JPS61243345A - Laser scattering/absorption detector - Google Patents
Laser scattering/absorption detectorInfo
- Publication number
- JPS61243345A JPS61243345A JP60084464A JP8446485A JPS61243345A JP S61243345 A JPS61243345 A JP S61243345A JP 60084464 A JP60084464 A JP 60084464A JP 8446485 A JP8446485 A JP 8446485A JP S61243345 A JPS61243345 A JP S61243345A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- reflector
- partial transmission
- cell
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010521 absorption reaction Methods 0.000 title claims description 10
- 239000007788 liquid Substances 0.000 claims abstract description 13
- 239000007787 solid Substances 0.000 claims abstract description 11
- 238000001514 detection method Methods 0.000 claims abstract description 4
- 239000007789 gas Substances 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 5
- 239000013543 active substance Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 abstract description 13
- 230000005540 biological transmission Effects 0.000 abstract description 6
- 239000000428 dust Substances 0.000 abstract description 5
- 239000010419 fine particle Substances 0.000 abstract description 4
- 230000003213 activating effect Effects 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 description 5
- 238000002834 transmittance Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 208000015943 Coeliac disease Diseases 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 238000000790 scattering method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
- G01N21/51—Scattering, i.e. diffuse reflection within a body or fluid inside a container, e.g. in an ampoule
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はレーザー元の散乱元金検出して被測定安中の粒
子の大＠嘔や数或いはａ度等を検出するレーザー散乱−
吸収検出器に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention is a laser scattering method that detects the scattering source of a laser source and detects the size, number, degree, etc. of particles in a sample to be measured.
It relates to absorption detectors.
（従来技術とその問題点）
周知のように超Ｌ８Ｉ （大規模集積回路）の生産や
生命化学の分野では、クリーンルームの清浄度の向上及
び維持がム要で１凱その測定や清浄度制御のセンサーと
してレーザー散乱検出器が用いられている。(Prior art and its problems) As is well known, in the production of ultra-L8I (large-scale integrated circuits) and in the field of biochemistry, it is necessary to improve and maintain the cleanliness of the clean room. A laser scattering detector is used as a sensor.
第１図は従来のレーザー散乱検出器の第１の方式による
一例を示すもので、レーザー共振器を構成する全反射＊
１．２間にレーザー活性物質３と被測定粒子４を配置し
、被測定粒子４からの散乱光を集光用反射源５を用して
検出器６に入射させるようにしている。なお７はレーザ
ービームでめる。Figure 1 shows an example of the first method of a conventional laser scattering detector.
A laser active substance 3 and a particle to be measured 4 are arranged between the particles 1 and 2, and the scattered light from the particle to be measured 4 is made to enter a detector 6 using a condensing reflection source 5. Note that 7 is determined by a laser beam.
このレーザー散乱検出器は、気体、例えば空気中のチリ
やホコリの検出には使用出来るが、液体中の不純物粒子
や固体、例えばガラス中の気泡やゴミの検出には、液体
又は固体の元エネルギーの反射吸収作用によりパワーの
低下を招！！、その作用が著しく大′ｆ！ｉい時は、レ
ーザーの発振が停止し実用が困難でめった。This laser scattering detector can be used to detect gases such as dirt and dust in the air, but it cannot be used to detect impurity particles or solids in liquids, such as bubbles or dust in glass. The reflection and absorption effect causes a decrease in power! ! , the effect is extremely large'f! When the temperature was low, the laser oscillation stopped, making it difficult to put it into practical use.
これを改善し７’Ｃｉ２の方式のものとして、第２図に
示すように、一方の反射ｇ＆２′を最適透過率を持った
一部透過反射鏡として従来の高出力レーザー元を集光し
、この一部透過反射挑２′の外側に被測定粒子４を置い
て液体や固体中のゴミ或いは微粒子を測定する方法が提
案されている。To improve this and create a 7'Ci2 system, as shown in Figure 2, one of the reflections g &2' is used as a partially transmissive reflector with optimal transmittance to focus the conventional high-power laser source. A method has been proposed in which particles to be measured 4 are placed outside the partially transmissive/reflective sensor 2' to measure dirt or fine particles in a liquid or solid.
と０ろが、この第２図に示すレーザー散乱検出器は、レ
ーザーの発振が停止することはないが、一部透過反射挑
２′から出るレーザー元エネルギーが小さいので、レー
ザー元吸収率の大きい液体や固体中のノミや微粒子の検
出には散乱光が微弱なため検出が困離であった。However, in the laser scattering detector shown in Figure 2, although the laser oscillation does not stop, the laser source energy emitted from the partially transmitted and reflected probe 2' is small, so the laser source absorption rate is high. Detection of fleas and fine particles in liquids and solids has been difficult because the scattered light is weak.
そこでこの発明は、従来のレーザー散乱検出器では検出
出来なかった液体又は固体中の粒子の検出が可ｉ目とな
るものを提供することを目的とする。Therefore, an object of the present invention is to provide a device that enables the detection of particles in liquids or solids that could not be detected with conventional laser scattering detectors.
（間趙点を解決するための手段〉
この目的音達成させるため、この発明は次のような構成
としている。(Means for solving the problem of confusion) In order to achieve this target sound, the present invention has the following configuration.
すなわち、この発明に・糸るレーザー散乱・吸収検出器
ｔｃ、第２図に示したレーザー散乱検出器にお−て、一
部透過反射説２′の外側に適宜の間隔を置いて反射鏡を
配置して第２のレーザー共振器を構成し、レーザー元エ
ネルギーを増巾することにより従来検出出来なかり７’
Ｃ液俸又は固体中の粒子の検出上可能としたものである
。That is, in the present invention, in the laser scattering/absorption detector tc shown in FIG. By amplifying the laser source energy by configuring a second laser resonator and amplifying the laser source energy, it is possible to detect
This makes it possible to detect particles in liquid C or solids.
（実施例）
ＷＪ３図は、本発明に係るレーザー散乱・吸収検出器の
概略図でろる。(Example) Figure WJ3 is a schematic diagram of a laser scattering/absorption detector according to the present invention.
１はＷＪｌの反射鏡でレーザー元反射単１００チのもの
である。２′は第２の反射鏡で、レーザー元の散乱検出
を目的とし友最適の透過′４１に待つものである。８は
第３の反射鏡で、レーザー元反射率ｔｏｏｓのものでろ
る。1 is a WJl reflector with a single 100-inch laser reflector. Reference numeral 2' denotes a second reflecting mirror, which waits for optimum transmission '41 for the purpose of detecting scattering of the laser source. 8 is a third reflecting mirror, which has a laser reflectance of too.
３はＷＪｌｏ反射ｆｊｉｌとｇ２ｏ反射ｍ２’間に設け
たレーザー活性Ｗ質％９は第２の反射鏡２′と第３の反
射鏡８間に設けた破検査液体を収容するセルである。Reference numeral 3 denotes a laser active W quality cell provided between the WJlo reflection fjil and the g2o reflection m2'.9 is a cell containing a fracture inspection liquid provided between the second reflection mirror 2' and the third reflection mirror 8.
こ＼ではレーザー活性物質３は気体（例えばＨｅ−Ｎｅ
）であり放電管１０中に封じられており、電極や回路は
省略してるる。In this case, the laser active substance 3 is a gas (for example, He-Ne).
) and is sealed in the discharge tube 10, and electrodes and circuits are omitted.
ｇ２の一部透過反射ｆｉ ２／を透過した第２のレーザ
ービーム７′はセル９ｔ−横断し、セル９甲の液体に含
まれる被測定粒子によって散乱し次レーザー１Ｕ１１（
７）ｆｉ元レンズにより巣元され、ピンホール板１２の
ピンホールを通って１３の検出器に入射し、検出される
。なお、気体中のノミやホコリを検出する場合はレーザ
ービーム７′ヲ横切るように流し、固体中の気泡を検出
する場合は、第２と！＠３の反射蜆間の画定領域に置く
ようにする。The second laser beam 7' that has passed through the partially transmitted/reflected fi 2/ of g2 crosses the cell 9t, is scattered by the particles to be measured contained in the liquid in the cell 9A, and is then beamed by the laser beam 1U11 (
7) The light is focused by the fi source lens, passes through the pinhole of the pinhole plate 12, enters the detector 13, and is detected. Note that when detecting fleas and dust in gas, the laser beam is passed across the laser beam 7', and when detecting air bubbles in solids, the laser beam is passed across the laser beam 7'. It should be placed in the defined area between the reflex holes of @3.
第２のレーザービーム７′はｉ２０反射反射鏡と第３の
反射鏡８よす構成されるレーザー共振器によって増巾さ
れ、レーザー光束が強められ、第２図に示した従来のレ
ーザー散乱検出器のそれの約１５倍になり、従来のレー
ザー散乱検出器では検出出来なかつｆｃ′ｒＬ体又は固
体中の粒子、気泡号の検出が出来る。The second laser beam 7' is amplified by a laser resonator composed of an i20 reflective mirror and a third reflective mirror 8, and the laser beam is intensified, and the conventional laser scattering detector shown in FIG. It is about 15 times that of the conventional laser scattering detector, and can detect fc'rL bodies or particles and bubbles in solids, which cannot be detected by conventional laser scattering detectors.
第２の反射％ｌ１ｔ２′の最大透過率は５反射［１，２
’で構成されるレーザー共振器のレーザーの発振が停止
しない透過率であり、最適透過率は、レーザービーム１
′が最も強くなる透過率である。The maximum transmittance of the second reflection %l1t2' is 5 reflections [1,2
It is the transmittance at which the laser oscillation of the laser resonator composed of ' does not stop, and the optimal transmittance is the laser beam 1
' is the transmittance at which it becomes the strongest.
第３の反射鏡８の曲率は、レーザー発振器によって決ま
る光束の物性と第２の反射鏡２′から第３の反射鏡８ま
での距離と光学素子の特性から決定される。The curvature of the third reflecting mirror 8 is determined from the physical properties of the light flux determined by the laser oscillator, the distance from the second reflecting mirror 2' to the third reflecting mirror 8, and the characteristics of the optical element.
測定領域のレーザー光束１′は、レーザー光束の特性と
、第２の反射鏡２′のＭｚ面（第３図に２いて左側の而
）の曲率と、第３の反射鏡８の曲率の整合によって決定
される。The laser beam 1' in the measurement area is determined by matching the characteristics of the laser beam, the curvature of the Mz plane of the second reflecting mirror 2' (the left side of 2 in FIG. 3), and the curvature of the third reflecting mirror 8. determined by
また、測定領域内にレンズ等を挿入することによっても
元来の太さを決定できる。The original thickness can also be determined by inserting a lens or the like into the measurement area.
こ＼では、被測定粒子による散乱光の検出を集光レンズ
１１とピンホール板１２ｔ−介して検出器１３によって
検出するように構成したもの全例示したが、この方法の
みに限定されるものではなく第１図に示したような公昶
の果光用反射説を使用したり、公矧の散乱セルｔ−使う
等目出でろる。Here, all examples have been shown in which the scattered light by the particles to be measured is detected by the detector 13 via the condensing lens 11 and the pinhole plate 12t, but the method is not limited to this method. Instead, it is obvious to use Kōyō's reflection theory for fruit light as shown in Figure 1, or to use Kōyō's scattering cell t-.
（本発明の効果）
本発明によれば、気体中のゴミやホコリの検出は勿論の
こと、従来検出出来なかった液体や固体中の微粒子や気
泡の検出が可能となり、天用上磯症の優れたレーザー散
乱・吸収検出器全提供することができる。(Effects of the present invention) According to the present invention, it is possible to detect not only dirt and dust in gases, but also fine particles and bubbles in liquids and solids, which could not be detected conventionally, and is an excellent method for treating celiac disease. All laser scattering and absorption detectors can be provided.
又市販されているブリニスター窓が設けられた外部説レ
ーザーや、内Ｓ鋭し−ザー、又は偏光がランダムな内部
説レーザーを用いても従来より優れた検出器を作製出来
る。Furthermore, a detector superior to the conventional one can be produced using a commercially available external laser provided with a Blinister window, an internal S sharpening laser, or an internal laser with random polarization.
こ＼では、レーザー散乱光検出による粒子の測定につい
て説明したが２本発明にか＼る検出器は気体、液体、固
体を測定領域に挿入する事によってレーザービーム強度
の減衰より吸収を効率よく測定することもできる。In this article, we explained the measurement of particles by detecting laser scattered light, but the detector according to the present invention efficiently measures absorption rather than attenuation of the laser beam intensity by inserting gas, liquid, or solid into the measurement region. You can also.
第１図及び第２図はそれぞれ従来のレーザー散乱検出器
の概略縦断面図、第３図は不発明の一実施例の主要部を
示す概念図でめる。
１・・・ｉｌの反射鏡％ ２′・・・第２の反射鏡、８
・・・第３の反射鏡、３・・・レーザー活性切質、９・
・・セル、１０・・・放電管、１ｍ−・・条光レンズ、
１２・・・ぎンホール板、１３・・・検出器。
第１図
第２図
７″
第 ６ 図1 and 2 are schematic longitudinal sectional views of a conventional laser scattering detector, respectively, and FIG. 3 is a conceptual diagram showing the main parts of an embodiment of the invention. 1...il reflecting mirror% 2'...second reflecting mirror, 8
...Third reflecting mirror, 3...Laser active cut, 9.
...Cell, 10...Discharge tube, 1m-...Striped lens,
12... Ginhole plate, 13... detector. Figure 1 Figure 2 7'' Figure 6
Claims (1)
前記一方の全反射鏡と一部透過反射鏡間にレーザー活性
物質を配置し、他方の全反射鏡と一部透過反射鏡間を測
定領域として、気体、液体、固体のレーザー散乱・吸収
状態を検出することを特徴とするレーザー散乱・吸収検
出器。A partially transmissive reflective mirror is placed between a pair of opposing fully reflective mirrors,
A laser active substance is placed between one of the fully reflective mirrors and the partially transmitting reflective mirror, and the measurement area is between the other fully reflective mirror and the partially transmitting reflective mirror to measure the laser scattering and absorption state of gases, liquids, and solids. A laser scattering/absorption detector characterized by detection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60084464A JPS61243345A (en) | 1985-04-22 | 1985-04-22 | Laser scattering/absorption detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60084464A JPS61243345A (en) | 1985-04-22 | 1985-04-22 | Laser scattering/absorption detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61243345A true JPS61243345A (en) | 1986-10-29 |
Family
ID=13831345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60084464A Pending JPS61243345A (en) | 1985-04-22 | 1985-04-22 | Laser scattering/absorption detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61243345A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4926836A (en) * | 1987-07-31 | 1990-05-22 | Mitsubishi Kinzoku Kabushiki Kaisha | Method of and apparatus for dressing cutting edge of cut-off wheel |
| US5864399A (en) * | 1996-03-08 | 1999-01-26 | Met One, Inc. | Method for counting particles in a fluent stream |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS509483A (en) * | 1973-05-23 | 1975-01-30 | ||
| JPS50104980A (en) * | 1974-01-25 | 1975-08-19 |
-
1985
- 1985-04-22 JP JP60084464A patent/JPS61243345A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS509483A (en) * | 1973-05-23 | 1975-01-30 | ||
| JPS50104980A (en) * | 1974-01-25 | 1975-08-19 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4926836A (en) * | 1987-07-31 | 1990-05-22 | Mitsubishi Kinzoku Kabushiki Kaisha | Method of and apparatus for dressing cutting edge of cut-off wheel |
| US5864399A (en) * | 1996-03-08 | 1999-01-26 | Met One, Inc. | Method for counting particles in a fluent stream |
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