JPS61256063A - ダイヤフラム及びその製造方法 - Google Patents
ダイヤフラム及びその製造方法Info
- Publication number
- JPS61256063A JPS61256063A JP9934085A JP9934085A JPS61256063A JP S61256063 A JPS61256063 A JP S61256063A JP 9934085 A JP9934085 A JP 9934085A JP 9934085 A JP9934085 A JP 9934085A JP S61256063 A JPS61256063 A JP S61256063A
- Authority
- JP
- Japan
- Prior art keywords
- plating layer
- diaphragm
- pressure receiving
- nickel
- electroforming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007747 plating Methods 0.000 claims abstract description 37
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 34
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 17
- 230000002093 peripheral effect Effects 0.000 claims abstract description 17
- 238000005323 electroforming Methods 0.000 claims abstract description 13
- 238000007772 electroless plating Methods 0.000 claims abstract description 3
- 239000011347 resin Substances 0.000 claims description 13
- 229920005989 resin Polymers 0.000 claims description 13
- 239000010935 stainless steel Substances 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 238000000206 photolithography Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 abstract description 11
- 230000007797 corrosion Effects 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000005489 elastic deformation Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J3/00—Diaphragms; Bellows; Bellows pistons
- F16J3/02—Diaphragms
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Diaphragms And Bellows (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9934085A JPS61256063A (ja) | 1985-05-09 | 1985-05-09 | ダイヤフラム及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9934085A JPS61256063A (ja) | 1985-05-09 | 1985-05-09 | ダイヤフラム及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61256063A true JPS61256063A (ja) | 1986-11-13 |
| JPH0524384B2 JPH0524384B2 (enrdf_load_html_response) | 1993-04-07 |
Family
ID=14244892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9934085A Granted JPS61256063A (ja) | 1985-05-09 | 1985-05-09 | ダイヤフラム及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61256063A (enrdf_load_html_response) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1094835C (zh) * | 1998-03-04 | 2002-11-27 | 大霸电子股份有限公司 | 振动片溢铸量的修正方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS541754A (en) * | 1977-06-07 | 1979-01-08 | Matsushita Electric Ind Co Ltd | Diaphragm for pressure convertor and its preparation |
-
1985
- 1985-05-09 JP JP9934085A patent/JPS61256063A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS541754A (en) * | 1977-06-07 | 1979-01-08 | Matsushita Electric Ind Co Ltd | Diaphragm for pressure convertor and its preparation |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1094835C (zh) * | 1998-03-04 | 2002-11-27 | 大霸电子股份有限公司 | 振动片溢铸量的修正方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0524384B2 (enrdf_load_html_response) | 1993-04-07 |
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