JPS6127605B2 - - Google Patents

Info

Publication number
JPS6127605B2
JPS6127605B2 JP5539476A JP5539476A JPS6127605B2 JP S6127605 B2 JPS6127605 B2 JP S6127605B2 JP 5539476 A JP5539476 A JP 5539476A JP 5539476 A JP5539476 A JP 5539476A JP S6127605 B2 JPS6127605 B2 JP S6127605B2
Authority
JP
Japan
Prior art keywords
spool
sleeve
servo valve
oil
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5539476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS52139878A (en
Inventor
Takeshi Ichanagi
Yoji Inada
Haruo Watanabe
Tomoaki Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5539476A priority Critical patent/JPS52139878A/ja
Publication of JPS52139878A publication Critical patent/JPS52139878A/ja
Publication of JPS6127605B2 publication Critical patent/JPS6127605B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
JP5539476A 1976-05-17 1976-05-17 Oil pressure servo-valve Granted JPS52139878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5539476A JPS52139878A (en) 1976-05-17 1976-05-17 Oil pressure servo-valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5539476A JPS52139878A (en) 1976-05-17 1976-05-17 Oil pressure servo-valve

Publications (2)

Publication Number Publication Date
JPS52139878A JPS52139878A (en) 1977-11-22
JPS6127605B2 true JPS6127605B2 (https=) 1986-06-26

Family

ID=12997294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5539476A Granted JPS52139878A (en) 1976-05-17 1976-05-17 Oil pressure servo-valve

Country Status (1)

Country Link
JP (1) JPS52139878A (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147970A (en) * 1980-04-18 1981-11-17 Hitachi Ltd Pressure control valve
JPH04191508A (ja) * 1990-11-22 1992-07-09 Res Dev Corp Of Japan サーボ弁
JPH06235404A (ja) * 1993-02-09 1994-08-23 Mitsubishi Heavy Ind Ltd 流体圧サーボ弁
JP2007187296A (ja) * 2006-01-16 2007-07-26 Psc Kk 気体圧制御弁

Also Published As

Publication number Publication date
JPS52139878A (en) 1977-11-22

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