JPS61245491A - 薄膜ｅｌ素子 - Google Patents
薄膜ｅｌ素子Info
- Publication number
- JPS61245491A JPS61245491A JP60088318A JP8831885A JPS61245491A JP S61245491 A JPS61245491 A JP S61245491A JP 60088318 A JP60088318 A JP 60088318A JP 8831885 A JP8831885 A JP 8831885A JP S61245491 A JPS61245491 A JP S61245491A
- Authority
- JP
- Japan
- Prior art keywords
- light absorption
- absorption layer
- layer
- thin film
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 59
- 230000031700 light absorption Effects 0.000 claims description 150
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 107
- 229910052757 nitrogen Inorganic materials 0.000 claims description 37
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 34
- 239000001301 oxygen Substances 0.000 claims description 34
- 229910052760 oxygen Inorganic materials 0.000 claims description 34
- 229910052732 germanium Inorganic materials 0.000 claims description 23
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 22
- 230000007423 decrease Effects 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 7
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 55
- 229910001873 dinitrogen Inorganic materials 0.000 description 33
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 31
- 229910001882 dioxygen Inorganic materials 0.000 description 31
- 239000007789 gas Substances 0.000 description 26
- 239000000203 mixture Substances 0.000 description 22
- 238000004544 sputter deposition Methods 0.000 description 21
- 238000000034 method Methods 0.000 description 20
- 230000000694 effects Effects 0.000 description 14
- 238000005546 reactive sputtering Methods 0.000 description 13
- 230000008033 biological extinction Effects 0.000 description 11
- 230000003247 decreasing effect Effects 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 239000011521 glass Substances 0.000 description 9
- 239000002131 composite material Substances 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 8
- 230000015556 catabolic process Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 7
- 239000000243 solution Substances 0.000 description 6
- 238000005477 sputtering target Methods 0.000 description 6
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 5
- XOLBLPGZBRYERU-UHFFFAOYSA-N SnO2 Inorganic materials O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 5
- 239000003989 dielectric material Substances 0.000 description 5
- 229910017604 nitric acid Inorganic materials 0.000 description 5
- 238000007738 vacuum evaporation Methods 0.000 description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000011259 mixed solution Substances 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 3
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 3
- 241000511976 Hoya Species 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 2
- 229910007277 Si3 N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 239000013543 active substance Substances 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 239000005354 aluminosilicate glass Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000005283 ground state Effects 0.000 description 2
- 229910003437 indium oxide Inorganic materials 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 2
- 230000001151 other effect Effects 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 241001175904 Labeo bata Species 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 235000011941 Tilia x europaea Nutrition 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60088318A JPS61245491A (ja) | 1985-04-23 | 1985-04-23 | 薄膜ｅｌ素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60088318A JPS61245491A (ja) | 1985-04-23 | 1985-04-23 | 薄膜ｅｌ素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61245491A true JPS61245491A (ja) | 1986-10-31 |
| JPH0325916B2 JPH0325916B2 (enrdf_load_stackoverflow) | 1991-04-09 |
Family
ID=13939572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60088318A Granted JPS61245491A (ja) | 1985-04-23 | 1985-04-23 | 薄膜ｅｌ素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61245491A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6293897A (ja) * | 1985-10-19 | 1987-04-30 | 日本精機株式会社 | 薄膜エレクトロルミネセンス素子 |
| WO2017221424A1 (ja) * | 2016-06-24 | 2017-12-28 | パイオニア株式会社 | 発光装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5854583A (ja) * | 1981-09-29 | 1983-03-31 | 日本精機株式会社 | 電界発光素子 |
-
1985
- 1985-04-23 JP JP60088318A patent/JPS61245491A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5854583A (ja) * | 1981-09-29 | 1983-03-31 | 日本精機株式会社 | 電界発光素子 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6293897A (ja) * | 1985-10-19 | 1987-04-30 | 日本精機株式会社 | 薄膜エレクトロルミネセンス素子 |
| WO2017221424A1 (ja) * | 2016-06-24 | 2017-12-28 | パイオニア株式会社 | 発光装置 |
| JPWO2017221424A1 (ja) * | 2016-06-24 | 2019-04-11 | パイオニア株式会社 | 発光装置 |
| US10727449B2 (en) | 2016-06-24 | 2020-07-28 | Pioneer Corporation | Light-emitting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0325916B2 (enrdf_load_stackoverflow) | 1991-04-09 |
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