JPS61255352A - Photosensitive body - Google Patents

Photosensitive body

Info

Publication number
JPS61255352A
JPS61255352A JP9823385A JP9823385A JPS61255352A JP S61255352 A JPS61255352 A JP S61255352A JP 9823385 A JP9823385 A JP 9823385A JP 9823385 A JP9823385 A JP 9823385A JP S61255352 A JPS61255352 A JP S61255352A
Authority
JP
Japan
Prior art keywords
carbon
photoreceptor
drum
layer
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9823385A
Other languages
Japanese (ja)
Inventor
Tetsuo Kyogoku
京極 哲男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Minolta Co Ltd
Original Assignee
Minolta Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minolta Co Ltd filed Critical Minolta Co Ltd
Priority to JP9823385A priority Critical patent/JPS61255352A/en
Publication of JPS61255352A publication Critical patent/JPS61255352A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G5/00Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
    • G03G5/14Inert intermediate or cover layers for charge-receiving layers
    • G03G5/147Cover layers
    • G03G5/14704Cover layers comprising inorganic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photoreceptors In Electrophotography (AREA)

Abstract

PURPOSE:To increase the resistance of a photosensitive body to wear and scratch by a blade and to prolong the life by forming a protective surface layer of diamondlike carbon on the surface of the photosensitive body. CONSTITUTION:Carbon in a crucible 1 is evaporated by heating the crucible 1 to >=4,200 deg.C with an electron gun. Positive voltage is applied to an ionization electrode 4 placed above the crucible 1 from a voltage source 5 to convert the evaporated carbon particle into ionized particles having positive charge by contact with the electrode 4. A DC electric field is formed between a photosensitive drum 7 having negative voltage applied from a voltage source 8 and the electrode 4 having the applied positive voltage, and the ionized carbon is accelerated toward the drum 7 by the DC electric field and deposits on the surface of the drum 7. A heater 9 may be placed close to the surface of the drum 7 so as to facilitate the growth of a thin carbon film by heating. The drum 7 is rotated with a motor 12 for driving so that uniform deposition is carried out on the whole surface.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は感光体、特に表面にダイヤモンド状カーボン薄
膜の層を有する感光体およびその製造法に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a photoreceptor, particularly a photoreceptor having a layer of a diamond-like carbon thin film on its surface, and a method for manufacturing the same.

従来技術 ダイヤモンド状カーボン薄膜を干渉フィルター、ミラー
、レンズ等の光学器機用多層干渉膜として用いる提案が
なされている(特公昭59−41163号公報)。これ
は透明基板(石英、ジエチレンカーボネート樹脂等)上
にダイヤモンド状カーボン層をイオンビームスパッタリ
ング蒸着法またはスパッタリングイオン銃を用いて設け
たものであり、干渉膜を得ることを目的としている。
BACKGROUND ART It has been proposed to use a diamond-like carbon thin film as a multilayer interference film for optical devices such as interference filters, mirrors, and lenses (Japanese Patent Publication No. 41163/1983). This is a method in which a diamond-like carbon layer is provided on a transparent substrate (quartz, diethylene carbonate resin, etc.) using an ion beam sputtering deposition method or a sputtering ion gun, and the purpose is to obtain an interference film.

一方、感光体の表面保護層として、ダイヤモンド状カー
ボン層を設けることについては従来全く提案されていな
い。
On the other hand, the provision of a diamond-like carbon layer as a surface protective layer of a photoreceptor has not been proposed at all.

発明の解決しようとする問題点 感光体、特に感光体ドラムは、転写工程、クリーニング
工程等において紙やクリーニングブレードと擦れあい表
面摩耗や傷を生じ易く、これが感光体の寿命を支配する
ことが多い。特に光導電性材料粒子を絶縁性高分子材料
からなる結着剤中に分散させた感光層を有する感光体に
おいては、感光層表面が樹脂であるため耐摩耗性、耐ブ
レード傷性が小さく、その寿命はせいぜい20000枚
程度、通常15000枚程度と通常れている。
Problems to be Solved by the Invention Photoconductors, especially photoconductor drums, are susceptible to surface abrasion and scratches due to rubbing against paper and cleaning blades during the transfer process, cleaning process, etc., and this often dominates the life of the photoconductor. . In particular, in a photoreceptor having a photosensitive layer in which photoconductive material particles are dispersed in a binder made of an insulating polymer material, the surface of the photosensitive layer is made of resin, so the wear resistance and blade scratch resistance are low. Its life is said to be about 20,000 sheets at most, and usually about 15,000 sheets.

上記問題を解決するためにはこれらの感光体表面に高硬
度の表面保護層を設ける方法が考えられるが、光透過性
に優れ、感光体の特性を損なうことのない素材の選定は
必らずしも容易でなく、また、この素材をいかに感光体
表面に密着させるかと云う困難な問題があった。特に性
質の全く異なる有機物表面に無機物の層を剥離しないよ
う密着させると云う困難な問題を解決する必要があった
In order to solve the above problem, it is possible to provide a highly hard surface protective layer on the surface of these photoreceptors, but it is not always necessary to select a material that has excellent light transmittance and does not impair the characteristics of the photoreceptor. However, there was also the difficult problem of how to bring this material into close contact with the surface of the photoreceptor. In particular, it was necessary to solve the difficult problem of adhering an inorganic layer to the surface of an organic material, which has completely different properties, without peeling it off.

加えて、得られた表面層はクリーニング時に容易にトナ
ーが除去できる平滑性を有していなければならない。
In addition, the resulting surface layer must be smooth enough to allow easy removal of toner during cleaning.

問題を解決するための手段 本発明は感光体表面上にダイヤモンド状カーボンの表面
保護層を設けた感光体を提供する。
Means for Solving the Problems The present invention provides a photoreceptor having a surface protective layer of diamond-like carbon on the surface of the photoreceptor.

感光体としては、アモルファスセレンやアモルファスセ
レン基の薄膜を基板上に形成させた無機薄膜感光体と光
導電性材料粒子を高分子材料で金属ドラム上に結着した
樹脂膜型感光体がある。
Examples of the photoreceptor include an inorganic thin film photoreceptor in which a thin film of amorphous selenium or an amorphous selenium group is formed on a substrate, and a resin film type photoreceptor in which photoconductive material particles are bound on a metal drum using a polymeric material.

本発明はそのいずれの感光体についても適用し得るが、
表面保護層を特に必要とする樹脂模型感光体に適用する
のが特に好ましい。適用し得る樹脂模型感光体は特に限
定的ではない。例えば光導電性材料としてフタロシアニ
ン系顔料(例えば胴フタロンアニン、無金属フタロシア
ニン、ハロゲン置換フタロシアニン等)、ポリビニルカ
ルバゾール等の有機光導電性材料、酸化亜鉛、硫化カド
ミウム等の無機光導電性材料等を用いたちのいずれであ
ってもよい。またこれらの光導電性材料を結着する樹脂
バインダーとしては、アクリル樹脂、スチレン樹脂、飽
和ポリエステル樹脂、ポリアミド樹脂、エチレン−酢酸
ビニル共重合体、アイオノマー樹脂、スチレン・ブタジ
ェン共重合体、ポリカーボネート樹脂、エポキシ樹脂、
ウレタン樹脂、シリコーン樹脂、フェノール樹脂、メラ
ミン樹脂、アルキッド樹脂、ポリ−N−ビニルカルバゾ
ール等が例示されるがこれに限定されるものではない。
Although the present invention can be applied to any of the photoreceptors,
It is particularly preferable to apply the present invention to resin model photoreceptors that particularly require a surface protective layer. The applicable resin model photoreceptor is not particularly limited. For example, as a photoconductive material, phthalocyanine pigments (e.g., body phthalonanine, metal-free phthalocyanine, halogen-substituted phthalocyanine, etc.), organic photoconductive materials such as polyvinyl carbazole, and inorganic photoconductive materials such as zinc oxide and cadmium sulfide are used. It may be either. In addition, examples of the resin binder for binding these photoconductive materials include acrylic resin, styrene resin, saturated polyester resin, polyamide resin, ethylene-vinyl acetate copolymer, ionomer resin, styrene-butadiene copolymer, polycarbonate resin, Epoxy resin,
Examples include, but are not limited to, urethane resins, silicone resins, phenol resins, melamine resins, alkyd resins, and poly-N-vinylcarbazole.

ダイヤモンド状カーボン薄膜を形成するに特に適した樹
脂は、アクリル樹脂、ポリカーボネート樹脂等がある。
Resins particularly suitable for forming diamond-like carbon thin films include acrylic resins and polycarbonate resins.

もちろん感光層自体多層構造のものであってもよい。Of course, the photosensitive layer itself may have a multilayer structure.

感光体最表面には、ダイヤモンド状カーボン層を設ける
。カーボン層厚さは0.05〜1.0μm1特に0.1
〜0.5μmが好ましい。ダイヤモンドはモス硬度で最
も硬い物質であるが薄膜にした場合もろい性質がある。
A diamond-like carbon layer is provided on the outermost surface of the photoreceptor. The carbon layer thickness is 0.05 to 1.0 μm, especially 0.1
~0.5 μm is preferred. Diamond is the hardest substance on the Moss scale, but it is brittle when made into a thin film.

特に樹脂模型感光体表面にこれを設けた場合感光層との
硬度差が極めて大きいため、応力に対して剥離や亀裂を
生じ易い。
In particular, when this is provided on the surface of a resin model photoreceptor, the difference in hardness between the resin model photoreceptor and the photosensitive layer is extremely large, so that peeling and cracking are likely to occur due to stress.

従って本発明はまたダイヤモンド状カーボン層を感光層
上によく密着させ剥離や亀裂を生じ難くする技術を提供
する。
Therefore, the present invention also provides a technique for making the diamond-like carbon layer adhere well to the photosensitive layer and making it difficult for peeling and cracking to occur.

即ち、本発明はカーボン蒸発源近くにイオン化電極と熱
電子放射線を設け、イオン化されたカーボンを直流電界
にて加速し、感光体表面に付着させる電子写真感光体の
製造法において、カーボン蒸発源とイオン化電極との間
の電界強度を徐々に高めることを特徴とするダイヤモン
ド状カーボンの表面保護層を有する感光体の製造方法に
関する。
That is, the present invention provides a method for manufacturing an electrophotographic photoreceptor in which an ionizing electrode and a thermionic radiation are provided near the carbon evaporation source, and ionized carbon is accelerated by a DC electric field and adhered to the surface of the photoreceptor. The present invention relates to a method for manufacturing a photoreceptor having a surface protective layer of diamond-like carbon, which is characterized by gradually increasing the electric field strength between it and an ionizing electrode.

上記製造法を第1図にもとづいて説明する。第1図は、
感光体表面にカーボン層を形成させるためのイオンブレ
ーティング装置である。(1)はカーボン(ターゲット
)(2)を入れたルツボ(例えば銅製)である。このル
ツボ(1)を電子銃(3)により加熱(4200℃以上
)するとカーボンが蒸発する。ルツボ上方にはイオン化
電極(4)を設けこれを電圧源(5)によって正電圧を
印加すると、蒸発したカーボン粒子はイオン化電極と接
触し、正電荷を有するイオン粒子となる。この際、ルツ
ボ(1)とイオン化電極(4)の間に熱電子放射電極(
6)(例えばタングステンフィラメント)を配置すると
、これから発生する熱電子によってイオン化が促進され
る。
The above manufacturing method will be explained based on FIG. Figure 1 shows
This is an ion blating device for forming a carbon layer on the surface of a photoreceptor. (1) is a crucible (made of copper, for example) containing carbon (target) (2). When this crucible (1) is heated (4200° C. or higher) with an electron gun (3), carbon evaporates. An ionization electrode (4) is provided above the crucible, and when a positive voltage is applied to it from a voltage source (5), the evaporated carbon particles come into contact with the ionization electrode and become positively charged ion particles. At this time, the thermionic emission electrode (
6) When a tungsten filament (for example, a tungsten filament) is placed, ionization is promoted by thermionic electrons generated from the filament.

一方、感光体ドラム(7)には電圧源(8)によって負
電圧が印加されており、正電荷が印加されたイオン化電
極(4)との間に直流電界が形成される。
On the other hand, a negative voltage is applied to the photoreceptor drum (7) by a voltage source (8), and a DC electric field is formed between it and the ionization electrode (4) to which a positive charge is applied.

この直流電界によって上記イオン化されたカーボンは感
光体ドラム(7)の方へ加速され、感光体表面に付着す
る。必要ならば感光体表面近傍にヒーター(9)を配置
してよく、これによって感光体表面を加熱してカーボン
薄膜の成長を補助してもよい。なお上記イオンブレーテ
ィングは真空容器(10)(10−’Torr以下)中
で行なうのが好ましい。必要なら真空容器にガス導入ラ
イン(ll)を設け、導入ガスと蒸発粒子とを感光体表
面において化学反応させ膜を形成させる必要がある場合
に用いてもよい。感光体ドラム(7)は駆動用モーター
(12)で回転し、被着が全面に一様になるようにする
The ionized carbon is accelerated toward the photoreceptor drum (7) by this DC electric field and adheres to the surface of the photoreceptor. If necessary, a heater (9) may be placed near the surface of the photoreceptor to heat the surface of the photoreceptor and assist in the growth of the carbon thin film. Note that the ion blating is preferably carried out in a vacuum container (10) (10-' Torr or less). If necessary, a gas introduction line (ll) may be provided in the vacuum container and used when it is necessary to cause a chemical reaction between the introduced gas and the evaporated particles on the surface of the photoreceptor to form a film. The photosensitive drum (7) is rotated by a driving motor (12) so that the coating is uniform over the entire surface.

上記方法において、イオンプレヘティングの設定条件で
あるイオン化率またはターゲットとイオン化電極間の距
離を変えることにより、カーボンの薄膜構造を変えるこ
とができる。イオン化率はイオン化電圧とイオン化電流
を変えることにより調節できる。イオン化率が小さいか
あるいは上記距離が長いとカーボン層は無定形構造とな
り、その逆の場合はダイヤモンド状カーボン層に近づく
In the above method, the carbon thin film structure can be changed by changing the ionization rate or the distance between the target and the ionization electrode, which are the setting conditions for ion prehetting. The ionization rate can be adjusted by changing the ionization voltage and ionization current. If the ionization rate is small or the distance is long, the carbon layer will have an amorphous structure, and vice versa, it will approach a diamond-like carbon layer.

無定形カーボンは比較的柔軟で樹脂との結着性に優れて
いるため、直接感光体表面にダイヤモンド状カーボン層
を形成させるよりもこれを間に介在させることにより耐
剥離性や耐亀裂性を著るしく向上させることができる。
Since amorphous carbon is relatively flexible and has excellent binding properties with resin, it is possible to improve peeling and cracking resistance by interposing a diamond-like carbon layer in between, rather than directly forming a diamond-like carbon layer on the surface of the photoreceptor. can be significantly improved.

無定形カーボン層は0.02〜0.2μm1特に 04
1μm以下にするのが好ましい。0.02μmより薄い
と無定形カーボン層の効果が不十分となり、0.1μm
より厚いと透明度か低下する。無定形カーボン層形成の
後、イオン化率を徐々に上げて、またはターゲット−イ
オン化電極間距離を短かくしてダイヤモンド状カーボン
層を形成させる。ダイヤモンド状カーボン層の厚さは0
.05〜1.0μm、より好ましくは0.1〜0.5μ
mである。表面保護層の厚さを0.5μmより大きくす
ると、感光体表面の残留電位が増大することになる。
The amorphous carbon layer has a thickness of 0.02 to 0.2 μm1, especially 04
The thickness is preferably 1 μm or less. If it is thinner than 0.02 μm, the effect of the amorphous carbon layer will be insufficient;
The thicker the layer, the lower the transparency. After forming the amorphous carbon layer, the ionization rate is gradually increased or the distance between the target and the ionization electrode is shortened to form a diamond-like carbon layer. The thickness of the diamond-like carbon layer is 0
.. 05-1.0μm, more preferably 0.1-0.5μm
It is m. When the thickness of the surface protective layer is made larger than 0.5 μm, the residual potential on the surface of the photoreceptor increases.

無定形カーボン層を形成するためには、ターゲット−イ
オン化電極間距離を80mmとしたときイオン化電圧2
0〜30V、イオン化電流を50〜15(1+Aに設定
し、厚さを0.01〜0.02)tmとするには0.5
〜1分間ブレーティングする。
In order to form an amorphous carbon layer, the ionization voltage is 2 when the distance between the target and the ionization electrode is 80 mm.
0 to 30 V, ionization current of 50 to 15 (set to 1+A, thickness of 0.01 to 0.02) tm: 0.5
Brate for ~1 minute.

イオン化電圧およびイオン化電流を徐々に上げ(例えば
1〜2分かけて)、ダイヤモンド状カーボン層が形成さ
れるイオン化率とする。無定形カーボン層から急激にダ
イヤモンド状カーボン層を形成させると剥離を生じ易く
なる。
The ionization voltage and ionization current are gradually increased (eg, over 1 to 2 minutes) to reach an ionization rate at which a diamond-like carbon layer is formed. If a diamond-like carbon layer is suddenly formed from an amorphous carbon layer, peeling tends to occur.

ダイヤモンド状カーボン層を形成させるにはイオン化電
圧50V以上、好ましくは60〜70Vとするのが好ま
しく、また、イオン化電流は10A以上、好ましくは2
0〜30Aである。
In order to form a diamond-like carbon layer, the ionization voltage is preferably 50V or more, preferably 60 to 70V, and the ionization current is 10A or more, preferably 2
It is 0-30A.

カーボンの沸点は極めて高いため(4200℃)、これ
を蒸発させるための電子銃にも相当量の電流(例えば約
600mA)を必要とする。電子銃から発生する電子ビ
ームをカーボンターゲット(2)の−i所に当てるとタ
ーゲットの蒸散が早くなり急激に穴があき、電子ビーム
が胴ルツボまで達して蒸着を困難にする。この問題を解
するには第2図に示すごとく銅ルツボ(1)中のカーボ
ンターゲット(円板)(2)を回転させながら蒸着を行
なうのが好ましい。この方法では電子ビームのスポット
の位置(13)は固定されているがルツボ(1)が回転
しているため電子ビームが図中の破線に沿って当たるこ
とになり、カーボンを徐々に蒸発させることが可能とな
る。
Since the boiling point of carbon is extremely high (4200° C.), an electron gun for vaporizing carbon also requires a considerable amount of current (for example, about 600 mA). When the electron beam generated from the electron gun is applied to the -i location of the carbon target (2), the target evaporates quickly and holes are formed rapidly, and the electron beam reaches the crucible, making vapor deposition difficult. To solve this problem, it is preferable to perform vapor deposition while rotating the carbon target (disc) (2) in the copper crucible (1) as shown in FIG. In this method, the spot position (13) of the electron beam is fixed, but since the crucible (1) is rotating, the electron beam hits along the broken line in the figure, and the carbon is gradually evaporated. becomes possible.

イオン化電極はカーボンを蒸発させるため、カーボンか
ら100mm以内、好ましくは60〜80mm以内に設
置するのが好ましい。この付近ではカーボンの蒸気が非
常に多いため(1〜0.1  torr)イオン化電極
と蒸発源との間で放電が起る。この放電は局所的な範囲
で起るため感光体、特に有機感光体に有害な紫外光の発
生は微かである。
In order to evaporate carbon, the ionization electrode is preferably installed within 100 mm, preferably within 60 to 80 mm, from carbon. Since there is a large amount of carbon vapor in this vicinity (1 to 0.1 torr), a discharge occurs between the ionization electrode and the evaporation source. Since this discharge occurs in a localized area, the generation of ultraviolet light harmful to the photoreceptor, especially the organic photoreceptor, is slight.

この様にして得られる感光体の模式的断面図を第3図に
示す。図中、(14)は導電性基板、(15)は光導電
層、(16a)は無定形カーボン層、(16b)はグラ
ファイト層および(16c)はダイヤモンド状カーボン
層である。
A schematic cross-sectional view of the photoreceptor obtained in this manner is shown in FIG. In the figure, (14) is a conductive substrate, (15) is a photoconductive layer, (16a) is an amorphous carbon layer, (16b) is a graphite layer, and (16c) is a diamond-like carbon layer.

以下、実施例をあげて本発明を説明する。The present invention will be explained below with reference to Examples.

寒ム■ (1’)  光導電性塗料の調製; 胴フタロシアニン50重量部とテトラニトロ胴フタロシ
アニン0.2重量部を98%a硫酸500重量部に充分
撹拌しながら溶解させ、これを水3000重量部にあけ
、胴フタロシアニン胴とテトラニトロ胴フタロシアニン
の光導電性材料組成物を析出さけた後、胛過、水洗し、
減圧下120℃で乾燥した。
Kanmu ■ (1') Preparation of photoconductive paint; Dissolve 50 parts by weight of body phthalocyanine and 0.2 parts by weight of tetranitro body phthalocyanine in 500 parts by weight of 98% a sulfuric acid with thorough stirring, and dissolve this in 3000 parts by weight of water. After depositing a photoconductive material composition of a phthalocyanine body and a tetranitro phthalocyanine body, it is filtered and washed with water.
It was dried at 120°C under reduced pressure.

得られた組成物10重量部を熱硬化性アクリル樹脂(ア
クリディックA405:大日本インキ(株)製)22.
5重量部、メラミン樹脂(スーパーベッカミンJ820
  :大日本インキ(株)製)7.5重量部、ヒドラゾ
ン化合物(1)15重量部をメチルイソブチルケトン:
セロソルブアセテルト(l :1)70重量部とともに
ボールミルポットに入れて48時間混練し、光導電性塗
料を調製した。
10 parts by weight of the obtained composition was mixed with thermosetting acrylic resin (Acridic A405: manufactured by Dainippon Ink Co., Ltd.) 22.
5 parts by weight, melamine resin (Super Beckamine J820
: 7.5 parts by weight of Dainippon Ink Co., Ltd., 15 parts by weight of hydrazone compound (1) and methyl isobutyl ketone:
The mixture was placed in a ball mill pot with 70 parts by weight of cellosolve acetate (l:1) and kneaded for 48 hours to prepare a photoconductive paint.

(2)光導電層の形成 上記塗料をアルミニウム基体上に約15μmとなるよう
に塗布した。これを150℃の条件下に乾燥硬化して光
導電層を形成した。
(2) Formation of photoconductive layer The above coating material was coated on an aluminum substrate to a thickness of about 15 μm. This was dried and cured at 150° C. to form a photoconductive layer.

(3)カーボン層の形成 上で得た感光体を第1図に示す装置に入れた。(3) Formation of carbon layer The photoreceptor obtained above was placed in the apparatus shown in FIG.

カーボン層形成条件は以下の通りである。The carbon layer forming conditions are as follows.

ターゲット−感光体表面間距離:  1000mmター
ゲット−イオン化電極間距離:   80m1llター
ゲット−熱電子放射電極間距離:20mm(タングステ
ンフィラメント12hm)真空容器内圧:      
  〜l O”−5Torr電子ビーム:      
     600mA感光体電圧:         
 −500V感光体表面温度:        100
℃熱電子放射電極電圧(電流):  9V(60A)上
記条件下でまずイオン化電圧(電流)  30V(2A
)で1分間イオンブレーティング処理を施し、無定形カ
ーボン層を感光体上に形成した。次いで1分を要してイ
オン化電圧(電流)を90V(30A)まで上昇せしめ
、グラファイト層を形成させた。
Distance between target and photoreceptor surface: 1000 mm Distance between target and ionization electrode: 80 ml Distance between target and thermionic emission electrode: 20 mm (tungsten filament 12 hm) Vacuum vessel internal pressure:
~l O”-5Torr electron beam:
600mA photoreceptor voltage:
-500V photoreceptor surface temperature: 100
°C Thermionic emission electrode voltage (current): 9V (60A) Under the above conditions, first ionization voltage (current) 30V (2A)
) for 1 minute to form an amorphous carbon layer on the photoreceptor. Next, the ionization voltage (current) was increased to 90 V (30 A) over 1 minute to form a graphite layer.

次いでこの条件下で2分間でブレーティングを行ないダ
イヤモンド状カーボン層を形成させた。
Next, brating was performed for 2 minutes under these conditions to form a diamond-like carbon layer.

得られたカーボン層は0.2μmであった。The obtained carbon layer had a thickness of 0.2 μm.

(4)感光体評価試験 上で得られた感光体を電子写真用複写機(ミノルタカメ
ラ(株)製: EP−300RE)に組み込み感光体の
基本特性とクリーニング性および耐久性を評価した。結
果を表−1に示す。表−1中、Voは直流電圧+ 7.
5KVを印加したときの初期表面電位、DDR,は帯電
後1秒間暗所に放置したときの電位の減衰率およびEl
/2は初期表面電位が1/2になるまでに要した露光量
を示す。
(4) Photoreceptor evaluation test The photoreceptor obtained above was installed in an electrophotographic copying machine (manufactured by Minolta Camera Co., Ltd.: EP-300RE), and the basic characteristics, cleaning performance, and durability of the photoreceptor were evaluated. The results are shown in Table-1. In Table-1, Vo is DC voltage +7.
The initial surface potential when 5KV is applied, DDR, is the decay rate of the potential when left in the dark for 1 second after charging, and El
/2 indicates the amount of exposure required until the initial surface potential becomes 1/2.

「傷発生」とは感光体表面に傷が発生することなくコピ
ーし得る枚数、クリーニング性とはブラックスポットが
コピー紙上に表われる量、経時変化とは、感光体表面状
態の変化などによって感光体表面電位力(+1OOV以
上変化する耐刷枚数であり、いずれの試験も20°C/
40%RHで行なった。
"Scratch occurrence" refers to the number of copies that can be made without scratches on the surface of the photoreceptor, cleanability refers to the amount of black spots that appear on the copy paper, and change over time refers to changes in the surface condition of the photoreceptor. Surface potential force (the number of printing sheets that changes by +1OOV or more, and all tests are conducted at 20°C/
The test was carried out at 40% RH.

結果を表−1に示す。比較のため、カーボン層を設ける
前の感光体の試験結果を示す。
The results are shown in Table-1. For comparison, the test results of the photoreceptor before providing the carbon layer are shown.

表−1 発明の効果 本発明感光体は耐刷枚数が著るしく向上し、ブレード傷
や摩耗を生じ難く、また、感光体表面に付着するトナー
の除去、即ちクリーニング性が向上した。
Table 1 Effects of the Invention The photoreceptor of the present invention has significantly improved printing durability, is less likely to cause blade scratches or wear, and has improved removal of toner adhering to the surface of the photoreceptor, that is, cleaning performance.

また、本発明方法を用いることにより、光導電性層とな
じみのよい無定形カーボン層を設け、徐々にダイヤモン
ド状カーボン層を設けることができるため剥離や亀裂を
生じなくすることが可能となった。
Furthermore, by using the method of the present invention, it is possible to provide an amorphous carbon layer that is compatible with the photoconductive layer, and gradually form a diamond-like carbon layer, thereby making it possible to prevent peeling and cracking. .

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明感光体のダイヤモンド状カーボン層を形
成するためのイオンブレーティング装置、第2図は回転
式のルツボとターゲットおよび第3図は本発明感光体を
示す。 (1)  ルツボ、 (2) カーボンターゲット、(
3)電子銃、 (4)イオン化電極、(6)熱電子放射
電極、 (7)感光体ドラム、(9)ヒーター、 (l
O)真空容器、(13)電子ビームスポット、 (14
)基板、(15)光導電層、 (16)カーボン層。 第1図 第2図 第3図
FIG. 1 shows an ion blasting apparatus for forming the diamond-like carbon layer of the photoreceptor of the present invention, FIG. 2 shows a rotating crucible and target, and FIG. 3 shows the photoreceptor of the invention. (1) Crucible, (2) Carbon target, (
3) Electron gun, (4) Ionization electrode, (6) Thermionic emission electrode, (7) Photoreceptor drum, (9) Heater, (l
O) Vacuum vessel, (13) Electron beam spot, (14
) substrate, (15) photoconductive layer, (16) carbon layer. Figure 1 Figure 2 Figure 3

Claims (1)

【特許請求の範囲】[Claims] 1、最表面にダイヤモンド状カーボン保護層を設けた感
光体。
1. A photoreceptor with a diamond-like carbon protective layer on its outermost surface.
JP9823385A 1985-05-08 1985-05-08 Photosensitive body Pending JPS61255352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9823385A JPS61255352A (en) 1985-05-08 1985-05-08 Photosensitive body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9823385A JPS61255352A (en) 1985-05-08 1985-05-08 Photosensitive body

Publications (1)

Publication Number Publication Date
JPS61255352A true JPS61255352A (en) 1986-11-13

Family

ID=14214240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9823385A Pending JPS61255352A (en) 1985-05-08 1985-05-08 Photosensitive body

Country Status (1)

Country Link
JP (1) JPS61255352A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01189658A (en) * 1988-01-25 1989-07-28 Semiconductor Energy Lab Co Ltd Photosensitive body and production thereof
JPH0229662A (en) * 1988-07-19 1990-01-31 Semiconductor Energy Lab Co Ltd Photoconductor
JPH03213871A (en) * 1989-11-20 1991-09-19 Semiconductor Energy Lab Co Ltd Electrophotographic sensitive body
US5168023A (en) * 1990-07-04 1992-12-01 Matsushita Electric Industrial Co., Ltd. Photosensitive element used in electrophotography
JPH075718A (en) * 1993-09-01 1995-01-10 Semiconductor Energy Lab Co Ltd Organic photosensitive body
JP2006091380A (en) * 2004-09-22 2006-04-06 Fuji Xerox Co Ltd Electrophotographic photoreceptor and image forming apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01189658A (en) * 1988-01-25 1989-07-28 Semiconductor Energy Lab Co Ltd Photosensitive body and production thereof
JPH0229662A (en) * 1988-07-19 1990-01-31 Semiconductor Energy Lab Co Ltd Photoconductor
JPH03213871A (en) * 1989-11-20 1991-09-19 Semiconductor Energy Lab Co Ltd Electrophotographic sensitive body
US5168023A (en) * 1990-07-04 1992-12-01 Matsushita Electric Industrial Co., Ltd. Photosensitive element used in electrophotography
JPH075718A (en) * 1993-09-01 1995-01-10 Semiconductor Energy Lab Co Ltd Organic photosensitive body
JP2006091380A (en) * 2004-09-22 2006-04-06 Fuji Xerox Co Ltd Electrophotographic photoreceptor and image forming apparatus

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