JPS6127179Y2 - - Google Patents
Info
- Publication number
- JPS6127179Y2 JPS6127179Y2 JP1981082376U JP8237681U JPS6127179Y2 JP S6127179 Y2 JPS6127179 Y2 JP S6127179Y2 JP 1981082376 U JP1981082376 U JP 1981082376U JP 8237681 U JP8237681 U JP 8237681U JP S6127179 Y2 JPS6127179 Y2 JP S6127179Y2
- Authority
- JP
- Japan
- Prior art keywords
- insertion grooves
- supports
- semiconductor wafers
- stopper
- cassette
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Packaging For Recording Disks (AREA)
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8237681U JPS60103837U (ja) | 1981-06-04 | 1981-06-04 | 半導体ウエフア用カセツト |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8237681U JPS60103837U (ja) | 1981-06-04 | 1981-06-04 | 半導体ウエフア用カセツト |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60103837U JPS60103837U (ja) | 1985-07-15 |
| JPS6127179Y2 true JPS6127179Y2 (cs) | 1986-08-13 |
Family
ID=30212326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8237681U Granted JPS60103837U (ja) | 1981-06-04 | 1981-06-04 | 半導体ウエフア用カセツト |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60103837U (cs) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5238906Y2 (cs) * | 1973-04-26 | 1977-09-03 | ||
| JPS5598822A (en) * | 1979-01-24 | 1980-07-28 | Hitachi Ltd | Wafer holding jig |
-
1981
- 1981-06-04 JP JP8237681U patent/JPS60103837U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60103837U (ja) | 1985-07-15 |
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