JP3409107B2 - Electrophotographic photoreceptor - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrophotographic photoreceptor, and more particularly to an electrophotographic photoreceptor having a surface protective layer having excellent peel resistance on a photosensitive layer.

[0002]

2. Description of the Related Art Conventionally, as a photoconductor used in an electrophotographic system, a photoconductor having a selenium or selenium alloy as a main component on a conductive support, an inorganic photoconductive material such as zinc oxide or cadmium sulfide. It is generally known that a material is dispersed in a binder, an organic photoconductive material such as poly-N-vinylcarbazole and trinitrofluorenone or an azo pigment is used, or an amorphous silicon material is used. ing.

By the way, in general, the "electrophotographic system" means
A photoconductive photoconductor is first charged in the dark by, for example, corona discharge, and then imagewise exposed to selectively dissipate the charge only in the exposed area to obtain an electrostatic latent image. The latent image area is dyed or pigmented. It is one of the image forming methods in which an image is formed by developing and visualizing electroscopic fine particles (toner) composed of a colorant such as the above and a binder such as a polymer substance. The basic characteristics required for a photoconductor in such an electrophotographic method are (1) being capable of being charged to an appropriate potential in a dark place, (2) being less dissipated in a dark place, (3) being light The ability to quickly dissipate the charge by irradiation,
And so on. In recent years, as the speed and size of electrophotographic copying machines have increased, there has been a strong demand for reliability of the photoconductor in addition to the above-mentioned characteristics, which is capable of maintaining high image quality even during repeated long-term use.

There are roughly two main causes for the life of the photoconductor in the copying machine.
One is due to abrasion and scratches caused by mechanical stress from developing process, cleaning process, copy paper, etc., and the other is chemical damage caused by corona discharge caused by charging, transfer and separation process. It is due to. As the former method of preventing abrasion of the photoconductor, a technique of providing a protective layer on the photoconductor surface is known. For example, a method of providing an organic film on the surface of the photosensitive layer (Japanese Patent Publication No. 38-15466) and a method of providing an inorganic oxide (Japanese Patent Publication No. 43-14531).
No. 7), a method of laminating an insulating layer after providing an adhesive layer (Japanese Patent Publication No. 43-27591), an a-Si layer, an a-S layer by a plasma CVD method, an optical CVD method, or the like.
A method of laminating an i: N: H layer, an a-Si: O: H layer, etc. (JP-A-57-179859, JP-A-59-5843).
No. 7, each publication) and the like are disclosed.

In recent years, plasma CVD method and photo CVD method have been used.
Of carbon or a high hardness film containing carbon as a main component (a-C: H film, amorphous carbon film, amorphous carbon film, diamond-like carbon film, etc.) Is being applied to the photoreceptor protective layer. For example, a protective layer made of amorphous carbon or hard carbon is provided on the surface of the photosensitive layer (JP-A-60-249155), and a diamond-like carbon protective layer is provided on the outermost surface (JP-A-61-161). 255352), a high-hardness insulating layer containing carbon as a main component on a photosensitive layer (JP-A-61-264355), or a nitrogen atom, an oxygen atom, a halogen atom, an alkali metal on an organic photosensitive layer. Examples thereof include those provided with a protective layer made of an amorphous hydrocarbon film produced by glow discharge containing at least atoms such as atoms (Japanese Patent Laid-Open No. 63-220166-9).

By these methods, it has become possible to obtain a photoconductor having a very improved surface hardness and excellent abrasion resistance.
However, these photoreceptors do not have sufficient resistance to peeling and cracking of the surface protective layer caused by local and long-term mechanical stress that is caused by the electrophotographic copying process.

Therefore, by changing the concentration of fluorine contained in the amorphous hydrocarbon film which is the surface protective layer so as to increase in the film thickness direction and toward the photosensitive layer side, the durability and moisture resistance are improved and the image is improved. Preventing fogging (JP-A-1-
No. 227161) has been proposed, but it has been clarified that it is still insufficient in terms of peel resistance of the surface protective layer.

According to the present inventors, a surface protective layer having a diamond-like carbon or amorphous carbon structure containing hydrogen can be provided with nitrogen, fluorine, boron, phosphorus, chlorine,
An invention in which an additive element such as bromine and iodine is contained, and the atomic ratio of the content of the additive element to carbon is larger near the outermost layer than near the photosensitive layer (JP-A-7-1).
No. 68385) has been proposed. Furthermore, the present inventors have made the surface protective layer into a three-layered structure, and the first surface protective layer near the photosensitive layer and the third surface protective layer on the outermost layer side have carbon as the main component, and other than that, hydrogen and oxygen are used. And a second surface protective layer sandwiched between the both layers is a film containing carbon as a main component and other than that containing at least hydrogen, oxygen and nitrogen (JP-A-7-24439).
No. 4 publication) is also proposed. All of these inventions are satisfied with respect to the improvement of the peeling resistance of the surface protective layer, but it has been found that the scratch resistance is still insufficient.

[0009]

SUMMARY OF THE INVENTION The present invention has been made to solve these problems, and its purpose is to provide a photosensitive member having a protective layer containing carbon as a main component on the photosensitive layer. An object of the present invention is to provide a photoconductor for electrophotography capable of improving peeling resistance and scratch resistance.

[0010]

According to the present invention, an electrophotography having a photosensitive layer provided on a conductor and a hydrogen-containing diamond-like or amorphous carbon film provided on the photosensitive layer. In the photoreceptor, the carbon film has a nitrogen element, the nitrogen element is the smallest in the vicinity of the photosensitive layer in the carbon film, and the ratio of nitrogen to carbon (N
/ C ratio) is 0.005 or less, most of the carbon film
A Knoop hardness of the surface layer is 1000 kg / mm ² or more, and an electrophotographic photoreceptor is provided.

Further, according to the present invention, there is provided an electrophotographic photoreceptor having a photosensitive layer provided on a conductor and a diamond-like or amorphous carbon film containing hydrogen provided on the photosensitive layer. The carbon film has elemental fluorine, and the elemental fluorine is the least in the vicinity of the photosensitive layer in the carbon film, and the ratio of fluorine to carbon (F / C ratio) in the vicinity of the photosensitive layer of the carbon film is F / C. 0.001
And the Knoop hardness of the outermost layer of the carbon film is 1
There is provided a photoconductor for electrophotography, which is characterized by having a weight of at least 000 kg / mm ² .

Further, in these electrophotographic photoconductors, there is provided an electrophotographic photoconductor characterized in that the carbon film has a thickness of 1 to 3 μm. Furthermore, in these electrophotographic photoconductors, there is provided an electrophotographic photoconductor characterized in that the carbon film protects the photosensitive layer.

The electrophotographic photoreceptor of the present invention has a structure in which at least a photosensitive layer and a carbon film having hydrogen-containing diamond-like carbon or an amorphous carbon structure (surface protective layer) are sequentially laminated on a conductive support. In the electrophotographic photosensitive member having, the surface protective layer is composed of a film containing a nitrogen element or a fluorine element, and the content atomic weight ratio of the additive element to carbon in the vicinity of the photosensitive layer of the surface protective layer is other than that. The Knoop hardness of the outermost surface protective layer is 1000 kg / mm ²
From the above, the peeling resistance and scratch resistance of the protective layer of the photoconductor can be improved.

The presumed mechanism for improving the peeling resistance and scratch resistance of these surface protective layers is as follows. By including an additive element of nitrogen or fluorine in the surface protective layer, the surface protective layer is formed into a film having a low resistance and a good permeability, and the image characteristics are improved. However, when it is deposited on the surface of the photosensitive layer of this film alone, NH ₃ is used in order to contain additive element during _{film, N 2, C 2 F 6} , CH 3
The additive gas of F etches and damages the photosensitive layer. When the photosensitive layer is damaged, the residual potential of the photosensitive member becomes high, and further, the paper is passed for a long period of time, and the adhesiveness is deteriorated. According to the study of the present inventors, in order to prevent damage to the photosensitive layer by the additive gas, when forming the surface protective layer in the vicinity of the photosensitive layer, the addition amount of the additive gas is reduced, It has been found that it is possible to form a photoconductor having improved image characteristics and less damage to the photosensitive layer by increasing the amount of the additive gas added after the film is formed with a certain film thickness. It was also found that by forming a film having a Knoop hardness of 1000 kg / mm ² or more on the outermost surface layer of the surface protective layer, it becomes possible to further improve wear characteristics and crack resistance in addition to the above characteristics. Was done. Further, the surface protective layer contains nitrogen, and defines the atomic ratio of nitrogen and carbon content in the vicinity of the photosensitive layer and other layers, or the surface protective layer contains fluorine and near the photosensitive layer. It is possible to further improve the above characteristics by defining the atomic ratio of the content of fluorine and carbon in the layers other than that and by defining the film thickness of the surface protective layer.

[0015]

DETAILED DESCRIPTION OF THE INVENTION The present invention will be described below with reference to the drawings. FIG. 1 is a schematic cross-sectional view of the electrophotographic photoreceptor of the present invention, which has a structure in which a photosensitive layer 2 and a surface protective layer 3 are sequentially provided on a conductive support 1. 2 to 4 each show a constitutional example of another electrophotographic photoreceptor of the present invention. FIG. 2 shows a photosensitive layer 2 and a surface protective layer 3 on a conductive support 1 with an undercoat layer 4 interposed therebetween. FIG. 3 is a functionally separated type photosensitive layer 2 in which the photosensitive layer 2 is composed of a charge generation layer (CGL) 2a and a charge transport layer (CTL) 2b, and FIG. 4 is a functionally separated type photosensitive layer. 3A and 3B respectively show that the stacking order of CGL and CTL of the layer 2 is reversed. In the present invention, as long as at least the photosensitive layer 2 and the surface protective layer 3 are provided on the conductive support 1, the above-mentioned other layers and the types of the photosensitive layer may be arbitrarily combined. Absent.

In the present invention, the conductive support used for the electrophotographic photoreceptor is a conductor or an insulator subjected to a conductive treatment, for example, a metal such as Al, Fe, Cu, Au or an alloy thereof, Al on an insulating substrate such as polyester, polycarbonate, polyimide, glass,
It is possible to use a thin film of a metal such as Ag or Au or a conductive material such as In ₂ O ₃ or SnO _2, or a paper that has been subjected to a conductive treatment. The shape of the conductive support is not particularly limited and is plate-shaped,
Either a drum shape or a belt shape can be used.

An undercoat layer, which is optionally provided between the conductive support and the photosensitive layer, is provided for the purpose of improving the photosensitivity and adhesion, and the material thereof is SiO, Al ₂ O ₃ ,
An inorganic material such as a silane coupling agent, a titanium coupling agent, a chromium coupling agent, a polyamide resin, an alcohol-soluble polyamide resin, a water-soluble polyvinyl butyral, a polyvinyl butyral, a binder resin having good adhesiveness such as PVA, or the like is used. In addition, it is also possible to use a resin in which ZnO, TiO ₂ , ZnS or the like is dispersed in the resin having good adhesiveness. As a method for forming the undercoat layer, a method such as sputtering or vapor deposition is used when the inorganic material is used alone, and a usual coating method is used when the organic material is used. The thickness of the undercoat layer is appropriately 5 μm or less. The type of the photosensitive layer provided on the conductive support directly or through the undercoat layer is any of the above-mentioned Se-based, OPC-based, etc., and its constitution is either a single-layer type or a function-separated type. it can.
Of these, the OPC system will be briefly described below.

Examples of the single-layer organic photosensitive layer include dye-sensitized photoconductive powders of zinc oxide, titanium oxide, zinc sulfate and the like, amorphous silicon powders, squaric salt pigments, phthalocyanine pigments, and azurenium salts. A pigment, an azo pigment, or the like, which is applied and formed together with a binder resin and / or an electron-donating compound described later, if necessary, or an electron is added to a eutectic complex formed from a birylium dye and a bisphenol A-based polycarbonate. Examples include those using a composition to which a donor compound is added. As the binder resin, those similar to the function-separated type photoreceptor described below can be used. The thickness of this single-layer type photoreceptor is suitably 5 to 30 μm.

On the other hand, as an example of the function-separated type photosensitive layer, a laminate of a charge generation layer (CGL) and a charge transport layer (CTL) is exemplified. As the charge generation layer (CGL) for generating and separating latent image charges by image exposure, an inorganic photoconductive powder such as crystalline selenium or arsenic selenide or an organic dye or pigment is dispersed or dissolved in a binder resin. Used.

Examples of organic dyes and pigments as the charge generating substance include CI Pigment Blue 25 {Color Index (CI) 21180}, CI Pigment Red 41 (CI21200), CI Acid Red 52 (CI45100), CI Basic Red 3 (CI45210), a phthalocyanine pigment having a porphyrin skeleton, an azurenium salt pigment, a squaric salt pigment, an azo pigment having a carbazole skeleton (described in JP-A-53-95033), and an azo pigment having a styrylstilbene skeleton (JP Sho 53-138229
JP-A-54-2), an azo pigment having a triphenylamine skeleton (described in JP-A-53-132547), and an azo pigment having a dibenzothiophene skeleton (JP-A-54-2).
1728), azo pigments having an oxadiazole skeleton (described in JP-A-54-12742),
Azo pigments having a fluorenone skeleton (JP-A-54-22)
834), an azo pigment having a bisstilbene skeleton (described in JP-A-54-17733), an azo pigment having a distyryl oxadiazole skeleton (described in JP-A-54-2129), Azo pigments having a distyrylcarbazole skeleton (described in JP-A-54-17734) and triazo pigments having a carbazole skeleton (JP-A-57-195767 and 57-1957).
No. 68), phthalocyanine-based pigments such as CI Pigment Blue 16 (CI74100),
Indigo-based pigments such as CI Eye Brown 5 (CI73410) and CI Eye Dye (CI73030),
Perylene pigments such as Argos Scarlet B (manufactured by Violet) and Indanthren Scarlet R (manufactured by Bayer) can be used. These charge generating substances may be used alone or in combination of two or more. The binder resin is appropriately used in an amount of 0 to 100 parts by weight, preferably 0 to 50 parts by weight, based on 100 parts by weight of the charge generating substance.

As the binder resin used in combination with these organic dyes and pigments, condensation resins such as polyamide, polyurethane, polyester, epoxy resin, polycarbonate, and polyether, polystyrene, polyacrylate, polymethacrylate, poly-N-vinylcarbazole, Examples of the adhesive and insulating resins include polymers such as polyvinyl butyral, styrene-butadiene copolymer, styrene-acrylonitrile copolymer, and copolymers.

In the charge generating layer, the charge generating substance is dispersed with a binder resin if necessary using a solvent such as tetrahydrofuran, cyclohexanone, dioxane, dichloroethane, etc. by a ball mill, an attritor, a sand mill, etc., and the dispersion is appropriately diluted. Can be formed by coating. The coating can be performed by using a dip coating method, a spray coating method, a bead coating method, or the like. A suitable film thickness of the charge generation layer is about 0.01 to 5 μm, preferably 0.1 to 2 μm.

In the present invention, when particles such as crystalline selenium or arsenic selenide alloy are used as the charge generating substance, an electron donating adhesive and / or an electron donating organic compound is used in combination. Examples of such an electron-donating substance include polyvinylcarbazole and its derivatives (for example, those having halogens such as chlorine and bromine in the carbazole skeleton, and substituents such as methyl group and amino group), polyvinylpyrene, oxadiazole, pyrazoline, and hydrazone. ,
There are nitrogen-containing compounds such as diarylmethane, α-phenylstilbene and triphenylamine compounds, and diarylmethane compounds, and polyvinylcarbazole and its derivatives are particularly preferable. Further, these substances can be used by mixing, but in this case, it is preferable to add another electron donating organic compound to polyvinyl carbazole and its derivative. The content of this type of inorganic charge generating substance is preferably 30 to 90% by weight of the entire layer. Further, the thickness of the charge generation layer when an inorganic charge generation material is used is appropriately about 0.2 to 5 μm.

The charge transport layer (CTL) is a layer intended to retain the charged charge and to move the charge generated and separated in the charge generation layer by exposure to combine with the retained charge. High electrical resistance is required to achieve the purpose of retaining the electrostatic charge, and in order to achieve the objective of obtaining a high surface potential with the retained electrostatic charge,
It is required to have a low dielectric constant and good charge mobility. The charge transport layer for satisfying these requirements is composed of a charge transport substance and a binder resin used as necessary. That is, the charge transporting layer can be formed by dissolving or dispersing the above substances in a suitable solvent and coating and drying them. Charge transport materials include
There are hole transport materials and electron transport materials.

As the hole-transporting substance, poly-N-vinylcarbazole and its derivative, poly-γ-carbazolylethylglutamate and its derivative, pyrene-formaldehyde condensate and its derivative, polyvinylpyrene, polyvinylphenanthrene, and oxazole derivative. ,
Oxadiazole derivative, imidazole derivative, triphenylamine derivative, 9- (p-diethylaminostyryl) anthracene, 1,1-bis- (4-dibenzylaminophenyl) propane, styrylanthracene, styrylpyrazoline, phenylhydrazones, Examples thereof include electron-donating substances such as α-phenylstilbene derivatives.

Examples of the electron transporting substance include chloranil, bromanil, tetracyanoethylene, tetracyanoquinone dimethane, 2,4,7-trinitro-9-fluorenone, 2,4,5,7-tetranitro-9-fluorene. , 2,4,5,7-tetranitroxanthone,
2,4,8-trinitrothioxanthone, 2,6,8-
Examples thereof include electron accepting substances such as trinitro-4H-indeno (1,2-b) thiophenon-4-one and 1,3,7-trinitrodibenzothiophenone-5,5-dioxide. These charge transport materials may be used alone or in combination of two or more.

As the binder resin used as necessary, polystyrene, styrene-acrylonitrile copolymer, styrene-butadiene copolymer, styrene-maleic anhydride copolymer, polyester, polyvinyl chloride, vinyl chloride- Vinyl acetate copolymer, polyvinyl acetate, polyvinylidene chloride, polyacrylate resin, phenoxy resin, polycarbonate, cellulose acetate resin, ethyl cellulose resin, polyvinyl butyral, polyvinyl formal, polyvinyl toluene, poly-N-
Vinylcarbazole, acrylic resin, silicone resin,
Examples thereof include thermoplastic resins or thermosetting resins such as epoxy resins, melamine resins, urethane resins, phenol resins, and alkyd resins. As the solvent, tetrahydrofuran, dioxane, toluene, monochlorobenzene, dichloroethane, methylene chloride or the like is used.

A suitable thickness of the charge transport layer is about 5 to 100 μm. Further, a plasticizer or a leveling agent may be added to the charge transport layer. As the plasticizer, those used as a plasticizer for general resins such as dibutyl phthalate and dioctyl phthalate can be used as they are, and the amount of the plasticizer used is preferably about 0 to 30% by weight based on the binder resin. As the leveling agent, silicone oils such as dimethyl silicone oil and methylphenyl silicone oil are used, and the amount thereof is preferably about 0 to 1% by weight based on the binder resin. These CGL
And CTL may be stacked on the support in the order of CGL and CTL from the support side, or may be stacked in the order of CTL and CGL.

In the present invention, the protective layer provided on the surface of the photoreceptor has a diamond-like carbon or amorphous carbon structure containing hydrogen, contains nitrogen element or fluorine element, and is the outermost surface layer of the surface protective layer. Knoop hardness of 10
It is composed of a high hardness thin film of at least 00 kg / mm ² .

The high hardness thin film preferably has a C—C bond similar to diamond having an SP ³ orbit, and the film thickness is preferably 1 to 3 μm. Within this thickness range, scratch resistance, light transmission, and
Electrostatic characteristics such as sensitivity are further improved. It is preferable that the above-mentioned contained elements near the photoconductor are smaller than those in other portions, but it is most preferable not to contain them at all. When nitrogen is contained, the atomic weight ratio of nitrogen and carbon (N / C ratio)
Is preferably 0.005 or less in the vicinity of the photosensitive layer, and when it contains fluorine, the atomic weight ratio (F / C ratio) of fluorine and carbon is 0.0
It is desirable that the film is 01 or less. Note that a film having a structure similar to graphite having an SP ² orbit may be used, or an amorphous film may be used. Further, instead of a laminated structure, a single layer structure without a clear interface with a concentration gradient of the atomic weight ratio of the additive element to carbon may be used.

When forming the surface protective layer, a hydrocarbon gas (methane, ethane, ethylene, acetylene, etc.) is used as a main material, and a carrier gas such as H ₂ or Ar is used. Further, the gas for supplying the additive element may be any gas which can be vaporized under reduced pressure or which can be vaporized by heating. For example, as a gas for supplying nitrogen, NH ₃ , N ₂
Or the like, and C ₂ F ₆ , CH ₃ as a gas for supplying fluorine.
F or the like can be used. Using the above gas,
It is formed by a plasma CVD method, a glow discharge decomposition method, a photo CVD method, or a sputtering method using graphite as a target. The film forming method is not particularly limited, but as a method of forming a film containing carbon as a main component having good characteristics as a protective layer, the film is formed while using a plasma CVD method and with a sputtering effect. A method (Japanese Patent Laid-Open No. 58-49609) is known.

In the method of forming a protective layer containing carbon as a main component using the plasma CVD method, it is not necessary to heat the support, and the film can be formed at a low temperature of about 150 ° C. or less, so that the heat resistance is low. Even when the protective layer is formed on the organic heat-sensitive layer, there is an advantage that there is no problem. The thickness of the protective layer containing carbon as a main component can be adjusted by controlling the film forming time. As a method for analyzing the film composition of the surface protective layer, a measuring method such as XPS, AES, SIMS or the like is used.

[0033]

EXAMPLES The present invention will be described below with reference to examples, but the embodiments of the present invention are not limited thereby. All parts are by weight.

Reference Example 1 A cylindrical support made of aluminum (outer diameter 80 mmφ,
(A length of 340 mm), a mixture having the following composition ratio was dispersed by a ball mill for 12 hours, and the prepared undercoat layer forming liquid was applied by a dipping method so that the film thickness after drying was about 2 μm, to form an undercoat layer. did. TiO ₂ (manufactured by Ishihara Sangyo: Taipek) 1 part Polyamide resin (manufactured by Toray: CM8000) 1 part Methanol 25 parts

Onto this undercoat layer, a charge generation layer coating solution containing a trisazo pigment having the following structure was applied by dip coating, and the coating was carried out at 120 ° C. for 10 hours.
After drying for a minute, CGL having a film thickness of about 0.15 μm was formed.

[Chemical 1] 30 parts Polyester resin (manufactured by Toyobo Co., Ltd .: Byron 200) 12 parts Cyclohexanone 360 parts [After dispersing the above mixture in a ball mill for 72 hours, further dilute with 500 parts of a mixed solvent of cyclohexanone: methyl ethyl ketone = 1: 1 (weight ratio). . ]

Then, an organic photosensitive layer was prepared by dip-coating a coating solution for the charge-transporting layer having the following composition onto the CGL so that the film thickness after drying was about 30 μm.

[Chemical 2] 10 parts Polycarbonate (manufactured by Teijin Chemicals: Panlite C-1400) 10 parts Tetrahydrofuran 80 parts Silicone oil (Shin-Etsu Silicone: KF50) 0.001 parts

The organic photoreceptor prepared in this manner is shown in FIG.
~ A plasma CVD apparatus as shown in Fig. 7 was set to form a protective layer made of carbon or a thin film containing carbon as a main component. Here, reference numeral 107 in FIG. 5 denotes a vacuum chamber of the plasma CVD apparatus, which is partitioned by a gate valve 109 from a loading / unloading preliminary chamber 117. The inside of the vacuum chamber 107 is an exhaust system 120 (pressure control valve 121, turbo molecular pump 12
2. It is configured to be evacuated by a rotary pump 123) and maintained at a constant pressure. A reaction tank 150 is provided in the vacuum tank 107. The reaction tank is a frame-shaped structure 102 (having a square or hexagonal shape when viewed from the electrode side) as shown in FIGS. 6 and 7, and hoods 108 and 118 that cover the openings at both ends thereof. Further, the hoods 108 and 118 are provided with a pair of first and second electrodes 103 and 113 (using a metal mesh such as aluminum) having the same shape. Reference numeral 130 denotes a gas line introduced into the reaction tank 150, to which various material gas containers are connected, each of which is introduced into the reaction tank 150 from a nozzle 125 via a flow meter 129. In the frame-shaped structure 102, the support 101 (101-1, 101-2, ...
01-n) are arranged as shown in FIGS. Each support is arranged as a third electrode as described later. A pair of power supplies 115 (115-1, 115-1, for applying the first alternating voltage) to the electrodes 103, 113, respectively.
115-2) is prepared. The frequency of the first alternating voltage is 1 to 100 MHz. These power supplies are connected to matching transformers 116-1 and 116-2, respectively. The phase of this matching transformer is the phase adjuster 12
6 and can be supplied at 180 ° or 0 ° offset from each other. That is, it has symmetrical or in-phase output. One end 104 and the other end 114 of the matching transformer are connected to the first and second electrodes 103 and 113, respectively. In addition, the output side midpoint 105 of the transformer is held at the ground level. Further, the middle point 105 and the third electrode, that is, the support 101 (101-1, 101-2 ... 101)
-N) or a holder 102 electrically connected to them is provided with a power supply 117 for applying a second alternating voltage. The frequency of this second alternating voltage is 1 to 500
KHz. The output of the first alternating voltage applied to the first and second electrodes is 0.1 to 1 KW at a frequency of 13.56 MHz, and the output of the second alternating voltage applied to the third electrode, that is, the support. The output is about 100 W at a frequency of 150 KHz.

The protective layer was composed of two layers, and a first surface protective layer and a second surface protective layer were formed in order from the side in contact with the photosensitive layer.
The first surface protective layer is an amorphous carbon film containing hydrogen and nitrogen. The film forming conditions are as follows. CH ₄ flow rate: 200 sccm N ₂ flow rate: 20 sccm Reaction pressure: 0.01 torr First alternating voltage output: 100 W 13.56 MHz Bias voltage (DC component): −200 V Film thickness: 0.12 μm N / C ratio: 0.008 As a result of composition analysis (XPS method) of this film, it was found that the composition of the film contained carbon, oxygen, hydrogen and nitrogen.

The second surface protective layer is an amorphous carbon film containing hydrogen and further containing nitrogen. The film forming conditions are as follows. CH ₄ flow rate: 90 sccm H ₂ flow rate: 210 sccm N ₂ flow rate: 45 sccm Reaction pressure: 0.02 torr First alternating voltage output: 100 W 13.56 MHz Bias voltage (DC component): −35 V Film thickness: 4 μm Knoop hardness: 1200 kg / mm ² N / C ratio: 0.15 As a result of composition analysis (XPS method) of this film, it was found that the composition of the film contained carbon, oxygen, hydrogen and nitrogen.

The thus prepared photoconductor was subjected to a paper-passing test of 500,000 sheets using initial and commercial digital copying machines IMAGIO 420V [manufactured by Ricoh Co., Ltd.], and then the protective layer on the surface of the photoconductor was peeled off. The situation and scratches were evaluated. The evaluation results are shown in Table 1.

Example 1 A photoreceptor was prepared and evaluated in the same manner as in Reference Example 1 except that the conditions for forming the first surface protective layer were as follows. CH ₄ flow rate: 200 sccm N ₂ flow rate: 5 sccm Reaction pressure: 0.01 torr First alternating voltage output: 100 W 13.56 MHz Bias voltage (DC component): −200 V Film thickness: 0.12 μm N / C ratio: 0.002 As a result of composition analysis (XPS method) of this film, it was found that the composition of the film contained carbon, oxygen, hydrogen and nitrogen. The evaluation results are shown in Table 1.

Reference Example 2 A photoconductor was prepared and evaluated in the same manner as in Reference Example 1 except that the conditions for forming the first surface protective layer and the second surface protective layer were as follows. went. (First surface protective layer) CH ₄ flow rate: 250 sccm C ₂ F ₆ amount: 20 sccm Reaction pressure: 0.01 torr First alternating voltage output: 100 W 13.56 MHz Bias voltage (DC component): −200 V Film thickness: 0. 12 μm F / C ratio: 0.002 As a result of composition analysis (XPS method) of this film, it was found that the composition of the film contained carbon, oxygen, hydrogen and fluorine.

(Second Surface Protective Layer) CH ₄ flow rate: 100 sccm H ₂ flow rate: 200 sccm C ₂ F ₆ flow rate: 50 sccm Reaction pressure: 0.02 torr First alternating voltage output: 100 W 13.56 MHz Bias voltage (DC component) -50 V Film thickness: 4 μm Knoop hardness: 1200 kg / mm ² F / C ratio: 0.05 As a result of composition analysis (XPS method) of this film, the composition of the film contains carbon, hydrogen and fluorine. It turned out that The evaluation results are shown in Table 1.

Example 2 A photoconductor was prepared in the same manner as in Reference Example 2 , except that the conditions for forming the first surface protective layer were as follows.
An evaluation was made. (First surface protective layer) CH ₄ flow rate: 250 sccm C ₂ F ₆ amount: 5 sccm Reaction pressure: 0.01 torr first alternating voltage output: 100W 13.56 MHz bias voltage (DC component): -200 V thickness: 0. 12 μm F / C ratio: 0.0005 As a result of composition analysis (XPS method) of this film, it was found that the composition of the film contained carbon, oxygen, hydrogen and fluorine. The evaluation results are shown in Table 1.

Comparative Example 1 Reference example except that the first surface protective layer was not provided on the protective layer.
A photoconductor was prepared and evaluated in the same manner as in 1 . However, the N / C ratio of the protective layer here is 0.15. The evaluation results are shown in Table 1.

Comparative Example 2 A photoconductor was prepared and evaluated in the same manner as in Reference Example 1 except that the conditions for forming the first surface protective layer and the second surface protective layer were as follows. It was (First surface protective layer) CH ₄ flow rate: 90 sccm H ₂ flow rate: 210 sccm N ₂ flow rate: 45 sccm Reaction pressure: 0.02 Torr first alternating voltage output: 100W 13.56 MHz bias voltage (DC component): -35 V thickness 0.14 μm N / C ratio: 0.15 As a result of composition analysis (XPS method) of this film, it was found that the composition of the film contained carbon, oxygen, hydrogen and nitrogen.

(Second Surface Protective Layer) CH ₄ flow rate: 200 sccm Reaction pressure: 0.01 torr First alternating voltage output: 100 W 13.56 MHz Bias voltage (DC component): −100 V Film thickness: 4 μm Knoop hardness: 2000 kg / mm ² A composition analysis (XPS method) of this film revealed that the composition of the film contained carbon, oxygen and hydrogen.
It was found to contain no nitrogen. Table 1 shows the evaluation results
Shown in.

Comparative Example 3 A photosensitive member was prepared and evaluated in the same manner as in Reference Example 1 except that the film forming conditions for the first surface protective layer and the second surface protective layer were as follows. It was (First surface protection layer) CH ₄ flow rate: 200 sccm Reaction pressure: 0.01 torr First alternating voltage output: 100 W 13.56 MHz Bias voltage (DC component): −100 V Film thickness: 0.15 μm Composition analysis of this film ( As a result of the XPS method), it was found that the composition of the film contained carbon, oxygen and hydrogen, but did not contain nitrogen.

(Second Surface Protection Layer) CH ₄ flow rate: 90 sccm H ₂ flow rate: 210 sccm N ₂ flow rate: 45 sccm Reaction pressure: 0.03 torr First alternating voltage output: 100 W 13.56 MHz Bias voltage (DC component): − 5V Film thickness: 4 μm Knoop hardness: 500 kg / mm ² N / C ratio: 0.15 As a result of composition analysis (XPS method) of this film, the composition of the film was found to contain carbon, oxygen, hydrogen and nitrogen. It turned out that

Comparative Example 4 A photoconductor was prepared and evaluated in the same manner as in Reference Example 1 except that the film forming conditions for the second surface protective layer were changed to those shown below. CH ₄ flow rate: 100 sccm H ₂ flow rate: 200 sccm C ₂ F ₆ flow rate: 50 sccm Reaction pressure: 0.02 torr First alternating voltage output: 100 W 13.56 MHz Bias voltage (DC component): −25 V Film thickness: 4 μm Knoop hardness: 900 kg / mm ² As a result of composition analysis (XPS method) of this film, it was found that the composition of the film contained carbon, hydrogen and fluorine. The evaluation results are shown in Table 1.

[0051]

[Table 1]

[0052]

The electrophotographic photoreceptor according to claim 1 has a structure in which at least a photosensitive layer and a surface protective layer having a diamond-like carbon containing hydrogen or an amorphous carbon structure are sequentially laminated on a conductive support. In the electrophotographic photoreceptor having, in the vicinity of the photosensitive layer of the surface protective layer in the vicinity of the photosensitive layer of the surface protective layer, the atomic weight ratio of nitrogen element is less than other portions, and further, the Knoop hardness of the outermost surface layer of the surface protective layer. Is 1000 kg / mm ² or more, the peeling resistance and scratch resistance of the photoconductor having a protective layer of hydrogen-containing diamond-like carbon or amorphous carbon are improved, and long-term stability is obtained. It becomes possible to form an image. Moreover, since the surface protective layer contains nitrogen and the ratio of the atomic weight of nitrogen and carbon (N / C ratio) in the vicinity of the photosensitive layer of the surface protective layer is 0.005 or less, the additive is added. It is possible to improve the sensitivity and peeling resistance of the photoreceptor having the surface protective layer containing nitrogen as an element.

The electrophotographic photosensitive member of claim 2 is an electron having a structure in which at least a photosensitive layer and a surface protective layer having a diamond-like carbon containing hydrogen or an amorphous carbon structure are sequentially laminated on a conductive support. In the photographic photoreceptor, the surface protective layer has a content atomic weight ratio of nitrogen element to carbon in the vicinity of the photosensitive layer of the surface protective layer is smaller than other portions, and the Knoop hardness of the outermost surface layer of the surface protective layer is 1000 kg. / Mm ² or more, the peeling resistance and scratch resistance of the photoconductor having a protective layer of hydrogen-containing diamond-like carbon or amorphous carbon are improved, and long-term stable image formation is achieved. It becomes possible to do. Moreover, since the surface protective layer contains fluorine and the ratio of the atomic content of fluorine and carbon (F / C ratio) in the vicinity of the photosensitive layer of the surface protective layer is 0.001 or less, the additive is added. It is possible to improve the sensitivity and peeling resistance of the photoreceptor having the surface protective layer containing fluorine as an element.

[Brief description of drawings]

FIG. 1 is a schematic view of a cross section of an electrophotographic photosensitive member used in an image forming apparatus of the present invention.

FIG. 2 is a schematic view of a cross section of an electrophotographic photosensitive member used in the image forming apparatus of the present invention.

FIG. 3 is a schematic view of a cross section of an electrophotographic photosensitive member used in the image forming apparatus of the present invention.

FIG. 4 is a schematic view of a cross section of an electrophotographic photosensitive member used in the image forming apparatus of the present invention.

FIG. 5 is an explanatory diagram of a specific example of a plasma CVD apparatus used when forming a protective layer made of carbon or a thin film containing carbon as a main component.

FIG. 6 is a plan view of a frame-shaped structure 102 of the plasma CVD apparatus.

FIG. 7 is a plan view of a frame-shaped structure 102 of the plasma CVD apparatus.

[Explanation of symbols]

1 to 4 1 Conductive support 2 Photosensitive layer 2a Charge generation layer (CGL) 2b Charge transport layer (CTL) 3 protective layer 4 Undercoat layer About Figures 5-7 101-0 to 101-n support 102 frame structure 103, 113 electrodes 104, 114 End of matching transformer 105 Transformer output side midpoint 107 vacuum chamber 108, 118 Hood 109 gate valve 115 power supply 116-1, 116-2 Matching transformer 117 power supply 120 exhaust system 121 Adjustment valve 122 Turbo molecular pump 123 Rotary pump 125 gas introduction nozzle 126 Phase adjuster 130-134 gas line 140 Alternating power supply system 150 reaction tank

Front Page Continuation (72) Inventor Hiroshi Nagame 1-3-6 Nakamagome, Ota-ku, Tokyo Within Ricoh Co., Ltd. (72) Inventor Yama ▲ Saki ▼ Shunpei Hase, Atsugi, Kanagawa 398 Semiconductor, Ltd. Inside the Institute for Body Energy (72) Inventor Shigenori Hayashi 398 Hase, Atsugi, Kanagawa Semiconductor Inside Institute for Energy Research (56) Reference JP-A-5-88525 (JP, A) JP-A-4-179969 (JP, A) JP-A-4-12295 (JP, A) JP-A-2-132455 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) G03G 5/00

Claims (4)

(57) [Claims] 1. In an electrophotographic photoreceptor having a photosensitive layer provided on a conductor and a diamond-like or amorphous carbon film containing hydrogen provided on the photosensitive layer, the carbon film is nitrogen. Element, the nitrogen element is the smallest in the vicinity of the photosensitive layer in the carbon film, and the ratio of nitrogen to carbon (N / C ratio) is 0.005 or less, and the Knoop hardness of the outermost layer of the carbon film is Is 1000 kg /
An electrophotographic photosensitive member characterized by having a size of at least ² mm ² . 2. An electrophotographic photoreceptor having a photosensitive layer provided on a conductor and a diamond-like or amorphous carbon film containing hydrogen, which is provided on the photosensitive layer, wherein the carbon film is fluorine. An element, and the elemental fluorine is the least in the vicinity of the photosensitive layer in the carbon film, and the ratio of fluorine to carbon (F / C ratio) in the vicinity of the photosensitive layer of the carbon film is 0.001 or less. The Knoop hardness of the outermost layer of the carbon film is 1000 kg /
An electrophotographic photosensitive member characterized by having a size of at least ² mm ² . 3. The electrophotographic photoconductor according to claim 1, wherein the carbon film has a thickness of 1 to 3 μm. 4. The electrophotographic photoconductor according to claim 1, wherein the carbon film protects the photosensitive layer.