JPS5238906Y2 - - Google Patents
Info
- Publication number
- JPS5238906Y2 JPS5238906Y2 JP5058473U JP5058473U JPS5238906Y2 JP S5238906 Y2 JPS5238906 Y2 JP S5238906Y2 JP 5058473 U JP5058473 U JP 5058473U JP 5058473 U JP5058473 U JP 5058473U JP S5238906 Y2 JPS5238906 Y2 JP S5238906Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5058473U JPS5238906Y2 (cs) | 1973-04-26 | 1973-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5058473U JPS5238906Y2 (cs) | 1973-04-26 | 1973-04-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS49149669U JPS49149669U (cs) | 1974-12-25 |
| JPS5238906Y2 true JPS5238906Y2 (cs) | 1977-09-03 |
Family
ID=28194284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5058473U Expired JPS5238906Y2 (cs) | 1973-04-26 | 1973-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5238906Y2 (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5651323Y2 (cs) * | 1976-06-29 | 1981-12-01 | ||
| JPS60103837U (ja) * | 1981-06-04 | 1985-07-15 | エム・セテツク株式会社 | 半導体ウエフア用カセツト |
-
1973
- 1973-04-26 JP JP5058473U patent/JPS5238906Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS49149669U (cs) | 1974-12-25 |