JPS61259163A - Specimen stand apparatus for ultrasonic microscope - Google Patents

Abstract

PURPOSE:To enable efficient observation without being acted by adverse effect due to the change in temp. of the circumference or during observation, by providing a heat generator and a temp. detection means to a specimen stand to control the temp. of an ultrasonic wave propagating medium. CONSTITUTION:A specimen stand 27 has an upper flat surface capable of mounting a specimen and is formed so as to have a lid shape and mounted to the upper part of a support plate 31 through a heat insulating member 34. A flat plate shaped heater 36 is mounted to the back surface inside the specimen stand 27 through an insulating sheet 35. A fine temp. detecting insert slot 38 is formed from the notch part 37 formed to the upper side part of the specimen stand 27 to the center of the specimen stand 27 and a temp. detecting rod shaped thermistor 39 is arranged in said slot 38. The thermistor 39 is connected to a temp. controller to control the flat plate-shaped heater 36.

Description

Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a sample stage device for an ultrasonic microscope that enables efficient observation or inspection without being adversely affected by ambient temperature changes or temperature changes during observation. It is something.

[Prior art and problems to be solved by the invention] The idea of observing the microscopic structure of objects using ultrasound instead of light has been around for a long time, and recently mechanical scanning ultrasound microscopes have been developed. Ta. In principle, this ultrasonic microscope mechanically scans the surface of a sample with a narrowly focused ultrahigh-frequency ultrasonic beam, collects the ultrasonic waves scattered by the sample, converts them into electrical signals, and converts the signals into electric signals. The image is displayed two-dimensionally on a display screen such as a cathode ray tube to obtain a microscopic image. The configuration depends on how the ultrasound is detected; in other words, there are two methods: detecting ultrasound that has passed through the sample while being scattered or attenuated, and detecting ultrasound that has been reflected due to differences in acoustic properties within the sample. Depending on the type, it can be divided into transmissive type and reflective type.

FIG. 6 is a diagram showing the principle of a reflection-type ultrasound microscope, in which a signal from a high-frequency oscillator 1 is supplied by a directional coupler or circulator 2 to an ultrasound transducer 3 for both transmitting and receiving purposes. This signal is converted into an ultrasonic wave, which is transmitted inside through one surface of an ultrasonic focusing lens (acoustic lens) 4 made of an ultrasonic propagation medium material such as sapphire for transmitting and receiving waves, which is attached to one surface (upper end surface). It is radiated and transmitted to the other side. The other surface of this acoustic lens 4 is hollowed out into a spherical shape to form a spherical lens portion 4.
a, and a sample holding plate 5 is disposed facing the spherical lens portion 4a. Water 6, which is an ultrasonic propagation medium, is interposed between the acoustic lens 4 and the holding plate 5,
The sample 7 is placed on the holding plate 5 at the focal position of the spherical lens portion 4a.
It can be installed on. The holding plate 5 is moved in the X and Y directions by a scanning device 8 so as to two-dimensionally scan a plane. Of course, it is also possible to move the acoustic lens 4 in the X and Y directions instead of the holding plate 5,
For example, it is also possible to move the acoustic lens 4 in the X direction and move the -force holding plate 5 in the Y direction.

The scanning bag @8 is tIIined by the scanning circuit 9.

The ultrasonic waves incident on the acoustic lens 4 from the ultrasonic transducer 3 are focused and reach the sample 7. The reflected waves are again collected by the acoustic lens 4, converted into electrical signals by the transducers 1 to 3, and supplied to the display bag ff1lo through the directional coupler 2.

By the way, in the ultrasonic microscope as described above, u W
When the temperature of the water used as the ultrasonic transmission liquid interposed between the spherical lens portion 4a of the lens and the sample changes, the sound speed C changes greatly as shown in FIGS. 7 and 8. Since the attenuation 8α changes greatly at each frequency, the focal position may shift due to changes in the surrounding temperature or temperature changes during observation, or the attenuation amount α may change, resulting in an unclear image.
Non-uniform temperature distribution may also cause problems such as unclear images.

[Object of the Invention] The present invention has been made in view of the above-mentioned points, and provides a sample stage for an ultrasonic microscope that enables efficient observation or inspection without being adversely affected by ambient temperature changes or temperature changes during observation. The purpose is to provide equipment.

[Means for Solving and Resolving the Problems] In order to solve the above problems, the present invention provides a sample stage device for an ultrasonic microscope, in which a heating element is provided on the specimen stage on which the sample is placed, and the heating element is The apparatus is configured to include a detection means for detecting the temperature of the sample stage caused by the body, so that the temperature of the ultrasonic propagation medium, such as water, can be controlled.

Embodiments] Embodiments of the present invention will be specifically described below with reference to the drawings.

Figure 1 is a plan view of the sample stage device for an ultrasonic microscope, Figure 2 is a cross-sectional view taken along line A-A in Figure 1, Figure 3 is a cross-sectional view taken along line B-B in Figure 1, and Figure 4 is a cross-sectional view taken along line B-B in Figure 1. FIG. 5 is a front view of an ultrasonic microscope equipped with the sample stage device of the invention, and FIG. 5 is a right side view of FIG. 4.

In these figures, numeral 11 is an ultrasound microscope;
This ultrasonic microscope 11 is equipped with a mount 12 that is movable with wheels.
The base plate 13 is supported via a vibration isolator (not shown). On this base plate 13, a sample stage device 14 which is movable in the X and Y directions by a sample stage driving mechanism (not shown) and an arm 15 formed in a mouth shape so as to straddle this sample stage device 14 are fixed. There is. At approximately the center of this arm 15, an ultrasonic acoustic lens 18 is attached via an optical observation objective lens 16 and an excitation device 17 so as to be able to slide and switch in the X direction at a predetermined distance apart. A mounting member 19 is provided. This mounting member 1
9 is attached to the arm 15 via a Z-direction slide device 20 that is movable in seven directions. Further, on the upper part of the mounting member 19, a #R cylinder 21 and a light source device 23 connected to this lens barrel 11 via a light transmission body 22 are mounted. Further, the lens barrel 21 is equipped with binocular eyepieces 24 for observing optical images.

Note that the sample stage device 1 is provided on the upper surface of the base plate 3.
A cover 25 that exposes part 4 and covers other parts.
is provided.

The sample stage device 14 has a structure in which a sample stage 27 is attached to the top of an inclination adjustment device 26. The inclination adjustment device 27 includes first and second cylinders 29 and 30 whose upper end surfaces are gently sloped in a support body 28.
．． A support plate 3 whose center part is supported on the upper part of 30 so as to be freely tiltable.
1 is arranged. The support plate 31 is provided with sliding members 31- which are slidably abutted on the upper portions of the cylinders 29 and 30, respectively. Adjustment knobs 32, 33 are also provided on the orthogonal sides of the support.

The end members of the adjustment knobs 32 and 33 are formed into worms, and are meshed with worm gears (not shown) formed on the side surfaces of the cylinders. That is, adjustment knob 3
2.33, the first and second cylinders 29.30 are rotated. As the two first and second cylinders 30 rotate, the sliding member 31' slides on the inclined upper surfaces of the first and second cylinders 29, 30.

Therefore, the support plate 31 can be tilted in any direction.

The sample stage 27 has a flat upper surface on which a sample can be placed, and is formed into a lid shape, with a heat insulating member 34 attached above the support plate 31. It is installed with... Further, a flat heater 36 is attached to the inner back surface of the sample stage 27 with an insulating sheet 35 interposed therebetween. On the other hand, a notch 3 is provided on one side of the upper side of the sample stage 27.
7 is formed. Also, from this notch 37 the sample stage 2
A thin through hole 38 for temperature detection is formed toward the center of the tube 7 . A rod-shaped thermistor 39 for temperature detection is disposed within this insertion hole 38. This rod-shaped thermistor 39 is connected to a temperature controller (not shown) to control the flat-plate heater 36.

In such a configuration, a sample is placed on the sample stage 27, and water is used as an ultrasonic transmission liquid between the ultrasonic acoustic lens 17 and the sample. Since the temperature of the data table 27 is controlled by a flat heater 36 and a rod-shaped thermistor 39, observation or inspection can be performed without being adversely affected by ambient temperature changes or temperature changes during observation. Further, the document stand 27 is insulated by the heat insulating members 34°, so that no adverse thermal influence is exerted on the lower inclination adjustment device 26.

In the above embodiment, a flat heater 36 is provided, but other heating elements may be used. Further, the rod-shaped nermistor 39 may also use a detection means capable of detecting temperature. moreover,
It is only necessary that the sample stage is provided with a heating element and a detection means (not limited to the embodiment).

[Effects of the Invention] As explained above, according to the present invention, the sample stage of an ultrasonic microscope is provided with a heating element and a detection means for detecting the temperature of the specimen stage by the heating element, so that This has the effect of allowing efficient observation or inspection without being adversely affected by temperature changes or temperature changes during observation.

[Brief explanation of drawings]

Figure 1 is a plan view of the sample stage device for an ultrasonic microscope, Figure 2 is a cross-sectional view taken along line A-A in Figure 1, Figure 3 is a cross-sectional view taken along line B-B in Figure 1, and Figure 4 is a cross-sectional view taken along line B-B in Figure 1. A front view of an ultrasonic microscope equipped with the sample stage device of the invention, FIG. 5 is a right side view of FIG. FIG. 8 is a characteristic diagram showing the temperature dependence of sound velocity and attenuation m in the case of FIG. 11... Ultrasonic microscope 14... Sample stage device 26
...Inclination adjustment device 27...Sample stage 34...Insulating member 36...Flat heater 39...11 to rod-shaped thermistor 1, No.1. -Town Figure 3 Proceedings ``N1 Book (Method) Relationship with the September 9, 1985 Incident Representative of the Patent Applicant - To Satoshi Yama Department 4, Agent

Claims (3)

[Claims] (1) A sample stage device for an ultrasonic microscope, characterized in that a sample stage on which a sample is placed is provided with a heating element and a detection means for detecting the temperature of the specimen stage by the heating element. Microscope sample stage device. (2) The sample stage apparatus for an ultrasonic microscope according to claim 1, wherein the heating element is a flat heater attached to the back surface of the sample stage. (3) The sample stage device for an ultrasound microscope according to claim 1, wherein the detection means is a rod-shaped thermistor embedded in the sample stage.