JPS61255868A - Preparation of ink jet head for printer - Google Patents
Preparation of ink jet head for printerInfo
- Publication number
- JPS61255868A JPS61255868A JP9867785A JP9867785A JPS61255868A JP S61255868 A JPS61255868 A JP S61255868A JP 9867785 A JP9867785 A JP 9867785A JP 9867785 A JP9867785 A JP 9867785A JP S61255868 A JPS61255868 A JP S61255868A
- Authority
- JP
- Japan
- Prior art keywords
- resin
- substrate
- vibration plate
- resin layer
- nozzles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920005989 resin Polymers 0.000 claims abstract description 48
- 239000011347 resin Substances 0.000 claims abstract description 48
- 239000000758 substrate Substances 0.000 claims abstract description 30
- 239000011521 glass Substances 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 5
- 229910052751 metal Inorganic materials 0.000 claims abstract description 5
- 239000004033 plastic Substances 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000003384 imaging method Methods 0.000 description 6
- 238000000576 coating method Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 241000237502 Ostreidae Species 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 235000020636 oyster Nutrition 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/1617—Production of print heads with piezoelectric elements of disc type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はプリンター用インクジェットヘッドの製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing an inkjet head for a printer.
本発明はプリンター用インクジェットヘッドの製造方法
において、全面にUV樹樹脂−が形成された振動板とイ
ンク流路及びノズルがUV樹脂で形成された基板を接合
したことを特徴とするインクジェットヘッドの製造方法
により、低コストで多数ノズルを可能にしたインクジェ
ットヘッドを提供するものである。The present invention relates to a method for manufacturing an inkjet head for a printer, which is characterized in that a diaphragm whose entire surface is coated with a UV resin is bonded to a substrate whose ink channels and nozzles are made of a UV resin. The present invention provides an inkjet head that enables a large number of nozzles at low cost.
従来のインクジェットヘッドの製造方法1寸ガラス基板
を用いたホトエツチング法がある。A conventional method for manufacturing an inkjet head is a photoetching method using a 1-inch glass substrate.
a動板は厚さがα15fiのガラス薄片で片面が導電性
のネサ1嘆が施されたものを用いる。The moving plate used is a glass thin piece having a thickness of α15fi, and one side of which is coated with a conductive layer.
インクジェット基板はインク流路及びノズルの形成はガ
ラス基板を用いてホトエツチング法で作る。まず、厚さ
1.5電のガラス・板にCrとAuをスパッタ法でガラ
ス基板全面に皮膜形成する。The inkjet substrate is formed by photoetching a glass substrate to form ink channels and nozzles. First, a film of Cr and Au is formed on the entire surface of a glass plate having a thickness of 1.5 volts by sputtering.
次に、ホトレジストを用いて一般に行なわれているホト
エツチング技術でインク流路とノズルとなる部分のCr
とAu皮膜を取り除き、露出されたガラス面を濃酸でエ
ツチングしてインク流路及びノズルを形成する。Next, the parts that will become the ink flow path and nozzle are etched with Cr using a photoetching technique that is generally performed using photoresist.
The Au film is removed, and the exposed glass surface is etched with concentrated acid to form ink channels and nozzles.
次に、振動板とインク流路及びシズルが形成されたガラ
ス基板を重ね合わせ、600Cの雰、!5気で加圧・加
熱して撮動板とインクジェット基板を接合する。Next, the diaphragm and the glass substrate on which the ink flow path and sizzle were formed were placed on top of each other, and the atmosphere was heated to 600C! The imaging plate and the inkjet board are bonded by applying pressure and heating at 5 air.
次に、ネサ膜が施されている振動板側に圧1素子を張り
付けるとインクジェットヘッドが完成される。Next, the pressure 1 element is attached to the diaphragm side on which the Nesa film is applied, and the inkjet head is completed.
〔発明が解決しようとする問題点及び目的〕しかし、前
述の従来技術では工程数が非常にか\ること及びガラス
エツチングを均一にエツチングすることは難かしく歩留
りが非常に低いこと、振動板のガラスが非常に薄いため
に割れ易く非常に製造コストが高いものになってしまう
。[Problems and objects to be solved by the invention] However, the above-mentioned conventional technology requires a very large number of steps, it is difficult to uniformly etch the glass, and the yield is very low. Since the glass is very thin, it breaks easily and is extremely expensive to manufacture.
また、ノズル径は小さくすることに限界があり、多数ノ
ズル化に対して有利な製造方法とはいえなt1’。Furthermore, there is a limit to how small the nozzle diameter can be made, and t1' cannot be said to be an advantageous manufacturing method for producing multiple nozzles.
そこで、本発明はこのような問題点を解決するもので、
その目的とするところは低コストで多数ノズルを可能に
するプリンター用インクジェットヘッドを提供するとこ
ろにある。Therefore, the present invention aims to solve these problems.
The objective is to provide an inkjet head for printers that enables multiple nozzles at low cost.
本発明のプリンター用インクシエンドヘッドの製造方法
は全面にUV樹脂層で形成された振動板とインク流路及
びノズルがUV樹脂で形成された基板を接合したもので
あり、撮動板と基板の接合は、それぞれに形成されるU
V樹脂の露光をハーフ露光で形成し、それぞれを重ね合
わした状態で後露光することにより、UV樹脂層が形成
された撮動板とインク流路及びノズルがUV樹脂で形成
された基板とを化学的に接合することを特徴とする。The method of manufacturing an ink transfer head for a printer according to the present invention involves bonding a diaphragm whose entire surface is made of a UV resin layer and a substrate whose ink channels and nozzles are made of UV resin. The junction of U formed in each
By half-exposure of the V resin and post-exposure with each layer overlapped, the imaging plate on which the UV resin layer is formed and the substrate on which the ink channels and nozzles are made of UV resin are chemically bonded. It is characterized by the fact that it can be joined in a specific manner.
撮動板に全面にUV樹脂を形成するのはスピンナー塗布
、ロールコータ−法等を用いると非常に簡単にできる。Forming UV resin on the entire surface of the imaging plate can be done very easily by using a spinner coating method, a roll coater method, or the like.
UV樹脂を用いて基板にインク姫路及びノズルを形成す
るには処理とする形状のオ型を作り、そのオ型にUV樹
脂を注型して紫外線を照射すると非常に短時間に成形が
できる。To form ink Himeji and nozzles on a substrate using UV resin, a mold of the shape to be treated is created, the UV resin is poured into the mold, and ultraviolet rays are irradiated, allowing molding to be performed in a very short time.
また、オ型は繰り返し使用できる。Also, the O type can be used repeatedly.
上記事実は低コストのインクジェットヘッドの提供につ
ながる。The above facts lead to the provision of a low-cost inkjet head.
また、振動板とインクジェットヘッドの接合は、UV樹
脂の同一物質で化学的に接合されるので接着面が強固で
あり、理想的な接合状態を可能にする。Furthermore, since the diaphragm and the inkjet head are chemically bonded using the same UV resin, the bonding surface is strong and an ideal bonding state is possible.
また、ノズル径を小さくすることができるので、多ノズ
ル化が可能になる。Furthermore, since the nozzle diameter can be made small, it is possible to use a large number of nozzles.
まず、撮動板3の片面にUV樹脂を塗布する。 First, UV resin is applied to one side of the imaging plate 3.
上記振動板の機質は金属またはガラスが用いられる。中
でも金蛎を用いるのが弾性係数が大きいので望ましい。The material of the diaphragm used is metal or glass. Among them, it is preferable to use golden oysters because they have a large elastic modulus.
例えば厚みが015mのステンレス板を用いると撮動板
としての機能を充分に果すことができる。For example, if a stainless steel plate with a thickness of 0.15 m is used, it can sufficiently function as a photographic plate.
U4樹脂の塗布方法はスピンナー塗亜、ロールコータ法
が採用できる。The U4 resin can be applied by spinner coating or roll coating.
UV樹脂層の厚みは10μ8度が望ましい。The thickness of the UV resin layer is preferably 10μ8 degrees.
次に、振動板5に塗布されたUV樹樹脂−に紫外線を照
射してハーフ露光すると@3図に示すUV樹脂層が形成
された撮動板ができる。Next, the UV resin coated on the diaphragm 5 is irradiated with ultraviolet rays for half exposure, thereby producing a photographing plate on which a UV resin layer is formed as shown in FIG.
このハーフ露光の意味はUV樹脂を完全硬化させないで
一部未重合のUV樹脂を残すことにある。The meaning of this half exposure is to leave a portion of the UV resin unpolymerized without completely curing the UV resin.
UV樹脂層と融動板の密着性を向上させるためにあらか
じめ振動板にプライマー処理を施してどくとUV樹脂と
振動板の一!BfIが強固になる。In order to improve the adhesion between the UV resin layer and the fusion plate, the diaphragm is treated with a primer beforehand, and the UV resin and the diaphragm are one and the same! BfI will become stronger.
次に、インクジェットヘッド基板の制置方法について説
明する。Next, a method for installing the inkjet head substrate will be explained.
まず、処理のインク流路及びノズルがb!を形できるオ
型7を用意する。オ型7の製造方法は処理のインク流路
及びノズルが形成されたマスターを作り、マスターから
転写してオ型7を作る。マスターから転写する方法とし
て、オ型が金属の場合は電鋳法、オ型7が樹脂の場合は
シリコンゴム、エポキシ等の注型法または熱可塑性樹脂
のホットスタンピング法が採用できる。First, the processing ink flow path and nozzle are b! Prepare an O-type 7 that can form . The method for manufacturing the O-mold 7 is to create a master in which ink channels and nozzles for processing are formed, and then transfer from the master to create the O-mold 7. As a method for transferring from the master, if the O-mold is made of metal, an electroforming method can be adopted, and if the O-mold 7 is made of resin, a casting method using silicone rubber, epoxy, etc., or a hot stamping method using a thermoplastic resin can be adopted.
次に用意されたオ型7にUV樹脂を注型し、更にその上
に基板1をセットする。上記UV樹脂の注入及び基板1
のセットに際し空気が入らないようにすることが重要で
ある。Next, UV resin is poured into the prepared mold 7, and the substrate 1 is further set on top of it. Injection of the above UV resin and substrate 1
It is important to prevent air from entering when setting.
基板1には紫外線を透過するプラスチック板、ガラスが
採用できる。撮動板がガラスの場合/i基板1として金
属が採用できる。The substrate 1 can be made of a plastic plate or glass that transmits ultraviolet rays. When the imaging plate is glass/i-substrate 1 can be made of metal.
次に、紫外線を照射してノ・−74光する。Next, ultraviolet rays are irradiated to emit -74 light.
このハーフ露光の意味はUV樹脂を完全硬化させないで
一部未重合の04樹脂を残すことにある。The purpose of this half exposure is to leave a portion of the 04 resin unpolymerized without completely curing the UV resin.
次に、オ型7から基板1にインク流路及びノズルが形成
されたUV樹脂をはがす。第4図次に、先にハーフ露光
されたUV、[脂・−2が形成された撮動板とインク流
路及びノズルがUV樹脂2で形成された基板1をそれぞ
れ7)UV樹脂同志を重ね合わせ、充分な紫外線を照射
すると重ね合わせ界面同志の未重合樹脂層が化学的に結
合硬化し強固な接合が潜られる。重ね合わせに際し界面
に空気が入らないようにすることが重要である。Next, the UV resin on which the ink channels and nozzles are formed is peeled off from the O-type 7 to the substrate 1. Figure 4: Next, the photographing plate on which the UV resin 2 was formed and the substrate 1 on which the ink flow path and nozzle were formed with the UV resin 2, which had been half-exposed earlier, are attached to the UV resin 7). When they are overlapped and irradiated with sufficient ultraviolet rays, the unpolymerized resin layers at the overlapped interface are chemically bonded and hardened, creating a strong bond. It is important to prevent air from entering the interface during overlapping.
そのためには重ね合わせから加重を加えて後は光をする
と良い。To achieve this, it is best to add weight from superimposition and then add light.
最後に、振動板に圧1素子4を導或性接着剤で接着する
と本発明のインクジェットヘッドが完成される。第1図
〔発明の効果〕
以上述べたように本発明によれば、振動板3に形成され
たUv、l封脂層2と基板1にインク流路及びノズルが
UV樹脂で成形されたUv#膚+―が化学的に完全接合
されるので圧成素子の@1助によって接合面がはがれる
心配がないこと、またはコスト的にもインク流路及びノ
ズルがUV樹脂による注型転写であり、撮動板3及び基
板1の同一基板に多数1固のインクジェットヘッドを形
成し層合後切断する加工も可能であるので低コストのプ
リンター用インクジェットヘッドが提供できる。Finally, the pressure element 4 is adhered to the diaphragm using a conductive adhesive to complete the inkjet head of the present invention. FIG. 1 [Effects of the Invention] As described above, according to the present invention, the Uv formed on the diaphragm 3, the Uv formed on the l sealing layer 2 and the ink flow path and nozzle on the substrate 1 are molded of UV resin. #Skin+- is completely bonded chemically, so there is no need to worry about the bonded surface peeling off due to the @1 aid of the pressure forming element, and in terms of cost, the ink flow path and nozzle are cast and transferred using UV resin. It is also possible to form a large number of one-piece inkjet heads on the same substrate, that is, the imaging plate 3 and the substrate 1, and cut them after layering, so that a low-cost inkjet head for a printer can be provided.
$1図は本発明のインクジェットヘッドの構造を示す断
面図。
第2図は本発明のインクジェットヘッドのインク流路及
びノズルを示す平面図。
第3図は従来のガラス製インクジェットヘッドの構造を
示す断面図。
44図はUV樹脂層が形成された振動板を示す断面図。
箒5図はオ型にUV樹脂が注型されたインクジェットヘ
ッド基板の構造を示す断面図。
第6図は基板に、インク流路及びノズルがUV樹脂で形
成されたインクジェットヘッド基板の構造を示す断面図
を示す。
本発胡のインクジエ・γトへヅド
本全日月のインクジ薔・ントへ1ド
インク流y各7r−ルをTiJF−臼図葛堀Figure $1 is a sectional view showing the structure of the inkjet head of the present invention. FIG. 2 is a plan view showing the ink flow path and nozzle of the inkjet head of the present invention. FIG. 3 is a sectional view showing the structure of a conventional glass inkjet head. FIG. 44 is a sectional view showing a diaphragm on which a UV resin layer is formed. Figure 5 is a cross-sectional view showing the structure of an inkjet head substrate in which UV resin is cast into an O-shape. FIG. 6 is a sectional view showing the structure of an inkjet head substrate in which an ink flow path and nozzle are formed of UV resin. TiJF-Usuzu Katsuhori
Claims (4)
と、インク流路及びノズルがUV樹脂で形成された基板
を接合したことを特徴とするプリンター用インクジェッ
トヘッドの製造方法。(1) A method for manufacturing an inkjet head for a printer, characterized in that a diaphragm on which a UV curable resin layer is formed on the entire surface and a substrate whose ink channels and nozzles are made of UV resin are bonded to each other.
接合において、それぞれで形成されるUV樹脂の露光を
ハーフ露光で形成し、それぞれを重ね合わした状態で後
露光することにより、UV樹脂層が形成された振動板と
インク流路及びノズルがUV樹脂で形成された基板とを
接合することを特徴とするプリンター用インクジェット
ヘッドの製造方法。(2) In claim 1, when the diaphragm and the substrate are bonded, the UV resin formed by each is formed by half exposure, and the UV resin is post-exposed in a state where they are overlapped. A method for manufacturing an inkjet head for a printer, comprising joining a diaphragm on which a layer is formed and a substrate on which ink channels and nozzles are formed of UV resin.
の機質が金属、ガラス及びプラスチックであることを特
徴とするプリンター用インクジェットヘッドの製造方法
。(3) The method of manufacturing an inkjet head for a printer according to claim 1, wherein the diaphragm and the substrate are made of metal, glass, or plastic.
の同一基板に2個以上の多数個のインクジェットヘッド
を形成し、接合後切断することを特徴とするプリンター
用インクジェットヘッドの製造方法。(4) A method of manufacturing an inkjet head for a printer according to claim 1, characterized in that two or more inkjet heads are formed on the same substrate of a diaphragm and a substrate, and the inkjet heads are cut after being joined.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9867785A JPS61255868A (en) | 1985-05-09 | 1985-05-09 | Preparation of ink jet head for printer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9867785A JPS61255868A (en) | 1985-05-09 | 1985-05-09 | Preparation of ink jet head for printer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS61255868A true JPS61255868A (en) | 1986-11-13 |
Family
ID=14226141
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9867785A Pending JPS61255868A (en) | 1985-05-09 | 1985-05-09 | Preparation of ink jet head for printer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61255868A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02208053A (en) * | 1989-02-07 | 1990-08-17 | Ricoh Co Ltd | Liquid jet recorder |
JP2007216226A (en) * | 2001-03-14 | 2007-08-30 | Kawamura Inst Of Chem Res | Micronozzle, its manufacturing method, spotting method, and spotter |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60203451A (en) * | 1984-03-28 | 1985-10-15 | Canon Inc | Ink jet recording head |
-
1985
- 1985-05-09 JP JP9867785A patent/JPS61255868A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60203451A (en) * | 1984-03-28 | 1985-10-15 | Canon Inc | Ink jet recording head |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02208053A (en) * | 1989-02-07 | 1990-08-17 | Ricoh Co Ltd | Liquid jet recorder |
JP2007216226A (en) * | 2001-03-14 | 2007-08-30 | Kawamura Inst Of Chem Res | Micronozzle, its manufacturing method, spotting method, and spotter |
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