JPS61253444A - 励起発光強度測定装置 - Google Patents

励起発光強度測定装置

Info

Publication number
JPS61253444A
JPS61253444A JP60094666A JP9466685A JPS61253444A JP S61253444 A JPS61253444 A JP S61253444A JP 60094666 A JP60094666 A JP 60094666A JP 9466685 A JP9466685 A JP 9466685A JP S61253444 A JPS61253444 A JP S61253444A
Authority
JP
Japan
Prior art keywords
light
emission intensity
observation
plasma
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60094666A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0478136B2 (enExample
Inventor
Seiji Nishino
清治 西野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP60094666A priority Critical patent/JPS61253444A/ja
Publication of JPS61253444A publication Critical patent/JPS61253444A/ja
Publication of JPH0478136B2 publication Critical patent/JPH0478136B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optical Measuring Cells (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
JP60094666A 1985-05-01 1985-05-01 励起発光強度測定装置 Granted JPS61253444A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60094666A JPS61253444A (ja) 1985-05-01 1985-05-01 励起発光強度測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60094666A JPS61253444A (ja) 1985-05-01 1985-05-01 励起発光強度測定装置

Publications (2)

Publication Number Publication Date
JPS61253444A true JPS61253444A (ja) 1986-11-11
JPH0478136B2 JPH0478136B2 (enExample) 1992-12-10

Family

ID=14116569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60094666A Granted JPS61253444A (ja) 1985-05-01 1985-05-01 励起発光強度測定装置

Country Status (1)

Country Link
JP (1) JPS61253444A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0426351U (enExample) * 1990-06-25 1992-03-02

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0426351U (enExample) * 1990-06-25 1992-03-02

Also Published As

Publication number Publication date
JPH0478136B2 (enExample) 1992-12-10

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