JPS61258126A - Ｓａｗパワ−センサ - Google Patents
Ｓａｗパワ−センサInfo
- Publication number
- JPS61258126A JPS61258126A JP60100339A JP10033985A JPS61258126A JP S61258126 A JPS61258126 A JP S61258126A JP 60100339 A JP60100339 A JP 60100339A JP 10033985 A JP10033985 A JP 10033985A JP S61258126 A JPS61258126 A JP S61258126A
- Authority
- JP
- Japan
- Prior art keywords
- saw
- power
- acoustic wave
- surface acoustic
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 238000010897 surface acoustic wave method Methods 0.000 claims abstract 15
- 230000010355 oscillation Effects 0.000 abstract description 40
- 238000005259 measurement Methods 0.000 abstract description 10
- 230000006866 deterioration Effects 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 8
- 230000035559 beat frequency Effects 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000009412 basement excavation Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60100339A JPS61258126A (ja) | 1985-05-11 | 1985-05-11 | Ｓａｗパワ−センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60100339A JPS61258126A (ja) | 1985-05-11 | 1985-05-11 | Ｓａｗパワ−センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61258126A true JPS61258126A (ja) | 1986-11-15 |
| JPH0473532B2 JPH0473532B2 (enrdf_load_stackoverflow) | 1992-11-24 |
Family
ID=14271367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60100339A Granted JPS61258126A (ja) | 1985-05-11 | 1985-05-11 | Ｓａｗパワ−センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61258126A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007515860A (ja) * | 2003-10-30 | 2007-06-14 | ソシエテ ドゥ テクノロジー ミシュラン | デジタルデータ送信機能を有する弾性波装置 |
-
1985
- 1985-05-11 JP JP60100339A patent/JPS61258126A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007515860A (ja) * | 2003-10-30 | 2007-06-14 | ソシエテ ドゥ テクノロジー ミシュラン | デジタルデータ送信機能を有する弾性波装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0473532B2 (enrdf_load_stackoverflow) | 1992-11-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |