-06

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